Conveying shaft protection device and furnace tube equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a transmission shaft protection device and furnace tube equipment, and the transmission shaft protection device comprises a protection member and a base body. The protection piece is connected to the base body, and an installation space used for installing a transmission shaft is formed between the protection piece and the base body. Through the arrangement of the transmission shaft protection device, the transmission shaft can be protected and insulated, so that the heating phenomenon of the transmission shaft is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a conveyor shaft protection device and furnace tube equipment. Background Technology

[0002] In semiconductor manufacturing, furnace tubes are commonly used process equipment. Furnace tube equipment has a variety of uses in the field of semiconductor technology, such as in oxidation processes, thermal annealing processes, and the formation of various deposited films.

[0003] During each furnace tube operation, a crystal boat needs to be loaded into the furnace tube. This loading process involves a conveyor shaft transporting a carrier plate and the crystal boat onto it into the furnace tube. The furnace tube must be opened during this loading process. This causes high temperatures inside the furnace tube to overflow, resulting in higher temperatures on the conveyor shaft located closer to the furnace tube, affecting the conveyor shaft's accuracy and lifespan.

[0004] Therefore, this utility model provides a conveyor shaft baffle and furnace tube device to improve the heating phenomenon of the aforementioned conveyor shaft. Utility Model Content

[0005] The purpose of this utility model is to provide a conveyor shaft protection device and furnace tube equipment. By setting the conveyor shaft protection device, the conveyor shaft can be protected and insulated, thereby improving the heating phenomenon of the conveyor shaft.

[0006] This utility model provides a transmission shaft protection device, comprising: a protective component and a base;

[0007] The protective component is connected to the base, and there is an installation space between the protective component and the base for installing the transmission shaft.

[0008] Optionally, the transmission shaft protection device further includes a connector;

[0009] The protective component is provided with a first connection hole, and the connector passes through the first connection hole to detachably connect the protective component to the base.

[0010] Optionally, the transmission shaft protection device further includes a force-applying component;

[0011] The base is provided with a second connecting hole, and the second connecting hole has an internal thread;

[0012] The connector includes a connecting section and a head, the connecting section being connected to the head, the connecting section having external threads, and the connecting section passing through the first connecting hole and threadedly connected to the second connecting hole.

[0013] The force-applying component is located between the protective component and the head, and is used to apply a force to the head to move it away from the protective component.

[0014] Optionally, the force-applying component is an elastic component, and the maximum compressive deformation dimension of the force-applying component is a;

[0015] The material of the connecting segment and the material at the location of the second connecting hole are configured such that the gap ∆S between the internal thread and the external thread caused by thermal expansion is less than a;

[0016] The ∆S is the difference between the pitch S1 of the internal thread after expansion and the pitch S2 of the external thread after expansion;

[0017] S1 = S × ∆T × k1;

[0018] S2 = S × ∆T × k2;

[0019] S is the standard pitch of the internal thread and the external thread;

[0020] The ∆T is the difference between the highest and lowest temperatures of the environment where the internal and external threads are located;

[0021] k1 is the coefficient of thermal expansion of the material of the connecting section, and k2 is the coefficient of thermal expansion of the material of the substrate located at the second connecting hole.

[0022] Optionally, the transmission shaft protection device further includes a gasket, which is sleeved on the connecting section and located between the force-applying member and the protective member.

[0023] Optionally, the protective component includes a first protective component and a second protective component, wherein the first protective component and the second protective component are arranged along the first direction and are detachably connected.

[0024] Optionally, the protective component further includes a protective connector that detachably connects the first protective component and the second protective component.

[0025] Optionally, the protective component is provided with a first connecting hole;

[0026] The first connecting hole is located at the end of the first protective member that is away from the second protective member along the first direction;

[0027] And / or, the first connection hole is disposed at the end of the second protective member away from the first protective member along the first direction.

[0028] Optionally, the first protective member has a third connecting hole for connecting with the protective connector at one end along the first direction near the second protective member;

[0029] And / or, the second protective member is provided with a fourth connection hole for connecting with the protective connector at one end along the first direction near the first protective member.

[0030] This utility model also provides a furnace tube device, including a conveyor shaft and the aforementioned conveyor shaft protection device;

[0031] The transmission shaft is disposed on the housing and located within the installation space.

[0032] With this configuration, the aforementioned conveyor shaft protection device can provide protection and heat insulation to the outside of the conveyor shaft, which helps to mitigate the impact of high-temperature overflow from inside the furnace tube on the conveyor shaft, thereby improving the conveying accuracy of the conveyor shaft and extending its service life. Attached Figure Description

[0033] Figure 1 This is a partial structural schematic diagram of a furnace tube device according to an embodiment of the present invention;

[0034] Figure 2 This is a schematic diagram of the connection structure of the protective component according to an embodiment of the present invention;

[0035] Figure 3 This is a front view structural diagram of a protective component according to an embodiment of the present utility model;

[0036] Figure 4 This is a schematic diagram of the structure of the first protective component according to an embodiment of the present invention;

[0037] Figure 5 This is a schematic diagram of the structure of the second protective component according to an embodiment of the present invention;

[0038] Figure 6 This is a schematic diagram of the structure of a protective connector according to an embodiment of the present invention;

[0039] Figure 7 This is a side view of the protective component according to another embodiment of the present invention.

[0040] In the attached diagram:

[0041] 100 - Transmission shaft protection device;

[0042] 10-Protective component; 11-First protective component; 12-Second protective component; 13-Protective connector;

[0043] 20-Matrix;

[0044] 30 - Connector; 31 - Connecting section; 32 - Head;

[0045] 40 - Force-applying component;

[0046] 50-Gasket;

[0047] 61-First connecting hole; 62-Second connecting hole; 63-Third connecting hole; 64-Fourth connecting hole; 65-Fifth connecting hole;

[0048] a - First direction. Detailed Implementation

[0049] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the conveyor shaft protection device and furnace tube equipment proposed in this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0050] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0051] This embodiment provides a furnace tube device, including a conveyor shaft and a conveyor shaft protection device 100;

[0052] The transmission shaft protection device 100 includes: a protective component 10 and a base 20;

[0053] The protective component 10 is connected to the base 20, and there is an installation space between the protective component 10 and the base 20 for installing the transmission shaft.

[0054] The transmission shaft is disposed on the housing and located within the installation space.

[0055] Combination Figure 1 As shown, Figure 1 Only a portion of the furnace tube assembly is shown. In this embodiment, the base 20 can be the outer casing assembly of the furnace tube assembly, with the protective member 10 mounted on it, forming an installation space between the protective member 10 and the outer casing assembly. The conveyor shaft is mounted within this installation space. In other alternative embodiments, the base 20 can utilize other existing components of the furnace tube assembly.

[0056] In addition, furnace tube equipment also includes heating elements, quartz tubes, flanges, gas supply ports, exhaust ports, gas transmission pipelines, mass flow controllers, elevators, etc.

[0057] The elevator is used to raise and lower the substrate (e.g., wafer) holder into and out of the quartz tube, enabling automated loading and unloading of substrates. The elevator is mounted on the aforementioned conveyor shaft.

[0058] The quartz tube is the core component of the thermal oxidation furnace. It is made of high-purity quartz and can withstand extremely high temperatures while maintaining chemical inertness, providing a stable heat treatment environment for the substrate.

[0059] The heating element, located around the quartz tube, is usually made of resistance wire and is used to heat the inside of the quartz tube.

[0060] The gas supply port is located at the top or side of the quartz tube and is used to deliver oxygen or other gases into the quartz tube to meet the gas requirements during the heat treatment of semiconductor materials.

[0061] Flanges are components that connect quartz tubes and gas lines, ensuring the sealing and stability of the connection and preventing gas leakage.

[0062] The gas transfer pipe connects the mass flow controller and the gas supply port for gas transfer. The mass flow controller controls the gas flow rate inside the quartz tube to precisely adjust the required gas volume, ensuring the semiconductor material receives the optimal gas atmosphere during heat treatment. The exhaust port is used to discharge waste gas from inside the furnace tube to the outside of the equipment, maintaining the cleanliness and stability of the furnace tube's interior.

[0063] The difference between the furnace tube equipment in this embodiment and the existing furnace tube equipment lies in the setting of the conveyor shaft protection device 100. The other structures are consistent with the existing equipment and will not be described in detail here.

[0064] The installation of the conveyor shaft protection device 100 can provide protection and heat insulation to the outside of the conveyor shaft, which helps to reduce the impact of high temperature overflow from inside the furnace tube on the conveyor shaft, thereby improving the conveying accuracy of the conveyor shaft and extending its service life.

[0065] Please continue to refer to this. Figure 1 As shown, in this embodiment, the transmission shaft protection device 100 further includes a connector 30;

[0066] The protective component 10 is provided with a first connection hole 61, and the connector 30 passes through the first connection hole 61 to detachably connect the protective component 10 to the base 20.

[0067] In this embodiment, the base 20 is provided with a second connecting hole 62, which has an internal thread; the connector 30 includes a connecting section 31 and a head 32, wherein the outer diameter of the head 32 is larger than the outer diameter of the connecting section 31. The connecting section 31 is coaxially connected to the head 32, and the connecting section 31 has an external thread. The connecting section 31 passes through the first connecting hole 61 and is threadedly connected to the second connecting hole 62.

[0068] In this embodiment, the head 32 is a cylindrical structure. In other alternative embodiments, the head can be a hexagonal prism, a cuboid, or other structure.

[0069] Please continue to refer to this. Figure 1 As shown, in this embodiment, the transmission shaft protection device 100 further includes a force-applying component 40;

[0070] The force-applying component 40 is located between the protective component 10 and the head 32, and is used to apply a force to the head 32 to move it away from the protective component 10, thereby applying an axial locking force to the connecting section 31 so that the connecting section 31 is locked with the second connecting hole 62 and the connecting component 30 is prevented from loosening.

[0071] In this embodiment, the force-applying component 40 is an elastic component, such as an elastic washer or a wave-shaped washer. When the connector 30 is tightened, the head 32 applies pressure to the force-applying component 40, causing the force-applying component 40 to elastically deform, thereby applying an axial reaction force to the head 32. This force is transmitted to the connecting section 31, causing the external thread of the connecting section 31 to lock with the internal thread of the second connecting hole 62.

[0072] In other alternative embodiments, the force-applying element 40 may be a lock nut or other known structure.

[0073] If the high temperature inside the furnace escapes to the wafer loading area during operation, the highest temperature in the furnace opening area can reach 720°C. This can easily cause the protective component 10 to deform at high temperature. Furthermore, due to its thermal expansion, the connection structure between the connecting section 31 and the substrate 20 is damaged, which in turn causes the connecting section 31 to strip and become difficult to disassemble, affecting the maintenance of the conveyor shaft.

[0074] Therefore, in this embodiment, the thermal expansion of the internal threads of the connecting section 31 and the second connecting hole 62 is further used to improve the above-mentioned stripping phenomenon.

[0075] The maximum compressive deformation size of the force-applying component 40 is a;

[0076] The gap ∆S between the internal thread and the external thread caused by thermal expansion is less than a;

[0077] The ∆S is the difference between the pitch S1 of the internal thread after expansion and the pitch S2 of the external thread after expansion;

[0078] That is, ∆S = S1 - S2;

[0079] S1 = S × ∆T × k1;

[0080] S2 = S × ∆T × k2;

[0081] S is the standard pitch of the internal thread and the external thread;

[0082] The ∆T is the difference between the highest and lowest temperatures of the environment where the internal and external threads are located. Under actual working conditions, the highest temperature at the location of the internal and external threads is about 200°C or higher, and the lowest temperature is room temperature, about 20°C. Therefore, ∆T is about 200°C. It is only necessary to ensure thermal expansion within the range of ∆T.

[0083] k1 is the coefficient of thermal expansion of the material of the connecting segment 31, and k2 is the coefficient of thermal expansion of the material of the base 20 located at the second connecting hole 62.

[0084] It should be noted that the above formula essentially limits the selection of the material of the connecting segment 31 and the material of the base 20 located at the second connecting hole 62. In essence, it is an improvement on the structure of the connecting segment 31 and the second connecting hole 62.

[0085] Both the connecting section 31 and the base 20 can be made of existing high-temperature resistant steel, resulting in smaller thermal expansion and thus smaller ∆S. Furthermore, the connecting section 31 and the base 20 can be made of the same material, so their expansion coefficients k1 and k2 are the same, making ∆S zero.

[0086] Furthermore, in this embodiment, the transmission shaft protection device 100 also includes a gasket 50, which is annular and is fitted onto the connecting section 31 and located between the force-applying member 40 and the protective member 10. The inner diameter of the gasket 50 is larger than the outer diameter of the connecting section 31, and the outer diameter of the gasket 50 is larger than the inner diameter of the first connecting hole 61. When the connecting member 30 is tightened, the head 32 presses against the force-applying member 40, the force-applying member 40 presses against the gasket 50, and the gasket 50 presses against the protective member 10.

[0087] In actual operation, connector 30 can use a torque of 2 NM to ensure locking, and the washer 50 can be flattened to prevent loosening. The force-applying component 40 has a thickness of 2.1 mm in its natural state and can be compressed up to 1 mm (elastic anti-loosening range). Based on existing anti-loosening calculations for connector 30, at the highest ambient temperature of 241℃, connector 30 will displace downwards by 3.71 e. -5 mm, which is much smaller than the elastic anti-loosening range (1mm) of the force-applying component 40, combined with the anti-loosening function of the gasket 50, ensures that the connector 30 will not loosen or strip.

[0088] In the above embodiment, the connector 30 is connected by a thread. In other alternative embodiments, the connector 30 can be a snap-fit ​​structure or other known detachable connection structures.

[0089] Please continue to refer to this. Figure 3 As shown, the protective component 10 includes a first protective component 11 and a second protective component 12, wherein the first protective component 11 and the second protective component 12 are arranged along a first direction a and are detachably connected.

[0090] The first protective component 11 and the second protective component 12 are generally elongated strip structures, and the first direction a corresponds to the length direction of the first protective component 11 and the second protective component 12.

[0091] The protective component 10 adopts a split structure, which helps to control the overall thermal deformation of the protective component 10. In addition, the first protective component 11 and the second protective component 12 are detachably connected, which facilitates flexible disassembly and assembly during later maintenance. The disassembly and assembly of the protective component 10 is less constrained by space, has high flexibility, and improves the efficiency of transmission shaft maintenance.

[0092] Combination Figures 3 to 6 As shown, the protective component 10 also includes a protective connector 13, which detachably connects the first protective component 11 and the second protective component 12.

[0093] The first connecting hole 61 is located at the end of the first protective member 11 away from the second protective member 12 along the first direction a. Figure 3(The left end of the first protective component 11); the end is provided with four first connecting holes 61, the four first connecting holes 61 are arranged along the width direction of the first protective component 11, and the four first connecting holes 61 are divided into two groups in pairs.

[0094] The first connecting hole 61 is also disposed at one end of the second protective member 12 away from the first protective member 11 along the first direction a. Figure 3 (The right end of the second protective component 12); This end is provided with four first connecting holes 61, which are arranged along the width direction of the second protective component 12, and the four first connecting holes 61 are divided into two groups in pairs.

[0095] Therefore, the protective component 10 is provided with eight first connection holes 61. Each first connection hole 61 is equipped with a connector 30, a force-applying component 40 and a gasket 50 for connection with the base 20. Thus, the protective component 10 and the base 20 have a total of eight connection points.

[0096] like Figures 3 to 6 As shown, the first protective member 11 is located at one end of the second protective member 12 along the first direction a. Figure 3 and Figure 4 The right end of the first protective member 11 is provided with a third connecting hole 63 for connecting with the protective connector 13. Four third connecting holes 63 are provided at this end, and the four third connecting holes 63 are divided into two groups in pairs. The two groups of connecting holes are arranged along the width direction of the first protective member 11, and the two third connecting holes 63 in each group are arranged along the length direction of the first protective member 11.

[0097] The second protective member 12 is located at one end of the first protective member 11 along the first direction a. Figure 3 and Figure 5 The left end of the second protective member 12 is provided with a fourth connecting hole 64 for connecting with the protective connector 13. This end has four fourth connecting holes 64. The four fourth connecting holes 64 are divided into two groups, with the two groups arranged along the width direction of the second protective member 12, and the two fourth connecting holes 64 in each group arranged along the length direction of the second protective member 12.

[0098] In this embodiment, two protective connectors 13 are provided, each with four fifth connecting holes 65, which correspond to two third connecting holes 63 and two fourth connecting holes 64, respectively. The protective connectors 13 and the first protective member 11 can be connected by bolts passing through the third connecting holes 63 and the fifth connecting holes 65; similarly, the protective connectors 13 and the second protective member 12 can be connected by bolts passing through the fourth connecting holes 64 and the fifth connecting holes 65.

[0099] In this embodiment, the protective member 10 is a two-piece split structure composed of a first protective member 11 and a second protective member 12. In other alternative embodiments, the protective member 10 can be a three-piece or four-piece split structure, and the specific split setting mode of the protective member 10 can be flexibly adjusted based on actual usage requirements.

[0100] In this embodiment, eight first connection holes 61 are provided on the protective member 10 for connecting with the base body 20. In other alternative embodiments, the number of the first connection holes 61 can be six, ten or other numbers. The number and distribution mode of the first connection holes 61 can be adjusted based on actual usage requirements.

[0101] In this embodiment, the first protective member 11 and the second protective member 12 are connected by two protective connection members 13. In other alternative embodiments, the first protective member 11 and the second protective member 12 can be detachably connected by one, three or more protective connection members 13.

[0102] In this embodiment, the protective connection member 13 is provided with a fifth connection hole 65 through which a bolt passes, and is connected with the first protective member 11 and the second protective member 12 by cooperating with a bolt. In other alternative embodiments, the fifth connection hole 65 may not be provided on the protective connection member 13. For example, the protective connection member 13 may be integrated with a stud, and the stud passes through the fourth connection hole 64 and cooperates with a nut to connect with the first protective member 11 and the second protective member 12. The specific structural form of the protective connection member 13 can be adjusted based on actual requirements.

[0103] Combined Figure 7 As shown, it is a side view of the protective member 10. In this embodiment, the cross-sectional shapes of the first protective member 11 and the second protective member 12 are the same. The cross-sectional shapes of both are approximately in a "Ji" - shaped structure, and the inner concave area is used as the space for protecting the transmission shaft. The protective connection member 13 is located in the groove outside the first protective member 11 and the second protective member 12.

[0104] In other alternative embodiments, the protective member 10 can be in a shape similar to a channel steel or other special-shaped structures, and the specific shape of the protective member can be adjusted adaptively based on its protection requirements.

[0105] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other.

[0106] The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention in any way. Any changes and modifications made by those of ordinary skill in the art of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A transmission shaft protection device, characterized in that, include: Protective components and substrate; The protective component is connected to the base, and there is an installation space between the protective component and the base for installing the transmission shaft.

2. The transmission shaft protection device as described in claim 1, characterized in that, The transmission shaft protection device also includes a connector; The protective component is provided with a first connection hole, and the connector passes through the first connection hole to detachably connect the protective component to the base.

3. The transmission shaft protection device as described in claim 2, characterized in that, The transmission shaft protection device also includes a force-applying component; The base is provided with a second connecting hole, and the second connecting hole has an internal thread; The connector includes a connecting section and a head, the connecting section is connected to the head, the connecting section has an external thread, and the connecting section passes through the first connecting hole and is threadedly connected to the second connecting hole; The force-applying component is located between the protective component and the head, and is used to apply a force to the head to move it away from the protective component.

4. The transmission shaft protection device as described in claim 3, characterized in that, The force-applying component is an elastic component, and the maximum compressive deformation dimension of the force-applying component is a; The material of the connecting segment and the material at the location of the second connecting hole are configured such that the gap ∆S between the internal thread and the external thread caused by thermal expansion is less than a. The ∆S is the difference between the pitch S1 of the internal thread after expansion and the pitch S2 of the external thread after expansion; S1 = S × ∆T × k1; S2 = S × ∆T × k2; S is the standard pitch of the internal thread and the external thread; The ∆T is the difference between the highest and lowest temperatures of the environment where the internal and external threads are located; k1 is the coefficient of thermal expansion of the material of the connecting section, and k2 is the coefficient of thermal expansion of the material of the substrate located at the second connecting hole.

5. The transmission shaft protection device as described in claim 3, characterized in that, The transmission shaft protection device also includes a gasket, which is located between the force-applying member and the protective member.

6. The transmission shaft protection device as described in any one of claims 1 to 5, characterized in that, The protective component includes a first protective component and a second protective component, wherein the first protective component and the second protective component are arranged along a first direction and are detachably connected.

7. The transmission shaft protection device as described in claim 6, characterized in that, The protective component also includes a protective connector, which detachably connects the first protective component and the second protective component.

8. The transmission shaft protection device as described in claim 6, characterized in that, When the protective component is provided with a first connecting hole; The first connecting hole is located at the end of the first protective member that is away from the second protective member along the first direction; And / or, the first connection hole is disposed at the end of the second protective member away from the first protective member along the first direction.

9. The transmission shaft protection device as described in claim 7, characterized in that, The first protective member has a third connecting hole for connecting with the protective connecting member at one end along the first direction near the second protective member. And / or, the second protective member is provided with a fourth connection hole for connecting with the protective connector at one end along the first direction near the first protective member.

10. A furnace tube device, characterized in that, Includes a transmission shaft and a transmission shaft protection device as described in any one of claims 1 to 9; The transmission shaft is disposed in the housing and located within the installation space.

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