Precise drying oven

Abstract

The utility model discloses a precise drying oven which comprises a motor, a filter, a louver board, an exhaust inlet, a heater, a protective door, an outer box, an inner box, a control cabinet, idler wheels, a sealing rubber strip, a display screen, an operation indicating lamp, a sensor, a drying oven body, a centrifugal fan wheel, an air guide pipeline, an air guide plate, a connecting block, a rotating shaft, a connecting rod, a connecting plate and an electric cylinder. The output end of the motor is fixedly connected with a centrifugal fan wheel, the centrifugal fan wheel is arranged in the inner box, a louver board is arranged on one side of the drying oven body, and a filter is arranged on one side of the louver board; the filtering structure is designed in the drying oven, and the air can continuously flow through the filter by constructing the efficient circulating air duct, so that deep circulating filtration is realized, various volatile matters and fine dust generated in the drying oven can be effectively filtered out, the high cleanliness of the internal environment of the drying oven is ensured, and the service life of the drying oven is prolonged. And the method has obvious effects on improving the product quality and avoiding cross contamination.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of oven, especially relates to a precision oven. BACKGROUND

[0002] With the rapid development of intelligent technology, especially the rapid development of electronic industry and semiconductor industry, the demand for high-temperature baking equipment is increasing, and the test environment requirement of equipment is higher and higher, the clean precision oven is one of commonly used equipment in various aging tests, and can inhibit the generation of particulate matter in the test process, mainly applied to the pretreatment baking, film hardening baking and high-temperature baking of silicon wafers, gallium arsenide, lithium niobate and glass materials in semiconductor manufacturing, in addition, it is also suitable for drying, heat treatment, aging and other high-temperature tests of non-volatile and non-flammable and explosive materials in electronic liquid crystal display, LCD, CMOS, IS, medicine, laboratory and other departments.

[0003] At present, the high-temperature baking equipment on the domestic market mainly takes high-temperature aging as the main part, has simple structure, single function and no clean function, and cannot meet the development of semiconductor industry and high-performance electronic industry, specifically: one, no filter is installed in the box, the cleanliness in the box is poor, and volatile matter or dust cannot be removed; two, the resistance of the installed filter is too large, the wind speed is small, and the temperature deviation in the box is large; three, the filter has poor high-temperature resistance, low service life and needs to be replaced frequently; at present, the similar high-temperature ovens have poor baking effect in general, and cannot meet the use of high-performance electronic products and semiconductor products, especially in wafer solidification, the sample is easy to oxidize, causing great loss. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims at providing a precision oven to solve the problems in the above background technology.

[0005] In order to solve the above technical problems, the utility model provides the following technical scheme: a precision oven, comprising an outer box, an inner box is arranged in the outer box, an oven main body is arranged in the inner box, the upper surface of the outer box is fixedly connected with a control cabinet, a motor is fixedly connected in the control cabinet, the output end of the motor is fixedly connected with a centrifugal fan wheel, the centrifugal fan wheel is arranged in the inner box, a louver is arranged on one side of the oven main body, a filter is arranged on one side of the louver, and the filter and the louver are both fixedly connected to the inner wall of the inner box.

[0006] As a further technical scheme of the utility model, a wind guide pipe is fixedly connected to the inner wall of the inner box, and the centrifugal fan wheel is arranged in the wind guide pipe, a heater is arranged on one side of the wind guide pipe, and the heater is fixedly connected to the inner wall of the inner box.

[0007] As a further technical scheme of the utility model, an air suction port is arranged on the outer wall of one side of the oven main body, and a sensor is fixedly connected to the inner wall of the oven main body.

[0008] As a further technical scheme of the utility model, the baffle is provided with a connecting block fixedly connected to one side outer wall of the baffle, a rotating shaft fixedly connected to the connecting block, a connecting rod sleeved on the baffle and fixedly connected to the connecting block, and an electric cylinder provided on one side of the baffle, wherein an output end of the electric cylinder is fixedly connected with a connecting plate fixedly connected to the connecting rod.

[0009] As a further technical scheme of the utility model, the lower surface of the outer box is fixedly connected with a roller.

[0010] As a further technical scheme of the utility model, a protective door is hinged to one side outer wall of the outer box, and a sealing rubber strip is fixedly connected to one side outer wall of the protective door.

[0011] As a further technical scheme of the utility model, a display screen is fixedly connected to one side outer wall of the control cabinet, and a running indicator lamp is fixedly connected to the upper surface of the control cabinet.

[0012] Compared with the prior art, the utility model has the beneficial effects that: the utility model is provided with a filtering structure in the oven, a high-efficiency circulating air duct is constructed, air can continuously flow through the filter, deep circulation filtering is realized, various volatile matters and fine dust generated in the oven can be filtered out very effectively, the internal environment of the oven is ensured to be highly clean, the product quality is improved, and cross contamination is avoided, the air circulation efficiency is improved by using the large air volume filter and the baffle with the adjustable air supply angle, the distribution of air flow can be flexibly adjusted, the temperature deviation of each area in the oven is significantly reduced, the overall temperature uniformity is higher, the baking effect is optimized, the application requirement in the high-temperature environment is fully considered, the selected material has good high-temperature resistance, which means that the components of the oven are not easy to age even in long-time high-temperature baking operation, the high stability and durability are maintained, the service life of the oven is prolonged, and the additional cost caused by frequent replacement of components is significantly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical schemes in the embodiments of the utility model or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating creative labor.

[0014] Figure 1 It is the overall front view schematic diagram of the utility model;

[0015] Figure 2 It is the whole side view cut structure schematic view of the utility model;

[0016] Figure 3 It is the louver's three-dimensional structure schematic view of the utility model;

[0017] Figure 4 It is the louver's three-dimensional structure schematic view of the utility model from another angle;

[0018] Figure 5 It is Figure 4 The enlarged structure schematic view of A area in the middle.

[0019] In the drawing: 1, motor;2, filter;3, louver;4, air suction port;5, heater;6, protection door;7, outer box;8, inner box;9, control cabinet;10, roller;11, sealing rubber strip;12, display screen;13, running indicator light;14, sensor;15, oven main body;16, centrifugal fan wheel;17, air guide pipeline;18, air guide plate;19, connecting block;20, rotating shaft;21, connecting rod;22, connecting plate;23, electric cylinder. DETAILED DESCRIPTION

[0020] In order to make the purpose technical scheme and the advantage of the utility model embodiment more clear, the technical scheme in the utility model embodiment will be described clearly and completely in the following with the drawings in the utility model embodiment, obviously, the described embodiment is a part of the embodiment of the utility model, rather than all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor belong to the scope of the utility model protection.

[0021] Please refer to the drawings of the utility model embodiment in the following Figure 1 - the drawings of the utility model embodiment in the following Figure 5The utility model provides a kind of embodiment: a precise oven, including outer box 7, inner box 8 is provided in outer box 7, inner box 8 is provided with oven main body 15, the upper surface of outer box 7 is fixedly connected with control cabinet 9, motor 1 is fixedly connected in control cabinet 9, the output of motor 1 is fixedly connected with centrifugal fan wheel 16, and centrifugal fan wheel 16 is arranged in inner box 8, the side of oven main body 15 is provided with louver 3, the side of louver 3 is provided with filter 2, and filter 2 and louver 3 are all fixedly connected on the inner wall of inner box 8, filter 2 uses high-temperature heat-resistant HEPA, wind resistance is smaller, and air volume is larger, and high-performance purification filtering can be reached by horizontal circulation mode, outer box 7 is processed using cold-rolled steel sheet, then is baked paint treatment, and is equipped with reinforcing framework, guarantee the overall strength of box body, inner box 8 is processed using senior SUS304 stainless steel sheet, surface is smooth, control cabinet 9 is baked paint treatment using cold-rolled steel sheet, outer box 7 and inner box 8 are filled with glass fiber thermal insulation cotton between, and the thickness of thermal insulation material is 100mm, guarantee that the temperature outside box is lower than 50 DEG C when 300 DEG C high temperature test in box;The inner wall of inner box 8 is fixedly connected with air guide duct 17, and centrifugal fan wheel 16 is arranged in air guide duct 17, the side of air guide duct 17 is provided with heater 5, and heater 5 is fixedly connected on the inner wall of inner box 8, heater 5 is processed using nickel-chromium alloy heating wire, and the surface heating load is configured reasonably, there is no open fire, and long life is the main heat source of equipment, provides the required heat for equipment temperature rise;The outer wall on the side of oven main body 15 is provided with air inlet 4, the inner wall of oven main body 15 is fixedly connected with sensor 14, and sensor 14 is used to monitor the temperature in oven main body 15, air inlet 4 is processed using senior SUS304 stainless steel sheet;Louver 3 is provided with air deflector 18, the outer wall on the side of air deflector 18 is fixedly connected with connecting block 19, connecting block 19 is fixedly connected with rotating shaft 20, and rotating shaft 20 is rotatably connected on louver 3, and connecting rod 21 is sleeved on louver 3, and connecting rod 21 is fixedly connected on connecting block 19, the side of louver 3 is provided with electric cylinder 23, the output of electric cylinder 23 is fixedly connected with connecting plate 22, and connecting plate 22 is fixedly connected on connecting rod 21, electric cylinder 23 and connecting plate 22 are used to drive connecting rod 21 reciprocating motion, and then drive air deflector 18 to swing up and down with rotating shaft 20 as center, realize the purpose of uniform oven main body 15 internal temperature, louver 3 and air deflector 18 are processed using senior SUS304 stainless steel sheet;The lower surface of outer box 7 is fixedly connected with roller 10, and roller 10 is used to move equipment;The outer wall on the side of outer box 7 is hinged with protective door 6, the outer wall on the side of protective door 6 is fixedly connected with sealing rubber strip 11, and sealing rubber strip 11 is used for sealing;The outer wall on the side of control cabinet 9 is fixedly connected with display screen 12, and the upper surface of control cabinet 9 is fixedly connected with running indicator light 13, display screen 12 is used to show equipment operating parameter, and running indicator light 13 is used to indicate equipment operating state.

[0022] Working principle: when using the utility model, the product is put into the oven main body 15, the protective door 6 on the outer box 7 is closed, and the sealing property in the baking process is ensured through the sealing rubber strip 11, the centrifugal fan wheel 16 is driven to rotate by the motor 1 in the process, the air in the oven main body 15 is sucked into the air guide pipeline 17 through the air suction port 4, heating is carried out through the heater 5 in the process, the air enters the filter 2 along the air guide pipeline 17 and is filtered, after filtering, the air returns to the oven main body 15 through the louver 3, the gas circulation filtering and cleaning in the inner box 8 are formed, the connecting plate 22 is driven to reciprocate up and down by the electric cylinder 23 in the process, the connecting plate 22 drives the connecting rod 21 to slide up and down on the louver 3, and the air deflector 18 is driven to swing up and down around the pivot 20 by the connecting block 19, the up and down swinging of the airflow is realized, and the overall temperature uniformity in the oven main body 15 is ensured; wherein the display screen 12 on the control cabinet 9 is used to display the equipment operating parameters, the running indicator light 13 is used to indicate the equipment operating state, the roller 10 is used to move the equipment, and the sensor 14 is used to monitor the temperature parameters in the oven main body 15.

[0023] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, the terms "mount", "connect", "connection" should be understood broadly, for example, it can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0024] The device embodiments described above are only schematic, wherein the units described as separate components can or can not be physically separate, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed on a plurality of network units. Part or all of the modules can be selected according to actual needs to achieve the purpose of the embodiment. Those skilled in the art can understand and implement without creative labor.

[0025] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the utility model, but not limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the utility model.

Claims

1. A precision drying oven, comprising an outer casing (7), characterized in that: An inner box (8) is provided inside the outer box (7), and an oven body (15) is provided inside the inner box (8). A control cabinet (9) is fixedly connected to the upper surface of the outer box (7), and a motor (1) is fixedly connected inside the control cabinet (9). A centrifugal fan wheel (16) is fixedly connected to the output end of the motor (1), and the centrifugal fan wheel (16) is located inside the inner box (8). A louvered plate (3) is provided on one side of the oven body (15), and a filter (2) is provided on one side of the louvered plate (3). Both the filter (2) and the louvered plate (3) are fixedly connected to the inner wall of the inner box (8).

2. The precision drying oven according to claim 1, characterized in that: An air duct (17) is fixedly connected to the inner wall of the inner box (8), and a centrifugal fan wheel (16) is set inside the air duct (17). A heater (5) is set on one side of the air duct (17), and the heater (5) is fixedly connected to the inner wall of the inner box (8).

3. A precision drying oven according to claim 1, characterized in that: An air inlet (4) is provided on one side of the outer wall of the oven body (15), and a sensor (14) is fixedly connected to the inner wall of the oven body (15).

4. A precision drying oven according to claim 1, characterized in that: A guide plate (18) is provided on the louver (3). A connecting block (19) is fixedly connected to one side of the outer wall of the guide plate (18). A rotating shaft (20) is fixedly connected to the connecting block (19), and the rotating shaft (20) is rotatably connected to the louver (3). A connecting rod (21) is sleeved on the louver (3), and the connecting rod (21) is fixedly connected to the connecting block (19). An electric cylinder (23) is provided on one side of the louver (3). A connecting plate (22) is fixedly connected to the output end of the electric cylinder (23), and the connecting plate (22) is fixedly connected to the connecting rod (21).

5. A precision drying oven according to claim 1, characterized in that: Rollers (10) are fixedly connected to the lower surface of the outer casing (7).

6. A precision drying oven according to claim 5, characterized in that: A protective door (6) is hinged to one side of the outer wall of the outer casing (7), and a sealing strip (11) is fixedly connected to one side of the outer wall of the protective door (6).

7. A precision drying oven according to claim 1, characterized in that: A display screen (12) is fixedly connected to one side of the outer wall of the control cabinet (9), and a running indicator light (13) is fixedly connected to the upper surface of the control cabinet (9).

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