Encore TaN device outer shielding body correction device

Abstract

The utility model relates to the technical field of semiconductors, in particular to an Encore TaN device outer shielding body correcting device which comprises a correcting disc (1). The correcting disc (1) comprises a correcting plate (2); a driving device is arranged at the bottom of the correcting disc (1); the driving device is propped against the correcting plate (2); the correction disc (1) is connected with an outer shielding cover (3); the correction plate (2) abuts against the outer shielding cover (3). The device is driven by the driving device, and workers do not need to manually knock and repair by using a rubber hammer; automatic operation is realized, and the working efficiency is greatly improved; and the correction plate abuts against the outer shielding case for correction and repair, so that the repaired outer shielding case can meet the roundness requirement, and the correction precision is effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to an Encore TaN device external shielding correction device. Background Technology

[0002] As semiconductor integrated circuit chip processing linewidths enter the nanometer era, the application scope of Cu (copper) line technology is becoming increasingly wide. However, because Cu molecules diffuse very easily, they can easily cause deep energy level defects. Therefore, it is necessary to deposit a TaN (TiAlN, i.e., titanium aluminum nitride) barrier layer to prevent Cu diffusion contamination. The Encore TaN device (Encore device, a type of equipment in the field of semiconductor integrated circuit PVD (physical vapor deposition) process) is a key piece of equipment in the field of semiconductor integrated circuit Cu process.

[0003] In conventional cleaning processes, high-concentration hydrofluoric acid or nitrofluoric acid (a mixed solution of nitric acid and hydrofluoric acid) is used to remove the thin film on the outer shield of the Encore TaN device. Although this method has a significant cleaning effect, it cannot avoid the corrosion of the aluminum material of the component body by concentrated acid. Some components in the Encore TaN cavity suffer significant losses during traditional regeneration processes. With the increase of regeneration cycles, some components will become deformed, thinned, or perforated, eventually causing the entire set of equipment components to become unusable. Currently, the conventional practice for correcting the outer shield of the Encore TaN device is to use a rubber mallet to hammer the deformed areas. For some components with strict roundness requirements, the hammering operation is inconvenient for employees, and it is impossible to guarantee the true roundness of the components, resulting in the scrapping of the components.

[0004] The applicant discovered through a search that Chinese patent document with publication number 220926901U, published on May 10, 2024, discloses a spraying fixture for the outer cup cover of the Encore TaN device. This fixture includes a disc, an anti-tipping support assembly at the bottom of the disc, and several spraying support assemblies evenly distributed around the top circumference of the disc. Each spraying support assembly includes a support column fixed to the disc, with a bolt threaded onto the top of the support column and a rubber plug passing through the bolt's thread. The anti-tipping support assembly includes several triangular supports evenly fixed around the bottom of the disc. Each triangular support is integrally formed from two inclined plates, with the tops of the two inclined plates connected and fixed to the bottom of the disc, and the bottoms of the two inclined plates being flush. This device also fails to solve the aforementioned technical problem.

[0005] Therefore, in order to improve or solve at least one of the above problems, it is necessary to provide an Encore TaN device outer shield correction device that can efficiently and accurately correct the deformation of the outer shield of the Encore TaN device. Utility Model Content

[0006] The purpose of this invention is to provide an Encore TaN device outer shield correction device that can efficiently and accurately correct the deformation of the outer shield of the Encore TaN device.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: an Encore TaN device outer shielding correction device, including a correction disc; the correction disc includes a correction plate; a driving device is provided at the bottom of the correction disc; the driving device is pressed against the correction plate; an outer shielding cover is connected to the correction disc; the correction plate is pressed against the outer shielding cover.

[0008] The outer shielding cover includes a base; the base is provided with mounting holes; the correction plate is disposed in the mounting holes.

[0009] The correction plate includes a base plate; the base plate is provided with a fan-shaped plate; the fan-shaped plate extends into the mounting hole and abuts against the base.

[0010] The sector plate includes a corrective end face; the end of the sector plate away from the corrective end face is provided with a connecting end face; the corrective end face abuts against the inner wall of the mounting hole; the connecting end face abuts against the driving device.

[0011] The driving device includes a driving rod; one end of the driving rod abuts against the connecting end face; the other end of the driving rod is connected to a jack.

[0012] The drive rod includes a smaller end and a larger end; the side of the smaller end abuts against the connecting end face.

[0013] The correction disc includes a plurality of the correction plates.

[0014] The beneficial effects of this application are as follows:

[0015] This application activates a jack, which drives the drive rod to move upward. The correction plate has multiple correction plates, each with a fan-shaped structure. Multiple fan-shaped plates can be assembled into a complete circular structure. The connecting end faces of the fan-shaped plates can be assembled into a circular hole. The smaller end of the drive rod extends into the circular hole, and as the drive rod moves, it can press the correction end face of the fan-shaped plate against the inner wall of the mounting hole, thereby achieving the deformation repair of the outer shield's base.

[0016] This application is jack-driven, eliminating the need for manual repair using a rubber mallet; it achieves automated operation and greatly improves work efficiency.

[0017] This application uses the correction end face of the sector plate to press against the inner wall of the mounting hole for correction and repair, which enables the repaired base to meet the roundness requirements and effectively improves the correction accuracy. Attached Figure Description

[0018] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, wherein:

[0019] Figure 1 This is a schematic diagram of the structure of the external shielding correction device of the Encore TaN device.

[0020] Figure 2 This is a schematic diagram of the correction disc of the external shielding correction device of the Encore TaN device.

[0021] Figure 3 This is a schematic diagram of the drive rod of the external shielding correction device of the Encore TaN device.

[0022] Figure 4 This is a schematic diagram of the structure of the outer shield of the correction device for the outer shield of the Encore TaN device.

[0023] The markings in the above figures are all:

[0024] The diagram is marked as follows:

[0025] 1. Correction disc,

[0026] 2. Correction plate, 201. Base plate,

[0027] 3. Outer shielding cover, 301. Side plate, 302. Through hole, 303. Through groove.

[0028] 4. Base, 401. Mounting hole, 402. Sector plate, 403. Correction end face, 404. Connection end face.

[0029] 5. Drive rod, 501, smaller end, 502, larger end. Detailed Implementation

[0030] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of this utility model, and to facilitate its implementation.

[0031] Figure 1 The Encore TaN device shown has an outer shielding correction device, including a correction disc 1; the correction disc 1 includes a correction plate 2; a driving device is provided at the bottom of the correction disc 1; the driving device is pressed against the correction plate 2; the correction disc 1 is connected to an outer shielding cover 3; the correction plate 2 is pressed against the outer shielding cover 3.

[0032] This application is driven by a drive device, eliminating the need for manual repair by workers using a rubber mallet; it achieves automated operation, greatly improving work efficiency; and the correction and repair are performed by the straightening plate 2 and the outer shield 3 being pressed together, which enables the repaired outer shield 3 to meet the roundness requirements, effectively improving the correction accuracy.

[0033] The outer shield 3 includes a base 4; the base 4 is provided with mounting holes 401; the correction plate 2 is disposed in the mounting holes 401.

[0034] The base 4 has a ring structure; the base 4 is provided with a side plate 301; the side plate 301 is provided with a through hole 302; the side of the side plate 301 away from the base 4 is provided with a through groove 303; the base 4 is prone to deformation, which makes it impossible to guarantee the roundness of the mounting hole 401.

[0035] The correction plate 2 includes a base plate 201; a fan-shaped plate 402 is provided on the base plate 201; the fan-shaped plate 402 extends into the mounting hole 401 and abuts against the base 4.

[0036] Both the base plate 201 and the fan-shaped plate 402 are fan-shaped structures; multiple base plates 201 can be assembled into a complete circle; multiple fan-shaped plates 402 can be assembled into a complete circle; the base plate 201 is pressed against the bottom surface of the base 4; the fan-shaped plate 402 extends into the mounting hole 401 and is pressed against the inner wall of the mounting hole 401, thereby realizing the repair and correction operation.

[0037] The sector plate 402 includes a straightening end face 403; a connecting end face 404 is provided at one end of the sector plate 402 away from the straightening end face 403; the straightening end face 403 abuts against the inner wall of the mounting hole 401; the connecting end face 404 abuts against the driving device.

[0038] The straightening end face 403 is an arc-shaped end face that can fit the arc-shaped inner wall of the mounting hole 401. The straightening end faces 403 of multiple sector plates 402 simultaneously press against the inner wall of the mounting hole 401, which can restore the deformed structure of the base 4. The connecting end faces 404 of multiple sector plates 402 are assembled into a round hole. The drive rod 5 extends into the round hole and can press the sector plates 402 against the inner wall of the mounting hole 401.

[0039] The driving device includes a driving rod 5; one end of the driving rod 5 is pressed against the connecting end face 404; the other end of the driving rod 5 is connected to a jack.

[0040] The drive rod 5 has a frustum structure; when the drive rod 5 moves toward the mounting hole 401, the side wall of the drive rod 5 is pressed against the connecting end face 404; thereby pressing the sector plate 402 toward the inner wall of the mounting hole 401.

[0041] The drive rod 5 includes a smaller end 501 and a larger end 502; the side of the smaller end 501 abuts against the connecting end face 404.

[0042] Multiple sector plates 402 are joined together at their connecting end faces 404 to form a circular hole; the smaller end 501 extends into the circular hole, and the side of the smaller end 501 abuts against the connecting end face 404, thereby driving the sector plates 402 to be squeezed against the inner wall of the mounting hole 401 to achieve the repair operation.

[0043] The corrective disc 1 includes multiple corrective plates 2.

[0044] Multiple correction plates 2 can be assembled into a complete circle; in this embodiment, the correction disc 1 includes three correction plates 2; the central angle of the cross-section of the correction plate 2 is 120 degrees.

[0045] The specific workflow of this utility model is as follows:

[0046] This application starts the jack, which drives the drive rod 5 to move upward; the straightening plate 1 is provided with multiple straightening plates 2; the straightening plate 2 is provided with a sector plate 402; the multiple sector plates 402 can be assembled into a complete circular structure; the connecting end faces 404 of the multiple sector plates 402 can be assembled into a circular hole; the smaller end 501 of the drive rod 5 extends into the circular hole, and with the movement of the drive rod 5, the straightening end face 403 of the sector plate 402 can be pressed against the inner wall of the mounting hole 401, thereby realizing the deformation repair of the base 4 of the outer shield 3.

[0047] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A correction device for the outer shield of an Encore TaN device, characterized in that: The device includes a correction disc (1); the correction disc (1) includes a correction plate (2); a driving device is provided at the bottom of the correction disc (1); the driving device abuts against the correction plate (2); the correction disc (1) is connected to an outer shield (3); the correction plate (2) abuts against the outer shield (3); the outer shield (3) includes a base (4); the base (4) is provided with a mounting hole (401); the correction plate (2) is disposed in the mounting hole (401); the correction plate (2) includes a base plate. (201); A fan-shaped plate (402) is provided on the base plate (201); The fan-shaped plate (402) extends into the mounting hole (401) and abuts against the base (4); The fan-shaped plate (402) includes a straightening end face (403); A connecting end face (404) is provided at one end of the fan-shaped plate (402) away from the straightening end face (403); The straightening end face (403) abuts against the inner wall of the mounting hole (401); The connecting end face (404) abuts against the driving device.

2. The Encore TaN device external shielding correction device according to claim 1, characterized in that: The driving device includes a driving rod (5); one end of the driving rod (5) abuts against the connecting end face (404); the other end of the driving rod (5) is connected to a jack.

3. The Encore TaN device external shielding correction device according to claim 2, characterized in that: The drive rod (5) includes a smaller end (501) and a larger end (502); the side of the smaller end (501) abuts against the connecting end face (404).

4. The Encore TaN device external shielding correction device according to claim 3, characterized in that: The correction disc (1) includes a plurality of the correction plates (2).

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