Gas guide cylinder and single crystal furnace

Abstract

The utility model relates to the technical field of monocrystalline silicon preparation, and provides a gas guide cylinder and a single crystal furnace, and the gas guide cylinder comprises a first cylinder body section and a second cylinder body section. The second barrel section is detachably connected to the first barrel section; the first barrel body section and the second barrel body section are jointly enclosed to form a barrel cavity; the inner diameter of the middle part of the cylinder cavity is smaller than that of the two ends of the cylinder cavity in the direction from the first cylinder section to the second cylinder section. In this way, the gas can flow from the first end of the cylinder cavity to the second end of the cylinder cavity, the Laval effect can be generated when the gas flows from the cylinder cavity, and then the flow speed of the gas in the gas guide cylinder can be increased. In addition, when the air guide cylinder is installed on the main body equipment, one of the first cylinder body section and the second cylinder body section can be installed on the main body equipment, and then the other one is connected with the installed one. Therefore, the air guide cylinder can be mounted more conveniently and is easy to operate, and the mounting efficiency of the air guide cylinder can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal silicon production, in particular to a gas guide cylinder and a single crystal furnace. BACKGROUND

[0002] Single crystal silicon is a core material for making solar panels, and is currently produced by a single crystal furnace. The bottom of the single crystal furnace is provided with a gas guide cylinder, which is used to discharge gaseous oxides generated in the furnace during the production of single crystal silicon.

[0003] However, the gas guide cylinder in the prior art has a slow flow rate of gaseous oxides when discharging the gaseous oxides, which causes the gaseous oxides to easily accumulate and adhere to the inner wall of the gas guide cylinder, and to chemically react with the material of the gas guide cylinder itself and generate impurities, thereby causing the gas guide cylinder to be blocked. CONTENT OF THE UTILITY MODEL

[0004] The present application provides a gas guide cylinder and a single crystal furnace, which can accelerate the flow rate of gas in the gas guide cylinder.

[0005] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] In a first aspect, the present application provides a gas guide cylinder, which comprises: a first cylinder segment and a second cylinder segment. The second cylinder segment is detachably connected to the first cylinder segment; the first cylinder segment and the second cylinder segment jointly enclose a cylinder cavity; the inner diameter of the middle part of the cylinder cavity is smaller than the inner diameter of the two ends of the cylinder cavity in the direction from the first cylinder segment to the second cylinder segment.

[0007] As an optional implementation, the cylinder cavity comprises a first cavity enclosed by the first cylinder segment; the inner diameter of the first end of the first cavity is greater than the inner diameter of the second end of the first cavity in the direction from the first cylinder segment to the second cylinder segment.

[0008] As an optional implementation, the cylinder cavity comprises a second cavity enclosed by the second cylinder segment; the inner diameter of the first end of the second cavity is smaller than the inner diameter of the second end of the second cavity in the direction from the first cylinder segment to the second cylinder segment; the second cavity is in communication with the first cavity.

[0009] As an optional implementation, the inner diameter of the first cavity gradually decreases in the direction from the first end of the first cavity to the second end of the first cavity;

[0010] And / or, the inner diameter of the second cavity gradually increases in the direction from the first end of the second cavity to the second end of the second cavity.

[0011] As an optional implementation, the inner wall of the first cavity comprises a first conical surface, and the included angle a between the generatrix of the first conical surface and the axis of the first cylinder segment is in the range of 25°≤a≤35°.

[0012] The inner wall of the second cavity comprises a second conical surface, and the included angle β between the generatrix of the second conical surface and the axis of the second cylinder segment is in the range of β<0.5a.

[0013] As an optional implementation, the second end of the first cylinder segment is provided with a connecting groove, and the first end of the second cylinder segment is provided with a connecting protrusion; or the second end of the first cylinder segment is provided with the connecting protrusion, and the first end of the second cylinder segment is provided with the connecting groove; the connecting protrusion is detachably inserted into the connecting groove.

[0014] As an optional implementation, the connecting groove is an annular groove, and the connecting protrusion is an annular protrusion; the annular groove and the annular protrusion are shape-fitted and both extend along the circumference of the first cylinder segment.

[0015] As an optional implementation, the first cylinder segment and the second cylinder segment are coaxially arranged, and the length of the first cylinder segment is less than the length of the second cylinder segment.

[0016] As an optional implementation, the first end of the first cylinder segment is provided with a flange plate, and the flange plate is protruded away from the axis of the first cylinder segment;

[0017] On the first surface of the flange plate, the distance between the protruded end of the flange plate and the second end of the first cylinder segment is less than the distance between the fixed end of the flange plate and the second end of the first cylinder segment; the first surface of the flange plate refers to the surface of the flange plate away from the second end of the first cylinder segment.

[0018] In a second aspect, the application provides a single crystal furnace, which comprises a furnace body and the gas guide cylinder of any one of the first aspect; the gas guide cylinder is arranged at the bottom of the furnace body.

[0019] In the gas guide cylinder, the first end of the first cylinder segment is located in the furnace body, and the second end of the second cylinder segment is located outside the furnace body.

[0020] Compared with the prior art, the application has at least the following beneficial effects:

[0021] The gas guide tube comprises a first cylindrical section and a second cylindrical section, which together form a cavity. Gas can flow from the first end to the second end of the cavity, and can then be discharged through the gas guide tube. Because the inner diameter of the cavity in the middle is smaller than the inner diameters at both ends along the direction from the first to the second cylindrical section, a Laval effect is generated when the gas flows through the cavity, thereby increasing the gas velocity within the gas guide tube.

[0022] Because the second cylinder section is detachably connected to the first cylinder section, when installing the air guide tube onto the main equipment, one of the first and second cylinder sections can be installed first, and then the other can be connected to the already installed one. Compared to an integrated air guide tube design, this makes the air guide tube easier and more convenient to install, thereby improving the installation efficiency.

[0023] When the main equipment mentioned above is a single crystal furnace, the gas guide tube is installed on the single crystal furnace to remove gaseous oxides inside the furnace. This can accelerate the flow rate of gaseous oxides in the gas guide tube, making it difficult for gaseous oxides to accumulate and adhere to the inner wall of the gas guide tube. This reduces the impurities generated by the reaction between gaseous oxides and the gas guide tube's own material, thus preventing the gas guide tube from becoming blocked. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of a gas guide tube provided in an embodiment of this application;

[0026] Figure 2 for Figure 1 Schematic diagram of the structure of the first cylindrical section;

[0027] Figure 3 for Figure 2 A three-dimensional structural diagram of the first cylindrical section;

[0028] Figure 4 for Figure 2 Top view of the first cylindrical section;

[0029] Figure 5 for Figure 1 Schematic diagram of the structure of the second cylindrical section;

[0030] Figure 6 forFigure 5 A schematic view of a three-dimensional structure of the second cylinder segment;

[0031] Figure 7 A schematic view of a three-dimensional structure of the second cylinder segment; Figure 5 A schematic view of a three-dimensional structure of the second cylinder segment;

[0032] Figure 8 A schematic view of a three-dimensional structure of the second cylinder segment.

[0033] Explanation of reference signs:

[0034] 100 - single crystal furnace, 120 - furnace body, 110 - gas guide cylinder, 111 - first cylinder segment, 1111 - first conical surface, 1112 - connecting groove, 1113 - flange plate, 1114 - first curved surface segment, 1115 - first heat insulation groove, 112 - second cylinder segment, 1121 - second conical surface, 1122 - connecting protrusion, 1123 - second curved surface segment, 1124 - second heat insulation groove, 113 - cylinder cavity, 1131 - first cavity, 1132 - second cavity. DETAILED DESCRIPTION

[0035] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application. The embodiments described below and the features in the embodiments can be combined with each other without conflict.

[0036] Monocrystalline silicon is a core material for manufacturing solar panels, and at present, a single crystal furnace is generally used to produce monocrystalline silicon. The bottom of the single crystal furnace is provided with a gas guide cylinder, which is used to discharge gaseous oxides generated in the furnace during the production of monocrystalline silicon.

[0037] However, in the prior art, the gas guide cylinder is a straight-wall gas guide cylinder, and the material of the gas guide cylinder is graphite. When the gas guide cylinder discharges gaseous oxides, the flow rate of the gaseous oxides is slow, which causes the gaseous oxides to easily gather and adhere to the inner wall of the gas guide cylinder, and to chemically react with the graphite of the gas guide cylinder and generate impurities. As the use time is prolonged, the impurities become more and more, which causes the gas guide cylinder to be blocked.

[0038] The utility model provides a gas guide cylinder based on the above technical problem, through setting the inner wall of gas guide cylinder to specific shape to solve, specifically, this gas guide cylinder includes first cylinder segment and second cylinder segment, first cylinder segment and second cylinder segment jointly enclose and form cylinder cavity. Such gas can flow from the first end of cylinder cavity to the second end of cylinder cavity, and then can discharge gas through the gas guide cylinder. Because along the direction of first cylinder segment to second cylinder segment, the inner diameter of cylinder cavity middle part is less than the inner diameter of both ends of cylinder cavity. Such gas can produce Laval effect when flowing from cylinder cavity, and then can increase the flow velocity of gas in gas guide cylinder.

[0039] Because second cylinder segment is detachably connected to first cylinder segment. Such in the installation of the gas guide cylinder to main body equipment, can install one of first cylinder segment and second cylinder segment to main body equipment first, then again connect the other with the installed one. Compared with the integrated design gas guide cylinder, can make the gas guide cylinder more convenient and easy to operate when installing, and then can improve the installation efficiency of gas guide cylinder.

[0040] The content of the present application will be described in detail below with reference to the drawings, so that those skilled in the art can understand the content of the present application more clearly and in detail.

[0041] The specific structure of the above-mentioned gas guide cylinder and various possible embodiments will be described in detail below.

[0042] Figure 1 A structure diagram of a gas guide cylinder 110 provided by the embodiment of the present application.

[0043] Referring to Figure 1 The gas guide cylinder 110 includes a first cylinder segment 111 and a second cylinder segment 112. The second cylinder segment 112 is detachably connected to the first cylinder segment 111; the first cylinder segment 111 and the second cylinder segment 112 jointly enclose and form a cylinder cavity 113; along the direction of the first cylinder segment 111 to the second cylinder segment 112, the inner diameter of the middle part of the cylinder cavity 113 is less than the inner diameter of both ends of the cylinder cavity 113.

[0044] In the embodiment, since the gas guide cylinder 110 includes the first cylinder segment 111 and the second cylinder segment 112, the first cylinder segment 111 and the second cylinder segment 112 jointly enclose and form the cylinder cavity 113. In this way, gas can flow from the first end of the cylinder cavity 113 to the second end of the cylinder cavity 113, and then the gas can be discharged through the gas guide cylinder 110. Because along the direction of the first cylinder segment 111 to the second cylinder segment 112, the inner diameter of the middle part of the cylinder cavity 113 is less than the inner diameter of both ends of the cylinder cavity 113. In this way, the gas can produce Laval effect when flowing from the cylinder cavity 113, and then the flow velocity of the gas in the gas guide cylinder 110 can be increased.

[0045] Since the second cylinder segment 112 is detachably connected to the first cylinder segment 111, one of the first cylinder segment 111 and the second cylinder segment 112 can be installed on the main body device first, and then the other one is connected to the installed one when the gas guide cylinder 110 is installed on the main body device. Compared with the gas guide cylinder 110 of integrated design, the gas guide cylinder 110 can be more convenient and easy to operate when installed, thereby improving the installation efficiency of the gas guide cylinder 110.

[0046] The Laval effect refers to the phenomenon that the speed of a liquid or gas increases and the pressure decreases when the liquid or gas flows from a narrower pipe to a wider pipe.

[0047] When the main body device is the single crystal furnace 100, the gas guide cylinder 110 is installed on the single crystal furnace 100 to remove gaseous oxides in the furnace body 120 of the single crystal furnace 100. In this way, the flow rate of the gaseous oxides in the gas guide cylinder 110 can be accelerated, so that the gaseous oxides are difficult to gather and adhere to the inner wall of the gas guide cylinder 110, and the impurities generated by the reaction between the gaseous oxides and the material of the gas guide cylinder 110 can be reduced, so that the gas guide cylinder 110 can be prevented from being blocked.

[0048] It should be noted that the cross section of the first cylinder segment 111 and the second cylinder segment 112 can be circular or polygonal, or other shapes, which are not limited in the embodiments of the present application.

[0049] It should be further noted that the gas guide cylinder 110 can be installed not only on the single crystal furnace 100, but also on other main body devices that need to exhaust or discharge liquid, which are not limited in the embodiments of the present application.

[0050] As an optional implementation, in some embodiments, referring to Figure 1 , Figure 2 , Figure 3 and Figure 4 , the cylinder cavity 113 includes a first cavity 1131 enclosed by the first cylinder segment 111; the inner diameter of the first end of the first cavity 1131 is greater than the inner diameter of the second end of the first cavity 1131 in the direction from the first cylinder segment 111 to the second cylinder segment 112.

[0051] In this way, when the second cylinder segment 112 is connected to the first cylinder segment 111 to enclose the cylinder cavity 113, the second end of the first cavity 1131 is located at the middle of the cylinder cavity 113, so that the inner diameter of the middle of the cylinder cavity 113 is smaller than the inner diameter of one end of the cylinder cavity 113, and the Laval effect can occur when the gas flows through the cylinder cavity 113.

[0052] As an optional implementation, in some embodiments, referring to Figure 1 , Figure 5 , Figure 6 andFigure 7 The barrel cavity 113 comprises a second cavity 1132 enclosed by the second barrel section 112; the inner diameter of the first end of the second cavity 1132 is smaller than the inner diameter of the second end of the second cavity 1132 in the direction from the first barrel section 111 to the second barrel section 112; and the second cavity 1132 is in communication with the first cavity 1131.

[0053] Specifically, the first end of the second cavity 1132 is connected with the second end of the first cavity 1131 to make the second cavity 1132 in communication with the first cavity 1131. In this way, when the second barrel section 112 is connected with the first barrel section 111 to enclose the barrel cavity 113, the second end of the first cavity 1131 and the first end of the second cavity 1132 are both located at the middle part of the barrel cavity 113, so that the inner diameter of the middle part of the barrel cavity 113 is smaller than the inner diameter of the two ends of the barrel cavity 113, and thus the Laval effect is more obvious when the gas flows through the barrel cavity 113.

[0054] As an optional embodiment, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the inner diameter of the first cavity 1131 gradually decreases in the direction from the first end of the first cavity 1131 to the second end of the first cavity 1131. In this way, the gas flowing through the first cavity 1131 experiences less resistance, so that the gas flows more smoothly, and thus the flow rate of the gas can be increased.

[0055] or the inner diameter of the second cavity 1132 gradually increases in the direction from the first end of the second cavity 1132 to the second end of the second cavity 1132. In this way, the gas flowing through the second cavity 1132 experiences less resistance, so that the gas flows more smoothly, and thus the flow rate of the gas can be increased.

[0056] As an optional embodiment, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the inner wall of the first cavity 1131 comprises a first conical surface 1111, and the included angle a between the generatrix of the first conical surface 1111 and the axis of the first barrel section 111 is in the range of 25°≤a≤35°. The inner wall of the second cavity 1132 comprises a second conical surface 1121, and the included angle β between the generatrix of the second conical surface 1121 and the axis of the second barrel section 112 is in the range of β<0.5a.

[0057] In this embodiment, the inner wall of the first cavity 1131 comprises the first tapered surface 1111, and the inner wall of the second cavity 1132 comprises the second tapered surface 1121. This makes the inner wall of the first cavity 1131 and the inner wall of the second cavity 1132 more smooth, so that the gas flowing through the barrel cavity 113 receives less resistance, and thus the gas flows more smoothly, so as to further accelerate the flow rate of the gas.

[0058] It is proved through multiple experiments that when the included angle α between the generatrix of the first tapered surface 1111 and the axis of the first barrel section 111 is in the range of 25°≤α≤35°, and the included angle β between the generatrix of the second tapered surface 1121 and the axis of the second barrel section 112 is in the range of β<0.5α, the gas flowing through the gas guide barrel 110 receives the least resistance.

[0059] It should be noted that the first tapered surface 1111 and the second tapered surface 1121 described above can be conical surfaces or pyramidal surfaces, and the embodiments of the present application do not limit this.

[0060] As an optional implementation, in some embodiments, referring to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 , the second end of the first barrel section 111 is provided with a connecting groove 1112, and the first end of the second barrel section 112 is provided with a connecting protrusion 1122. The connecting protrusion 1122 is detachably inserted into the connecting groove 1112. When the first barrel section 111 and the second barrel section 112 are connected through the connecting groove 1112 and the connecting protrusion 1122, the joint between the first barrel section 111 and the second barrel section 112 is a fold line joint. In this way, the gas in the barrel cavity 113 is less likely to flow out along the joint, so as to improve the air tightness of the gas guide barrel 110.

[0061] or the second end of the first barrel section 111 is provided with a connecting protrusion 1122, and the first end of the second barrel section 112 is provided with a connecting groove 1112. The connecting protrusion 1122 is detachably inserted into the connecting groove 1112. This technical feature produces the same technical effect as the above technical effect, and thus will not be described here.

[0062] As an optional implementation, in some embodiments, referring to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 , the connecting groove 1112 is an annular groove, and the connecting protrusion 1122 is an annular protrusion. The annular groove and the annular protrusion are shape-fitted and both extend along the circumference of the first barrel section 111.

[0063] Since the joint between the first cylinder segment 111 and the second cylinder segment 112 is a fold line joint when the first cylinder segment 111 and the second cylinder segment 112 are connected by the connecting groove 1112 and the connecting protrusion 1122, the gas in the cylinder cavity 113 is less likely to flow out along the joint. Since the connecting groove 1112 is an annular groove and the connecting protrusion 1122 is an annular protrusion, the annular groove and the annular protrusion both extend along the circumferential direction of the first cylinder segment 111. Thus, the gas tightness of the joint between the first cylinder segment 111 and the second cylinder segment 112 is improved along the circumferential direction of the first cylinder segment 111, and thus the gas tightness of the gas guide cylinder 110 is further improved.

[0064] Since the annular groove and the annular protrusion are shaped to match, i.e., the inner surface of the annular groove and the outer surface of the annular protrusion can be connected, when the first cylinder segment 111 and the second cylinder segment 112 are connected, the relative movement of the first cylinder segment 111 and the second cylinder segment 112 along the radial direction of the gas guide cylinder 110 is limited, and thus the connection between the first cylinder segment 111 and the second cylinder segment 112 is more secure.

[0065] As an optional implementation, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the first cylinder segment 111 and the second cylinder segment 112 are coaxially arranged, and the length of the first cylinder segment 111 is less than the length of the second cylinder segment 112.

[0066] When the gas guide cylinder 110 is exhausting, the gas flows into the first end of the first cylinder segment 111 and flows out of the second end of the second cylinder segment 112. When the length of the first cylinder segment 111 is less than the length of the second cylinder segment 112, the flow rate of the gas flowing out of the second end of the second cylinder segment 112 is greater, and thus the flow rate of the gas is further increased.

[0067] As an optional implementation, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7The first end of the first cylinder segment 111 is provided with a flange plate 1113 which is protruded in a direction away from the axis of the first cylinder segment 111. On the first surface of the flange plate 1113, the distance between the protruded end of the flange plate 1113 and the second end of the first cylinder segment 111 is less than the distance between the fixed end of the flange plate 1113 and the second end of the first cylinder segment 111. The first surface of the flange plate 1113 refers to the surface of the flange plate 1113 which is away from the second end of the first cylinder segment 111.

[0068] When the gas is discharged through the gas guide cylinder 110, the gas flows into the first end of the first cylinder segment 111 and flows out of the second end of the second cylinder segment 112. When the flange plate 1113 is arranged at the first end of the first cylinder segment 111, the first surface of the flange plate 1113 can guide the gas flow, so that more gas can flow into the first end of the first cylinder segment 111, and the flow rate of the gas in the gas guide cylinder 110 can be increased. When the gas guide cylinder 110 is used for discharging gas, the speed of discharging gas can be increased.

[0069] It should be noted that the first surface of the flange plate 1113 can be an inclined plane or an arc surface, and the embodiments of the present application do not limit the same.

[0070] As an optional embodiment, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the first cylinder segment 111 comprises a first arc surface segment 1114 which is located at the second end of the first cylinder segment 111. The second cylinder segment 112 comprises a second arc surface segment 1123 which is located at the first end of the second cylinder segment 112. The first arc surface segment 1114 and the second arc surface segment 1123 have the same curvature and are detachably and smoothly connected.

[0071] In this way, the inner surface of the first cylinder segment 111 and the inner surface of the second cylinder segment 112 are smoothly connected, and the gas flowing through the cylinder cavity 113 has less resistance, so that the gas flows more smoothly, and the flow rate of the gas can be further increased.

[0072] As an optional embodiment, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7The first cylinder segment 111 is provided with a first heat insulation groove 1115, and the first heat insulation groove 1115 is arranged on the cylinder wall of the first cylinder segment 111. The first heat insulation groove 1115 can play a heat insulation role, so that the heat loss of the gas can be reduced when the gas flows through the gas guide cylinder 110, thereby playing a role of energy saving.

[0073] The second cylinder segment 112 is provided with a second heat insulation groove 1124, and the second heat insulation groove 1124 is arranged on the cylinder wall of the second cylinder segment 112. The technical features and the technical effects generated by the above technical features are the same, and therefore will not be described here.

[0074] Since the opening of the second heat insulation groove 1124 is located at the first end of the second cylinder segment 112, and the opening of the first heat insulation groove 1115 is located at the second end of the first cylinder segment 111. In this way, when the gas guide cylinder 110 is provided with the first heat insulation groove 1115 and the second heat insulation groove 1124 at the same time, the first heat insulation groove 1115 and the second heat insulation groove 1124 can be connected to form a heat insulation cavity, thereby improving the heat insulation capacity of the gas guide cylinder 110, and further improving the energy saving effect of the gas guide cylinder 110.

[0075] As an optional implementation, in some embodiments, referring to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the first heat insulation groove 1115 and the second heat insulation groove 1124 are annular grooves, and the annular grooves extend along the circumference of the first cylinder segment 111.

[0076] In this way, the cylinder cavity 113 of the gas guide cylinder 110 can be wrapped in the annular groove, thereby reducing the heat loss of the gas in the cylinder cavity 113, further improving the heat insulation capacity of the gas guide cylinder 110, and further improving the energy saving effect of the gas guide cylinder 110.

[0077] As an optional implementation, in some embodiments, referring to Figure 1 、 Figure 8 、 ​ 、 ​ 、 ​ 、 ​ and ​ , the thermal conductivity of the first cylinder segment 111 is less than 150 W / (m·K). In this way, the heat loss of the gas in the cylinder cavity 113 through the first cylinder segment 111 can be reduced, the heat insulation capacity of the first cylinder segment 111 is further improved, and the energy saving effect of the gas guide cylinder 110 is further improved.

[0078] Or the thermal conductivity of the second cylinder segment 112 is less than 150 W / (m·K). In this way, the heat dissipated by the gas in the cylinder cavity 113 through the second cylinder segment 112 can be reduced, further improving the heat insulation capability of the second cylinder segment 112, so as to further improve the energy saving effect of the gas guide cylinder 110.

[0079] It should be noted that the materials of the first cylinder segment 111 and the second cylinder segment 112 described above can be ceramic or stone, or other materials with relatively low thermal conductivity, and the embodiments of the present application do not limit this. When the material is ceramic, it can be boron nitride ceramic or aluminum oxide ceramic, and the embodiments of the present application do not limit this.

[0080] Referring to ​ and ​ The embodiments of the present application also provide a single crystal furnace 100, which comprises a furnace body 120 and any of the above-mentioned gas guide cylinders 110, and the gas guide cylinder 110 is arranged at the bottom of the furnace body 120. In the gas guide cylinder 110, the first end of the first cylinder segment 111 is located in the furnace body 120, and the second end of the second cylinder segment 112 is located outside the furnace body 120.

[0081] In the embodiments, the gas guide cylinder 110 is used to discharge gaseous oxides generated in the furnace body 120. Since the gas guide cylinder 110 comprises the first cylinder segment 111 and the second cylinder segment 112, the first cylinder segment 111 and the second cylinder segment 112 jointly enclose the cylinder cavity 113. In this way, the gas can flow from the first end of the cylinder cavity 113 to the second end of the cylinder cavity 113, and then be discharged through the gas guide cylinder 110. Since the inner diameter of the middle part of the cylinder cavity 113 is smaller than the inner diameters of the two ends of the cylinder cavity 113 in the direction from the first cylinder segment 111 to the second cylinder segment 112. In this way, the gas can generate a Laval effect when flowing in the cylinder cavity 113, thereby increasing the flow rate of the gas in the gas guide cylinder 110.

[0082] Since the gas guide cylinder 110 is arranged at the bottom of the furnace body 120. In the gas guide cylinder 110, the first end of the first cylinder segment 111 is located in the furnace body 120, and the second end of the second cylinder segment 112 is located outside the furnace body 120. In this way, the flow rate of the gaseous oxides in the gas guide cylinder 110 can be accelerated, so that the gaseous oxides are difficult to gather and adhere to the inner wall of the gas guide cylinder 110, thereby reducing the impurities generated by the reaction between the gaseous oxides and the material of the gas guide cylinder 110, so as to avoid the gas guide cylinder 110 being blocked. In addition, the corrosion effect of the gaseous oxides on the inner wall of the gas guide cylinder 110 can be reduced, so as to prolong the service life of the gas guide cylinder 110.

[0083] Since the flow rate of the gaseous oxide in the gas guide cylinder 110 is increased, and the gas guide cylinder 110 is arranged at the bottom of the furnace body 120. In this way, the heat at the bottom of the furnace body 120 can be timely delivered to the outside of the furnace body 120, thereby avoiding the temperature at the bottom of the furnace body 120 being too high, and also being able to control the temperature difference between the bottom of the furnace body 120 and the top of the furnace body 120 within a suitable range, so as to ensure that the temperature gradient in the furnace body 120 is within a suitable range. In this way, the crystal growth rate in the furnace body 120 can be stabilized, and the thermal stress in the crystal can be avoided, so as to improve the final quality of the crystal.

[0084] Since the cylinder wall of the gas guide cylinder 110 has good heat insulation effect, so that when the gaseous oxide flows through the gas guide cylinder 110, less heat is transferred from the cylinder wall of the gas guide cylinder 110 to the bottom of the furnace body 120, thereby further avoiding the temperature at the bottom of the furnace body 120 being too high, and further ensuring that the temperature gradient in the furnace body 120 is within a suitable range, so as to further improve the final quality of the crystal.

[0085] Since the second cylinder segment 112 is detachably connected to the first cylinder segment 111. In this way, when the gas guide cylinder 110 is installed at the bottom of the furnace body 120, one of the first cylinder segment 111 and the second cylinder segment 112 can be installed at the bottom of the furnace body 120 first, and then the other is connected with the one that has been installed. Compared with the integrated design of the gas guide cylinder 110, the gas guide cylinder 110 can be more convenient and easy to operate during installation, thereby improving the installation efficiency of the gas guide cylinder 110.

[0086] It should be noted that the "one embodiment", "embodiment", "exemplary embodiment", "some embodiments" and the like mentioned in the specification mean that the described embodiment can include a particular feature, structure or characteristic, but not necessarily every embodiment. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a particular feature, structure or characteristic is described in connection with an embodiment, it is within the knowledge of those skilled in the art to implement such a feature, structure or characteristic in connection with other embodiments described explicitly or implicitly.

[0087] Generally, the terms should be understood at least partially by the context of use. For example, at least partially according to the context, the term "one or more" used in the text can be used to describe any feature, structure or characteristic of singular meaning, or can be used to describe a combination of features, structures or characteristics of plural meaning. Similarly, at least partially according to the context, terms such as "a" or "said" can be understood to convey singular usage or convey plural usage.

[0088] It should be readily understood that "on," "over," and "above" in the present application are to be interpreted in the broadest context, such that "on" means not only "directly on" but also includes the meaning of "on" with intervening features or layers therebetween, and "over" or "above" includes not only the meaning of "over" or "above" but also the meaning of "over" or "above" without intervening features or layers therebetween, i.e., directly on.

[0089] In addition, spatially relative terms, such as "beneath", "below", "lower", "above", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. The devices can be otherwise oriented (rotated 90° or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0090] Finally, it should be noted that the above-described embodiments are merely intended for describing and illustrating, not limiting, the technical solutions of the present application; even though the present application has been described in detail with reference to the above-described embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the above-described embodiments, or equivalently replace some or all of the technical features thereof; and such modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A gas duct, characterized in that The application relates to a cylinder body, which comprises: a first cylinder segment (111); a second cylinder segment (112) detachably connected to the first cylinder segment (111); the first cylinder segment (111) and the second cylinder segment (112) jointly enclose a cylinder cavity (113); the inner diameter of the middle part of the cylinder cavity (113) is smaller than the inner diameter of the two ends of the cylinder cavity (113) in the direction from the first cylinder segment (111) to the second cylinder segment (112).

2. The air guide cylinder of claim 1, wherein, The cylinder cavity (113) comprises a first cavity (1131) enclosed by the first cylinder segment (111); the inner diameter of the first end of the first cavity (1131) is larger than the inner diameter of the second end of the first cavity (1131) in the direction from the first cylinder segment (111) to the second cylinder segment (112).

3. The air guide cylinder of claim 2, wherein, The cylinder cavity (113) comprises a second cavity (1132) enclosed by the second cylinder segment (112); the inner diameter of the first end of the second cavity (1132) is smaller than the inner diameter of the second end of the second cavity (1132) in the direction from the first cylinder segment (111) to the second cylinder segment (112); the second cavity (1132) is in communication with the first cavity (1131).

4. The air guide cylinder of claim 3, wherein, The inner diameter of the first cavity (1131) gradually decreases in the direction from the first end of the first cavity (1131) to the second end of the first cavity (1131); and / or, the inner diameter of the second cavity (1132) gradually increases in the direction from the first end of the second cavity (1132) to the second end of the second cavity (1132).

5. The air guide cylinder of claim 4, wherein, The inner wall of the first cavity (1131) comprises a first conical surface (1111), the included angle alpha between the generatrix of the first conical surface (1111) and the axis of the first cylinder segment (111) is in the range of 25 DEG ≤ alpha ≤ 35 DEG; The inner wall of the second cavity (1132) comprises a second conical surface (1121), the included angle beta between the generatrix of the second conical surface (1121) and the axis of the second cylinder segment (112) is in the range of beta < 0.5 alpha.

6. A mouthpiece according to any one of claims 1 to 5, wherein, The second end of the first cylinder segment (111) is provided with a connecting groove (1112), and the first end of the second cylinder segment (112) is provided with a connecting protrusion (1122); or the second end of the first cylinder segment (111) is provided with the connecting protrusion (1122), and the first end of the second cylinder segment (112) is provided with the connecting groove (1112); the connecting protrusion (1122) is detachably inserted into the connecting groove (1112).

7. The air guide cylinder of claim 6, wherein, The connecting groove (1112) is an annular groove, and the connecting protrusion (1122) is an annular protrusion; the annular groove and the annular protrusion are shape-fitted and extend along the circumference of the first cylinder segment (111).

8. A mouthpiece according to any one of claims 1 to 5, wherein, The first cylinder segment (111) and the second cylinder segment (112) are coaxially arranged, and the length of the first cylinder segment (111) is smaller than the length of the second cylinder segment (112).

9. A mouthpiece according to any one of claims 1 to 5, wherein, The first end of the first cylinder segment (111) is provided with a flange plate (1113) which is projected in a direction away from the axis of the first cylinder segment (111); On the first surface of the flange plate (1113), the distance between the projected end of the flange plate (1113) and the second end of the first cylinder segment (111) is less than the distance between the fixed end of the flange plate (1113) and the second end of the first cylinder segment (111); the first surface of the flange plate (1113) refers to the surface of the flange plate (1113) which is away from the second end of the first cylinder segment (111).

10. A single crystal furnace characterized by comprising: The furnace body (120) and the gas guide cylinder according to any one of claims 1-9 are included, and the gas guide cylinder is arranged at the bottom of the furnace body (120); In the gas guide cylinder, the first end of the first cylinder segment (111) is located in the furnace body (120), and the second end of the second cylinder segment (112) is located outside the furnace body (120).

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