Quartz boat loading, unloading and conveying device

Abstract

The utility model belongs to the technical field of quartz boat processing, and discloses a quartz boat loading and unloading conveying device which is arranged on one side of a main machine table, the main machine table is provided with a conveying opening, the quartz boat loading and unloading conveying device comprises a base frame, a conveying mechanism and a cooling mechanism, the base frame is provided with a material conveying station and a cooling station, and the material conveying station corresponds to the conveying opening. The conveying mechanism is arranged on the base frame, the conveying mechanism is used for conveying the quartz boat between the material conveying station and the cooling station and used for conveying the quartz boat between the material conveying station and the conveying opening, and the cooling mechanism is arranged on the base frame, located at the cooling station and used for cooling the quartz boat located at the cooling station. The quartz boat loading, unloading and conveying device provided by the utility model can be used for effectively conveying the quartz boat and reliably cooling the quartz boat after a silicon wafer is arranged in the quartz boat, so that the generation of oxidation smudginess is effectively inhibited, and the proportion of the oxidation smudginess is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz boat processing technical field especially relates to a quartz boat loading and unloading conveying device. BACKGROUND

[0002] Tunneling oxide layer passivation contact (hereinafter referred to as TOPCon) technology is a kind of photovoltaic cell technology, mainly used to improve the conversion efficiency of solar cell and reduce production cost.TOPCon technology is to deposit a layer of ultra-thin silicon oxide layer on the surface of silicon wafer, and form a tunneling oxide layer on it, reduce surface recombination loss by passivation contact, thereby improving the conversion efficiency of the cell.The core of TOPCon technology lies in the formation of tunneling oxide layer.The technology is to deposit a layer of ultra-thin silicon oxide layer on the surface of silicon wafer, and form a tunneling oxide layer on it, reduce surface recombination loss by passivation contact, thereby improving the conversion efficiency of the cell.In addition, TOPCon technology can also further improve efficiency and reduce cost by optimizing process parameters and material selection.

[0003] In actual operation process, the growth rate of oxide layer is positively correlated with growth time, environmental temperature and humidity, in actual mass production process, for the requirement of machine output, the quartz boat and silicon wafer that have not been cooled completely will be temporarily moved to automation for loading and unloading to maximize the output, but the quartz boat that has not been cooled completely will cause the temperature to be significantly higher than the normal temperature in the automation environment, causing the growth rate of natural oxide layer to exceed the reasonable range, causing oxidation contamination, affecting the oxidation effect.Therefore, how to inhibit the generation of oxidation contamination and balance product mass production and process effect has become a problem to be solved by technical personnel in the field. INVENTION CONTENTS

[0004] The utility model aims at providing a quartz boat loading and unloading conveying device, which can effectively convey the quartz boat, reliably cool the quartz boat after the silicon wafer is placed inside, effectively inhibit the generation of oxidation contamination and reduce the proportion of oxidation contamination.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] A quartz boat loading and unloading conveying device is arranged on one side of a main machine, the main machine has a conveying port, and the quartz boat can enter the main machine through the conveying port, the quartz boat loading and unloading conveying device comprises:

[0007] A base frame has a material conveying station and a cooling station, and the material conveying station is arranged correspondingly to the conveying port;

[0008] A conveying mechanism is arranged on the base frame, and the conveying mechanism is used to convey the quartz boat between the material conveying station and the cooling station, and is used to convey the quartz boat between the material conveying station and the conveying port;

[0009] A cooling mechanism is arranged on the base frame and located at the cooling station, and is used for cooling the quartz boat at the cooling station.

[0010] Preferably, the cooling mechanism comprises a cooling fan, an exhaust hood, and a lifting assembly.

[0011] The cooling fan is arranged on the base frame, the exhaust hood is correspondingly arranged above the cooling fan, and the lifting assembly is used for driving the exhaust hood to lift or lower relative to the cooling fan.

[0012] Preferably, the exhaust hood is provided with an exhaust hole.

[0013] Preferably, the exhaust hood is provided with an exhaust mechanism.

[0014] Preferably, the lifting assembly comprises a sliding rail and a sliding part, the sliding rail is arranged on the base frame in a direction perpendicular to the bottom surface of the base frame, the sliding part is slidably connected to the sliding rail, and the exhaust hood is arranged on the sliding part.

[0015] Preferably, the cooling mechanism further comprises a temperature sensor, the temperature sensor is used for detecting the temperature of the cooling station, and the temperature sensor is in communication connection with the cooling fan and the lifting assembly.

[0016] Preferably, the conveying mechanism comprises a first conveying belt and a second conveying belt, the first conveying belt is arranged on the base frame, the second conveying belt is arranged on the conveying end of the first conveying belt, and the quartz boat can be arranged on the conveying end of the second conveying belt; the first conveying belt is used for conveying the second conveying belt between the material conveying station and the cooling station, and the second conveying belt is adapted to convey the quartz boat to the conveying port when the quartz boat is at the material conveying station.

[0017] Preferably, the number of the second conveying belts is at least two, and the interval between two adjacent second conveying belts is equal to the interval between the material conveying station and the cooling station.

[0018] Preferably, the base frame further has a loading and unloading station, and a loading and unloading mechanism is further arranged, which is used for carrying the quartz boat without silicon wafers on the loading and unloading station to the conveying mechanism, or carrying the quartz boat with silicon wafers and after cooling to the loading and unloading station.

[0019] Preferably, the base frame is further provided with a third conveying belt, which is used for conveying the quartz boat without silicon wafers into the loading and unloading station, or conveying the quartz boat with silicon wafers and after cooling out of the loading and unloading station.

[0020] Advantages:

[0021] The quartz boat loading and unloading conveying device provided by the utility model places the quartz boat without built-in silicon wafer on the conveying mechanism when working, and the quartz boat without built-in silicon wafer is conveyed into the conveying port by the conveying mechanism to enter the main machine table and build in the silicon wafer, and the quartz boat with built-in silicon wafer is sent out from the conveying port and returned to the conveying mechanism. The above process is carried out on the material conveying station. After the conveying mechanism is loaded with the quartz boat with built-in silicon wafer just sent out from the conveying port, the conveying mechanism conveys the quartz boat from the material conveying station to the cooling station, and the quartz boat is cooled by the cooling mechanism arranged at the cooling station, so that the quartz boat with built-in silicon wafer is quickly and effectively cooled, the quartz boat is quickly and completely cooled, the growth rate of the natural oxidation layer is controlled within a reasonable range, the generation of oxidation stains is effectively inhibited, and the proportion of oxidation stains is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a structural schematic view of the quartz boat loading and unloading conveying device provided by the utility model;

[0023] Figure 2 is a partial structural schematic view of the cooling mechanism provided by the utility model.

[0024] In the drawings:

[0025] 1, base frame;

[0026] 2, conveying mechanism; 21, first conveying belt; 22, second conveying belt;

[0027] 3, cooling mechanism; 31, cooling fan; 32, exhaust hood; 321, exhaust hole; 33, sliding rail; 34, sliding part;

[0028] 4, third conveying belt;

[0029] 5, main machine table; 51, conveying port. DETAILED DESCRIPTION

[0030] The utility model will be further described in detail in combination with the drawings and examples. It can be understood that the specific examples described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0031] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two elements of the interaction relationship.For the ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0032] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features are not direct contact but contact through the additional features between them.Moreover, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the horizontal height of the first feature is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the horizontal height of the first feature is less than the second feature.

[0033] In the description of the embodiment, the terms "on", "under", "right", etc. Orientation or positional relationship is based on the orientation or positional relationship shown in the drawing, only for the convenience of description and simplification operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0034] The embodiment provides a quartz boat loading and unloading conveying device. Figures 1-2 As shown in the figure, the quartz boat loading and unloading conveying device is arranged on one side of the main machine table 5, the main machine table 5 has a conveying port 51, and the quartz boat can enter the main machine table 5 through the conveying port 51.The quartz boat loading and unloading conveying device comprises a base frame 1, a conveying mechanism 2 and a cooling mechanism 3.The base frame 1 has a conveying station and a cooling station, and the conveying station is arranged correspondingly with the conveying port 51;The conveying mechanism 2 is arranged on the base frame 1, and the conveying mechanism 2 is used for conveying the quartz boat between the conveying station and the cooling station, and is used for conveying the quartz boat between the conveying station and the conveying port 51;The cooling mechanism 3 is arranged on the base frame 1 and located in the cooling station, and the cooling mechanism 3 is used for cooling the quartz boat in the cooling station.

[0035] In the embodiment, the quartz boat loading and unloading conveying device places the quartz boat without silicon wafers in the conveying mechanism 2 when working, and then the conveying mechanism 2 conveys the quartz boat without silicon wafers into the conveying port 51 to enter the main machine table 5 and place the silicon wafers. The quartz boat with the silicon wafers placed is sent out from the conveying port 51 and returns to the conveying mechanism 2. The above process is performed on the material conveying station. When the conveying mechanism 2 is loaded with the quartz boat with the silicon wafers just sent out from the conveying port 51, the conveying mechanism 2 conveys the quartz boat from the material conveying station to the cooling station, and then the cooling mechanism 3 arranged on the cooling station rapidly and effectively cools the quartz boat with the silicon wafers, so as to ensure that the quartz boat is rapidly and completely cooled, control the natural oxide layer growth rate within a reasonable range, effectively inhibit the generation of oxidation stains, and reduce the proportion of oxidation stains.

[0036] In the embodiment, the cooling mechanism 3 includes a cooling fan 31, an air exhaust cover 32, and a lifting assembly. The cooling fan 31 is arranged on the base frame 1, the air exhaust cover 32 is arranged above the cooling fan 31, and the lifting assembly is used to drive the air exhaust cover 32 to ascend and descend relative to the cooling fan 31. Specifically, when the conveying mechanism 2 is loaded with the quartz boat with the silicon wafers just sent out from the conveying port 51, the conveying mechanism 2 conveys the quartz boat from the material conveying station to the cooling station, and then the air exhaust cover 32 is lowered by the lifting assembly to cover the quartz boat. The cooling fan 31 is started and blows air to the quartz boat covered in the air exhaust cover 32, so as to rapidly and effectively cool the quartz boat with the silicon wafers, and ensure that the quartz boat is rapidly and completely cooled. When the quartz boat is completely cooled, the cooling fan 31 can stop working, and the air exhaust cover 32 is lifted again.

[0037] Exemplarily, the number and arrangement position of the cooling fan 31 can be adaptively adjusted according to actual use.

[0038] In the embodiment, the air exhaust cover 32 is provided with air exhaust holes 321. The air exhaust holes 321 can timely exhaust the air in the air exhaust cover 32 when the cooling fan 31 blows air, effectively flow the cold air in the air exhaust cover 32, ensure the cleanliness inside the air exhaust cover 32, and avoid abnormal cleanliness inside the air exhaust cover 32.

[0039] Exemplarily, the number and arrangement position of the air exhaust holes 321 can be adaptively adjusted according to actual use.

[0040] As an optional implementation, the air exhaust mechanism is arranged in the air exhaust cover 32. The air exhaust mechanism can further ensure the effective flow of the cold air in the air exhaust cover 32. Optionally, the air exhaust mechanism can be an air exhaust fan.

[0041] Exemplarily, the lifting assembly comprises a slide rail 33 and a sliding part 34, the slide rail 33 is arranged on the base frame 1 in a direction perpendicular to the bottom surface of the base frame 1, and the sliding part 34 is slidingly connected to the slide rail 33, and the exhaust hood 32 is arranged on the sliding part 34. Specifically, the sliding part 34 is lifted relative to the slide rail 33, and can drive the lifting action of the exhaust hood 32 relative to the base frame 1, so as to realize the lifting and lowering of the exhaust hood 32.

[0042] Exemplarily, the lifting assembly can be provided as a linear servo module comprising the slide rail 33 and the sliding part 34.

[0043] Exemplarily, the lifting assembly can also be provided as a drive cylinder, the drive cylinder comprising a cylinder body and a cylinder rod, the cylinder body is fixedly arranged on the base frame 1, and the exhaust hood 32 is fixedly arranged on the cylinder rod. The lifting action of the exhaust hood 32 is realized by the extension and retraction of the cylinder rod relative to the cylinder body.

[0044] In the embodiment, the cooling mechanism 3 further comprises a temperature sensor for detecting the temperature of the cooling station, and the temperature sensor is in communication connection with the cooling fan 31 and the lifting assembly. Specifically, the temperature sensor is in communication connection with the cooling fan 31 and the lifting assembly through the control member. Specifically, when the conveying mechanism 2 is loaded with the quartz boat with a silicon wafer just sent out from the conveying port 51 and is conveyed to the cooling station, the temperature sensor detects that the temperature of the quartz boat is higher than the cooling threshold value, at this time, the temperature sensor sends a signal to the control member, so that the control member controls the cooling fan 31 to work, and at the same time controls the lifting assembly to drive the exhaust hood 32 to lower and cover the quartz boat. When the temperature sensor detects that the temperature of the quartz boat has dropped to below the cooling threshold value, it indicates that the quartz boat has been cooled completely, at this time, the temperature sensor sends a signal to the control member, so that the control member controls the cooling fan 31 to stop working, and at the same time controls the lifting assembly to drive the exhaust hood 32 to rise again.

[0045] Exemplarily, the control member can be provided as a PCB circuit board.

[0046] In the embodiment, the conveying mechanism 2 comprises a first conveying belt 21 and a second conveying belt 22, the first conveying belt 21 is arranged on the base frame 1, and the second conveying belt 22 is arranged on the conveying end of the first conveying belt 21, and the quartz boat can be placed on the conveying end of the second conveying belt 22. The first conveying belt 21 is used to convey the second conveying belt 22 between the material conveying station and the cooling station, and the second conveying belt 22 is adapted to convey the quartz boat to the conveying port 51 when the quartz boat is in the material conveying station. Specifically, Figure 1The first direction is the conveying direction of the first conveying belt 21, and the second direction is the conveying direction of the second conveying belt 22. In the initial state, the second conveying belt 22 is located at the feeding station. Then, the quartz boat without the silicon wafer is placed on the conveying end of the second conveying belt 22. The second conveying belt 22 works to convey the quartz boat along the second direction to the conveying port 51, so that the quartz boat enters the main machine table 5 and is internally placed with the silicon wafer. The quartz boat with the internally placed silicon wafer is sent out from the conveying port 51 and returned to the second conveying belt 22. Then, the first conveying belt 21 works to drive the second conveying belt 22 to convey along the first direction from the feeding station to the cooling station. The cooling mechanism 3 cools the quartz boat. After cooling, the first conveying belt 21 works to convey the second conveying belt 22 from the cooling station back to the feeding station, so that the quartz boat after cooling is returned to the feeding station for subsequent feeding and conveying work. The specific structure of the first conveying belt 21 and the second conveying belt 22 is the prior art.

[0047] In this embodiment, the number of the second conveying belt 22 is at least two, and the interval between the adjacent two second conveying belts 22 is equal to the interval between the feeding station and the cooling station. For example, the number of the second conveying belt 22 is two, and the two second conveying belts 22 are respectively the second conveying belt A and the second conveying belt B. The interval between the second conveying belt A and the second conveying belt B is equal to the interval between the feeding station and the cooling station. Specifically, when the second conveying belt A is located opposite to the conveying port 51, the second conveying belt B is misaligned with the conveying port 51. At this time, only the quartz boat is placed on the second conveying belt A for conveying work. After the quartz boat with the internally placed silicon wafer is sent out from the conveying port 51 and returned to the second conveying belt A, the first conveying belt 21 works to convey the second conveying belt A from the feeding station to the cooling station, while the second conveying belt B is also conveyed to the position opposite to the conveying port 51. At this time, the quartz boat can be placed on the second conveying belt B for conveying work, which is equivalent to simultaneously conveying the quartz boat for silicon wafer internal placement and cooling the quartz boat after the silicon wafer internal placement, thereby further improving the work efficiency. Of course, the number of the second conveying belt 22 can also be three or other numbers, which is not limited here.

[0048] In this embodiment, the quartz boat loading and unloading conveying device further comprises a loading and unloading mechanism (not shown), and the base frame 1 further has a loading and unloading station. The loading and unloading mechanism is used to carry the quartz boat without the silicon wafer on the loading and unloading station to the conveying mechanism 2, or carry the quartz boat with the internally placed silicon wafer and the cooled quartz boat on the conveying mechanism 2 to the loading and unloading station. For example, the loading and unloading mechanism can be used for feeding and discharging work of the quartz boat. The automatic feeding and discharging work of the quartz boat is ensured. For example, the loading and unloading mechanism can be a mechanical arm with a gripper structure.

[0049] In the embodiment, the base frame 1 is further provided with a third conveying belt 4, which is used for conveying the quartz boat without built-in silicon wafer into the loading and unloading station or conveying the quartz boat with built-in silicon wafer and with completed cooling out of the loading and unloading station. The third conveying belt 4 can realize the conveying work in the loading and unloading process of the quartz boat, and further improves the overall automation degree of the device.

[0050] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A quartz boat loading / unloading transfer device provided on one side of a main machine table (5) having a transfer port (51) through which a quartz boat can enter the main machine table (5), characterized in that, The quartz boat loading and unloading conveying device comprises: a base frame (1) having a feeding station and a cooling station, the feeding station being arranged corresponding to the conveying port (51); a conveying mechanism (2) arranged on the base frame (1), the conveying mechanism (2) being used for conveying the quartz boat between the feeding station and the cooling station, and used for conveying the quartz boat between the feeding station and the conveying port (51); a cooling mechanism (3) arranged on the base frame (1) and located at the cooling station, the cooling mechanism (3) being used for cooling the quartz boat at the cooling station.

2. The quartz boat loading / unloading transfer apparatus according to claim 1, wherein The cooling mechanism (3) comprises a cooling fan (31), an exhaust hood (32), and a lifting assembly; wherein, the cooling fan (31) is arranged on the base frame (1), the exhaust hood (32) is arranged above the cooling fan (31) in correspondence, and the lifting assembly is used for driving the exhaust hood (32) to lift relative to the cooling fan (31).

3. The quartz boat loading / unloading transfer apparatus according to claim 2, wherein The exhaust hood (32) is provided with an exhaust hole (321).

4. The quartz boat loading / unloading transfer apparatus according to claim 2, wherein The exhaust hood (32) is provided with an exhaust mechanism.

5. The quartz boat handling transport apparatus according to claim 2, wherein The lifting assembly comprises a sliding rail (33) and a sliding part (34), the sliding rail (33) is arranged on the base frame (1) in a direction perpendicular to the bottom surface of the base frame (1), the sliding part (34) is slidingly connected to the sliding rail (33), and the exhaust hood (32) is arranged on the sliding part (34).

6. The quartz boat handling transport apparatus according to claim 2, wherein The cooling mechanism (3) further comprises a temperature sensor (35), the temperature sensor (35) is used for detecting the temperature of the cooling station, and the temperature sensor (35) is in communication connection with the cooling fan (31) and the lifting assembly.

7. The quartz boat handling transport apparatus according to claim 1, wherein The conveying mechanism (2) comprises a first conveying belt (21) and a second conveying belt (22), the first conveying belt (21) is arranged on the base frame (1), the second conveying belt (22) is arranged on the conveying end of the first conveying belt (21), and the quartz boat can be placed on the conveying end of the second conveying belt (22); the first conveying belt (21) is used for conveying the second conveying belt (22) between the feeding station and the cooling station, and the second conveying belt (22) is adapted to convey the quartz boat to the conveying port (51) when the quartz boat is at the feeding station.

8. The quartz boat handling transport apparatus according to claim 7, wherein The number of the second conveying belts (22) is at least two, and the interval between adjacent two second conveying belts (22) is equal to the interval between the feeding station and the cooling station.

9. The quartz boat handling transport apparatus according to claim 1, wherein, Further comprising a loading and unloading mechanism, the base frame (1) further has a loading and unloading station, and the loading and unloading mechanism is used for carrying the quartz boat without built-in silicon wafer on the loading and unloading station to the conveying mechanism (2), or carrying the quartz boat with built-in silicon wafer and cooling completed on the conveying mechanism (2) to the loading and unloading station.

10. The quartz boat handling transport apparatus according to claim 9, wherein, The base frame (1) is further provided with a third conveying belt (4), the third conveying belt (4) is used for conveying the quartz boat without built-in silicon wafer into the loading and unloading station, or conveying the quartz boat with built-in silicon wafer out of the loading and unloading station.

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