Reaction furnace with tensioning device for CVD (Chemical Vapor Deposition) method
By combining a belt conveyor and a pneumatic tensioning device, the problem of limited substrate area for carbon nanotube growth in the CVD method was solved, enabling continuous production and easy material discharge, thereby improving production capacity and automation level.
Patent Information
- Application Number
- CN202520294092.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-24
AI Technical Summary
In existing CVD methods, the substrate area for carbon nanotube growth is limited and production is discontinuous, resulting in low capacity. Traditional tensioning devices are complex in structure and difficult to seal, making it difficult to achieve unmanned, automated, continuous production.
By employing a belt conveyor and a pneumatic tensioning device, and through the combination of active and passive rollers, continuous conveying of the strip substrate is achieved. Combined with a split furnace structure, continuous growth of carbon nanotubes and easy discharge are realized.
It provides an unrestricted substrate area, reduces energy consumption, simplifies the tensioning device structure, improves sealing performance, and enables continuous production and automated discharge of carbon nanotubes.
Smart Images
Figure CN223852776U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the production equipment technical field of chemical vapor deposition method, specifically a reaction furnace with a tensioning device for CVD method. BACKGROUND
[0002] The substrate for generating deposits in the existing chemical vapor deposition method is discontinuous in the horizontal reaction furnace, for example, the carbon nanotubes generated by the horizontal reaction furnace in the CVD method are deposited in the container of the substrate material such as quartz boat or stainless steel box, and the containers are arranged one by one and not communicated with each other in the horizontal furnace, and the carbon nanotubes attached to the inner wall of the container are particularly difficult to discharge.
[0003] At present, the addition of catalyst and the discharge of carbon nanotubes both need to be cooled to room temperature first and then completed through manual operation, which not only increases a large amount of energy consumption, but also is difficult to realize unmanned and automatic continuous production under such high temperature conditions, so that the production capacity is greatly limited.
[0004] The traditional tensioning device realizes tensioning by adjusting the shaft in the passive roller, but the movement of the shaft in the passive roller will cause sealing problems inside and outside the reaction furnace, which is particularly difficult to handle, and the structure of such device is complex and the manufacturing cost is high.
[0005] Carbon nanotubes and carbon nanotube fibers as emerging frontier materials have attracted widespread attention and research from the scientific and industrial communities due to their unique physical and chemical properties and wide application potential. At present, there are three methods for preparing carbon nanotube fibers using carbon nanotubes in the world: wet spinning method, carbon nanotube array spinning method and floating catalyst spinning method. Among them, the carbon nanotube fibers produced by the carbon nanotube array spinning method have the highest cleanliness, but due to the discontinuity and small area of the substrate container, continuous production is not possible, the production capacity is low, and the price is particularly expensive; that is, the area of the carbon nanotube growth substrate provided by the traditional structure is limited and intermittent operation.
[0006] In summary, it is urgent to seek a solution that can provide a carbon nanotube growth substrate with unlimited area and continuous production. UTILITY MODEL CONTENT
[0007] In view of the problems in the prior art, the utility model aims to provide a reaction furnace with a tensioning device for CVD method to solve the problems mentioned in the background art.
[0008] In order to achieve the above object, the utility model provides the following technical scheme: the horizontal reaction furnace 1 of continuous production using chemical vapor deposition method includes tensioner 1C, belt conveyor 2 and furnace body 3, and the belt conveyor 2 including belt 2A and roller 4 installed in furnace body 3, and the belt 2A is the substrate of deposit prepared by CVD method, and the belt 2A includes upper layer belt 2A1 and lower layer belt 2A2, and the belt 2A is enveloped by roller 4, and the roller 4 includes driving roller 41 and passive roller 42; the furnace body 3 includes initial section 5, telescopic section 6, reaction section 7 and discharge section 8, the telescopic section 6 includes upper telescopic section 6A and lower telescopic section 6B, and the reaction section 7 includes heating furnace body 7A and return furnace body 7B, and the heating furnace body 7A is located above the return furnace body 7B;
[0009] the upper layer belt 2A1 grows on the upper layer belt 2A1 in the heating furnace body 7A, and the lower layer belt 2A2 is discharged from the discharge section 8 to the initial section 5 through the return furnace body 7B;
[0010] when the initial section 5 is installed on the tensioner 1C, the telescopic section 6 is located between the initial section 5 and the reaction section 7, the upper telescopic section 6A is located between the initial section 5 and the heating furnace body 7A, the lower telescopic section 6B is located between the initial section 5 and the return furnace body 7B, and the movement of the initial section 5 relative to the ground is realized through the tensioner 1C;
[0011] when the discharge section 8 is installed on the tensioner 1C, the telescopic section 6 is located between the discharge section 8 and the reaction section 7, the upper telescopic section 6A is located between the discharge section 8 and the heating furnace body 7A, the lower telescopic section 6B is located between the discharge section 8 and the return furnace body 7B, and the movement of the discharge section 8 relative to the ground is realized through the tensioner 1C; the belt conveyor 2 realizes the tensioning of the belt 2A through the tensioner 1C.
[0012] As a further scheme of the utility model: the reaction furnace 1 includes the reaction furnace for preparing carbon nanotube, and the belt 2A includes stainless steel belt.
[0013] As a further scheme of the utility model: when the driving roller 41 is installed in the initial section 5 of the tensioner 1C in the discharge section 8 fixedly relative to the ground, then the passive roller 42 is installed in the initial section 5 of the tensioner 1C.
[0014] As a further scheme of the utility model: the reaction furnace 1 includes steel structure frame 1E, and the furnace body 3 and the tensioner 1C are all installed in the steel structure frame 1E.
[0015] As a further scheme of the utility model: the tensioner 1C includes pneumatic tensioner 1C1, and the pneumatic tensioner 1C1 realizes tensioning through air cylinder.
[0016] As a further scheme of the utility model: the furnace body 3 includes split structure, the heating furnace body 7A and return furnace body 7B in split structure are independent respectively.
[0017] As a further scheme of the utility model: the driving roller 41 is installed in the discharging section 8 on the tensioning device 1C, then the driven roller 42 is installed in the initial section 5 fixed relative to the ground.
[0018] In summary, compared with the prior art, the utility model provides a continuous production solution due to the unique structure with belt as the base, and the specific advantages are as follows: 1) since the belt in the conveyor is continuously operated, the base area in the CVD method is unlimited; 2) since the conveyor belt is planar, the discharging and cleaning of carbon nanotubes are particularly easy; 3) energy consumption is low; 4) the structure of the tensioning device is simple, and the sealing performance is good. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 is the structure schematic view of the tensioning device 1C, the belt conveyor device 2, the furnace body 3 and the steel structure frame 1E constituting the horizontal reaction furnace 1, is also the structure schematic view of the belt 2A and the roller 4 constituting the belt conveyor device 2, is also the structure schematic view of the upper layer belt 2A1 and the lower layer belt 2A2 constituting the belt 2A, is also the structure schematic view of the driving roller 41 and the driven roller 42 constituting the roller 4, is also the structure schematic view of the initial section 5, the telescopic section 6, the reaction section 7 and the discharging section 8 constituting the furnace body 3, is also the structure schematic view of the upper telescopic section 6A and the lower telescopic section 6B constituting the telescopic section 6, is also the structure schematic view of the heating furnace body 7A and the return furnace body 7B constituting the reaction section 7, is also the structure schematic view of the initial section 5 installed on the tensioning device 1C;
[0020] Figure 2 is the A-A sectional view of Figure 1 ;
[0021] Figure 3 is the structure schematic view of the initial section 5 installed on the tensioning device 1C;
[0022] Figure 4 is the structure schematic view of the discharging section 8 installed on the tensioning device 1C;
[0023] Figure 5 is the B view of Figure 1 ;
[0024] Figure 6 is the structure schematic view of the integral furnace body 3.
[0025] Reaction furnace 1, tensioning device 1C, pneumatic tensioning device 1C1, steel structure frame 1E, belt conveying device 2, belt 2A, upper layer belt 2A1, lower layer belt 2A2, furnace body 3, roller 4, driving roller 41, passive roller 42, initial section 5, telescopic section 6, upper telescopic section 6A, lower telescopic section 6B, reaction section 7, heating furnace body 7A, return furnace body 7B, discharging section 8. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0027] Please refer to Figures 1-6 In the embodiments of the present application, the horizontal reaction furnace 1 for continuous production by chemical vapor deposition method comprises a tensioning device 1C, a belt conveying device 2 and a furnace body 3. The belt conveying device 2 installed in the furnace body 3 comprises a belt 2A and a roller 4. The belt 2A is a substrate for preparing deposits by CVD method, and comprises an upper layer belt 2A1 and a lower layer belt 2A2. The belt 2A is wrapped around the roller 4, and the roller 4 comprises a driving roller 41 and a passive roller 42. The furnace body 3 comprises an initial section 5, a telescopic section 6, a reaction section 7 and a discharging section 8. The telescopic section 6 comprises an upper telescopic section 6A and a lower telescopic section 6B. The reaction section 7 comprises a heating furnace body 7A and a return furnace body 7B. The heating furnace body 7A is located above the return furnace body 7B.
[0028] The upper layer belt 2A1 passes through the heating furnace body 7A from the initial section 5 to the discharging section 8, and the lower layer belt 2A2 passes through the return furnace body 7B from the discharging section 8 to the initial section 5. The chemical reaction product grows on the upper layer belt 2A1 in the heating furnace body 7A and is discharged at the discharging section 8.
[0029] When the initial section 5 is installed on the tensioning device 1C, the telescopic section 6 is located between the initial section 5 and the reaction section 7. The upper telescopic section 6A is located between the initial section 5 and the heating furnace body 7A, and the lower telescopic section 6B is located between the initial section 5 and the return furnace body 7B. The movement of the initial section 5 relative to the ground is realized by the tensioning device 1C.
[0030] When the discharging section 8 is installed on the tensioning device 1C, the telescopic section 6 is located between the discharging section 8 and the reaction section 7. The upper telescopic section 6A is located between the discharging section 8 and the heating furnace body 7A, and the lower telescopic section 6B is located between the discharging section 8 and the return furnace body 7B. The movement of the discharging section 8 relative to the ground is realized by the tensioning device 1C. The belt 2A of the belt conveying device 2 is tensioned by the tensioning device 1C.
[0031] The reaction furnace 1 comprises a reaction furnace for preparing carbon nanotubes, and the belt 2A comprises a stainless steel belt.
[0032] When the active roller 41 is installed in the discharging section 8 of the tensioning device 1C, the passive roller 42 is installed in the initial section 5 fixed relative to the ground.
[0033] The reaction furnace 1 comprises a steel structure frame 1E, and the furnace body 3 and the tensioning device 1C are both installed in the steel structure frame 1E.
[0034] The tensioning device 1C comprises a pneumatic tensioning device 1C1, and the pneumatic tensioning device 1C1 realizes tensioning through a pneumatic cylinder.
[0035] It should be noted that the tensioning device 1C can also be a gravity tensioning device.
[0036] The furnace body 3 comprises a split structure, and the heating furnace body 7A and the return furnace body 7B in the split structure are independent.
[0037] It should be noted that the furnace body 3 can also adopt an integrated structure of the heating furnace body 7A and the return furnace body 7B.
[0038] When the active roller 41 is installed in the discharging section 8 of the tensioning device 1C, the passive roller 42 is installed in the initial section 5 fixed relative to the ground.
[0039] In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "back" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model, and in the utility model, it should be noted that the terms "mounting" and "connecting" should be understood broadly, for example, fixed connection, detachable connection, one-piece connection, mechanical connection, indirect connection through an intermediate medium, and the specific meaning of the terms in the utility model can be understood according to the specific circumstances.
[0040] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that those skilled in the art can understand.
Claims
1. A reactor furnace for use in a CVD process having a tensioning device, characterized in that The horizontal reaction furnace (1) for continuous production by chemical vapor deposition method comprises a tensioning device (1C), a belt conveying device (2) and a furnace body (3), the belt conveying device (2) installed in the furnace body (3) comprises a belt (2A) and a roller (4), the belt (2A) is a substrate for preparing deposits by CVD method, the belt (2A) comprises an upper layer belt (2A1) and a lower layer belt (2A2), the belt (2A) is enveloped by the roller (4), the roller (4) comprises a driving roller (41) and a driven roller (42); the furnace body (3) comprises an initial section (5), an expansion section (6), a reaction section (7) and a discharge section (8), the expansion section (6) comprises an upper expansion section (6A) and a lower expansion section (6B), the reaction section (7) comprises a heating furnace body (7A) and a return furnace body (7B), the heating furnace body (7A) is located above the return furnace body (7B); the upper layer belt (2A1) passes through the heating furnace body (7A) from the initial section (5) to the discharge section (8), and the lower layer belt (2A2) passes through the return furnace body (7B) from the discharge section (8) to the initial section (5); a chemical reaction product grows on the upper layer belt (2A1) in the heating furnace body (7A), and is discharged at the discharge section (8); when the initial section (5) is installed on the tensioning device (1C), the expansion section (6) is located between the initial section (5) and the reaction section (7), the upper expansion section (6A) is located between the initial section (5) and the heating furnace body (7A), the lower expansion section (6B) is located between the initial section (5) and the return furnace body (7B), and the movement of the initial section (5) relative to the ground is realized by the tensioning device (1C); when the discharge section (8) is installed on the tensioning device (1C), the expansion section (6) is located between the discharge section (8) and the reaction section (7), the upper expansion section (6A) is located between the discharge section (8) and the heating furnace body (7A), the lower expansion section (6B) is located between the discharge section (8) and the return furnace body (7B), and the movement of the discharge section (8) relative to the ground is realized by the tensioning device (1C); the belt conveying device (2) realizes the tensioning of the belt (2A) by the tensioning device (1C).
2. A reactor for CVD method having a tensioning device according to claim 1, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes, and the belt (2A) comprises a stainless steel belt.
3. A reactor for CVD method having a tensioning device according to claim 2, characterized in that When the driving roller (41) is installed in the discharge section (8) fixed relative to the ground, the driven roller (42) is installed in the initial section (5) on the tensioning device (1C).
4. A reactor for CVD method having a tensioning device according to claim 3, characterized in that The reaction furnace (1) comprises a steel structure frame (1E), and the furnace body (3) and the tensioning device (1C) are both installed in the steel structure frame (1E).
5. A reactor for CVD method having a tensioning device according to claim 4, characterized in that The tensioning device (1C) comprises a pneumatic tensioning device (1C1), and the pneumatic tensioning device (1C1) realizes tensioning by a pneumatic cylinder.
6. A reactor for CVD method having a tensioning device according to claim 4, characterized in that The furnace body (3) comprises a split structure, and the heating furnace body (7A) and the return furnace body (7B) in the split structure are independent.
7. A reactor for CVD method having a tensioning device according to claim 1, characterized in that When the driving roller (41) is installed in the discharge section (8) on the tensioning device (1C), the driven roller (42) is installed in the initial section (5) fixed relative to the ground.