Deposition cavity radio frequency reflection power adjusting device
By connecting the regulating block to the coil using a fully enclosed locking method, the problem of the regulating block falling off and becoming loose is solved, achieving stable output of RF reflected power and avoiding coil arcing.
Patent Information
- Application Number
- CN202520289770.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-20
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-20
AI Technical Summary
In existing deposition cavity RF reflection power adjustment devices, the adjustment block is prone to falling off and loosening, resulting in unstable coil arcing and RF power output.
The adjusting block, which adopts a fully enclosed locking method, is connected to the coil. The upper and lower clamping arms are locked by a fixing component to ensure that the adjusting block and the coil are in close contact. The coil impedance is changed by a driving device.
This effectively prevents the regulating block from falling off or loosening, ensuring a stable output of RF reflected power and suppressing the occurrence of coil arcing.
Smart Images
Figure CN223852774U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor technology, in particular to a deposition cavity radio frequency reflection power adjusting device. BACKGROUND
[0002] The prior art adjusts the position of the adjusting block to change the coil impedance to find the matching impedance so that the radio frequency reflection power reaches the minimum value and the radio frequency power is stably output.
[0003] The existing adjusting block design has defects. When the screw is locked, the adjusting block is easy to fall off from the coil or cannot be tightly attached to and fixed with the coil, thereby causing the occurrence of coil arc and unstable output of radio frequency power. CONTENT OF THE INVENTION
[0004] In view of the above-mentioned defects of the prior art, the purpose of the present application is to provide a deposition cavity radio frequency reflection power adjusting device to solve the problem that the adjusting block is easy to fall off and loosen in the existing deposition cavity radio frequency reflection power adjusting device.
[0005] To achieve the above-mentioned purpose and other related purposes, the present application provides a deposition cavity radio frequency reflection power adjusting device. The adjusting device comprises an adjusting block, a coil and a driving device. The adjusting block and the coil are in a "full opening" locking mode. The driving device drives the adjusting block to slide along the coil to change the impedance of the coil.
[0006] Preferably, the adjusting block has a structure similar to a clip for holding hair, which is integrally constructed from an upper clamping arm, a lower clamping arm and a column connecting the upper clamping arm and the lower clamping arm. The upper clamping arm and the lower clamping arm are provided with screw holes for fixing the fixing member, and the upper clamping arm and the lower clamping arm are locked by the fixing member.
[0007] Preferably, the fixing member comprises a combination of a screw and a nut or a bolt.
[0008] Preferably, the upper clamping arm and the lower clamping arm are symmetrical structures.
[0009] Preferably, the distance between the upper clamping arm and the lower clamping arm is not less than the diameter of the coil, and the coil passes through the space defined by the upper clamping arm, the lower clamping arm, the fixing member and the column.
[0010] Preferably, the column and the driving device are connected by a cable.
[0011] As described above, the deposition cavity radio frequency reflection power adjusting device provided by the present application has the following beneficial effects: the "half opening" locking mode between the adjusting block and the coil is changed to a "full opening" locking mode. When the fixing member is locked, the coil is subjected to a pre-tightening force, which ensures that the adjusting block is tightly attached to the coil, effectively prevents the adjusting block from falling off and loosening, inhibits the occurrence of coil arc, and ensures the stable output of radio frequency reflection power. Attached Figure Description
[0012] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0013] Figure 1 The diagram shown is a schematic of an existing deposition cavity radio frequency reflection power adjustment device;
[0014] Figure 2 The diagram shown is a schematic of a deposition cavity radio frequency reflection power adjustment device provided in an embodiment of this application. Detailed Implementation
[0015] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this invention.
[0016] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0017] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," indicating orientation or positional relationships, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0018] In the description of the present application, it should be noted that unless specifically defined and limited otherwise, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements, it can be wireless connection, or it can be wired connection. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0019] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict.
[0020] Please refer to Figure 1 , which shows a schematic diagram of the existing deposition cavity radio frequency reflected power adjusting device.
[0021] As Figure 1 shown, the adjusting block 100 and the coil 101 in the deposition cavity radio frequency reflected power adjusting device are in a "half-open" locking mode, and the two cannot be closely attached. When the adjusting block slides along the coil, it is easy to fall off, resulting in coil arc; when the adjusting block is fixed at a certain position of the coil, it is easy to loosen, resulting in unstable output of radio frequency reflected power.
[0022] In order to solve the above problems, the present application provides a deposition cavity radio frequency reflected power adjusting device.
[0023] Please refer to Figure 2 , which shows a schematic diagram of the deposition cavity radio frequency reflected power adjusting device provided by the embodiment of the present application.
[0024] As Figure 2 shown, the deposition cavity radio frequency reflected power adjusting device comprises an adjusting block 200, a coil 201 and a driving device (not shown in the figure), and the adjusting block 200 and the coil 201 are in a "full package" locking mode. When the adjusting block 200 slides along the coil 201, it will not fall off, avoiding coil arc; when the adjusting block 200 is fixed at a certain position of the coil 201, the locking fixture 202 is locked at the same time, and the adjusting block 200 and the coil 201 can be closely attached, avoiding loosening, and ensuring the stable output of radio frequency reflected power.
[0025] As an example, the adjusting block 200 has a structure similar to a clip for holding hair, which is integrally formed by an upper clamping arm 2001, a lower clamping arm 2002, and a column 2003 connecting the upper clamping arm 2001 and the lower clamping arm 2002. The upper clamping arm 2001 and the lower clamping arm 2002 are provided with screw holes for fixing a fixing member 202, and the upper clamping arm 2001 and the lower clamping arm 2002 are locked by the fixing member 202. The upper clamping arm 2001 and the lower clamping arm 2002 are symmetrical structures, and the distance between the upper clamping arm 2001 and the lower clamping arm 2002 is not less than the diameter of the coil 201. The coil 201 passes through the space defined by the upper clamping arm 2001, the lower clamping arm 2002, the fixing member 202, and the column 2003. The fixing member 202 includes a combination of a screw and a nut, a bolt, etc. The column 2003 is connected to a driving device by a cable 203, and the driving device drives the adjusting block 200 to slide along the coil 201 to change the impedance of the coil 201, so that the radio frequency reflected power reaches a minimum value and the radio frequency reflected power is stably output.
[0026] The adjusting block 200 and the coil 201 in the deposition cavity radio frequency reflected power adjusting device provided by the present application are in a "full package" locking mode. When the fixing member 202 is locked, the coil 201 is subjected to a pre-tightening force, which ensures that the adjusting block 200 and the coil 201 are tightly fitted, effectively prevents the adjusting block 200 from falling off and loosening, suppresses the occurrence of coil arc, and ensures the stable output of radio frequency reflected power. Therefore, the present application effectively overcomes the various shortcomings in the prior art and has high industrial utilization value.
[0027] It should be noted that the diagrams provided in the embodiments only schematically illustrate the basic concept of the present application, and only the components related to the present application are shown in the diagrams, not the number, shape, and size of the components when actually implemented. The actual implementation of each component may be arbitrarily changed in shape, number, and proportion, and the layout pattern of the components may be more complex.
[0028] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical idea disclosed by the present application should be covered by the claims of the present application.
Claims
1. A deposition chamber radio frequency reflected power adjustment device, comprising: The adjusting device comprises an adjusting block (200), a coil (201), and a driving device, the adjusting block (200) and the coil (201) are in a "full package" locking mode, and the driving device drives the adjusting block (200) to slide along the coil (201) to change the impedance of the coil (201).
2. The adjustment device of claim 1, wherein The adjusting block (200) has a structure similar to a clip for holding hair, which is integrally formed by an upper clamping arm (2001), a lower clamping arm (2002), and a column (2003) connecting the upper clamping arm (2001) and the lower clamping arm (2002), the upper clamping arm (2001) and the lower clamping arm (2002) are provided with screw holes for fixing a fixing member (202), and the upper clamping arm (2001) and the lower clamping arm (2002) are locked by the fixing member (202).
3. The adjustment device of claim 2, wherein, The fixing member (202) comprises a combination of a screw and a nut or a bolt.
4. The adjustment device of claim 2, wherein, The upper clamping arm (2001) and the lower clamping arm (2002) are symmetrical structures.
5. The adjustment device according to claim 2 or 4, characterized in that The distance between the upper clamping arm (2001) and the lower clamping arm (2002) is not less than the diameter of the coil (201), and the coil (201) passes through the space defined by the upper clamping arm (2001), the lower clamping arm (2002), the fixing member (202), and the column (2003).
6. The adjustment device of claim 2, wherein, The column (2003) and the driving device are connected by a cable.