Carrier plate falling compensation device and battery piece production equipment
By setting positioning holes on the carrier plate and using detection and compensation modules to adjust the position of the carrier plate, problems such as leakage and drift caused by carrier plate sag were solved, thus improving production efficiency and product quality.
Patent Information
- Application Number
- CN202520006388.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-01-02
AI Technical Summary
Large-size carrier plates exhibit varying degrees of sagging from the edges to the center during long-term operation, leading to issues such as missed pick-up, wafer drift, or overlap during the wafer retrieval process, which affects production efficiency and product quality.
Positioning holes are set on the carrier plate, and the light entering the plate is captured by the detection module to output offset information. The position of the carrier plate is adjusted by the compensation module to achieve compensation for the carrier plate.
It effectively prevents the carrier plate from falling, ensures the accuracy of the wafer picking process, improves production efficiency and product quality, and reduces production costs.
Smart Images
Figure CN223859559U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to battery preparation technical field, specifically, relate to a carrier plate falling compensation device and battery piece production equipment. BACKGROUND
[0002] In prior art, silicon wafer fixture plays a vital role in semiconductor manufacturing process, it needs not only to fix silicon wafer accurately, but also to ensure the position stability of silicon wafer in the whole processing. However, due to the different size, parameter and weight of silicon wafer fixture, the edge to the middle of large size carrier plate will appear falling phenomenon in long time running. This falling is mainly caused by processing precision problem and adaptive production line problem, leading to the falling of each carrier plate not being same, and different degrees of falling may appear in horizontal and vertical directions. These problems have not been effectively solved for a long time, which seriously affects production efficiency and product quality.
[0003] After the falling of carrier plate, the original gantry transverse moving pick-and-place height cannot accurately fit the surface of carrier plate, thereby leading to the problem of missing suction in pick-up process, and the problem of floating or edge lifting in placing. Especially in placing, due to the occasional difference of different carrier plates, it may cause small batch hidden fixture printing and irregular scratches, and further affect the yield of the whole process. These problems not only increase the production cost, but also reduce the qualified rate of products, which becomes the key factor restricting the further optimization of semiconductor manufacturing process. SUMMARY
[0004] The utility model discloses a carrier plate falling compensation device and battery piece production equipment, which can compensate the carrier plate, thereby avoiding the adverse effects caused by the falling of carrier plate.
[0005] The embodiment of the utility model can be realized as follows:
[0006] The utility model provides a carrier plate falling compensation device, which comprises:
[0007] A carrier plate is provided with a positioning hole, and the positioning hole is used for passing light;
[0008] A detection module is arranged between the carrier plate and the detection module, and the detection module is used for outputting the offset information of the carrier plate based on the light passing condition in the positioning hole;
[0009] A compensation module is connected with the detection module and the carrier plate, and the compensation module is used for adjusting the position of the carrier plate according to the offset information of the detection module.
[0010] Optionally, the positioning hole comprises a transverse positioning hole and a vertical positioning hole which are connected and communicate with each other, and the transverse positioning hole and the vertical positioning hole are both communicated with the light.
[0011] Optionally, the carrier plate falling compensation device further comprises a beam splitter, which is arranged at the connection position of the transverse positioning hole and the vertical positioning hole, and is used for splitting the light so that the light is communicated in the transverse positioning hole and the vertical positioning hole.
[0012] Optionally, the detection module comprises a camera and a calculation module, the camera and the calculation module are connected, the position of the camera corresponds to the position of the positioning hole, the camera is used for outputting position information representing the light communication condition of the positioning hole to the calculation module, the calculation module is used for outputting the offset information based on the position information, and the calculation module is connected with the compensation module.
[0013] Optionally, the detection module further comprises a driving member, the driving member is connected with the camera and is used for driving the camera to ascend and descend.
[0014] Optionally, the driving member is a pneumatic cylinder.
[0015] Optionally, the compensation module is a lifting motor, the lifting motor is connected with the detection module and the carrier plate at the same time, and is used for driving the carrier plate to ascend and descend based on the offset information calculated by the detection module, so as to compensate the carrier plate.
[0016] Optionally, the number of the lifting motors is multiple.
[0017] Optionally, the number of the positioning holes is multiple, and the multiple positioning holes are arranged at the edge positions of the carrier plate.
[0018] The utility model further provides a kind of battery piece production equipment, including battery piece and carrier plate falling compensation device, and the battery piece is arranged on the carrier plate.
[0019] The beneficial effects of the carrier plate falling compensation device and the battery piece production equipment provided by the utility model embodiment include:
[0020] The carrier plate falling compensation device comprises a carrier plate, a detection module and a compensation module, the carrier plate is provided with a positioning hole for passing light, the detection module is arranged at intervals with the carrier plate, the detection module is used for outputting the offset information of the carrier plate based on the light passing condition in the positioning hole, and the compensation module is connected with the detection module and the carrier plate at the same time, and the compensation module is used for adjusting the position of the carrier plate according to the offset information of the detection module.
[0021] The battery piece production equipment comprises a battery piece and a carrier plate falling compensation device, and the battery piece is arranged on the carrier plate. In use, the positioning hole is arranged on the carrier plate, the positioning hole can pass the light emitted by the external light source, the detection module captures the light emitted by the positioning hole, and the offset information of the carrier plate is output based on the light passing condition in the positioning hole. The compensation module adjusts the position of the carrier plate after receiving the offset information emitted by the detection module, thereby compensating the carrier plate, avoiding the falling phenomenon of the carrier plate and affecting the subsequent work. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.
[0023] Figure 1 The structure schematic diagram of the carrier plate falling compensation device provided in the present embodiment is shown in the first perspective view.
[0024] Figure 2 The structure schematic diagram of the carrier plate falling compensation device provided in the present embodiment is shown in the first perspective view. Figure 1 The local enlarged view of the A area in the present embodiment is shown.
[0025] Figure 3 The structure schematic diagram of the positioning hole provided in the present embodiment is shown.
[0026] Figure legend: 10-carrier plate; 11-positioning hole; 111-horizontal positioning hole; 112-vertical positioning hole; 20-detection module; 21-camera; 22-driving part. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.
[0029] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0030] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the present application is used, only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0031] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0032] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.
[0033] In the prior art, the silicon wafer jig plays a crucial role in the semiconductor manufacturing process, it not only needs to accurately fix the silicon wafer, but also needs to ensure the positional stability of the silicon wafer during the entire processing. However, due to the different size, parameters and weight of the silicon wafer jig, the large-size carrier plate will have different degrees of sagging from the edge to the middle during long-time operation. This sagging is mainly caused by processing precision problems and adaptation line problems, resulting in different sagging conditions for each carrier plate, and different degrees of sagging in both horizontal and vertical directions. These problems have not been effectively solved for a long time, which seriously affects the production efficiency and product quality.
[0034] After the carrier plate falls, the original gantry transverse moving pick-and-place sheet height cannot accurately match the surface of the carrier plate, thereby causing the pick-up process to easily occur the problem of missing suction, and the problem of floating or edge lifting when placing the sheet. Especially when placing the sheet, due to the occasional differences of different carrier plates, it may cause small batch hidden tool marks and irregular scratches, thereby affecting the yield of the whole process. These problems not only increase the production cost, but also reduce the qualification rate of the product, which becomes the key factor restricting the further optimization of the semiconductor manufacturing process.
[0035] To solve the above technical problems, the embodiment provides a battery piece production equipment, which comprises a battery piece and a carrier plate falling compensation device. The battery piece is arranged on the carrier plate 10 of the carrier plate falling compensation device. The carrier plate 10 can be compensated, thereby avoiding the adverse effects caused by the falling of the carrier plate 10.
[0036] The overall structure, working principle and technical effects of the carrier plate falling compensation device provided by the utility model are described in detail below through embodiments and in combination with the drawings.
[0037] Please refer to Figures 1-3 The carrier plate falling compensation device comprises a carrier plate 10, a detection module 20 and a compensation module. The carrier plate 10 is provided with a positioning hole 11 for passing in light. The detection module 20 is arranged at intervals from the carrier plate 10. The detection module 20 is used to output the offset information of the carrier plate 10 based on the light passing condition in the positioning hole 11. The compensation module is connected with the detection module 20 and the carrier plate 10 at the same time. The compensation module is used to adjust the position of the carrier plate 10 according to the offset information of the detection module 20.
[0038] In the embodiment, the positioning hole 11 comprises a horizontal positioning hole 111 and a vertical positioning hole 112 which are connected. The horizontal positioning hole 111 and the vertical positioning hole 112 both pass in light. Specifically, the midpoint positions of the horizontal positioning hole 111 and the vertical positioning hole 112 are connected. An external air-cooled light source is arranged below the carrier plate 10. The air-cooled light source emits light towards the carrier plate 10. The light can pass into the horizontal positioning hole 111 and the vertical positioning hole 112 and then spread out.
[0039] It can be understood that the carrier plate falling compensation device further comprises a beam splitter. The beam splitter is arranged at the connection position of the horizontal positioning hole 111 and the vertical positioning hole 112. The beam splitter is used to split the light, so that the light passes into the horizontal positioning hole 111 and the vertical positioning hole 112. The external air-cooled light source is located at the lower end of the vertical positioning hole 112. After the external air-cooled light source passes in light from the lower end of the vertical positioning hole 112, the light reaches the position of the beam splitter, thereby splitting part of the light into the horizontal positioning hole 111, and the other part of the light continues to spread out from the upper end of the vertical positioning hole 112.
[0040] It needs to be explained that the detection module 20 comprises a camera 21 and a calculation module, the camera 21 and the calculation module are connected, the calculation module and the compensation module are connected, the position of the camera 21 corresponds to the position of the positioning hole 11, the camera 21 is used for capturing the light in the positioning hole 11 and outputting position information representing the light passing condition of the positioning hole 11 to the calculation module, and the calculation module is used for outputting offset information based on the position information.
[0041] Specifically, the outer part of the vertical positioning hole 112 and the horizontal positioning hole 111 corresponds to the camera 21, the camera 21 is used for capturing the light emitted by the vertical positioning hole 112 and the horizontal positioning hole 111 and positioning by taking pictures, and the camera 21 transmits image information to the calculation module, wherein the horizontal positioning hole 111 can be imaged as a regular circle after passing the light, the current center is captured by using visual software, the calculation module compares the current center with the reference center, so as to obtain the deviation between the current center and the reference center, that is, the compensation value of the carrier plate 10 can be calculated, and the compensation module adjusts the position of the carrier plate 10 after obtaining the compensation value output by the calculation module, so as to compensate the carrier plate 10.
[0042] It also needs to be explained that the detection module 20 further comprises a driving member 22, the driving member 22 and the camera 21 are connected, and the driving member 22 is used for driving the camera 21 to ascend and descend. When the carrier plate 10 is running, the driving member 22 drives the camera 21 to descend, so as to allow the carrier plate 10 to pass; after the carrier plate 10 is in place, the driving member 22 drives the camera 21 to ascend, so as to reach the position of the carrier plate 10 to detect the falling. The camera 21 ascends and descends through the driving member 22, so as to avoid affecting the normal operation of the carrier plate 10.
[0043] In the embodiment, the driving member 22 is a pneumatic cylinder. In other embodiments, the driving member 22 can also be other driving devices, which are not limited here.
[0044] In the embodiment, the compensation module is a lifting motor, and the lifting motor is connected with the detection module 20 and the carrier plate 10. The lifting motor is used for driving the carrier plate 10 to ascend and descend based on the offset information calculated by the detection module 20, so as to compensate the carrier plate 10.
[0045] In the embodiment, the number of the lifting motors is multiple. Specifically, the number of the lifting motors is twelve, and the twelve lifting motors are respectively arranged at the edges of the carrier plate 10 and are used for driving the respective positions of the carrier plate 10 to ascend and descend, so as to compensate the falling of the carrier plate 10. In other embodiments, the number of the lifting motors can be adjusted according to actual conditions, which is not limited here.
[0046] In the embodiment, the number of positioning holes 11 is multiple, and the multiple positioning holes 11 are arranged at the edge positions of the carrier plate 10. Specifically, the number of positioning holes 11 is four, the carrier plate 10 is a square plate structure, and the four positioning holes 11 are arranged at the four corner positions of the carrier plate 10. In other embodiments, the number of positioning holes 11 can be adjusted according to actual conditions, which is not limited here.
[0047] In operation, when the carrier plate 10 reaches the detection station, the cylinder drives the camera 21 to rise, the external air-cooled light source emits light, the light passes through the vertical positioning hole 112 and the horizontal positioning hole 111, and the camera 21 captures the light and then takes a photo for positioning, so as to capture the center positions of the vertical positioning hole 112 and the horizontal positioning hole 111. The calculation module compares the current center position captured by the camera 21 with the reference center position, so as to obtain the center offset, and finally calculates the compensation value of the carrier plate 10. After obtaining the compensation value, the compensation module drives the carrier plate 10 to move, so as to compensate the position of the carrier plate 10.
[0048] In summary, the carrier plate falling compensation device and the battery piece production equipment provided by the embodiment of the utility model, the carrier plate falling compensation device includes carrier plate 10, detection module 20 and compensation module, the carrier plate 10 is equipped with positioning hole 11, the positioning hole 11 is used for the light, the detection module 20 and the carrier plate 10 are arranged at intervals, the detection module 20 is used for outputting the offset information of the carrier plate 10 based on the light passing through the positioning hole 11, the compensation module is connected with the detection module 20 and the carrier plate 10 simultaneously, and the compensation module is used for adjusting the position of the carrier plate 10 according to the offset information of the detection module 20. In use, the carrier plate 10 is provided with the positioning hole 11, the positioning hole 11 can pass the light emitted by the external light source, the detection module 20 captures the light emitted by the positioning hole 11, and outputs the offset information of the carrier plate 10 based on the light passing through the positioning hole 11. After receiving the offset information emitted by the detection module 20, the compensation module adjusts the position of the carrier plate 10, so as to compensate the carrier plate 10, avoid the carrier plate 10 from falling and affect the subsequent work.
[0049] The battery piece production equipment includes a battery piece and a carrier plate falling compensation device, and the battery piece is arranged on the carrier plate 10. In use, the carrier plate 10 is provided with the positioning hole 11, the positioning hole 11 can pass the light emitted by the external light source, the detection module 20 captures the light emitted by the positioning hole 11, and outputs the offset information of the carrier plate 10 based on the light passing through the positioning hole 11. After receiving the offset information emitted by the detection module 20, the compensation module adjusts the position of the carrier plate 10, so as to compensate the carrier plate 10, avoid the carrier plate 10 from falling and affect the subsequent work.
[0050] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.
Claims
1. A carrier board drop compensation device, characterized by, The application relates to a falling compensation device for a carrier plate (10) provided with positioning holes (11) for light transmission. The device comprises a detection module (20) spaced apart from the carrier plate (10) and configured to output offset information of the carrier plate (10) based on the light transmission in the positioning holes (11); and a compensation module connected to the detection module (20) and the carrier plate (10) and configured to adjust the position of the carrier plate (10) according to the offset information of the detection module (20). The positioning holes (11) comprise horizontal positioning holes (111) and vertical positioning holes (112) connected to each other and transmitting light. The device further comprises a beam splitter arranged at the connection position of the horizontal positioning holes (111) and the vertical positioning holes (112) and configured to split the light so that the horizontal positioning holes (111) and the vertical positioning holes (112) transmit light.
2. The carrier board drop compensation apparatus of claim 1, wherein, The detection module (20) comprises a camera (21) and a calculation module connected to the camera (21), the position of the camera (21) corresponding to the position of the positioning holes (11), the camera (21) being configured to output position information representing the light transmission in the positioning holes to the calculation module, the calculation module being configured to output the offset information based on the position information, and the calculation module being connected to the compensation module.
3. The carrier board drop compensation apparatus of claim 2, wherein, The detection module (20) further comprises a driving member (22) connected to the camera (21) and configured to drive the camera (21) to move up and down.
4. The carrier board drop compensation apparatus of claim 1, wherein, The driving member (22) is a pneumatic cylinder.
5. The carrier board drop compensation apparatus of claim 4, wherein, The compensation module is a lifting motor connected to the detection module (20) and the carrier plate (10) and configured to drive the carrier plate (10) to move up and down based on the offset information calculated by the detection module (20) so as to compensate the carrier plate (10).
6. The carrier board drop compensation apparatus of claim 5, wherein, The number of the lifting motors is more than one.
7. The carrier board drop compensation apparatus of claim 1, wherein, The number of the positioning holes (11) is more than one, and each of the positioning holes (11) is arranged at the edge of the carrier plate (10).
8. The carrier board drop compensation apparatus of claim 7, wherein, The device is applied to a battery piece arranged on the carrier plate (10).
9. The carrier board drop compensation apparatus of claim 1, wherein, 10. A cell sheet production apparatus characterized by comprising: