Transfer device for ultrasonic detection

Abstract

The utility model belongs to the technical field of ultrasonic detection tools, and particularly relates to a transfer device for ultrasonic detection. The transfer device for ultrasonic detection comprises a frame and a sliding rail, a fixing groove with the hollow middle is formed in the frame, the sliding rail is connected between opposite frame edges of the frame and can move in the extending direction of the connected frame edges, the fixing groove is divided into a plurality of containing grooves with the hollow middle by the sliding rail, and the containing grooves are suitable for containing and supporting samples to be detected. The placing groove is adjusted to be in the size matched with different to-be-detected samples by moving the sliding rail, so that the to-be-detected samples of different sizes can be placed in the transfer device, and the transfer device has the adaptability to the to-be-detected samples of different sizes while high-quality detection of the to-be-detected samples is considered.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of ultrasonic detection tooling, especially relates to a transfer device for ultrasonic detection. BACKGROUND

[0002] Ultrasonic surface detection technology is to detect defects in a sample to be measured by using transmission and reflection characteristics of ultrasonic waves. The sound waves are focused and transmitted to the sample through a medium (usually water), and the sound waves can pass through the sample to estimate the thickness, stiffness, density, shape, roughness and attenuation of the sample. Therefore, ultrasonic surface detection technology is an ideal method for detecting the internal layer thickness and layering of integrated circuit chips, underfill layering and void defects.

[0003] The existing transfer methods for testing samples mainly have two kinds, one is to place the sample to be measured on a special plastic or glass tray, and the other is to use a hollow tool to fix the sample on the tool by adhesive tape. The above two methods have the following common problems: difficult to adapt to sample diversity, different size samples need special trays or adhesive tape, greatly increasing the detection cost and operation difficulty.

[0004] To solve the above problems, the application provides a transfer device for ultrasonic detection. UTILITY MODEL CONTENT

[0005] The utility model solves the technical problem that the existing transfer tool is difficult to adapt to sample diversity, and provides a transfer device for ultrasonic detection.

[0006] To solve the above technical problems, the utility model embodiment provides a transfer device for ultrasonic detection, which comprises a frame and a sliding rail, the frame has a fixed groove with a hollow middle part, the sliding rail is connected between the opposite frame edges of the frame and can move along the extension direction of the connected frame edge, the fixed groove is divided into a plurality of placement grooves with a hollow middle part by the sliding rail, and the placement groove is suitable for accommodating and supporting the sample to be measured.

[0007] At least adjacent frame edges of the frame are provided with scales distributed along the extension direction thereof for reading the size of the hollow area of the placement groove.

[0008] Optionally, the frame comprises a first frame edge, a second frame edge, a third frame edge and a fourth frame edge connected in sequence, the first frame edge and the third frame edge are arranged in parallel and spaced apart along a first direction, and the second frame edge and the fourth frame edge are arranged in parallel and spaced apart along a second direction; wherein the first direction is perpendicular to the second direction.

[0009] The slide rail extends along the first direction and is connected between the first frame edge and the third frame edge; or, the slide rail extends along the second direction and is connected between the second frame edge and the fourth frame edge.

[0010] Optionally, two slide rails are provided, including a first slide rail and a second slide rail. The first slide rail extends along the first direction and connects between the first frame edge and the third frame edge. The second slide rail extends along the second direction and connects between the second frame edge and the fourth frame edge. The adjacent frame edges of the frame and the two slide rails together enclose the placement groove.

[0011] Optionally, the second slide rail includes a limiting vertical plate, a first limiting horizontal plate, and a second limiting horizontal plate. The second limiting horizontal plate is spaced apart on the top side of the first limiting horizontal plate along the hollowing direction of the fixing groove. The limiting vertical plate extends along the second direction and connects the middle parts of the first limiting horizontal plate and the second limiting horizontal plate, so that the second slide rail forms a groove on the side along the first direction, and the groove constitutes part of the placement groove.

[0012] Optionally, both the first frame edge and the third frame edge include a frame edge body and an increasing seat disposed on the top of the frame edge body. The top surface of the frame edge body, the top surface of the first limiting horizontal plate, and the top surfaces of the second frame edge and the fourth frame edge are flush.

[0013] The height-increasing seat extends along the second direction, the first slide rail rests on the second limiting horizontal plate, one end of the first slide rail is slidably connected to the height-increasing seat on the first frame edge, and the other end is slidably connected to the height-increasing seat on the third frame edge.

[0014] Optionally, the system also includes a slider fixed to the end of the slide rail, and a guide rail extending along its extension direction is provided on the opposite frame edge of the frame, with the slider slidably mounted on the guide rail.

[0015] Optionally, it also includes a rolling element, which is rotatably mounted on the bottom of the slider about a preset rotation axis, and the rolling element on the slide rail rolls along the guide rail when the slide rail moves relative to the frame.

[0016] Optionally, it also includes a locking element capable of locking the slide rail and the frame to temporarily fix the slide rail and the frame; after the locking element releases the locking of the slide rail and the frame, the slide rail can move relative to the frame.

[0017] Optionally, the locking member is a threaded member, the slide rail is provided with an internal threaded hole, and the frame edge connected to the slide rail is provided with a plurality of locking holes spaced apart along its extension direction. The threaded member is threadedly connected to the internal threaded hole and can be screwed into any of the locking holes.

[0018] In this ultrasonic testing transport device, a slide rail connected between opposite frame edges divides the fixed groove within the frame into different placement grooves. The center of each placement groove is hollowed out. After the sample to be tested is placed in a groove, the sidewalls of the groove restrict its movement, while the bottom wall supports the edge of the sample. The hollowed-out area in the center exposes the bottom of the sample, allowing ultrasonic waves to directly penetrate the sample as it passes through the transport device. This effectively avoids absorption and attenuation of the ultrasonic waves, improving the consistency of the ultrasonic scanning image structure of the sample and facilitating optimal measurement results. Furthermore, the placement grooves can be adjusted to fit different sample sizes by moving the slide rails, enabling the transport device to accommodate samples of varying sizes. Therefore, the transport device ensures both high-quality testing of the sample and adaptability to samples of different sizes. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a transport device for ultrasonic testing provided in an embodiment of the present invention;

[0020] Figure 2 yes Figure 1 Top view;

[0021] Figure 3 yes Figure 2 Partial sectional view of AA in the image.

[0022] The reference numerals in the accompanying drawings are as follows:

[0023] 1. Frame; 11. First frame edge; 12. Second frame edge; 13. Third frame edge; 14. Fourth frame edge; 15. Heightening seat; 16. Guide rail; 17. Placement slot; 18. Locking hole; 2. First slide rail; 3. Second slide rail; 31. First limiting horizontal plate; 32. Second limiting horizontal plate; 4. Locking component; 5. Slider; 6. Rolling component. Detailed Implementation

[0024] To make the technical problems solved, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0025] Ultrasonic waves have short wavelengths and propagate approximately in a straight line in liquids. They cannot penetrate air, have good directionality, and strong reflection capabilities; when ultrasonic waves encounter air, they are 100% reflected. When ultrasonic waves encounter interfaces, some are reflected, while some pass through the interface. Therefore, existing technologies utilize the transmission and reflection characteristics of ultrasonic waves to detect defects in samples under test, i.e., ultrasonic surface inspection technology. Ultrasonic surface inspection technology is an ideal method for detecting layer thickness and delamination, bottom filling delamination, and void defects within integrated circuit chips.

[0026] During testing, the chip is immersed in a liquid (usually water) using a fixture. Ultrasonic waves emitted by the ultrasonic instrument are transmitted to the chip through the liquid. By passing through the chip, the thickness, stiffness, density, shape, roughness, and attenuation of the chip can be estimated, thereby obtaining measurement results for the chip's internal layer thickness and delamination, bottom filling delamination, and void defects. This invention provides a transfer device for ultrasonic testing, which can place the chip to immerse it in the liquid and also transfer the chip using the transfer device.

[0027] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a transfer device for ultrasonic testing, including a frame 1 and a slide rail. The frame 1 has a fixing groove with a central hollow section. The slide rail is connected between opposite frame edges of the frame 1 and can move along the extension direction of the connected frame edges. The fixing groove is divided by the slide rail into multiple placement grooves 17 with a central hollow section. The placement grooves 17 are suitable for accommodating and supporting the sample to be tested.

[0028] The "fixing groove with a hollow center" refers to the fixing groove being open in the middle, and the "multiple placement grooves 17 with a hollow center" refers to the placement grooves 17 being open in the middle. The "sample to be tested" is usually a chip.

[0029] The slide rails connected between the opposite frame edges of the frame 1 divide the fixed groove within the frame 1 into different placement grooves 17. The center of each placement groove 17 is hollowed out. After the sample to be tested is placed in the placement groove 17, the side walls of the placement groove 17 restrict the planar movement of the sample to be tested, and the bottom wall of the placement groove 17 supports the edge of the sample to be tested. The hollowed-out area in the center of the placement groove 17 exposes the bottom of the sample to be tested, so that the ultrasonic waves can directly penetrate the sample to be tested when passing through the transfer device, thereby effectively avoiding the absorption of ultrasonic waves by the transfer device, so that the ultrasonic waves can fully act on the sample to be tested, avoiding attenuation of ultrasonic waves, improving the consistency of the ultrasonic scanning image structure of the sample to be tested, and facilitating the acquisition of the best measurement results.

[0030] Furthermore, the placement slot 17 can be adjusted to a size that suits different test samples by moving the slide rail, so that the transfer device can place test samples of different sizes. Thus, the transfer device can take into account both high-quality detection of test samples and adaptability to test samples of different sizes.

[0031] In addition, compared with the existing technology that uses tape to fix the sample to be tested, the tape and the sample to be tested are difficult to bond tightly, and tiny air bubbles are easily generated at the bonding surface. When the ultrasonic waves encounter air bubbles, they will be 100% reflected, which significantly affects the accuracy of the measurement results. The transfer device of this utility model restricts the movement of the sample to be tested by the wall of the placement groove 17 (i.e. the side wall on the frame edge of the slide rail and frame 1), so that the sample to be tested is fixed in the placement groove 17, avoiding the problem of air bubbles easily forming at the bonding surface when using tape to fix the sample to be tested.

[0032] In the ultrasonic testing transport device of this invention, a slide rail connected between the opposite edges of a frame 1 divides the fixed groove within the frame 1 into different placement grooves 17. The center of each placement groove 17 is hollowed out. After the sample to be tested is placed in the placement groove 17, the sidewalls of the placement groove 17 restrict the movement of the sample, while the bottom wall of the placement groove 17 supports the edge of the sample. The hollowed-out area in the center of the placement groove 17 exposes the bottom of the sample, allowing ultrasonic waves to directly penetrate the sample as it passes through the transport device. This effectively avoids absorption and attenuation of the ultrasonic waves by the transport device, improves the consistency of the ultrasonic scanning image structure of the sample, and facilitates obtaining optimal measurement results. Furthermore, the placement groove 17 can be adjusted to a size suitable for different samples by moving the slide rail, enabling the transport device to hold samples of different sizes. Thus, the transport device ensures both high-quality testing of the sample and adaptability to samples of different sizes.

[0033] In one embodiment, at least adjacent frame edges of frame 1 are provided with scales distributed along their extension direction (not shown in the figure), so that the scanning area of ​​the ultrasonic scanner can be set by reading the scale corresponding to the hollow area of ​​the placement slot 17, so that the scanning area of ​​the ultrasonic scanner can correspond exactly to the size of the exposed area at the bottom of the sample to be tested, so as to adjust and set the scanning area of ​​the ultrasonic scanner, improve scanning efficiency and measurement quality.

[0034] In one embodiment, such as Figure 2 As shown, the frame 1 includes a first frame edge 11, a second frame edge 12, a third frame edge 13, and a fourth frame edge 14 connected end to end. The first frame edge 11 and the third frame edge 13 are arranged parallel to each other along a first direction, and the second frame edge 12 and the fourth frame edge 14 are arranged parallel to each other along a second direction; wherein, the first direction is perpendicular to the second direction. Figure 2 In the diagram, D1 represents the first direction and D2 represents the second direction.

[0035] The slide rail extends along a first direction and connects between the first frame edge 11 and the third frame edge 13; or, the slide rail extends along a second direction and connects between the second frame edge 12 and the fourth frame edge 14.

[0036] The sample chip under test is generally square in shape. The fixing groove of the frame 1, which is composed of the first frame side 11, the second frame side 12, the third frame side 13, and the fourth frame side 14, is square. The linearly extending slide rail divides the square fixing groove into two square placement grooves 17. By sliding the slide rail, the square placement grooves 17 can be adjusted to the same size as the square chip, so that the sidewalls of the chip can better fit the groove walls of the placement grooves 17, thereby further improving the stability of the chip within the placement grooves 17.

[0037] In one embodiment, such as Figure 1 As shown, there are two slide rails, including a first slide rail 2 and a second slide rail 3. The first slide rail 2 extends along a first direction and connects between the first frame edge 11 and the third frame edge 13. The second slide rail 3 extends along a second direction and connects between the second frame edge 12 and the fourth frame edge 14. The adjacent frame edges of the frame 1 and the two slide rails together enclose and form a placement groove 17.

[0038] Compared to setting only one slide rail, when setting a first slide rail 2 and a second slide rail 3 that are perpendicular to each other, the first slide rail 2 extending in the first direction can slide along the extension direction of the first frame edge 11, and the second slide rail 3 extending in the second direction can slide along the extension direction of the second frame edge 12, so as to realize the adjustment of the length and width of the placement groove 17, expand the size adjustment range of the placement groove 17, and thus the transfer device can adapt to the test samples with more diverse sizes.

[0039] In one embodiment, the second slide rail 3 includes a limiting vertical plate, a first limiting horizontal plate 31, and a second limiting horizontal plate 32. The second limiting horizontal plate 32 is spaced apart on the top side of the first limiting horizontal plate 31 along the hollowing direction of the fixing groove. The limiting vertical plate extends along the second direction and connects the middle of the first limiting horizontal plate 31 and the second limiting horizontal plate 32, so that the side of the second slide rail 3 along the first direction forms a groove, and the groove constitutes a partial placement groove 17.

[0040] With this design, the first limiting plate 31 can support the sample to be tested together with the frame edge, and the second limiting plate 32 can prevent the chip from detaching from the placement slot 17, thereby improving the stability of the sample to be tested when the transfer device places and transfers the sample to be tested.

[0041] In one embodiment, the first frame edge 11 and the third frame edge 13 each include a frame edge body and a heightening seat 15 disposed on the top of the frame edge body. The top surface of the frame edge body, the top surface of the first limiting horizontal plate 31, and the top surfaces of the second frame edge 12 and the fourth frame edge 14 are flush, so that the adjacent frame edges and the second slide rail 3 can jointly support the chips in the corresponding placement slots 17.

[0042] The riser seat 15 extends along the second direction, and the first slide rail 2 rests on the second limiting horizontal plate 32. One end of the first slide rail 2 is slidably connected to the riser seat 15 of the first frame edge 11, and the other end is slidably connected to the riser seat 15 of the third frame edge 13, so as to avoid interference between the first slide rail 2 and the second slide rail 3 when they slide.

[0043] In one embodiment, one end of the second slide rail 3 is slidably connected to the second frame edge 12, and the other end is slidably connected to the fourth slide rail.

[0044] In one embodiment, a slider 5 is also included. The slider 5 is fixed to the end of the slide rail. A guide rail 16 extending along its extension direction is provided on the opposite frame edge of the frame 1. The slider 5 is slidably mounted on the guide rail 16 to avoid the slide rail from being easily worn and reducing the service life of the slide rail when the slide rail and the guide rail 16 slide in direct contact.

[0045] In one embodiment, the slider 5 and the frame 1 are made of PTFE (polytetrafluoroethylene) material, which has the characteristics of high strength, corrosion resistance, hydrolysis resistance and wear resistance.

[0046] In one embodiment, a guide rail 16 slidably connected to the first slide rail 2 on the first frame edge 11 is installed on the top surface of the riser seat 15 on the first frame edge 11, and a guide rail 16 slidably connected to the first slide rail 2 on the third frame edge 13 is installed on the top surface of the riser seat 15 on the third frame edge 13. The guide rail 16 on the second frame edge 12, the guide rail 16 on the fourth frame edge 14, the riser seat 15 on the first frame edge 11, the riser seat 15 on the third frame edge 13, and the second slide rail 3 serve as the sidewalls of each placement slot 17.

[0047] In one embodiment, the cross-sectional shape of the riser 15 is T-shaped.

[0048] In one embodiment, such as Figure 3 As shown, it also includes a rolling element 6, which is rotatably mounted on the bottom of the slider 5 around a preset rotation axis. When the slide rail moves relative to the frame 1, the rolling element 6 on the slide rail rolls along the guide rail 16.

[0049] Compared to sliding friction, rolling friction is less, resulting in less resistance when the user moves the slide rail, making it easier to adjust the slide rail position. The preset rotation axis refers to the direction perpendicular to the direction of movement of the slide rail on a reference plane parallel to the top surface of frame 1.

[0050] In one embodiment, the rolling element 6 is a ball bearing, and the bottom of the slider 5 is provided with a groove adapted to the slide rail. The ball bearing is installed in the groove and symmetrically arranged on opposite sides of the guide rail 16.

[0051] In one embodiment, such as Figure 2 As shown, it also includes a locking member 4, which can lock the slide rail and the frame 1 to temporarily fix the slide rail and the frame 1; after the locking member 4 releases the locking of the slide rail and the frame 1, the slide rail can move relative to the frame 1.

[0052] After the locking component 4 locks the slide rail and frame 1, the position of the slide rail is fixed, so that the size of the placement groove 17 can remain unchanged, so as to avoid the sample to be tested moving in the placement groove 17 or the slide rail squeezing the sample to be tested and damaging it.

[0053] In one embodiment, the locking member 4 is a threaded member. The slide rail has an internal threaded hole, and the frame 1, which is connected to the slide rail, has a plurality of locking holes 18 spaced apart along its extension direction. The threaded member is threaded into the internal threaded hole and can be screwed into any locking hole 18 to lock the slide rail to the frame 1 when it has slid to the corresponding position. When it is necessary to move the slide rail, the threaded member is rotated so that the end of the threaded member is screwed out of the locking hole 18.

[0054] In one embodiment, the threaded element is a screw.

[0055] In other embodiments, only one slide rail may be provided. In this case, the transfer device can only adjust the size of the support groove in a single direction by moving the slide rail.

[0056] In other embodiments, the second slide rail 3 can be a square rod extending along a second direction. In this case, adjacent sides of the chip are supported by adjacent frame edges, and the first slide rail 2 and the second slide rail 3 are only used to restrict the movement of the chip.

[0057] In other embodiments, the heightening seat 15 can be omitted. Instead, the middle of the first slide rail 2 can be slidably connected to the frame 1. Specifically, a through hole extending in the second direction is provided on the second frame edge 12 or the fourth frame edge 14, and a guide rod is inserted through the through hole. One end of the guide rod is connected to the middle of the first slide rail 2. When the first slide rail 2 needs to be moved, the other end of the guide rod is pulled to move the first slide rail 2. Of course, the through hole can also be replaced by an internally threaded hole, and the guide rod is a threaded rod, with one end of the threaded rod rotatably connected to the middle of the first slide rail 2. When the first slide rail 2 needs to be moved, the other end of the threaded rod is rotated, and the threaded rod rotates and moves in the internally threaded hole to move the first slide rail 2 linearly.

[0058] In other embodiments, the locking element 4 can be omitted, and a material that increases friction can be provided on the bottom of the slide rail and / or on the guide rail 16. When the slide rail needs to be slid, the operator's pushing force on the slide rail is greater than the friction between the slide rail and the guide rail 16, thereby pushing the slide rail to move. Once the slide rail has slid to the desired position, the pushing force is released, and the friction between the slide rail and the guide rail 16 restricts the movement of the slide rail.

[0059] In other embodiments, the locking element 4 can be a pin.

[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A transport device for ultrasonic testing, characterized in that The utility model provides a frame (1) and slide rail, the frame (1) has the fixed groove of middle hollow inside, the slide rail is connected between the opposite frame edge of frame (1), and can move along the extension direction of the frame edge connected, the fixed groove is divided into the multiple placement slot (17) of middle hollow by the slide rail, and the placement slot (17) is suitable for accommodating and supporting the sample to be measured.

2. The transport device for ultrasonic testing according to claim 1, characterized in that At least adjacent frame edge of the frame (1) is provided with the scale along its extension direction distribution, is used for reading the size of hollow area of the placement slot (17).

3. The transport device for ultrasonic testing of claim 1, wherein, The frame (1) includes first frame edge (11), second frame edge (12), third frame edge (13) and fourth frame edge (14) connected in order, the first frame edge (11) and third frame edge (13) are arranged along the first direction parallelly and are spaced, and the second frame edge (12) and fourth frame edge (14) are arranged along the second direction parallelly and are spaced, wherein the first direction is perpendicular to the second direction. The slide rail extends along the first direction, and the slide rail is connected between the first frame edge (11) and the third frame edge (13). Alternatively, the slide rail extends along the second direction, and the slide rail is connected between the second frame edge (12) and the fourth frame edge (14).

4. The transport device for ultrasonic testing according to claim 3, characterized in that The slide rail is provided with two, including first slide rail (2) and second slide rail (3), the first slide rail (2) extends along the first direction and is connected between the first frame edge (11) and the third frame edge (13), the second slide rail (3) extends along the second direction and is connected between the second frame edge (12) and the fourth frame edge (14), and adjacent frame edges of the frame (1) and the two slide rails jointly enclose the placement slot (17).

5. The transport device for ultrasonic testing according to claim 4, characterized in that The second slide rail (3) includes a limiting vertical plate, a first limiting horizontal plate (31), and a second limiting horizontal plate (32). The second limiting horizontal plate (32) is arranged in the top side of the first limiting horizontal plate (31) along the hollow direction of the fixed groove. The limiting vertical plate extends along the second direction and connects the middle part of the first limiting horizontal plate (31) and the second limiting horizontal plate (32), so that a groove is formed on the side of the second slide rail (3) along the first direction. The groove constitutes part of the placement slot (17).

6. The transport device for ultrasonic testing according to claim 5, characterized in that The first frame edge (11) and the third frame edge (13) each include a frame body and a raised seat (15) arranged on the top of the frame body. The top surface of the frame body, the top surface of the first limiting horizontal plate (31), and the top surfaces of the second frame edge (12) and the fourth frame edge (14) are flush. The raised seat (15) extends along the second direction. The first slide rail (2) is placed on the second limiting horizontal plate (32). One end of the first slide rail (2) is slidingly connected with the raised seat (15) of the first frame edge (11), and the other end is slidingly connected with the raised seat (15) of the third frame edge (13).

7. The transport device for ultrasonic testing according to any one of claims 1 to 6, characterized in that The sliding block (5) is fixed at the end of the sliding rail, and a guide rail (16) extending along the extension direction of the frame (1) is arranged on the opposite frame edge of the frame (1), and the sliding block (5) is slidingly installed on the guide rail (16).

8. The transport device for ultrasonic testing according to claim 7, characterized in that The rolling member (6) is rotatably installed at the bottom of the sliding block (5) around a preset rotating axis, and when the sliding rail moves relative to the frame (1), the rolling member (6) on the sliding rail rolls along the guide rail (16).

9. The transport device for ultrasonic testing according to any one of claims 1 to 6, characterized in that The locking member (4) can lock the sliding rail and the frame (1) to temporarily fix the sliding rail and the frame (1), and after the locking member (4) is unlocked, the sliding rail can move relative to the frame (1).

10. The transport device for ultrasonic testing according to claim 9, characterized in that The locking member (4) is a threaded member, the sliding rail is provided with an internally threaded hole, and the frame edge connected with the sliding rail of the frame (1) is provided with a plurality of locking holes (18) arranged at intervals along the extension direction of the frame edge, and the threaded member is threadedly connected in the internally threaded hole and can be screwed into any locking hole (18).

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