Ceramic packaging shell metallization sintering device

Abstract

The utility model relates to the field of metallization sintering, in particular to a ceramic packaging shell metallization sintering device which comprises a shell assembly, a cover plate assembly movably connected to the shell assembly, a synchronous assembly connected to the cover plate assembly, a rotating assembly connected to the synchronous assembly and an air supply assembly movably connected to the rotating assembly. The synchronizing assembly comprises a first meshing wheel connected to the cover plate assembly, a meshing strip movably connected to the first meshing wheel and a synchronizing assembly movably connected to the meshing strip. The rotating assembly comprises a combined frame connected to the synchronous assembly. The cover plate assembly is rotated, and the synchronous assembly is driven to work through the first meshing wheel and the meshing strip, so that the synchronous assembly can drive the fixed cylinder and the rotating cylinder assembly to move in the vertical direction, and high-temperature gas introduced by the gas extraction assembly can be sprayed out through the rotating cylinder assembly; therefore, the bottom and the opening of the inner cavity of the ceramic packaging shell can be kept at the same sintering temperature.

Description

Technical Field

[0001] This utility model relates to the field of metallization sintering, and in particular to a ceramic encapsulation shell metallization sintering device. Background Technology

[0002] Ceramic packaging shells serve as critical protective structures for electronic components (such as high-density integrated circuits, high-power semiconductor devices, optoelectronic modules, and MEMS sensors). They must ensure the long-term reliability and signal integrity of the internal chips under high-temperature, high-humidity, corrosive environments and complex mechanical stresses. Metallization sintering, a core step in ceramic packaging manufacturing, forms a dense, highly thermally conductive metal layer on the ceramic surface (commonly using molybdenum-manganese methods, tungsten-copper systems, or silver-palladium thick-film pastes). This enables hermetic sealing, electrical interconnection, and heat dissipation channels. The quality of this process directly determines the hermeticity, thermal cycle life, and high-frequency signal transmission performance of the package.

[0003] Traditional metallization sintering equipment mostly uses mesh belt resistance furnaces or box sintering furnaces, which rely on radiation heating and static atmosphere control to complete the pyrolysis of organic carriers in slurry and the diffusion-sintering process of metal particles. When encountering ceramic encapsulation shells with internal cavities, the uneven temperature inside the cavity inevitably leads to insufficient sintering or over-burning of the metallization layer. Utility Model Content

[0004] In order to overcome the problem that existing sintering equipment inevitably has a temperature difference between the bottom and the opening of the ceramic package shell due to the inner cavity of the ceramic package shell during use, which leads to insufficient sintering or over-sintering of the metallization layer on the ceramic package shell, resulting in decreased conductivity, coating peeling or cracking of the ceramic substrate.

[0005] The technical solution of this utility model is: a ceramic encapsulation shell metallization sintering device, including a shell assembly, a cover plate assembly movably connected to the shell assembly, a synchronization assembly connected to the cover plate assembly, a rotating assembly connected to the synchronization assembly, and an air supply assembly movably connected to the rotating assembly.

[0006] The synchronization component includes a first meshing wheel connected to the cover plate assembly, a meshing bar movably connected to the first meshing wheel, and a synchronization component movably connected to the meshing bar;

[0007] The rotating assembly includes a frame connected to the synchronization assembly, a mounting strip connected to the frame, several telescopic components movably connected to the frame, an air extraction assembly connected to the frame, and a fixed cylinder connected to the air extraction assembly.

[0008] The air delivery assembly includes several connecting plates connected to a fixed cylinder, rotating wheels movably connected to the connecting plates, and a rotating cylinder assembly movably connected to the fixed cylinder, wherein the rotating wheels and connecting plates are configured to correspond one-to-one.

[0009] Preferably, the synchronization component includes a wheel frame movably connected to the meshing bar, a second meshing wheel movably connected to the wheel frame, and a moving bar movably connected to the second meshing wheel.

[0010] Preferably, the telescopic assembly includes a telescopic sleeve movably connected to the assembly frame, a telescopic rod movably connected to the telescopic sleeve, a plurality of limit strips connected to the telescopic rod, and a servo motor connected to one of the telescopic sleeves.

[0011] Preferably, the air extraction assembly includes a guide fan connected to the assembly frame, a first air pipe connected to the guide fan, a drain head connected to the first air pipe, and a second air pipe connected to the guide fan.

[0012] Preferably, the rotating drum assembly includes a rotating drum movably connected to a fixed drum, an engagement ring connected to the outer wall of the rotating drum, a fixed ring connected to the inner wall of the rotating drum, a plurality of guide vanes connected to the fixed ring, and a plurality of vent holes formed on the rotating drum.

[0013] Preferably, the cover plate assembly includes a rotating rod connected to a first meshing wheel, a fixed head connected to the rotating rod, a combination bar connected to the fixed head, an opening and closing plate connected to the combination bar, and an abutment block connected to the opening and closing plate.

[0014] Preferably, the housing assembly includes a fixed plate movably connected to the rotating rod, a fixed housing connected to the fixed plate, a sealing plate connected to the fixed housing, a plurality of heating rods connected to the inner wall of the fixed housing, a hydraulic push rod connected to the sealing plate, a connecting strip connected to the hydraulic push rod, a positioning rod movably connected to the connecting strip, an anti-detachment head connected to the positioning rod, and a sealing strip connected to the connecting strip.

[0015] The beneficial effects of this utility model are:

[0016] This invention uses a rotating cover plate assembly to drive a synchronization assembly via a first meshing wheel and meshing bar. This allows the synchronization assembly to move the fixed cylinder and rotating cylinder assembly vertically, enabling the high-temperature gas introduced by the extraction assembly to be ejected through the rotating cylinder assembly. This ensures that the bottom of the inner cavity and the opening of the ceramic encapsulation shell maintain the same sintering temperature. This solves the problem that existing sintering devices inevitably have temperature differences between the bottom and opening of the inner cavity of the ceramic encapsulation shell during use. This difference can lead to insufficient sintering or over-sintering of the metallization layer on the ceramic encapsulation shell, resulting in decreased conductivity, coating peeling, or cracking of the ceramic substrate.

[0017] This invention uses a limiting strip to prevent the telescopic rod from rotating when it slides inside the telescopic sleeve. A servo motor drives the telescopic sleeve to rotate, which in turn causes the telescopic rod to rotate synchronously. A guide fan allows the high-temperature gas collected by the guide head to pass sequentially through the first and second air pipes and enter the interior of the fixed cylinder, thus achieving the delivery of the high-temperature gas. Attached Figure Description

[0018] Figure 1 The diagram shown is a three-dimensional structural schematic of the outer shell assembly of the metallization sintering apparatus of this utility model.

[0019] Figure 2 The diagram shown is a three-dimensional structural schematic of the rotating component of the metallization sintering apparatus of this utility model.

[0020] Figure 3 The diagram shown is a three-dimensional structural schematic of the metallization sintering apparatus of this utility model.

[0021] Figure 4 The diagram shown is a three-dimensional structural schematic of the gas supply component of the metallization sintering apparatus of this utility model.

[0022] Explanation of reference numerals in the attached drawings: 1. Outer shell assembly; 2. Cover plate assembly; 3. Synchronization assembly; 4. Rotation assembly; 5. Air supply assembly; 101. Fixed outer shell; 102. Sealing plate; 103. Hydraulic push rod; 104. Connecting strip; 105. Positioning rod; 106. Anti-detachment head; 107. Sealing strip; 108. Fixing plate; 109. Heating rod; 201. Opening and closing plate; 202. Combination strip; 203. Fixing head; 204. Rotation rod; 205. Abutment block; 301. First meshing wheel; 302. Meshing strip; 303. Second meshing wheel; 304. Rotary wheel frame; 305. Moving bar; 401. Combination frame; 402. Mounting bar; 403. Telescopic sleeve; 404. Telescopic rod; 405. Limiting bar; 406. Servo motor; 407. Guide fan; 408. First air pipe; 409. Drain head; 410. Second air pipe; 411. Fixed cylinder; 501. Connecting piece; 502. Rotating wheel; 503. Rotating cylinder; 504. Meshing ring; 505. Fixed ring; 506. Guide plate; 507. Vent hole. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] A ceramic encapsulation shell metallization sintering apparatus, according to Figure 1-4 As shown, it includes a housing assembly 1, a cover plate assembly 2 movably connected to the housing assembly 1, a synchronization assembly 3 connected to the cover plate assembly 2, a rotation assembly 4 connected to the synchronization assembly 3, and an air supply assembly 5 movably connected to the rotation assembly 4.

[0025] The synchronization component 3 includes a first meshing wheel 301 connected to the cover plate assembly 2, a meshing bar 302 movably connected to the first meshing wheel 301, and a synchronization component 3 movably connected to the meshing bar 302;

[0026] The rotating assembly 4 includes a combination frame 401 connected to the synchronization assembly 3, a mounting strip 402 connected to the combination frame 401, several telescopic components movably connected to the combination frame 401, an air extraction assembly connected to the combination frame 401, and a fixed cylinder 411 connected to the air extraction assembly.

[0027] The air supply assembly 5 includes several connecting pieces 501 connected to the fixed cylinder 411, a rotating wheel 502 movably connected to the connecting pieces 501, and a rotating cylinder assembly movably connected to the fixed cylinder 411. The rotating wheel 502 and the connecting pieces 501 are configured to correspond one-to-one.

[0028] according to Figure 2As shown, the synchronization component 3 includes a rotating frame 304 movably connected to the meshing bar 302, a second meshing wheel 303 movably connected to the rotating frame 304, and a moving bar 305 movably connected to the second meshing wheel 303. The second meshing wheel 303 meshes with the moving bar 305, the meshing bar 302 meshes with the second meshing wheel 303, and the meshing bar 302 meshes with the first meshing wheel 301.

[0029] It should be noted that the second meshing wheel 303 is driven to rotate by the meshing bar 302, and the rotating second meshing wheel 303 drives the moving bar 305 to move in the vertical direction, so that the fixed cylinder 411 connected to the moving bar 305 can also move synchronously, thereby inserting the fixed cylinder 411 into the inner cavity of the ceramic encapsulation shell.

[0030] according to Figure 2 As shown, the telescopic assembly includes a telescopic sleeve 403 movably connected to the assembly frame 401, a telescopic rod 404 movably connected to the telescopic sleeve 403, a plurality of limit bars 405 connected to the telescopic rod 404, and a servo motor 406 connected to one of the telescopic sleeves 403. The telescopic rod 404 is connected to the rotating wheel 502.

[0031] It should be noted that the limit bar 405 is designed to prevent the telescopic rod 404 from rotating when it slides inside the telescopic sleeve 403. At the same time, the servo motor 406 can drive the telescopic sleeve 403 to rotate, and the rotating telescopic sleeve 403 can drive the telescopic rod 404 to rotate synchronously.

[0032] according to Figure 2 As shown, the air extraction assembly includes a guide fan 407 connected to the assembly frame 401, a first air pipe 408 connected to the guide fan 407, a drain head 409 connected to the first air pipe 408, and a second air pipe 410 connected to the guide fan 407.

[0033] It should be noted that the high-temperature gas collected by the guide fan 407 can pass through the first air pipe 408 and the second air pipe 410 in sequence and enter the interior of the fixed cylinder 411 to achieve the transportation of high-temperature gas.

[0034] according to Figure 4 As shown, the rotating drum assembly includes a rotating drum 503 movably connected to a fixed drum 411, an engagement ring 504 connected to the outer wall of the rotating drum 503, a fixed ring 505 connected to the inner wall of the rotating drum 503, a plurality of guide vanes 506 connected to the fixed ring 505, and a plurality of vent holes 507 opened on the rotating drum 503.

[0035] It should be noted that the rotating telescopic rod 404 drives the rotating wheel 502 to rotate, thereby rotating the meshing ring 504. In turn, the rotating meshing ring 504 drives the rotating cylinder 503 to rotate synchronously, thereby improving the heating efficiency of the high-temperature gas.

[0036] according to Figures 1-2 As shown, the cover plate assembly 2 includes a rotating rod 204 connected to the first meshing wheel 301, a fixed head 203 connected to the rotating rod 204, a combination bar 202 connected to the fixed head 203, an opening and closing plate 201 connected to the combination bar 202, and an abutment block 205 connected to the opening and closing plate 201.

[0037] It should be noted that by rotating the opening and closing plate 201, the first meshing wheel 301 is driven to rotate synchronously, so that the entire sintering device can complete the insertion and removal of the gas supply component 5 during the rotation of the opening and closing plate 201, thereby greatly improving the ease of use of the entire sintering device.

[0038] according to Figure 1 and Figure 3 As shown, the outer casing assembly 1 includes a fixed disk 108 movably connected to the rotating rod 204, a fixed outer casing 101 connected to the fixed disk 108, a sealing plate 102 connected to the fixed outer casing 101, a plurality of heating rods 109 connected to the inner wall of the fixed outer casing 101, a hydraulic push rod 103 connected to the sealing plate 102, a connecting strip 104 connected to the hydraulic push rod 103, a positioning rod 105 movably connected to the connecting strip 104, an anti-detachment head 106 connected to the positioning rod 105, and a sealing strip 107 connected to the connecting strip 104.

[0039] It should be noted that the connecting bar 104 is moved by the hydraulic push rod 103, so that the connecting bar 104 can drive the sealing bar 107 connected to the connecting bar 104 to move synchronously. This allows the moving sealing bar 107 to separate from the opening and closing plate 201, so that the rotating opening and closing plate 201 can have a locking space, thereby greatly improving the safety of the entire sintering device.

[0040] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A ceramic encapsulation shell metallization sintering apparatus, characterized in that: It includes a housing assembly (1), a cover plate assembly (2) movably connected to the housing assembly (1), a synchronization assembly (3) connected to the cover plate assembly (2), a rotating assembly (4) connected to the synchronization assembly (3), and an air supply assembly (5) movably connected to the rotating assembly (4). The synchronization component (3) includes a first meshing wheel (301) connected to the cover plate assembly (2), a meshing bar (302) movably connected to the first meshing wheel (301), and a synchronization component (3) movably connected to the meshing bar (302). The rotating assembly (4) includes a combination frame (401) connected to the synchronization assembly (3), a mounting strip (402) connected to the combination frame (401), a plurality of telescopic components movably connected to the combination frame (401), an air extraction assembly connected to the combination frame (401), and a fixed cylinder (411) connected to the air extraction assembly. The air delivery assembly (5) includes several connecting pieces (501) connected to the fixed cylinder (411), a rotating wheel (502) movably connected to the connecting pieces (501), and a rotating cylinder assembly movably connected to the fixed cylinder (411). The rotating wheel (502) and the connecting pieces (501) are configured to correspond one-to-one.

2. The ceramic encapsulation shell metallization sintering apparatus according to claim 1, characterized in that: The synchronization component (3) includes a wheel frame (304) movably connected to the meshing bar (302), a second meshing wheel (303) movably connected to the wheel frame (304), and a moving bar (305) movably connected to the second meshing wheel (303).

3. The ceramic encapsulation shell metallization sintering apparatus according to claim 1, characterized in that: The telescopic assembly includes a telescopic sleeve (403) movably connected to the assembly frame (401), a telescopic rod (404) movably connected to the telescopic sleeve (403), a plurality of limit strips (405) connected to the telescopic rod (404), and a servo motor (406) connected to one of the telescopic sleeves (403).

4. The ceramic encapsulation shell metallization sintering apparatus according to claim 1, characterized in that: The air extraction assembly includes a guide fan (407) connected to the assembly frame (401), a first air pipe (408) connected to the guide fan (407), a drain head (409) connected to the first air pipe (408), and a second air pipe (410) connected to the guide fan (407).

5. The ceramic encapsulation shell metallization sintering apparatus according to claim 1, characterized in that: The rotating cylinder assembly includes a rotating cylinder (503) movably connected to a fixed cylinder (411), a meshing ring (504) connected to the outer wall of the rotating cylinder (503), a fixed ring (505) connected to the inner wall of the rotating cylinder (503), a plurality of guide vanes (506) connected to the fixed ring (505), and a plurality of vent holes (507) opened on the rotating cylinder (503).

6. The ceramic encapsulation shell metallization sintering apparatus according to claim 1, characterized in that: The cover plate assembly (2) includes a rotating rod (204) connected to the first meshing wheel (301), a fixed head (203) connected to the rotating rod (204), a combination bar (202) connected to the fixed head (203), an opening and closing plate (201) connected to the combination bar (202), and an abutment block (205) connected to the opening and closing plate (201).

7. The ceramic encapsulation shell metallization sintering apparatus according to claim 6, characterized in that: The outer casing assembly (1) includes a fixed plate (108) movably connected to a rotating rod (204), a fixed outer casing (101) connected to the fixed plate (108), a sealing plate (102) connected to the fixed outer casing (101), a plurality of heating rods (109) connected to the inner wall of the fixed outer casing (101), a hydraulic push rod (103) connected to the sealing plate (102), a connecting strip (104) connected to the hydraulic push rod (103), a positioning rod (105) movably connected to the connecting strip (104), an anti-detachment head (106) connected to the positioning rod (105), and a sealing strip (107) connected to the connecting strip (104).

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