Single crystal furnace

Abstract

The utility model discloses a single crystal furnace which comprises a furnace body in which a furnace chamber is formed; the pot body is installed in the furnace cavity, and a heat source used for heating the pot body is further arranged in the furnace cavity; and the cooling device is installed in the furnace cavity, the cooling device is located above the pot body, the cooling device is arranged to be capable of ascending and descending relative to the furnace body, and the cooling device is arranged to be at least used for cooling the pot body after descending relative to the furnace body. According to the single crystal furnace disclosed by the utility model, the cooling device is arranged above the furnace chamber, so that the cooling device and the furnace body can be assembled together in the installation process of the furnace body, the cooling device can be directly descended to the pot body to cool the hot environment of the pot body and the surrounding of the pot body when cooling is needed, and the cooling device and the furnace body are integrated into a whole; the process of manual assembly is reduced, so that the cooling time of the single crystal furnace is shortened, namely the blowing-out time of the single crystal furnace can be shortened, and the production efficiency and productivity of single crystals are greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to monocrystalline silicon manufacturing technical field especially relates to a single crystal furnace. BACKGROUND

[0002] The technical innovation of photovoltaic industry is accelerating continuously, and the emergence of new materials, new technology and new technology makes the conversion efficiency of photovoltaic cell assembly be improved significantly. With the application of automation and intelligent technology, the production process of photovoltaic industry has been greatly optimized.

[0003] In the related art, in the process of manufacturing a single crystal silicon rod, the installation process in the entire device requires personnel to repeatedly disassemble and replace the equipment, which generates some invalid working hours during disassembly and assembly, affects the effective output of the crystal bar, and there is room for improvement. UTILITY MODEL CONTENT

[0004] The utility model aims at at least one of the technical problems existing in the prior art. To this end, the utility model provides a single crystal furnace, when cooling is needed, the cooling device is directly lowered to the pot body to cool the pot body and the thermal environment around it, and the cooling device is integrated with the furnace body, which reduces the process of manual assembly, thereby shortening the cooling time of the single crystal furnace, and greatly improving the single crystal production efficiency and capacity.

[0005] According to the single crystal furnace of the utility model embodiment, the cooling device is located above the furnace cavity, so that the cooling device can be assembled together with the furnace body during the installation of the furnace body, the cooling device can be directly lowered to the pot body when cooling is needed, the pot body and the thermal environment around it are cooled, and the cooling device is integrated with the furnace body, which reduces the process of manual assembly, thereby shortening the cooling time of the single crystal furnace, i.e. the shutdown time of the single crystal furnace, thereby greatly improving the single crystal production efficiency and capacity.

[0006] According to the single crystal furnace of the utility model embodiment, the cooling device is located above the furnace cavity, so that the cooling device can be assembled together with the furnace body during the installation of the furnace body, the cooling device can be directly lowered to the pot body when cooling is needed, the pot body and the thermal environment around it are cooled, and the cooling device is integrated with the furnace body, which reduces the process of manual assembly, thereby shortening the cooling time of the single crystal furnace, i.e. the shutdown time of the single crystal furnace, thereby greatly improving the single crystal production efficiency and capacity.

[0007] According to the single crystal furnace of some embodiments of the utility model, the cooling device comprises a cooling pipe body, the cooling pipe body comprises a first water inlet pipe part, a main cooling pipe part and a first water outlet pipe part, the first water inlet pipe part and the first water outlet pipe part are communicated with the main cooling pipe part respectively, and the main cooling pipe part is located in the furnace body and is used for cooling the pot body.

[0008] The single crystal furnace according to some embodiments of the present application, the main cooling pipe part includes a first annular pipe section, an intermediate cooling pipe section and a second annular pipe section, the first annular pipe section is communicated with the first water inlet pipe part, the second annular pipe section is communicated with the first water outlet pipe part, the two ends of the intermediate cooling pipe section are communicated with the first annular pipe section and the second annular pipe section respectively, and the intermediate cooling pipe section extends towards the direction close to the pot body relative to the first annular pipe section or the second annular pipe section.

[0009] The single crystal furnace according to some embodiments of the present application, the pot body has a circular cross section.

[0010] The first annular pipe section and the second annular pipe section are both configured to extend along the circumference of the pot body, and / or the intermediate cooling pipe section extends along the axial direction of the pot body.

[0011] The single crystal furnace according to some embodiments of the present application, the intermediate cooling pipe section is a plurality of, the plurality of intermediate cooling pipe sections are connected to the first annular pipe section and the second annular pipe section respectively, and the plurality of intermediate cooling pipe sections are distributed along the circumference of the pot body.

[0012] The single crystal furnace according to some embodiments of the present application, the intermediate cooling pipe section includes a first sub-pipe section, a second sub-pipe section and an arc-shaped connecting section, the first sub-pipe section is connected to the first annular pipe section, the second sub-pipe section is connected to the second annular pipe section, the first sub-pipe section and the second sub-pipe section are parallel and spaced apart and both extend along the axial direction of the pot body, and the arc-shaped connecting section is connected between the end of the first sub-pipe section and the end of the second sub-pipe section.

[0013] The single crystal furnace according to some embodiments of the present application, further comprising a driving structure, the driving structure is connected to the cooling device, and the driving structure is used to drive the cooling device to ascend and descend in the furnace cavity.

[0014] The single crystal furnace according to some embodiments of the present application, further comprising a water-cooled screen, the water-cooled screen is installed in the furnace cavity in a liftable manner, the water-cooled screen is formed with a crystal bar avoiding space, the water-cooled screen is provided with a water-cooled pipe line, and the water-cooled pipe line is located outside the crystal bar avoiding space.

[0015] The single crystal furnace according to some embodiments of the present application, the water-cooled pipe line includes a second water inlet pipe part, a main water-cooled pipe part and a second water outlet pipe part, the second water inlet pipe part and the second water outlet pipe part are communicated with the main water-cooled pipe part respectively, and the main water-cooled pipe part is located in the water-cooled screen and is used to cool the crystal bar avoiding space.

[0016] According to some embodiments of the utility model, the single crystal furnace further comprises a heat shield, the heat shield is installed in the furnace cavity in a liftable manner, and the heat shield is arranged around the water cooling shield.

[0017] The additional aspects and advantages of the utility model will be partially given in the following description, some will become obvious from the following description, or be understood through the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the utility model will become apparent and more readily appreciated from the following description of the embodiments, with reference to the following drawings, in which:

[0019] Figure 1 is the section view of the single crystal furnace after shutdown according to the utility model embodiment;

[0020] Figure 2 is the partial section view of the single crystal furnace in the normal crystal pulling state according to the utility model embodiment;

[0021] Figure 3 is the process flow chart of the single crystal rod production according to the utility model embodiment.

[0022] REFERENCE NUMERALS

[0023] Single crystal furnace 100,

[0024] Furnace body 1, furnace cavity 11, pot body 2, heat source 21, cooling device 3, cooling pipe body 31, first water inlet pipe portion 311, main cooling pipe portion 312, first annular pipe section 3121, intermediate cooling pipe section 3122, second annular pipe section 3123, first sub-pipe section 3124, second sub-pipe section 3125, arc-shaped connecting section 3126, first water outlet pipe portion 313, water cooling shield 4, single crystal rod avoiding space 41, water cooling pipe 42, second water inlet pipe portion 421, main water cooling pipe portion 422, second water outlet pipe portion 423, heat shield 5, heat shield fixed felt 51, bottom heater 6, upper insulation barrel assembly 71, middle insulation barrel assembly 72, exhaust pipe 8, exhaust hole 81. DETAILED DESCRIPTION

[0025] The embodiments of the utility model will be described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the utility model, and cannot be understood as limiting the utility model.

[0026] In the description of the utility model, it needs to be understood that, the orientation or positional relation indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientation or positional relation shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model. In addition, the features limited by "first" and "second" can be explicitly or implicitly included one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0027] In the description of the utility model, it needs to be understood that, the orientation or positional relation indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientation or positional relation shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model. In addition, the features limited by "first" and "second" can be explicitly or implicitly included one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0028] Reference will be made to the following Figures 1-3 The single crystal furnace 100 according to the embodiment of the utility model is described, by setting the cooling device 3 is located above the furnace cavity 11, can make the furnace body 1 installation process, cooling device 3 and furnace body 1 together with the assembly is completed, can directly drop to the pot body 2 at the cooling device 3 when needing cooling, the hot environment of the pot body 2 and its surrounding is cooled, and the cooling device 3 and the furnace body 1 are integrated, which reduces the process of manual assembly, thereby shortening the cooling time of the single crystal furnace 100, that is, the shutdown time of the single crystal furnace 100 can be shortened, thereby greatly improving the single crystal production efficiency and capacity.

[0029] As Figures 1-3 The single crystal furnace 100 according to the embodiment of the utility model, including: furnace body 1, pot body 2 and cooling device 3.

[0030] The furnace body 1 is formed with a furnace cavity 11, the pot body 2 is installed in the furnace cavity 11, and the furnace body 1 is further provided with a heat source 21 for heating the pot body 2. The cooling device 3 is installed in the furnace cavity 11, and the cooling device 3 is located above the pot body 2. The cooling device 3 is arranged to be lifted relative to the furnace body 1, and the cooling device 3 is arranged to at least cool the pot body 2 after being lowered relative to the furnace body 1.

[0031] Specifically, the furnace body 1 is a main body part of the single crystal furnace 100, used to support and protect other structures inside the furnace body 1, a furnace cavity 11 is formed inside the furnace body 1, the furnace cavity 11 is a hollow cavity structure, the furnace cavity 11 is a closed or relatively closed space for accommodating the pot body 2 and other heating or cooling devices 3, and the production of single crystal silicon can be carried out in the furnace cavity 11.

[0032] The pot body 2 can be a quartz crucible, which is located in the furnace cavity 11 and forms an open accommodating space in which the polycrystalline silicon raw material can be placed. During the heating process, the polycrystalline silicon raw material is melted in the quartz crucible. The furnace body 1 is also provided with a heat source 21, such as a graphite heater, etc. The heat source 21 can be distributed around the outer periphery of the quartz crucible to heat the quartz crucible, i.e. to heat the polycrystalline silicon raw material inside the quartz crucible, so that the polycrystalline silicon raw material is melted into a liquid state. A bottom heater 6 can also be provided at the bottom of the quartz crucible to heat the bottom of the quartz crucible, improve the melting efficiency of the polycrystalline silicon raw material, and shorten the melting time.

[0033] The cooling device 3 is located in the furnace cavity 11, and the cooling device 3 is located above the furnace cavity 11, and the pot body 2 is located below the furnace cavity 11. The cooling device 3 can be lifted relative to the furnace body 1, i.e. the cooling device 3 moves away from the pot body 2 when it is lifted, and the cooling device 3 moves towards the pot body 2 when it is lowered. The cooling device 3 is used to cool the pot body 2 and the structures inside the furnace cavity 11 to achieve the cooling of the pot body 2.

[0034] During the normal crystal production process of the single crystal furnace 100, the cooling device 3 does not perform the cooling function, and the cooling device 3 is lifted to the farthest distance from the pot body 2. The heat source 21 first heats the solid polycrystalline silicon raw material in the pot body 2, so that the polycrystalline silicon raw material reaches the melting point and is melted into liquid polycrystalline silicon raw material. At this time, the crystal production structure is lowered into the liquid raw material in the pot body 2 to perform crystal drawing. When the crystal production is completed, the crystal production structure can be lifted to separate from the pot body 2, and at the same time, the cooling device 3 moves towards the pot body 2 and is lowered to a higher temperature area of the pot body 2 to cool and cool the hot environment around the pot body 2. After a certain time of cooling, the cooling device 3 moves away from the pot body 2 to end the cooling.

[0035] In the process, the cooling device 3 is integrated with the furnace body 1, and the cooling device 3 is located inside the furnace body 1, so that the cooling device 3 can be lowered into the pot body 2 in the first time after the crystal growth is completed, and the pot body 2 is cooled, which can improve the cooling efficiency of the pot body 2, thereby shortening the cooling time of the whole single crystal furnace 100. Through the use of the cooling device 3, the shutdown time can be shortened by 4-6 hours, and only for a 36-inch hot field, and the effect is better for a large hot field. The cooling device 3 is located inside the furnace body 1, which can improve the sealing performance of the working process of the furnace body 1, avoid air leakage and ash in the furnace body 1, and prevent high-temperature oxidation and corrosion in the hot field. The service life of the equipment is longer.

[0036] The cooling device 3 can be connected with the furnace body 1 through a lifting mechanism such as a driving motor, and the lifting of the cooling device 3 in the furnace body 1 can be realized. The cooling device 3 and the furnace body 1 are integrated, and the cooling device 3 does not need to be manually installed during the cooling process, which effectively avoids the safety risks generated during installation or disassembly. The automatic lifting can reduce the repetitive disassembly and assembly work of workers, significantly improve the production efficiency, reduce the production cost, and improve the safety and use effect of the disassembly and assembly when the temperature of the furnace body 1 is reduced.

[0037] According to the single crystal furnace 100 of the embodiment of the utility model, the cooling device 3 is arranged above the furnace cavity 11, so that the cooling device 3 can be assembled with the furnace body 1 during the installation of the furnace body 1. When cooling is needed, the cooling device 3 can be directly lowered to the pot body 2 to cool the pot body 2 and the surrounding thermal environment. The cooling device 3 is integrated with the furnace body 1, which reduces the manual assembly process, thereby shortening the cooling time of the single crystal furnace 100, i.e. the shutdown time of the single crystal furnace 100, thereby greatly improving the single crystal production efficiency and capacity.

[0038] In some embodiments, the cooling device 3 includes a cooling pipe body 31, which includes a first water inlet pipe portion 311, a main cooling pipe portion 312, and a first water outlet pipe portion 313. The first water inlet pipe portion 311 and the first water outlet pipe portion 313 are in communication with the main cooling pipe portion 312, and the main cooling pipe portion 312 is located inside the furnace body 1 and used for cooling the pot body 2.

[0039] Specifically, the first water inlet pipe part 311 is configured to inject the external cooling medium into the cooling pipe body 31, the first water outlet pipe part 313 is configured to discharge the cooling medium inside the cooling pipe body 31 out of the cooling pipe body 31, and the two ends of the main cooling pipe part 312 are connected to the first water inlet pipe part 311 and the first water outlet pipe part 313, respectively. The main cooling pipe part 312 is the main cooling part of the cooling pipe body 31, is located in the furnace body 1, and can be distributed in the inner cavity of the pot body 2, so as to improve the cooling effect of the main cooling pipe part 312 on the pot body 2. The main cooling pipe part 312 can be hung in the furnace body 1 through the first water inlet pipe part 311 and the first water outlet pipe part 313, wherein the first water inlet pipe part 311 and the first water outlet pipe part 313 extend out of the furnace body 1 and are respectively connected to the external water source to form a cooling medium loop.

[0040] In some embodiments, the cooling medium can be water. When cooling is needed, the cooling mode is started after the cooling device 3 is lowered. The external water source flows into the main cooling pipe part 312 through the first water inlet pipe part 311. The water absorbs the heat of the hot gas flow around the pot body 2, and the heated water flows out of the first water outlet pipe part 313 and circulates continuously to cool the internal structure of the pot body 2 and the furnace body 1.

[0041] Therefore, by arranging the cooling pipe body 31 in the order of the first water inlet pipe part 311, the main cooling pipe part 312, and the first water outlet pipe part 313, the cooling pipe body 31 can cool the pot body 2. The cooling pipe body 31 has a smaller structure and a faster flow speed per unit time than the cooling pipe, which can quickly cool and dissipate heat from the pot body 2. The structure is simple, easy to set up, and has a lower cost.

[0042] In some embodiments, the main cooling pipe part 312 includes a first annular pipe segment 3121, a middle cooling pipe segment 3122, and a second annular pipe segment 3123. The first annular pipe segment 3121 is connected to the first water inlet pipe part 311, the second annular pipe segment 3123 is connected to the first water outlet pipe part 313, and the two ends of the middle cooling pipe segment 3122 are connected to the first annular pipe segment 3121 and the second annular pipe segment 3123, respectively. The middle cooling pipe segment 3122 extends towards the pot body 2 relative to the first annular pipe segment 3121 or the second annular pipe segment 3123.

[0043] Specifically, the first annular pipe segment 3121 and the second annular pipe segment 3123 are distributed around the inner periphery of the pot body 2, so that the cooling water flows along the annular path in the first annular pipe segment 3121 and the second annular pipe segment 3123, and the intermediate cooling pipe segment 3122 is connected between the first annular pipe segment 3121 and the second annular pipe segment 3123, wherein the first annular pipe segment 3121 and the second annular pipe segment 3123 are parallelly distributed in the same plane, and the intermediate cooling pipe segment 3122 extends towards the pot body 2 relative to the first annular pipe segment 3121 or the second annular pipe segment 3123, that is, the extension direction of the intermediate cooling pipe segment 3122 intersects with the extension direction of the first annular pipe segment 3121 or the second annular pipe segment 3123, so that the pipe arrangement is simple and the flow path is longer.

[0044] In this way, the cooling water in the first annular pipe segment 3121 flows towards the pot body 2, and the cooling water exchanges heat with the hot gas flow in the pot body 2 during the flow in the intermediate cooling pipe segment 3122, so that the cooling water carries away the heat of the hot gas flow to cool the internal space of the pot body 2 and the pot body 2 in the intermediate cooling pipe segment 3122.

[0045] The outlet end of the first water inlet pipe portion 311 is connected with the first annular pipe segment 3121, so that the water in the first water inlet pipe portion 311 flows into the first annular pipe segment 3121, and the water in the first annular pipe segment 3121 flows into the intermediate cooling pipe segment 3122 and the second water outlet pipe portion 423, and the second annular pipe segment 3123 is connected with the inlet end of the second water outlet pipe portion 423, so that the water in the second annular pipe segment 3123 flows into the second water outlet pipe portion 423 and then is discharged from the furnace body 1, so as to realize the cooling of the cooling water to the pot body 2 and the surrounding hot gas flow.

[0046] Therefore, by arranging the first annular pipe segment 3121, the cooling water can be gathered and stored, and by arranging the second annular pipe segment 3123, the water after heat exchange can be collected, and the first annular pipe segment 3121 and the second annular pipe segment 3123 are both annular structures, so that the cooling water is distributed around the inner periphery of the pot body 2, and the intermediate cooling pipe segment 3122 extends towards the pot body 2, so as to increase the heat exchange area of the cooling water with the pot body 2, thereby improving the cooling efficiency of the cooling water to the pot body 2.

[0047] In some embodiments, the pot body 2 has a circular cross section, for example, at least part of the pot body 2 can be configured as a cylinder, and a circular cavity is formed in the inside of the cylinder for more holding of the polysilicon raw material, wherein the pot body 2 has a radial direction and an axial direction, and the radial direction can be arranged as a horizontal direction, and the axial direction can be arranged as a vertical direction.

[0048] In some embodiments, the first annular pipe segment 3121 and the second annular pipe segment 3123 are both arranged to extend along the circumferential direction of the pot body 2; and / or the intermediate cooling pipe segment 3122 extends along the axial direction of the pot body 2.

[0049] Specifically, the first annular pipe section 3121 and the second annular pipe section 3123 are annular structures and extend along the circumferential direction of the pot body 2, so that the planes in which the first annular pipe section 3121 and the second annular pipe section 3123 are located are respectively parallel to the radial planes of the pot body 2, so that the water flow in the first annular pipe section 3121 and the second annular pipe section 3123 can flow along the circumferential direction of the pot body 2, and the extension direction of the intermediate cooling pipe section 3122 is along the axial direction of the pot body 2, that is, the intermediate cooling pipe section 3122 is connected perpendicularly to the first annular pipe section 3121 and the second annular pipe section 3123, and the cooling device 3 is lifted relative to the pot body 2 along the axial direction of the pot body 2, that is, the extension direction of the intermediate cooling pipe section 3122 is the same as the moving direction of the cooling device 3, so that the intermediate cooling pipe section 3122 can be close to or away from the pot body 2 during the movement, and the structure is simple, the moving distance is shorter, and the cooling time is shortened. The first water inlet pipe portion 311 and the first water outlet pipe portion 313 can extend along the axial direction of the pot body 2, and the bottoms of the two are respectively communicated with the first annular pipe section 3121 and the second annular pipe section 3123, so that the water flow before cooling and the water flow after cooling can flow into and out along the axial direction.

[0050] Therefore, through the above arrangement, the water flow entering the first annular pipe section 3121 can flow along the circumferential direction of the pot body 2, which improves the coverage area of the cooling water in the circumferential direction of the pot body 2, and part of the water flow flows along the axial direction, which can increase the coverage area of the water flow in the axial direction of the pot body 2, thereby increasing the contact area of the water flow with the inner cavity space of the pot body 2, which can increase the heat exchange efficiency of the cooling water and the hot gas flow, and the structure is simple and reasonable.

[0051] In some embodiments, the intermediate cooling pipe section 3122 is a plurality of intermediate cooling pipe sections 3122, and the plurality of intermediate cooling pipe sections 3122 are respectively connected to the first annular pipe section 3121 and the second annular pipe section 3123, and the plurality of intermediate cooling pipe sections 3122 are spaced apart along the circumferential direction of the pot body 2.

[0052] Specifically, one end of each intermediate cooling pipe section 3122 is communicated with the first annular pipe section 3121, and the other end of each intermediate cooling pipe section 3122 is communicated with the second annular pipe section 3123, and the plurality of intermediate cooling pipe sections 3122 are spaced apart along the circumferential direction of the pot body 2, so that the first annular pipe section 3121 and the second annular pipe section 3123 form water flow branches at multiple positions in the circumferential direction, so that the cooling water in the first annular pipe section 3121 is branched from multiple positions to the plurality of intermediate cooling pipe sections 3122, and then flows into the second annular pipe section 3123 from the plurality of intermediate cooling pipe sections 3122 respectively, to realize the branching and collecting of the water flow. The plurality of intermediate cooling pipe sections 3122 can be five, six, seven, eight, etc., and the number of settings is not limited, which can be selectively set according to the actual space size of the pot body 2.

[0053] The plurality of intermediate cooling pipe sections 3122 can be evenly spaced along the circumference of the kettle 2, which can make the water flow branch points of the first annular pipe section 3121 and the second annular pipe section 3123 more uniform, improve the uniformity of the water flow distribution in the interior space of the kettle 2, and improve the heat exchange efficiency between the water flow and the hot air.

[0054] Thus, by the above arrangement, the water flow can flow between the first annular pipe section 3121, the intermediate cooling pipe section 3122, and the second annular pipe section 3123, i.e., after the water flow in the intermediate cooling pipe section 3122 absorbs the heat of the hot air outside the intermediate cooling pipe section 3122, the water flow directly flows into the second annular pipe section 3123 to be discharged from the kettle 2, which can increase the flow rate of the water flow, and the water flow in adjacent two intermediate cooling pipe sections 3122 cannot flow into each other, so that the water flow in each intermediate cooling pipe section 3122 can quickly flow out of the kettle 2, which can reduce the flow distance of the water flow in the circumferential direction of the kettle 2, so that a multi-stage cooling effect can be formed in the cooling device 3, the coverage area is wide, and thus the heat exchange efficiency between the water flow and the hot air is increased.

[0055] In some embodiments, the intermediate cooling pipe section 3122 includes a first sub-pipe section 3124, a second sub-pipe section 3125, and an arc-shaped connecting section 3126, the first sub-pipe section 3124 is connected to the first annular pipe section 3121, the second sub-pipe section 3125 is connected to the second annular pipe section 3123, the first sub-pipe section 3124 and the second sub-pipe section 3125 are parallel and spaced apart, and both extend along the axial direction of the kettle 2, and the arc-shaped connecting section 3126 is connected between the end of the first sub-pipe section 3124 and the end of the second sub-pipe section 3125.

[0056] Specifically, as shown in Figure 2 the inner diameters of the first annular pipe section 3121 and the second annular pipe section 3123 are different, the inner diameter of the first annular pipe section 3121 is greater than that of the second annular pipe section 3123, and the first annular pipe section 3121 and the second annular pipe section 3123 are spaced apart along the axial direction of the kettle 2, i.e., the first annular pipe section 3121 and the second annular pipe section 3123 are distributed in the radial direction and the axial direction of the kettle 2, respectively, which can form spaces in the axial direction and the radial direction of the first annular pipe section 3121 and the second annular pipe section 3123, and facilitate the arrangement of the intermediate cooling pipe section 3122 between the first annular pipe section 3121 and the second annular pipe section 3123.

[0057] and as shown in Figure 1 and Figure 2As shown, the inlet end of the first sub-pipe segment 3124 is connected with the first annular pipe segment 3121, the outlet end of the first sub-pipe segment 3124 is connected with the inlet end of the second sub-pipe segment 3125 through the arc-shaped connecting segment 3126, and the outlet end of the second sub-pipe segment 3125 is connected with the second annular pipe segment 3123, wherein the first sub-pipe segment 3124 and the second sub-pipe segment 3125 are distributed in parallel and at intervals in the radial direction of the kettle body 2, and the first sub-pipe segment 3124 and the second sub-pipe segment 3125 both extend in the axial direction of the kettle body 2, so that the water flow in the first sub-pipe segment 3124 and the second sub-pipe segment 3125 flows in the axial direction of the kettle body 2, and the water flow exchanges heat with the hot gas flow in the axial direction of the kettle body 2.

[0058] The water flow directions of the first sub-pipe segment 3124 and the second sub-pipe segment 3125 are parallel and opposite, the water flow in the first sub-pipe segment 3124 flows in the axial direction of the kettle body 2 towards the kettle body 2, and after flowing into the arc-shaped connecting segment 3126, the water flow reverses and flows away from the kettle body 2, and the first sub-pipe segment 3124, the arc-shaped connecting segment 3126 and the second sub-pipe segment 3125 cool the hot gas flow, and the water flow in the second sub-pipe segment 3125 flows into the second annular pipe segment 3123 and is discharged from the kettle body 2, so that the cooling water quickly absorbs heat and is quickly discharged from the kettle body 2, thereby improving the heat exchange efficiency of the cooling liquid.

[0059] In some embodiments, the single crystal furnace 100 further comprises a driving structure connected with the cooling device 3, and the driving structure is used to drive the cooling device 3 to ascend and descend in the furnace chamber 11.

[0060] Specifically, the driving structure is the power source of the cooling device 3, and the driving structure can be configured as a driving motor and a linear module, the linear module can move linearly, and the moving end of the linear module is connected with the cooling device 3 in power, so that the driving motor drives the linear module to drive the cooling device 3 to move up and down, thereby realizing the ascending and descending of the cooling device 3 in the furnace chamber 11.

[0061] Further, when cooling is needed, the driving motor drives the cooling device 3 to move downwards to the high-temperature area of the kettle body 2, the inner periphery of the kettle body 2 is cooled by the cooling device 3, and after cooling is completed, the driving motor drives the cooling device 3 to move upwards to the highest position, thereby realizing the resetting of the cooling device 3, and the driving motor can drive the cooling device 3 to effectively extend into the kettle body 2, thereby realizing rapid cooling of the kettle body 2 and other structures, avoiding the oxidation and the attenuation of the service life of the hot field due to air impact after the furnace is disassembled, and the cooling device 3 is automatically arranged to ascend and descend, so that the movement precision is higher, the stability is higher, and the safety is higher.

[0062] And the driving structure can be connected to the first water inlet pipe part 311 and the first water outlet pipe part 313 away from one end of the main cooling pipe part 312, that is, the driving structure can be arranged outside the furnace body 1, and the driving structure can be fixedly connected to the outer periphery of the pot body 2, so that the driving structure and the cooling device 3 are integrated with the furnace body 1. Compared with some cooling devices 3 suspended by tungsten wire ropes, the shaking during the hoisting process may cause damage due to collision of the device, which has certain safety risks. The integrated structure in the embodiment has high safety and higher operation precision. Moreover, the driving structure is arranged outside the furnace body 1, which can avoid damage or operation failure of the driving structure caused by the high-temperature environment inside the furnace body 1, and has higher stability and safety.

[0063] The linear module can be a gear rack, a worm gear, a lead screw sliding table, etc., and the driving structure can also be arranged as a piston pushing structure, etc., which has various arrangement modes and can meet the linear motion of the cooling device 3.

[0064] In some embodiments, the single crystal furnace 100 further comprises a water-cooled screen 4 which is installed in the furnace chamber 11 in a lifting manner. The water-cooled screen 4 is formed with a crystal bar avoiding space 41, and is provided with a water-cooled pipe 42 which is located outside the crystal bar avoiding space 41.

[0065] Specifically, the water-cooled screen 4 is used for cooling the crystal bar during the crystal production process. The water-cooled screen 4 is located in the furnace chamber 11 and is lifted relative to the furnace chamber 11. When the water-cooled screen 4 is lowered, the single crystal furnace 100 is in the crystal production process, and when the water-cooled screen 4 is raised, the single crystal furnace 100 is in the shutdown state. The water-cooled screen 4 can be configured as a circular structure, and the center of the water-cooled screen 4 is formed with the crystal bar avoiding space 41 which is used for avoiding the crystal bar and the structure for driving the crystal bar to rise during the crystal production process. The water-cooled screen 4 is connected with the water-cooled pipe 42 which can cool the water-cooled screen 4 and the crystal bar located in the crystal bar avoiding space 41. The water-cooled pipe 42 is located outside the crystal bar avoiding space 41, so that the water-cooled pipe 42 does not occupy the crystal bar avoiding space 41 and leaves enough space for producing the crystal bar. Moreover, the water-cooled pipe 42 can avoid interference with the crystal bar and damage to the water-cooled pipe 42, etc.

[0066] During the crystal production process, the water-cooled screen 4 moves relative to the furnace body 1 towards the direction close to the pot body 2, and the produced crystal bar rises to the crystal bar avoiding space 41 of the water-cooled screen 4. The cooling medium in the water-cooled screen 4 cools the high-temperature crystal bar, and after the crystal bar is cooled to room temperature, the crystal bar continues to rise and is taken out from the furnace body 1. After the crystal production process is completed, the water-cooled screen 4 moves relative to the furnace body 1 away from the direction of the pot body 2, and after the furnace body 1 is shut down, the cooling device 3 can be used for cooling the pot body 2.

[0067] And, the water-cooled screen 4 and the driving mode of the cooling device 3 are the same, and can be driven through a driving structure, wherein the driving structure can be configured as a driving motor and a linear module, and the moving end of the linear module is connected with the water-cooled screen 4 in power, so that the driving motor drives the linear module to drive the water-cooled screen 4 to move up and down, that is, the water-cooled screen 4 can be lifted in the furnace cavity 11. The linear module can be a gear rack, a worm gear, a screw slide, etc., and the driving structure can also be configured as a piston pushing structure, etc., and the setting mode is various, which can meet the linear motion of the water-cooled screen 4.

[0068] In some embodiments, the water-cooled pipe 42 comprises a second water inlet pipe part 421, a main water-cooled pipe part 422 and a second water outlet pipe part 423, the second water inlet pipe part 421 and the second water outlet pipe part 423 are respectively communicated with the main water-cooled pipe part 422, and the main water-cooled pipe part 422 is located in the water-cooled screen 4 and is used for cooling the crystal bar avoiding space 41.

[0069] Specifically, the second water inlet pipe part 421 is used for injecting the cooling medium outside into the water-cooled screen 4, the second water outlet pipe part 423 is used for discharging the cooling medium inside the water-cooled screen 4 outside the water-cooled screen 4, and the two ends of the main water-cooled pipe part 422 are respectively connected to the second water inlet pipe part 421 and the second water outlet pipe part 423. The main water-cooled pipe part 422 is the main cooling part of the water-cooled screen 4, and is located in the water-cooled screen 4, that is, the inside of the water-cooled screen 4 can be set as a hollow body to form the main water-cooled pipe part 422, so that the cooling medium in the main water-cooled pipe part 422 can spread in the water-cooled screen 4, the water storage capacity in the water-cooled screen 4 can be improved, the cooling effect of the main water-cooled pipe part 422 on the crystal bar can be improved, and the main water-cooled pipe part 422 can be hung in the furnace body 1 through the second water inlet pipe part 421 and the second water outlet pipe part 423, wherein the second water inlet pipe part 421 and the second water outlet pipe part 423 extend to the outside of the furnace body 1 and are respectively communicated with the water source outside to form a cooling medium loop.

[0070] The cooling medium can be water, and during the normal crystal production process, the water-cooled screen 4 is lowered, and the cooling mode of the water-cooled screen 4 is started at the same time. The water source outside flows into the main water-cooled pipe part 422 through the second water inlet pipe part 421, and the water absorbs the heat of the crystal bar in the crystal bar avoiding space 41, and the water after absorbing heat flows out from the second water outlet pipe part 423 and circulates continuously to cool the crystal bar.

[0071] Therefore, by setting the water-cooled pipe 42 as the second water inlet pipe part 421, the main water-cooled pipe part 422 and the second water outlet pipe part 423 connected in sequence, the water-cooled screen 4 can cool the crystal bar, and can cool the crystal bar in time after the crystal bar is produced, so that the cooling speed of the crystal bar can be improved, and the production efficiency of the crystal bar can be improved.

[0072] In some embodiments, the single crystal furnace 100 further comprises a heat shield 5, which is installed in the furnace cavity 11 in a liftable manner, and the heat shield 5 is arranged around the water-cooled shield 4.

[0073] Specifically, the heat shield 5 is used to block the outside heat absorbed by the water-cooled shield 4, and the heat shield 5 is located in the furnace cavity 11 and is lifted relative to the furnace cavity 11, and when the heat shield 5 is lowered, the single crystal furnace 100 is in a crystal making process, and when the heat shield 5 is raised, the single crystal furnace 100 is in a shutdown state. The heat shield 5 can be configured in a circular structure, which is arranged around the water-cooled shield 4 and is spaced apart from the water-cooled shield 4 on the inner diameter of the pot body 2, so as to separate the cold of the water-cooled shield 4 from the heat shield 5, and avoid the influence of the heat of the heat shield 5 on the stability of the cooling medium in the water-cooled shield 4.

[0074] In the crystal making process, the heat shield 5 and the water-cooled shield 4 move relative to the furnace body 1 towards the pot body 2, and the finished crystal rod rises to the crystal rod avoiding space 41 of the water-cooled shield 4, and the cooling medium in the water-cooled shield 4 cools the high-temperature crystal rod, and after the crystal rod is cooled to room temperature, the crystal rod continues to rise and is taken out of the furnace body 1. After the crystal making is completed, the heat shield 5 and the water-cooled shield 4 move relative to the furnace body 1 away from the pot body 2, and after the furnace body 1 is shut down, the cooling device 3 can be operated to cool the pot body 2.

[0075] The heat shield 5 is provided with a heat shield fixed felt 51 on the side close to the water-cooled shield 4, which can reduce the heat loss at the heat shield 5, and the heat shield fixed felt 51 fills the space between the heat shield 5 and the water-cooled shield 4, so that the cooling medium in the water-cooled shield 4 does not absorb the heat at the heat shield 5 during the crystal making process, and the cooling medium can effectively cool the crystal rod. Through the heat shield fixed felt 51, the heat shield 5 and the water-cooled shield 4 can be effectively insulated, so as to improve the reliability of the crystal making process.

[0076] In addition, the heat shield 5 and the water-cooled shield 4 can share a driving structure, and under the driving action of the driving structure, the movement directions of the heat shield 5 and the water-cooled shield 4 are consistent, so that the heat shield 5 and the water-cooled shield 4 can be automatically lifted, and the number of driving structures is saved, and the setting cost is reduced.

[0077] The water-cooled screen 4 is formed with a flow guide surface inclined towards the pot body 2 on the side away from the heat screen 5, and the protective gas (such as argon) can be blown along the flow guide surface into the pot body 2. The bottom of the heat screen 5 is provided with a flow guide portion formed with a guide surface inclined away from the pot body 2 towards the water-cooled screen 4. In this way, the protective gas in the pot body 2 rises to the heat screen 5 and is guided by the flow guide portion to the outside of the pot body 2. The outside of the pot body 2 is formed with a downwardly extending exhaust duct 8 and exhaust holes 81, and the protective gas enters the exhaust duct 8 and is discharged from the exhaust holes 81 out of the furnace body 1. In this way, the impurities and volatile substances in the crystal growth environment can be blown away by the protective gas to form a stable crystal growth space.

[0078] As shown in Figure 1 The furnace body 1 is also provided with an upper heat preservation barrel assembly 71 and a middle heat preservation barrel assembly 72, which are located outside the pot body 2 and can provide heat preservation for the pot body 2 and other structures such as the heat screen 5 and the water-cooled screen 4. The upper heat preservation barrel assembly 71 is located above the pot body 2, and the middle heat preservation barrel assembly 72 is located around the periphery of the pot body 2. In this way, a single crystal heat preservation can be provided for the solid-liquid interface during single crystal pulling to isolate heat and provide a stable growth environment for single crystal growth. The upper heat preservation barrel assembly 71 and the middle heat preservation barrel assembly 72 are formed with a gap, which is mainly used for guiding the protective gas to flow through the gap after being blown to the liquid surface and then flow into the exhaust duct 8.

[0079] The heat source 21 is a main heater located around the upper region of the pot body 2. When cooling is needed, the heat source 21 is turned off, the water-cooled screen 4 and the heat screen 5 are raised to the upper limit position by the driving device provided in the furnace body 1, and the quartz crucible in the furnace is lowered to the lower limit position. Then, the cooling device 3 is lowered by the driving structure through the automatic system provided in the single crystal furnace 100. The lowering distance can be adjusted according to the remaining amount of material in the pot body 2, and the stroke of the water-cooled screen 4 is consistent with the stroke of the cooling device 3 within the range of 0-500mm. Circulating water is supplied to the cooling device 3, which quickly absorbs the residual heat in the pot body 2 and from the heat source 21 through the gap between the cooling device 3 and the gap, and then quickly removes the heat through the cooling device 3 to achieve rapid cooling of the furnace body 1. The exhaust duct 8 also synchronously removes part of the heat from the bottom of the furnace body 1. The heat removed from the exhaust duct by the cooling device 3 and the argon blowing can greatly reduce the temperature of the furnace body 1, thereby slowing down the pulverization of the thermal field and reducing the invalid working hours.

[0080] As shown in Figure 3The process flow chart of normal crystal growth process is shown, the furnace is combined → the air is extracted and the leakage is checked → the melting material is melted → the temperature is adjusted → the crystal is introduced → the shoulder is put → the diameter is kept → the furnace is stopped (the heat source 21 is closed) → the cooling device 3 is lowered → the cooling is performed → the furnace is disassembled, that is, first, all the auxiliary materials such as the heat shield solid felt 51, the heater, the pot body 2 and the like, and the polycrystalline silicon raw material and the like are installed according to the standard, and the conditions for normal crystal pulling are prepared, then the furnace body 1 is pumped to vacuum, the pump is closed after the vacuum is ensured, and it is observed whether there is leakage, if there is leakage, the leakage is checked, after the leakage is ensured, the melting material is melted, the polycrystalline silicon raw material is in a solid state, after the melting material is melted, the liquid level is low, the polycrystalline silicon raw material is continuously added into the pot body 2 through the sub-chamber, until the liquid in the pot body 2 is full, then the temperature is adjusted, and the crystal pulling is performed, after the crystal is introduced, the shoulder is put, and the diameter is kept, the crystal pulling is completed, at this time, the furnace is stopped, and the heat source 21 is closed, then the cooling device 3 is lowered to the high temperature area of the pot body 2, and the pot body 2 and the internal space are cooled, after the cooling is completed, the furnace is disassembled, and all the auxiliary materials such as the heat shield solid felt 51, the heater, the pot body 2 and the like are disassembled, and then cleaned and checked, when there is a damaged structure, the damaged structure is replaced, and then the above-mentioned crystal pulling process is performed again.

[0081] In addition, the first water inlet pipe part 311, the main cooling pipe part 312 and the first water outlet pipe part 313 of the cooling pipe body 31 in the embodiment are each coated with a polyurethane resin coating layer on the outer surface by plasma spraying or pyrolytic deposition, so that the coating layer is tightly combined with the surface of the cooling pipe body 31, the wear resistance of the cooling pipe body 31 is enhanced, metal contamination caused by wear in the furnace is avoided, and the like, and a polyurea anticorrosive coating is attached to the inner surface of each pipe, so that the pipe is prevented from being scaled, rusted and the like, the water flow rate of the pipe is greatly improved, the cooling effect of the cooling device 3 is accelerated, and the service life of the equipment is prolonged.

[0082] Therefore, by using the cooling device 3 in the embodiment, the assembly time is shortened, and the invalid working hours of the crystal growth process are saved, then, according to the 36-inch hot field for pulling a 12-inch crystal rod, the effective weight of the round rod per hour is 6.58 kg, for the equal diameter state, 5*6.58=32.9 kg of single crystal round rods are produced per furnace, the cost is reduced, and the production capacity of the crystal rod is effectively improved. In addition, the automatic operation reduces human errors, improves the product quality and consistency, and thus improves the performance of the single crystal furnace 100.

[0083] In the description of the present specification, the description referring to the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0084] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A single crystal furnace characterized by comprising: The application relates to a furnace body, a pot body, a cooling device and a water-cooled screen. The furnace body is internally provided with a furnace cavity; the pot body is installed in the furnace cavity; the furnace body is further provided with a heat source for heating the pot body; the cooling device is installed in the furnace cavity and located above the pot body; the cooling device is arranged to be liftable relative to the furnace body and is arranged to be used for cooling the pot body after being lowered relative to the furnace body. The cooling device comprises a cooling pipe body, which comprises a first water inlet pipe part, a main cooling pipe part and a first water outlet pipe part; the first water inlet pipe part and the first water outlet pipe part are respectively communicated with the main cooling pipe part; the main cooling pipe part is located in the furnace body and is used for cooling the pot body. The main cooling pipe part comprises a first annular pipe segment, an intermediate cooling pipe segment and a second annular pipe segment; the first annular pipe segment is communicated with the first water inlet pipe part; the second annular pipe segment is communicated with the first water outlet pipe part; the two ends of the intermediate cooling pipe segment are respectively communicated with the first annular pipe segment and the second annular pipe segment; the intermediate cooling pipe segment extends towards the pot body relative to the first annular pipe segment or the second annular pipe segment.

2. The single crystal furnace of claim 1, wherein The pot body has a circular cross section.

3. The single crystal furnace of claim 2, wherein The first annular pipe segment and the second annular pipe segment are arranged to extend along the circumference of the pot body; and / or the intermediate cooling pipe segment extends along the axis of the pot body.

4. The single crystal furnace of claim 3, wherein The intermediate cooling pipe segment is a plurality of intermediate cooling pipe segments; the plurality of intermediate cooling pipe segments are respectively connected to the first annular pipe segment and the second annular pipe segment and are spaced apart along the circumference of the pot body. The intermediate cooling pipe segment comprises a first sub-pipe segment, a second sub-pipe segment and an arc-shaped connecting segment; the first sub-pipe segment is connected to the first annular pipe segment; the second sub-pipe segment is connected to the second annular pipe segment; the first sub-pipe segment and the second sub-pipe segment are parallel and spaced apart and extend along the axis of the pot body; and the arc-shaped connecting segment is connected between the end of the first sub-pipe segment and the end of the second sub-pipe segment.

5. The single crystal furnace of claim 3, wherein The driving structure is connected to the cooling device and is used for driving the cooling device to lift or lower in the furnace cavity.

6. The single crystal furnace of claim 3, wherein The water-cooled screen is liftable and is installed in the furnace cavity; the water-cooled screen is provided with a crystal bar avoiding space; and the water-cooled screen is provided with a water-cooled pipe line located outside the crystal bar avoiding space.

7. The single crystal furnace of any one of claims 1-6, wherein, The water-cooled pipe line comprises a second water inlet pipe part, a main water-cooled pipe part and a second water outlet pipe part; the second water inlet pipe part and the second water outlet pipe part are respectively communicated with the main water-cooled pipe part; and the main water-cooled pipe part is located in the water-cooled screen and is used for cooling the crystal bar avoiding space.

8. The single crystal furnace of any one of claims 1-6, wherein, The heat screen is liftable and is installed in the furnace cavity; and the heat screen surrounds the water-cooled screen.

9. The single crystal furnace of claim 8, wherein ​ 10. The single crystal furnace of claim 8, wherein ​

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