Support ring and single crystal furnace

Abstract

The utility model provides a support ring and a single crystal furnace, and relates to the technical field of monocrystalline silicon production. The supporting ring is used for the single crystal furnace and comprises a supporting ring body, a first positioning block and a second positioning block, a first clamping groove and a second clamping groove are formed in the supporting ring body, the first positioning block is clamped in the first clamping groove, the second positioning block is clamped in the second clamping groove, a first positioning hole is formed in the first positioning block, and a second positioning hole is formed in the second positioning block. The first positioning block is provided with a first positioning hole, the second positioning block is provided with a second positioning hole, and the first positioning hole and the second positioning hole are symmetrically distributed in the two sides of the center shaft of the supporting ring body so that the supporting ring can be positioned through the first positioning hole and the second positioning hole. The utility model provides a support ring and a single crystal furnace, which are not easy to damage and low in maintenance cost.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal silicon production technical field especially, relate to a kind of support ring and single crystal furnace. BACKGROUND

[0002] Support ring in single crystal furnace mainly has following: one is to provide mechanical support, load heat shield, flow guide cylinder and other components, guarantee structure integrity;Second is to assist heat management, maintain heat field uniform by virtue of heat insulation performance, guide heat flow, create suitable heat environment for crystal growth;Third is involved in gas management, guide gas flow by specific shape, cooperate sealing, stabilize gas environment in furnace, meet the demand of crystal growth.

[0003] The existing support ring is generally integrally formed, and a positioning hole for positioning and calibration is formed therein. During maintenance or installation and debugging, an industrial camera can be used to take a photo of the positioning hole, so as to measure the position and size of the support ring, thereby ensuring subsequent processes.

[0004] However, the existing support ring is easy to be damaged, and the maintenance cost is high after being damaged. UTILITY MODEL CONTENTS

[0005] In order to solve at least one problem mentioned in the background art, the utility model provides a support ring and a single crystal furnace, which are not easy to be damaged and have low maintenance cost.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] In a first aspect, the utility model provides a support ring for a single crystal furnace, comprising a support ring body, a first positioning block and a second positioning block. First and second clamping grooves are formed in the support ring body. The first positioning block is clamped in the first clamping groove, and the second positioning block is clamped in the second clamping groove. The first positioning block has a first positioning hole, and the second positioning block has a second positioning hole. The first and second positioning holes are symmetrically distributed on both sides of the central axis of the support ring body, so as to position the support ring through the first and second positioning holes.

[0008] As an optional implementation, the first clamping groove penetrates the axial direction of the support ring body, and the first clamping groove has a notch towards the center of the support ring body.

[0009] As an optional implementation, the first clamping groove comprises a stepped groove, and the stepped groove is located on the upper surface of the support ring body. The first positioning block comprises a main body and a clamping portion extending towards both sides of the main body. The clamping portion is clamped at the stepped groove.

[0010] As an optional implementation, the stepped groove and the inner ring edge of the support ring body have a spacing in the radial direction of the support ring body, and the length of the stepped groove in the circumferential direction of the support ring body is greater than the length of the notch in the circumferential direction of the support ring body.

[0011] As an optional implementation, a positioning groove is formed on the body, the positioning groove is located at the notch, and the first positioning hole is located at the groove bottom of the positioning groove.

[0012] As an optional implementation, the inner wall of the positioning groove is in an arc surface structure.

[0013] As an optional implementation, the first positioning block and the second positioning block are graphite blocks.

[0014] As an optional implementation, the first clamping groove and the second clamping groove are symmetrically arranged about the center of the support ring body.

[0015] As an optional implementation, the first positioning block and the second positioning block are of the same structure.

[0016] In a second aspect, the utility model also provides a single crystal furnace, including the support ring in the first aspect.

[0017] The support ring provided by the utility model is used for a single crystal furnace, includes a support ring body, a first positioning block and a second positioning block, the support ring body is provided with a first clamping groove and a second clamping groove, the first positioning block is clamped in the first clamping groove, the second positioning block is clamped in the second clamping groove, the first positioning block is provided with a first positioning hole, the second positioning block is provided with a second positioning hole, and the first positioning hole and the second positioning hole are symmetrically distributed on both sides of the central axis of the support ring body to position the support ring through the first positioning hole and the second positioning hole.

[0018] The support ring provided by the utility model clamps the first positioning block with the first positioning hole in the first clamping groove and clamps the second positioning block with the second positioning hole in the second clamping groove by forming the first clamping groove and the second clamping groove on the support ring body. When the support ring body is locally deformed due to high temperature, since the first positioning hole and the second positioning hole are not formed on the support ring body but on the first positioning block and the second positioning block that are detachably arranged with the first clamping groove and the second clamping groove, the stress in the support ring body hardly directly affects the structure at the first positioning hole and the second positioning hole. The internal stress generated after the first positioning block and the second positioning block are deformed by heat can be released through the gap between the positioning block and the support ring, damage from the first positioning hole and the second positioning hole is avoided, the damage probability of the support ring is reduced, and even when the support ring is damaged from the first positioning hole or the second positioning hole, only the first positioning block or the second positioning block needs to be replaced, the entire support ring does not need to be replaced, and the maintenance cost is greatly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0020] Figure 1 The overall structure schematic diagram of the support ring provided by the embodiment of the present application is shown in the figure.

[0021] Figure 2 The exploded view of the support ring provided by the embodiment of the present application is shown in the figure.

[0022] Figure 3 The structure schematic diagram of the support ring body in the support ring provided by the embodiment of the present application is shown in the figure.

[0023] Figure 4 The enlarged view of A in the figure. Figure 3

[0024] Figure 5 The structure schematic diagram of the first positioning block in the support ring provided by the embodiment of the present application is shown in the figure.

[0025] Figure 6 The top view of the figure. Figure 5

[0026] Explanation of reference signs:

[0027] 100 - support ring;

[0028] 110 - support ring body;

[0029] 111 - first clamping groove;

[0030] 1111 - notch;

[0031] 1112 - step groove;

[0032] 112 - second clamping groove;

[0033] 120 - first positioning block;

[0034] 121 - main body;

[0035] 1211 - positioning groove;

[0036] 1212 - first positioning hole;

[0037] 122 - clamping part;

[0038] 130 - second positioning block; ​​

[0039] 131 - second positioning hole. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0041] In the application, the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "transverse", "longitudinal" and the like are the orientations or positional relationships shown based on the drawings. These terms are mainly used for better describing the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0042] In addition, in addition to being used to indicate the orientations or positional relationships, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. Those skilled in the art can understand the specific meanings of these terms in the present application according to the specific circumstances.

[0043] In addition, the terms "mount", "set", "provided with", "connected", "connected" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication between two devices, elements or components. Those skilled in the art can understand the specific meanings of the above-mentioned terms in the present application according to the specific circumstances.

[0044] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific types and structures can be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, the meaning of "multiple" is two or more.

[0045] The existing support ring in a single crystal furnace is generally integrally formed, and a positioning hole for positioning and calibration is formed on the support ring. When overhauling or installing and debugging, an industrial camera can be used to take a photo of the positioning hole, so that the position and size of the support ring are measured to ensure subsequent processes. Since the structure at the positioning hole is relatively weak, the support ring is prone to cracking from the positioning hole after the support ring is deformed by heat, and the damaged support ring needs to be replaced, resulting in high maintenance cost.

[0046] Therefore, the utility model provides a kind of support ring, including support ring main body, first locating block and second locating block, first clamping slot and second clamping slot are formed on support ring main body, first locating block is clamped in first clamping slot, second locating block is clamped in second clamping slot, first locating hole is on first locating block, second locating hole is on second locating block, first locating hole and second locating hole are symmetrically distributed on the center axis of support ring main body two sides.It can be understood that when the support ring main body is locally deformed due to high temperature, since the first locating hole and the second locating hole are not formed on the support ring main body, but are formed on the first locating block and the second locating block which are detachably arranged with the first clamping slot and the second clamping slot, the stress in the support ring main body cannot directly affect the structure at the first locating hole and the second locating hole. The internal stress generated by the first locating block and the second locating block after being deformed by heat can be released to a certain extent through the gap between the locating block and the support ring, avoiding damage from the first locating hole and the second locating hole, reducing the damage probability of the support ring, and even if the support ring is damaged from the first locating hole or the second locating hole, only the first locating block or the second locating block needs to be replaced, without replacing the entire support ring, greatly reducing the maintenance cost.

[0047] Figure 1 The overall structure diagram of the support ring provided by the utility model embodiment is shown in the figure. Figure 2 The exploded view of the support ring provided by the utility model embodiment is shown in the figure. Figure 3 The structure diagram of the support ring main body in the support ring provided by the utility model embodiment is shown in the figure. Figure 4 The enlarged view of position A in the figure. Figure 3 The structure diagram of the first locating block in the support ring provided by the utility model embodiment is shown in the figure. Figure 5 The top view of the support ring provided by the utility model embodiment is shown in the figure. Figure 6 The top view of the support ring provided by the utility model embodiment is shown in the figure. Figure 5 The top view of the support ring provided by the utility model embodiment is shown in the figure.

[0048] Reference can be made to Figures 1 to 6The utility model embodiment provides a kind of support ring 100, for single crystal furnace, including support ring main body 110, first positioning block 120 and second positioning block 130, first clamping groove 111 and second clamping groove 112 are set up on support ring main body 110, first positioning block 120 is clamped in first clamping groove 111, second positioning block 130 is clamped in second clamping groove 112, first positioning hole 1212 is on first positioning block 120, second positioning hole 131 is on second positioning block 130, first positioning hole 1212 and second positioning hole 131 are symmetrically distributed on the center axis of support ring main body 110 two sides, to be positioned to support ring 100 by first positioning hole 1212 and second positioning hole 131.

[0049] The utility model embodiment provides support ring 100 by setting up first clamping groove 111 and second clamping groove 112 on support ring main body 110, first positioning block 120 with first positioning hole 1212 is clamped in first clamping groove 111, and second positioning block 130 with second positioning hole 131 is clamped in second clamping groove 112.When support ring main body 110 occurs local deformation due to high temperature, since first positioning hole 1212 and second positioning hole 131 are not set up on support ring main body 110, but are set up on first positioning block 120 and second positioning block 130 with first clamping groove 111, second clamping groove 112 detachable setting, therefore, the stress in support ring main body 110 is difficult to directly affect the structure at first positioning hole 1212 and second positioning hole 131.And the internal stress generated after first positioning block 120 and second positioning block 130 are heated and deformed can be released to a certain extent through the gap between positioning block and support ring 100, avoid damage from first positioning hole 1212 and second positioning hole 131, reduce the damage probability of support ring 100, and even when support ring 100 is damaged from first positioning hole 1212 or second positioning hole 131, only need to replace first positioning block 120 or second positioning block 130, no need to replace entire support ring 100, greatly reduce maintenance cost.

[0050] In the above embodiments, the first clamping groove 111 can be axially through the support ring body 110, and the first clamping groove 111 has a notch 1111 towards the center direction of the support ring body 110. In this way, the first positioning block 120 can be directly inserted into the clamping groove along the axial direction, which is simple to operate and does not require complex angle adjustment, thereby improving the installation efficiency. The notch 1111 in the center direction not only provides additional operating space and visual guidance, but also allows the installer to clearly see the fitting condition, thereby reducing the probability of installation failure. At the same time, the axial through ensures that the first positioning block 120 is accurately and stably positioned in the axial direction in the clamping groove and is not easily axially displaced. The notch 1111 can be used as a positioning mark to make the first positioning block 120 more evenly stressed and enhance the installation stability. This clamping groove structure also allows the first positioning block 120 to have buffering and self-adapting capabilities when subjected to external force or thermal stress. For example, when the support ring body 110 deforms due to temperature changes, the first positioning block 120 can be fine-tuned in the clamping groove and adapt to the deformation through the notch 1111 and the axial space, without affecting the positioning function and enhancing the positioning adaptability. In terms of maintenance, the axial through makes the first positioning block 120 easy to disassemble, and the first positioning block 120 can be directly taken out along the axial direction when repaired or replaced. The notch 1111 also provides convenience for the use of disassembly tools and reduces the difficulty of disassembly. The convenient disassembly allows the first positioning block 120 to be quickly replaced, and only the positioning block needs to be replaced instead of the entire support ring 100, thereby greatly reducing the maintenance cost. In addition, this structure easily releases the internal stress of the support ring body 110. When the support ring body 110 generates internal stress due to high temperature and other factors, the through and notch 1111 structure of the first clamping groove 111 provides space and a way for stress release, thereby avoiding stress concentration from damaging the support ring 100 and further improving the reliability and service life of the support ring 100.

[0051] In the above embodiment, the first clamping groove 111 can include a stepped groove 1112 located on the upper surface of the support ring body 110 (the surface facing upward when the support ring 100 is installed in the single crystal furnace), the first positioning block 120 includes a main body 121 and a clamping portion 122 extending from both sides of the main body 121, and the clamping portion 122 is clamped at the stepped groove 1112. It can be understood that the cooperation of the stepped groove 1112 and the clamping portion 122 can provide precise positioning for the first positioning block 120. When assembling, the operator can easily and accurately embed the clamping portion 122 of the first positioning block 120 in the stepped groove 1112 according to the structural characteristics of the stepped groove 1112, so that the position of the first positioning block 120 on the support ring body 110 is accurately fixed. Such precise positioning not only ensures the positional accuracy of the first positioning hole 1212, laying a foundation for subsequent precise positioning of the support ring 100 using the first positioning hole 1212, but also enables the first positioning block 120 to remain stable and not easily displaceable due to external disturbances such as vibration, thermal expansion and contraction, etc. during the operation of the single crystal furnace. Secondly, the design of the stepped groove 1112 greatly simplifies the installation process. Compared with the ordinary clamping groove structure, the stepped groove 1112 has obvious guidance, and the operator only needs to gently push the clamping portion 122 of the first positioning block 120 along the profile of the stepped groove 1112 to complete the installation, without the need for complex alignment operations and repeated debugging, effectively saving installation time and labor costs. In addition, the clamping structure of the stepped groove 1112 and the clamping portion 122 can also effectively disperse the stress. In the high-temperature and high-pressure working environment of the single crystal furnace, the support ring 100 bears stress from all directions. At this time, the clamping portion 122 and the stepped groove 1112 are closely fitted, and the stress is evenly dispersed to the entire contact surface, avoiding local stress concentration and causing damage to the components, thereby prolonging the service life of the first positioning block 120 and the support ring body 110.

[0052] In the above embodiment, in the radial direction of the support ring body 110, the stepped groove 1112 and the inner ring edge of the support ring body 110 can have a spacing, and the length of the stepped groove 1112 along the circumferential direction of the support ring body 110 is greater than the length of the notch 1111 along the circumferential direction of the support ring body 110. In this way, the precise fitting of the limiting portion and the stepped groove 1112 can be further ensured.

[0053] In the above embodiment, the main body 121 can be provided with a positioning groove 1211, which is located at the gap 1111, and the first positioning hole 1212 is located at the bottom of the positioning groove 1211. It can be understood that the positioning groove 1211 can provide an additional protective barrier for the first positioning hole 1212. When the single crystal furnace encounters thermal expansion and contraction, strong vibration and other complex working conditions, the positioning groove 1211 located at the gap 1111 can buffer and disperse the impact of external force on the first positioning hole 1212 by its own structure. Even if the surrounding environment changes dramatically, the first positioning hole 1212 can still be stably fixed at the bottom of the groove under the protection of the positioning groove 1211, ensuring the stability of the positioning reference of the support ring 100.

[0054] In the above embodiment, the inner wall of the positioning groove 1211 can be arc-shaped. When external impact force acts on the arc-shaped inner wall of the positioning groove 1211, the arc surface will not cause stress to concentrate at the contact point instantaneously, but will uniformly disperse and conduct the impact force to the entire arc surface along the tangent direction according to its own geometric characteristics. In this way, stress will not concentrate in a local area, effectively reducing the risk of local over-stress. In this way, the first positioning hole 1212 can avoid bearing excessive concentrated stress, further reducing the risk of damage to the first positioning hole 1212.

[0055] In the above embodiment, the first positioning block 120 and the second positioning block 130 can be graphite blocks. The graphite structure of the positioning block has high temperature resistance, high melting point, and is not easy to deform or melt at high temperatures, can maintain its structural integrity, and ensure accurate positioning. In addition, graphite can be easily machined, which can reduce production costs.

[0056] In the above embodiment, the first clamping groove 111 and the second clamping groove 112 can be symmetrically arranged about the center of the support ring main body 110. In this way, the operator can quickly locate the clamping groove position corresponding to the first and second positioning blocks 130, and when the positioning block is clamped into the clamping groove, there is no need for complex alignment adjustment, which greatly improves the assembly efficiency and effectively reduces the installation errors caused by human operation errors, ensuring that the support ring 100 has precision from the beginning of assembly. In addition, the symmetrically arranged clamping grooves can evenly share external forces from all directions. When external stress impacts, the two clamping grooves work together to avoid tilting and deformation of the support ring 100 due to uneven stress.

[0057] In the above embodiment, the first positioning block 120 and the second positioning block 130 can have the same structure, thereby improving the production efficiency of the first positioning block 120 and the second positioning block 130 and further reducing production costs.

[0058] Furthermore, the utility model discloses a single crystal furnace, including the support ring 100 in above -mentioned embodiment, this support ring 100 includes support ring main part 110, first locating block 120 and second locating block 130, the first clamping groove 111 and the second clamping groove 112 are seted up on support ring main part 110, first locating block 120 is connected in the first clamping groove 111, second locating block 130 is connected in the second clamping groove 112, first locating hole 1212 has on first locating block 120, second locating hole 131 has on second locating block 130, and first locating hole 1212 and second locating hole 131 are distributed on the center axis both sides of support ring main part 110 symmetry. When the local deformation of support ring main part 110 occurs due to high temperature, because first locating hole 1212 and second locating hole 131 are not seted up on support ring main part 110, but are seted up on first locating block 120 and second locating block 130 with the first clamping groove 111, the second clamping groove 112 detachable setting, therefore, the stress in support ring main part 110 is difficult to directly influence the structure at first locating hole 1212 and second locating hole 131. And the internal stress of first locating block 120 and second locating block 130 after heat deformation can be released to a certain extent through the gap between the locating block and support ring 100, avoid damaging from first locating hole 1212 and second locating hole 131, reduce the damage probability of support ring 100, and even when support ring 100 is damaged from first locating hole 1212 or second locating hole 131, only need to replace first locating block 120 or second locating block 130, do not need to replace the whole support ring 100, greatly reduce the maintenance cost, improve the reliability and maintenance cost of single crystal furnace in the embodiment.

[0059] Finally, it needs to be pointed out that: the above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A support ring, characterized by, A support ring for a single crystal furnace, comprising a support ring body, a first positioning block and a second positioning block, a first clamping groove and a second clamping groove are formed on the support ring body, the first positioning block is clamped in the first clamping groove, the second positioning block is clamped in the second clamping groove, the first positioning block has a first positioning hole, the second positioning block has a second positioning hole, the first positioning hole and the second positioning hole are symmetrically distributed on both sides of the central axis of the support ring body, and the support ring is positioned through the first positioning hole and the second positioning hole.

2. The support ring of claim 1, wherein The first clamping groove penetrates the axial direction of the support ring body, and the first clamping groove has a gap towards the center direction of the support ring body.

3. The support ring of claim 2, wherein, The first clamping groove comprises a stepped groove, the stepped groove is located on the upper surface of the support ring body, the first positioning block comprises a main body and a clamping portion extending towards both sides of the main body, and the clamping portion is clamped at the stepped groove.

4. The support ring of claim 3, wherein, In the radial direction of the support ring body, the stepped groove and the inner ring edge of the support ring body have a spacing, and the length of the stepped groove along the circumferential direction of the support ring body is greater than the length of the gap along the circumferential direction of the support ring body.

5. The support ring of claim 4, wherein, A positioning groove is formed on the main body, the positioning groove is located at the gap, and the first positioning hole is located at the groove bottom of the positioning groove.

6. The support ring of claim 5, wherein, The inner wall of the positioning groove is in an arc surface structure.

7. The support ring of any one of claims 1-6, wherein, The first positioning block and the second positioning block are graphite blocks.

8. The support ring of any one of claims 1-6, wherein, The first clamping groove and the second clamping groove are symmetrically arranged about the center of the support ring body.

9. The support ring of any one of claims 1-6, wherein, The first positioning block and the second positioning block are the same in structure.

10. A single crystal furnace characterized by comprising: A support ring as claimed in any one of claims 1-9.

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