Diaphragm position adjusting device and semiconductor detection equipment

Abstract

The utility model provides a diaphragm position adjusting device and semiconductor detection equipment. The diaphragm position adjusting device comprises a guide rod frame, a guide rod, a diaphragm frame and a pushing assembly. A sliding hole is defined in the guide rod frame. The guide rod penetrates through the sliding hole in a sliding mode. The diaphragm frame is arranged at one end of the guide rod so as to move along with the guide rod. The pushing assembly is arranged on the guide rod frame and abuts against the peripheral wall of the guide rod in a contact mode so as to push the guide rod to enable the peripheral wall of the guide rod to abut against the hole wall of the sliding hole in a contact mode. According to the diaphragm position adjusting device, the repeated positioning precision during diaphragm adjustment is improved, and the effect of improving the detection quality is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor detection, especially to a diaphragm position adjusting device and semiconductor detection equipment. BACKGROUND

[0002] With the high -speed development of semiconductor industry, the demand of wafer manufacturing process to defect detection equipment is also more and more extensive. Since the features of wafer needing to be detected all belong to microscopic size, the commonly used optical detection equipment has been unable to meet the use requirement. The prior art usually uses electron beam detection equipment (for example scanning electron microscope) to detect wafer. In the electron beam detection equipment, to ensure that electron beam can clearly image, usually need to install diaphragm between electron beam pump source and the workpiece to be detected, ensure that the beam current at the center of detection electron beam passes through, and intercepts the rest of the electron.

[0003] In the related art, the diaphragm is adjustably installed in the electron beam detection equipment through the mechanical structure, so as to align the diaphragm hole with the center of the electron beam. However, due to the factors such as mechanical matching precision, manufacturing error, use wear, etc., the mechanical structure has poor repeatability when adjusting the position of the diaphragm, which further affects the detection quality. SUMMARY

[0004] In view of the above problems, the utility model is proposed to provide a diaphragm position adjusting device and semiconductor detection equipment to overcome the above problems or at least partially solve the above problems.

[0005] One object of the utility model is to improve the repeatability of the diaphragm position adjusting device when adjusting the diaphragm, and further improve the detection quality of the semiconductor.

[0006] Specifically, the utility model provides the following technical scheme:

[0007] A diaphragm position adjusting device, comprising a guide rod holder, a guide rod, a diaphragm holder and a pushing assembly.

[0008] The guide rod holder defines a sliding hole. The guide rod slidably passes through the sliding hole. The diaphragm holder is arranged at one end of the guide rod to move with the guide rod. The pushing assembly is arranged on the guide rod holder and in contact with the peripheral wall of the guide rod to push the guide rod so that the peripheral wall of the guide rod is in contact with the hole wall of the sliding hole.

[0009] Optionally, the pushing assembly comprises a pushing piece and a ball.

[0010] The pushing piece is mounted on the guide rod holder. The ball is rotatably mounted on the pushing piece. The ball is in contact with the guide rod.

[0011] Optionally, the pushing member is a cylinder and is perpendicular to the guide rod. The ball is mounted on one end of the pushing member close to the guide rod.

[0012] The pushing member is screwed to the guide rod holder.

[0013] Optionally, the pushing assembly further comprises a locking member configured to fix the pushing member to the guide rod holder.

[0014] Optionally, the locking member is a locking nut arranged outside the sliding hole. The pushing member is a screw rod. The locking nut is screwed to the pushing member and is in contact with the guide rod holder.

[0015] Optionally, the pushing member is a screw rod double-end stud.

[0016] Optionally, the diaphragm position adjusting device further comprises a horizontal pushing assembly.

[0017] The horizontal pushing assembly is arranged at one end of the guide rod holder and is connected to the guide rod to drive the guide rod to slide along the sliding hole. The pushing assembly is arranged at the end of the guide rod holder away from the horizontal pushing assembly.

[0018] Optionally, the guide rod holder is provided with a guide groove extending along the length direction of the guide rod, and the guide groove is communicated with the sliding hole and penetrates through the guide rod holder outwardly.

[0019] The guide rod is provided with a limiting column in the guide groove.

[0020] The pushing assembly is arranged between the guide groove and the horizontal pushing assembly.

[0021] Optionally, the guide rod holder comprises a sleeve and a connecting cylinder.

[0022] The sleeve defines the sliding hole, and the pushing assembly and the guide groove are arranged on the sleeve. The connecting cylinder is connected to one end of the sleeve, and the inner diameter of the connecting cylinder is larger than the diameter of the sliding hole. The horizontal pushing assembly is arranged at the end of the connecting cylinder away from the sleeve.

[0023] Optionally, the diaphragm position adjusting device further comprises a mounting holder, a side pushing motor and a side pushing pin assembly.

[0024] The mounting holder is provided with a rotating groove and a through hole connected to the bottom of the rotating groove. The groove surfaces of the rotating groove are on the same rotary surface. The end of the sleeve away from the connecting cylinder has a plug matched with the rotating groove, and the plug is inserted into the rotating groove. The guide rod passes through the through hole, and the diameter of the through hole is larger than the diameter of the guide rod.

[0025] The side pushing motor is arranged on the mounting frame, and an output shaft of the side pushing motor is in contact with the connecting cylinder on one side in the radial direction of the connecting cylinder.

[0026] The side pushing ejector pin assembly is arranged on the mounting frame and comprises a side pushing ejector pin and an elastic member. The side pushing ejector pin is coaxially arranged with the output shaft of the side pushing motor and is in contact with the connecting cylinder on the other side. The elastic member is configured to apply a force to move the side pushing ejector pin towards the connecting cylinder.

[0027] In another aspect, the application also provides a semiconductor detection device comprising an electron beam source, a diaphragm, a sample stage and the diaphragm position adjusting device. The electron beam source is configured to emit an electron beam to a semiconductor to be detected on the sample stage. The diaphragm is arranged on the diaphragm frame and is between the electron beam source and the sample stage.

[0028] The diaphragm position adjusting device of the utility model, diaphragm is arranged on diaphragm frame, through setting the push assembly between guide rod and sliding hole to form the push force, can force the contact of the circumferential wall of guide rod and one side hole wall of sliding hole, thereby reducing or avoiding the shaking or swinging of guide rod when sliding along the sliding direction, and further reducing the positioning deviation of diaphragm on diaphragm frame. The utility model improves the repeat positioning precision of diaphragm position adjusting device when adjusting diaphragm, and achieves the effect of improving detection quality.

[0029] The above and other objects, advantages and features of the present utility model will become more apparent from the following detailed description of the preferred embodiments thereof, when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0030] Some specific embodiments of the present utility model will be described in detail hereinafter with reference to the accompanying drawings, which are presented by way of illustration and not of limitation. Like reference numerals designate like elements or parts throughout the drawings. It should be understood by those skilled in the art that the drawings are not necessarily drawn to scale. In the drawings:

[0031] Figure 1 is a schematic longitudinal partial cross-section of the diaphragm position adjusting device according to one embodiment of the present utility model Figure 1 ;

[0032] Figure 2 is a schematic longitudinal partial cross-section of the diaphragm position adjusting device according to one embodiment of the present utility model Figure 2 ;

[0033] Figure 3 is Figure 1 a schematic enlarged view of part A in

[0034] Figure 4is a schematic longitudinal section view of a pushing assembly of the diaphragm position adjusting device according to one embodiment of the utility model;

[0035] Figure 5 is a schematic front view of a diaphragm frame of the diaphragm position adjusting device according to one embodiment of the utility model;

[0036] Figure 6 is a schematic structure view of a horizontal pushing motor of the diaphragm position adjusting device according to one embodiment of the utility model;

[0037] Figure 7 is a schematic structure view of a side pushing motor of the diaphragm position adjusting device according to one embodiment of the utility model;

[0038] Figure 8 is a schematic structure view of the semiconductor detection equipment according to one embodiment of the utility model.

[0039] List of reference signs:

[0040] 100, guide rod; 200, guide rod frame; 210, sleeve; 220, guide groove; 230, plug; 240, connecting cylinder; 250, limiting column; 300, diaphragm frame; 310, diaphragm mounting frame; 320, diaphragm strip; 400, pushing assembly; 410, pushing piece; 420, ball; 430, locking piece; 500, sliding hole; 600, mounting frame; 610, fixed mounting piece; 620, perforation; 630, mounting screw; 640, sealing copper pad; 650, rotating groove; 660, deformation sleeve; 700, horizontal pushing assembly; 710, horizontal pushing motor; 711, horizontal pushing output shaft; 720, adapter assembly; 730, second elastic piece; 740, first elastic piece; 750, first limiting snap ring; 760, second limiting snap ring; 810, side pushing motor; 811, cylindrical head push rod; 820, side pushing thimble assembly; 821, gland; 822, elastic piece; 823, side pushing thimble; 910, electron beam source; 920, electron beam; 930, scanning coil; 940, diaphragm; 950, detector; 960, sample table. DETAILED DESCRIPTION

[0041] The following will be described with reference to Figures 1 to 8The diaphragm position adjusting device and the semiconductor detection equipment are described in the embodiments of the present application. In the description of the embodiments, it should be understood that the terms "first", "second" are used only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include at least one of the features, that is, one or more of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited. When a certain feature "includes or contains" a certain or certain features, unless otherwise specifically described, it indicates that other features and can further include other features are not excluded.

[0042] Unless otherwise expressly specified and limited, the terms "provide", "mount", "connect", "connect", "fix", "couple" and other terms should be broadly understood, for example, can be fixedly connected, or can be detachably connected, or integrated; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0043] In addition, in the description of the embodiments, the first feature "above" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. That is, in the description of the embodiments, the first feature "above", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" or "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is less than the second feature in horizontal height.

[0044] In the description of the embodiments, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0045] Figure 1is a schematic longitudinal partial section of the diaphragm position adjusting device according to an embodiment of the utility model Figure 1 As shown in Figure 1 and with reference to Figures 2-8 The utility model embodiment provides a kind of diaphragm position adjusting device, including guide rod frame 200, guide rod 100, diaphragm frame 300 and push assembly 400.

[0046] Guide rod frame 200 is defined with sliding hole 500.Guide rod 100 can slidably pass through sliding hole 500.Diaphragm frame 300 is arranged at one end of guide rod 100, to move with guide rod 100.Push assembly 400 is arranged on guide rod frame 200, and with the contact of the peripheral wall of guide rod 100, to push guide rod 100 so that the peripheral wall of guide rod 100 is contacted with the hole wall of sliding hole 500.

[0047] Diaphragm position adjusting device can be applied in semiconductor detection equipment.Semiconductor detection equipment is usually based on electron beam to generate measurement image to carry out microscopic detection to semiconductor, and semiconductor detection equipment can include Scanning Electron Microscope (SEM for short), Transmission Electron Microscope (TEM for short) and the like.The technical scheme of the utility model embodiment is described below with the example of Scanning Electron Microscope.

[0048] Diaphragm position adjusting device can be installed at the lens barrel (also called electron optical system) of Scanning Electron Microscope, and diaphragm 940 can be arranged on diaphragm frame 300.When diaphragm 940 is aligned with the center of electron beam of Scanning Electron Microscope, the electrons of the center of electron beam can be allowed to pass through, and the electrons deviating from the center are prevented.Diaphragm 940 can also reduce the size of electron beam.

[0049] Diaphragm 940 and diaphragm frame 300 can be in the vacuum cavity of lens barrel, and guide rod frame 200 and push assembly 400 are on the atmospheric side outside vacuum cavity.Guide rod 100 is slidably arranged along sliding hole 500, and the sliding direction is the axis direction of sliding hole 500, that is, the length direction of guide rod 100.Guide rod 100 can drive diaphragm frame 300 to move in sliding direction when sliding along sliding direction, to adjust the position of diaphragm 940 in sliding direction.Exemplarily, sliding direction can be perpendicular to the main shaft of lens barrel, and sliding direction can coincide, approximately coincide or be parallel to the radial direction of lens barrel, that is, diaphragm 940 can stretch out to the side wall of vacuum cavity, and by moving in sliding direction, the distance of diaphragm 940 from the main shaft of lens barrel in radial direction is adjusted, to align with the main shaft of lens barrel in sliding direction.

[0050] The cross section of the sliding hole 500 can be circular, square, etc., which is not limited herein. Preferably, the cross section of the sliding hole 500 is circular, and the guide rod 100 is a round rod. When the guide rod 100 and the sliding hole 500 are strictly aligned, the axial direction of the guide rod 100 coincides with the axial direction of the sliding hole 500, that is, the axial direction of the guide rod 100 coincides with the sliding direction. In the prior art, in order to enable the guide rod 100 to smoothly slide in the sliding hole 500, the guide rod 100 and the sliding hole 500 are both pre-set with a certain fitting gap. During the manufacturing, assembling and using of the parts, a certain gap is also caused. The gap will cause the guide rod 100 to shake or swing when sliding, and cause the diaphragm 940 on the diaphragm frame 300 to form a certain position error, and the position error is mainly formed in a direction perpendicular to the sliding direction, which finally leads to poor repeatability of the diaphragm 940, and further affects the detection quality of the detection equipment.

[0051] To solve the above problems, the present embodiment is provided with the pushing assembly 400 to form a pushing force between the guide rod 100 and the guide rod frame 200. Exemplarily, one end of the pushing assembly 400 can be fixed on the guide rod frame 200 through screwing, welding, bonding, clamping, etc., and the other end can abut against the peripheral wall of the guide rod 100 through sliding or rolling, so as to push the guide rod 100 to make the peripheral wall of the guide rod 100 abut against the hole wall of one side of the sliding hole 500. Through pushing, the gap between the guide rod 100 and the hole wall of one side of the sliding hole 500 is reduced, so as to eliminate or reduce the shaking or swinging of the guide rod 100 when sliding, further eliminate or reduce the position error of the diaphragm 940 in the direction perpendicular to the sliding direction, and improve the detection quality of the detection equipment.

[0052] It should be understood that the pushing force formed by the pushing assembly 400 can be generated by a rigid member (for example, a pre-tightening force is formed when the pushing assembly 400 is installed), or can be generated by an elastic element (for example, a spring is arranged in the pushing assembly 400, the spring is in a compressed state, one end of the spring directly or indirectly abuts against the guide rod 100, and the other end directly or indirectly abuts against the guide rod frame 200, so as to form an elastic pushing force between the guide rod 100 and the guide rod frame 200), which can be selected as needed in actual use.

[0053] It should be noted that the diaphragm position adjusting device can be provided with one or more pushing assemblies 400. When the pushing assembly 400 is multiple, multiple pushing forces can be generated to form a resultant force, so as to force the guide rod 100 to closely abut against the hole wall of one side of the sliding hole 500, and further improve the reliability of the pushing assembly 400.

[0054] In some embodiments of the diaphragm position adjusting device of the present utility model, as shown in Figure 4 The pushing assembly 400 includes a pushing member 410 and a ball 420.

[0055] The pushing piece 410 is installed on the guide rod holder 200. The ball 420 is rotatably installed on the pushing piece 410. The ball 420 is in contact with the guide rod 100.

[0056] The pushing piece 410 can be connected to the guide rod holder 200 by screwing, welding, bonding, buckling, etc., for example, connected to the side wall of the sliding hole 500. The end of the pushing piece 410 close to the guide rod 100 can be provided with a spherical accommodating cavity with an opening to accommodate the ball 420 and allow the ball 420 to rotate freely. A lubricant can be used between the ball 420 and the spherical accommodating cavity to reduce friction and improve the service life of the ball 420.

[0057] In this embodiment, the ball 420 rolls against the side wall of the guide rod 100, and when the guide rod 100 moves in the sliding direction, the ball 420 rolls relative to the guide rod 100, which reduces the friction of the guide rod 100 and facilitates fine adjustment of the guide rod 100. On the other hand, it can reduce or avoid scratches on the guide rod 100, thereby affecting the repeated positioning accuracy of the diaphragm 940.

[0058] In some embodiments of the diaphragm position adjustment device of the utility model, a spring is arranged between the pushing piece 410 and the ball 420 to urge the ball 420 to abut against the guide rod 100 with a preset elastic force when the relative position of the pushing piece 410 and the guide rod 100 is unchanged. The pushing piece 410, the spring and the ball 420 form a ball plunger. The pushing piece 410 forms a shell of the ball plunger, one end of the shell is open, the spring is installed in the shell, one end of the spring abuts against the bottom of the shell, and the other end abuts against the ball 420 at the opening of the shell.

[0059] In some embodiments of the diaphragm position adjustment device of the utility model, as shown in Figure 3 The pushing piece 410 is in the form of a column and is perpendicular to the guide rod 100. The ball 420 is installed at the end of the pushing piece 410 close to the guide rod 100. The pushing piece 410 is screwed to the guide rod holder 200.

[0060] The pushing piece 410 is perpendicular to the guide rod 100, so that the force generated by the guide rod holder 200 on the pushing piece 410 is perpendicular to the sliding direction, and then the pushing force is transmitted to the guide rod 100 through the ball 420, which can improve the strength of the pushing force.

[0061] The pushing piece 410 is screwed to the guide rod holder 200, and the peripheral wall of the pushing piece 410 can be provided with threads, and the hole wall of the sliding hole 500 can be provided with a threaded hole. In this way, the size of the pushing force generated by the ball 420 on the guide rod 100 can be adjusted by rotating the pushing piece 410, and the pushing force can be kept within a predetermined range. This scheme is easy to manufacture and assemble, and the size of the pushing force can be easily adjusted.

[0062] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 3 The pushing assembly 400 further comprises a locking member 430, which is configured to fix the pushing member 410 to the guide rod holder 200.

[0063] In this embodiment, the locking member 430 is used to fix the pushing member 410 after the pushing assembly 400 is installed in place, preventing the pushing member 410 from rotating, moving or shaking. The locking member 430 can be a locking nut, a set screw or the like. When the locking member 430 is a set screw, it can be directly or indirectly threadedly connected to the guide rod holder 200, with the set screw end abutting against the side wall of the pushing member 410, thereby preventing the pushing member 410 from moving relative to the side wall of the sliding hole 500.

[0064] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 3 The locking member 430 is a locking nut, which is arranged outside the sliding hole 500. The pushing member 410 is a screw rod. The locking nut is threadedly connected to the pushing member 410 and in contact with the guide rod holder 200.

[0065] In this embodiment, the pushing member 410 is a screw rod, and the locking nut can be threadedly connected to the threads on the peripheral wall of the pushing member 410, and a friction force is formed on the contact surface between the locking nut and the outer wall of the sliding hole 500, thereby preventing the pushing member 410 from rotating relative to the hole wall of the sliding hole 500.

[0066] In some embodiments of the diaphragm position adjusting device of the utility model, the pushing member 410 is a screw rod double-end stud. In this way, the thread hole diameter of the sliding hole 500 and the thread hole diameter of the locking nut can be independently set according to actual needs, improving the connection quality of the pushing member 410.

[0067] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figures 1-2 The diaphragm position adjusting device further comprises a horizontal pushing assembly 700.

[0068] The horizontal pushing assembly 700 is arranged at one end of the guide rod holder 200 and connected to the guide rod 100 to drive the guide rod 100 to slide along the sliding hole 500. The pushing assembly 400 is arranged at the end of the guide rod holder 200 away from the horizontal pushing assembly 700.

[0069] The horizontal pushing assembly 700 is used to drive the guide rod 100 to move in the sliding direction. The horizontal pushing assembly 700 can comprise a horizontal pushing motor 710, which can be a linear push rod motor and can be installed at the end of the guide rod holder 200 away from the diaphragm holder 300 and drivingly connected to one end of the guide rod 100 to drive the guide rod 100 to move in the sliding direction.

[0070] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 3 The guide slot 220 extends along the length direction of the guide rod 100, is communicated with the sliding hole 500 and penetrates the guide rod frame 200 outward. The guide rod 100 is provided with a limiting column 250, and the limiting column 250 is in the guide slot 220. The pushing assembly 400 is arranged between the guide slot 220 and the horizontal pushing assembly 700.

[0071] The hole wall of the guide slot 220 is precisely matched with the limiting column 250, thereby preventing the guide rod 100 from rotating relative to the guide rod frame 200, and further improving the repeated positioning accuracy of the diaphragm frame 300.

[0072] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 3 The axial direction of the limiting column 250 is the same as the axial direction of the pushing piece 410. It needs to be understood that the side wall of the guide slot 220 forms limiting to the limiting column 250 when guiding the limiting column 250, thereby preventing the guide rod 100 from shaking in the direction perpendicular to the side wall of the guide slot 220, that is, the gap between the guide rod 100 and the sliding hole 500 can be eliminated or reduced in the direction. In the embodiment, by setting the axial direction of the limiting column 250 to be the same as the axial direction of the pushing piece 410, the guide slot 220 and the pushing piece 410 limit the guide rod 100 in two directions perpendicular to each other, thereby further preventing the guide rod 100 from shaking in the sliding hole 500 and improving the repeated positioning accuracy of the diaphragm 940.

[0073] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 2 The guide rod frame 200 comprises a sleeve 210 and a connecting barrel 240.

[0074] The sleeve 210 defines the sliding hole 500, and the pushing assembly 400 and the guide slot 220 are arranged on the sleeve 210. The connecting barrel 240 is connected to one end of the sleeve 210, and the inner diameter of the connecting barrel 240 is greater than the diameter of the sliding hole 500. The horizontal pushing assembly 700 is arranged at the end of the connecting barrel 240 away from the sleeve 210.

[0075] The sleeve 210 and the connecting cylinder 240 can be circular tubes. The connecting cylinder 240 can be welded or connected to the sleeve 210 by a fastener, or can be integrally formed with the sleeve 210. The horizontal pushing assembly 700 can include a horizontal pushing motor 710, an adapter assembly 720, and a second elastic member 730. The adapter assembly 720 is threadedly connected to a horizontal pushing output shaft 711 of the horizontal pushing motor 710 at one end, and is threadedly connected to the guide rod 100 at the other end, for accurately transmitting the movement of the horizontal pushing motor 710 to the guide rod 100. The second elastic member 730 is arranged between the guide rod holder 200 and the adapter assembly 720. Specifically, the second elastic member 730 can be a spring, one end of the spring can abut against a connecting section between the connecting cylinder 240 and the sleeve 210, and the other end can abut against the adapter assembly 720. The second elastic member 730 is in a compressed state, thus being able to provide a pre-tightening force for the adapter assembly 720, and being able to eliminate the threaded connection gap of the adapter assembly 720, to ensure the repeated positioning accuracy in the sliding direction. The inner diameter of the connecting cylinder 240 is greater than the diameter of the sliding hole 500, to provide a containing space for the adapter assembly 720 and the second elastic member 730.

[0076] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figures 1-3 The diaphragm position adjusting device further includes a mounting bracket 600, a side pushing motor 810, and a side pushing needle assembly 820.

[0077] The mounting bracket 600 is provided with a rotating groove 650 and a through hole 620 connected to the bottom of the rotating groove 650. The groove surface of the rotating groove 650 is on the same rotary surface. The end of the sleeve 210 away from the connecting cylinder 240 has a plug 230 matched with the rotating groove 650, and the plug 230 is inserted into the rotating groove 650. The end surface of the plug 230 is on the same rotary surface, and the rotary shafts of the end surface rotary surface of the plug 230 and the groove surface rotary surface of the rotating groove 650 are coaxial. When the guide rod 100 swings around the rotary shaft, the end surface of the plug 230 always adheres to the groove surface of the rotating groove 650, so that the rotating groove 650 limits the plug 230 and prevents the plug 230 from shaking. The groove surface of the rotating groove 650 and the end surface of the plug 230 are both cylindrical surfaces. The guide rod 100 passes through the through hole 620, and the diameter of the through hole 620 is greater than the diameter of the guide rod 100.

[0078] The side pushing motor 810 is arranged on the mounting bracket 600, and the output shaft of the side pushing motor 810 is in contact with the connecting cylinder 240 on one side in the radial direction of the connecting cylinder 240.

[0079] The side pushing plunger assembly 820 is arranged on the mounting frame 600 and has a side pushing plunger 823 and an elastic member 822. The side pushing plunger 823 is coaxially arranged with the output shaft of the side pushing motor 810 and is in contact with the connecting cylinder 240 on the other side of the connecting cylinder 240. The elastic member 822 is configured to apply a force to move the side pushing plunger 823 towards the connecting cylinder 240.

[0080] The diaphragm position adjusting device can be mounted at the lens barrel by the mounting frame 600. Exemplarily, the mounting frame 600 can be fixedly mounted on the outer sidewall of the vacuum chamber by the fixed mounting member 610, the mounting screw 630, the sealing copper pad 640, etc., and the diaphragm frame 300 and part of the guide rod 100 can extend into the inner side of the vacuum chamber through the sidewall of the vacuum chamber, and the guide rod frame 200, the side pushing assembly 700, the side pushing motor 810, the side pushing plunger assembly 820, etc. can be on the atmospheric side outside the vacuum chamber, so as to facilitate heat dissipation of electrical elements, setting of lubricant in the motion mechanism, etc.

[0081] In the embodiment, the rotation shaft of the rotation surface on which the groove surface of the rotation groove 650 is arranged forms the yawing rotation shaft of the guide rod frame 200, so that the guide rod frame 200 swings around the yawing rotation shaft under the driving of the side pushing motor 810. Preferably, the groove surface of the rotation groove 650 is a concave surface, and the plug 230 of the sleeve 210 is a convex surface. Preferably, the yawing rotation shaft is parallel to the main shaft of the lens barrel, so that the diaphragm 940 on the diaphragm frame 300 has a planar degree of freedom on the corresponding vertical section of the main shaft of the lens barrel by moving along the sliding direction and swinging around the yawing rotation shaft, and the diaphragm 940 can be accurately aligned with the main shaft of the lens barrel.

[0082] The diaphragm position adjusting device can be provided with a first elastic member 740, which extends along the sleeve 210 and is clamped between the sleeve 210 and the mounting frame 600, so as to always make the plug 230 of the sleeve 210 abut against the groove surface of the rotation groove 650 and prevent the plug 230 of the sleeve 210 from being separated from the groove surface of the rotation groove 650. In some optional embodiments, a first limiting snap ring 750 can be arranged on the sleeve 210, a second limiting snap ring 760 can be arranged on the mounting frame 600, and the first elastic member 740 is clamped between the first limiting snap ring 750 and the second limiting snap ring 760, so that the first elastic member 740 is in a compressed state and thus always provides a force to the first limiting snap ring 750, so as to always make the plug 230 of the sleeve 210 abut against the groove surface of the rotation groove 650.

[0083] The side pushing motor 810 can be a linear pushing rod motor, which is used to drive the guide rod holder 200 to swing around the yawing shaft, and further drive the diaphragm holder 300 to swing. The linear output end of the side pushing motor 810 can be provided with a cylindrical head pushing rod 811, which is abuttingly connected in the corresponding circular groove of the connecting cylinder 240. The extension direction of the cylindrical head pushing rod 811 can be perpendicular to the sliding direction and the yawing shaft direction. The side pushing pin assembly 820 can include a gland 821, an elastic element 822 and a side pushing pin 823. One end of the side pushing pin 823 is abuttingly connected to the connecting cylinder 240, and the other end of the pin extends into the gland 821. The gland 821 is connected to the mounting frame 600, and the elastic element 822 is arranged in the gland 821 and clamped between the side pushing pin 823 and the gland 821. The elastic element 822 provides a pre-tightening force so that the side pushing pin 823 is always abuttingly connected to the connecting cylinder 240, and further ensures that the connecting cylinder 240 is always abuttingly connected to the cylindrical head pushing rod 811 of the side pushing motor 810.

[0084] In some embodiments of the diaphragm position adjusting device of the utility model, the pushing direction of the pushing assembly 400 to the guide rod 100 is the same as the side pushing direction of the side pushing motor 810 to the guide rod holder 200.

[0085] When the side pushing motor 810 drives the guide rod holder 200 to swing around the yawing shaft, due to mechanical deformation, inertia and other factors, the gap between the guide rod 100 and the sliding hole 500 in the side pushing direction of the side pushing motor 810 can be enlarged, or the guide rod 100 can be more easily shaken relative to the sliding hole 500 in the side pushing direction of the side pushing motor 810, and further cause the repeated positioning accuracy of the diaphragm 940 to be poor. In the embodiment, by setting the pushing direction of the pushing assembly 400 to the guide rod 100 to be the same as the side pushing direction of the side pushing motor 810 to the guide rod holder 200, the shaking of the guide rod 100 in the direction can be effectively reduced, and the repeated positioning accuracy of the diaphragm 940 in the direction can be improved.

[0086] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figure 5 The diaphragm holder 300 includes a diaphragm mounting frame 310 and a diaphragm strip 320. The diaphragm mounting frame 310 is fixedly connected to the guide rod 100. The diaphragm strip 320 is fixedly connected to the diaphragm mounting frame 310. A plurality of diaphragms 940 are arranged on the diaphragm strip 320, and each diaphragm 940 is arranged at intervals along the sliding direction of the guide rod 100.

[0087] The apertures of the diaphragms 940 on the diaphragm strip 320 can be the same or different, in the case of the same apertures of the diaphragms 940, the service life of the diaphragms 940 can be increased, and in the case of different apertures of the diaphragms 940, diaphragms 940 of different diameters can be selected according to requirements. In the embodiment, the diaphragms 940 are arranged at intervals along the sliding direction, that is, the centers of the apertures of the diaphragms 940 are on the same straight line. In this way, when replacing the diaphragms 940, only the guide rod 100 needs to be adjusted in the sliding direction, and the concentricity of the diaphragms 940 and the electron beam center can be conveniently adjusted. At the same time, under the action of the pushing assembly 400, when the guide rod 100 slides relative to the guide rod holder 200 in the sliding direction, it will not sway in the direction perpendicular to the sliding direction, so that the diaphragms 940 have high repeat positioning accuracy. By arranging a plurality of diaphragms 940 along the sliding direction, the replacement frequency of the diaphragm holder 300 can be further reduced, and the application range of the semiconductor detection equipment can be improved.

[0088] In some embodiments of the diaphragm position adjusting device of the utility model, as shown in Figures 2-3 One end of the guide rod 100 extends out of the guide rod holder 200 and the mounting bracket 600 and is fixedly connected to the diaphragm holder 300. The outer side of the part of the guide rod 100 extending out of the mounting bracket 600 is sleeved with a deformation sleeve 660. The deformation sleeve 660 can deform under the action of a force, and during the movement or swing of the guide rod 100, the deformation sleeve 660 can also deform correspondingly to adapt to the movement of the guide rod 100. The deformation sleeve 660 is connected between the guide rod 100 and the mounting bracket 600, so as to separate the guide rod 100, the mounting bracket 600, the guide rod holder 200, etc. from the diaphragm holder 300. In this way, during the use of the semiconductor detection equipment, the diaphragm holder 300 can be in the vacuum chamber, and the guide rod 100, the mounting bracket 600, the guide rod holder 200, etc. can be on the atmospheric side outside the vacuum chamber. On the one hand, it can avoid the pollution of the guide rod 100, the mounting bracket 600, the guide rod holder 200, etc. to the vacuum chamber. On the other hand, it is convenient to arrange a lubricant between the guide rod 100 and the guide rod holder 200, reduce the sliding friction, and improve the repeat positioning accuracy. The deformation sleeve 660 can be a bellows, a rubber sleeve, etc. Exemplarily, the deformation sleeve 660 is a metal bellows, and the two ends of the metal bellows are fixedly connected to the guide rod 100 and the mounting bracket 600 through a welding process. This connection method has high reliability and strong sealing performance.

[0089] In some embodiments of the semiconductor detection equipment of the utility model, as shown in Figure 8As shown, the semiconductor detection device includes an electron beam source 910, a diaphragm 940, a sample stage 960, and the diaphragm position adjusting apparatus of any one of the above embodiments or a combination of embodiments. The electron beam source 910 is configured to emit an electron beam 920 toward a semiconductor to be detected on the sample stage 960. The diaphragm 940 is disposed on the diaphragm frame 300 and between the electron beam source 910 and the sample stage 960. The semiconductor detection device can further be provided with a detector 950 to acquire one or more of backscattered electrons, secondary electrons, or transmitted electrons generated after the electron beam 920 passes through the semiconductor to be detected and generate a detection image. Taking the semiconductor detection device as a scanning electron microscope for example, the scanning electron microscope can generally include an electron optical system, a signal collection and display system, a vacuum system, and a power supply system, etc. The electron optical system can include the electron beam source 910, an electromagnetic lens, a scanning coil 930, and the sample stage 960, etc. The diaphragm frame 300 in the diaphragm position adjusting apparatus can be disposed between the electron beam source 910 and the sample stage 960. One or more diaphragms 940 can be disposed on the diaphragm frame 300. Since the diaphragm position adjusting apparatus has high repeatability positioning accuracy, the semiconductor detection device realizes precise adjustment of the position of the diaphragm 940 in the electron beam detection process, improves the repeatability positioning accuracy of the diaphragm 940, improves the position consistency of the diaphragm 940 switching recovery, and improves the detection imaging effect.

[0090] At this point, those skilled in the art should recognize that, although the present application has been shown and described in detail a plurality of exemplary embodiments, many other variations or modifications can be directly determined or deduced in accordance with the disclosure of the present application without departing from the spirit and scope of the present application, which conform to the principles of the present application. Therefore, the scope of the present application should be understood and recognized as covering all these other variations or modifications.

Claims

1. An aperture position adjustment device, characterized by, It comprises: a guide rod holder defining a sliding hole; a guide rod slidably passing through the sliding hole; a diaphragm holder arranged at one end of the guide rod to move with the guide rod; and a pushing assembly arranged on the guide rod holder and in contact with the peripheral wall of the guide rod to push the guide rod so that the peripheral wall of the guide rod is in contact with the hole wall of the sliding hole. The pushing assembly comprises:

2. The diaphragm position adjustment apparatus of claim 1, wherein a pushing member mounted on the guide rod holder; and a ball rotatably mounted on the pushing member; the ball is in contact with the guide rod.

3. The diaphragm position adjusting device according to claim 2, wherein: the pushing member is in a column shape and perpendicular to the guide rod; the ball is mounted at one end of the pushing member close to the guide rod; the pushing member is threadedly connected to the guide rod holder.

4. The diaphragm position adjusting device according to claim 3, wherein: the pushing assembly further comprises a locking member configured to fixedly mount the pushing member on the guide rod holder.

5. The diaphragm position adjusting device according to claim 4, wherein: the locking member is a locking nut arranged outside the sliding hole; the pushing member is a screw rod or a stud bolt; the locking nut is threadedly connected with the pushing member and in contact with the guide rod holder. It further comprises:

6. The iris position adjustment apparatus of claim 1, wherein a horizontal pushing assembly arranged at one end of the guide rod holder and connected with the guide rod to drive the guide rod to slide along the sliding hole; the pushing assembly is arranged at the end of the guide rod holder away from the horizontal pushing assembly.

7. The diaphragm position adjusting device according to claim 6, wherein: a guide groove is arranged on the guide rod holder and extends along the length direction of the guide rod, and is communicated with the sliding hole and penetrates through the guide rod holder outwardly; a limiting column is arranged on the guide rod and is located in the guide groove; the pushing assembly is arranged between the guide groove and the horizontal pushing assembly. The guide rod holder comprises:

8. The iris position adjustment apparatus of claim 7, wherein a sleeve defining the sliding hole, the pushing assembly and the guide groove are arranged on the sleeve; a connecting cylinder connected to one end of the sleeve, the inner diameter of the connecting cylinder is larger than the diameter of the sliding hole; the horizontal pushing assembly is arranged at the end of the connecting cylinder away from the sleeve. It further comprises:

9. The iris position adjustment apparatus of claim 8, wherein a mounting bracket provided with a rotating groove and a through hole connected to the bottom of the rotating groove; the groove surface of the rotating groove is on the same rotary surface; the end of the sleeve away from the connecting cylinder has a plug matched with the rotating groove, the plug is inserted into the rotating groove; the guide rod passes through the through hole, the diameter of the through hole is larger than the diameter of the guide rod; a side pushing motor arranged on the mounting bracket, the output shaft of the side pushing motor is in contact with the connecting cylinder on the side of the connecting cylinder in the radial direction. ​ A side push ejector pin assembly is provided on the mounting frame, which has a side push ejector pin and an elastic member; the side push ejector pin is coaxially arranged with the output shaft of the side push motor and is in contact with the connecting cylinder on the other side of the connecting cylinder; the elastic member is configured to apply a force to move the side push ejector pin towards the connecting cylinder.

10. A semiconductor inspection apparatus characterized by comprising: Comprising: An electron beam source; A sample stage, the electron beam source is configured to emit an electron beam to a semiconductor to be detected on the sample stage; The light barrier position adjusting device according to any one of claims 1 to 9; and A light barrier is provided on the light barrier frame and is between the electron beam source and the sample stage.

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