Support of minority carrier lifetime test platform

Abstract

The utility model provides a support for a minority carrier lifetime test platform, which relates to the technical field of minority carrier lifetime test platforms and comprises a concave connecting block, the concave position of the concave connecting block is connected with the minority carrier lifetime test platform, one side of the top of the concave connecting block is provided with a sliding groove, and the sliding groove is connected with two symmetrically arranged supporting frames in a matched mode. An L-shaped step is arranged on the inner side of the supporting frame and used for solving the problems that an existing minority carrier lifetime testing platform is not provided with a fixing mechanism, silicon wafers are prone to displacement in the testing process, then the silicon wafers are scratched, follow-up reworking of the silicon wafers is not facilitated, and the product yield is affected. And when the silicon wafer is placed on the test platform, the position has randomness, the randomness can generate adverse effects on the test result, and the test accuracy is reduced.

Description

Technical Field

[0001] This utility model mainly relates to the field of minority carrier lifetime testing platform technology, and specifically to a minority carrier lifetime testing platform support. Background Technology

[0002] Minority carrier lifetime is a crucial parameter for evaluating the quality of semiconductor materials and is essential for the performance of semiconductor devices. As a key piece of equipment for detecting minority carrier lifetime, the accuracy and efficiency of a minority carrier lifetime tester directly affect the reliability of the test results. Currently, when testing silicon wafers, the wafers are typically placed directly on a testing platform before the testing process begins.

[0003] During the operation of specific embodiments, the inventors discovered the following defects:

[0004] The minority carrier lifetime testing platform lacks a fixing mechanism and has a relatively smooth surface, which makes it easy for silicon wafers to shift during testing, leading to scratches on the wafers. This hinders subsequent rework and affects product yield. Furthermore, the lack of fixtures to fix the silicon wafers on the testing platform results in randomness in their placement. This randomness can negatively impact test results and reduce test accuracy.

[0005] It should be noted that the above content falls within the scope of the inventor's technical knowledge. Due to the vast and complex nature of the technical content in this field, the above content of this application does not necessarily constitute prior art. Utility Model Content

[0006] 1. The technical problem to be solved by the utility model:

[0007] This utility model provides a support for a minority carrier lifetime testing platform to solve the technical problems existing in the background art.

[0008] 2. Technical Solution:

[0009] To achieve the above objectives, the technical solution provided by this utility model is as follows: a minority carrier lifetime testing platform support, including a concave connecting block, the concave connecting block being connected to the minority carrier lifetime testing platform at its recessed portion, a sliding groove being formed on one side of the top of the concave connecting block, the sliding groove being matched and connected to two symmetrically arranged support frames, and an L-shaped step being provided on the inner side of the support frame. When this device is in operation, the concave connecting block is engaged with the minority carrier lifetime testing platform, and then the silicon wafer to be tested is placed on the L-shaped step using a suction cup. The support frame of this device can slide on the sliding groove, thereby adjusting different spacings to accommodate silicon wafers of different sizes. After the silicon wafer is placed on the L-shaped step, the minority carrier lifetime testing platform performs the testing operation. At this time, only the edge area of ​​the silicon wafer provides support, so the bottom of the silicon wafer will not come into contact with the surface of the minority carrier lifetime testing platform, which can prevent scratches on the silicon wafer. Furthermore, since the spacing of the support frames adapted to silicon wafers of the same specification is the same, the positions of silicon wafers of different specifications are the same during testing, improving the accuracy of the test. It should be noted that the minority carrier lifetime testing platform is existing technology and will not be described in detail here.

[0010] Furthermore, the concave connecting block has symmetrical first connecting holes on both sides, and the minority carrier lifetime testing platform has corresponding second connecting holes on both sides.

[0011] Furthermore, one end of the support frame is provided with a sliding ball, the top of the sliding ball is provided with a threaded groove, the threaded groove is matched and connected to a locking screw, and the locking screw is provided with a limit slider.

[0012] Furthermore, a scale is provided on the side of the sliding groove.

[0013] Furthermore, the sliding groove is symmetrically provided with concave mounting grooves, and miniature air knives are connected inside the concave mounting grooves.

[0014] 3. Beneficial effects:

[0015] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0016] This utility model is reasonably designed. It uses two support frames with adjustable spacing to support and test silicon wafers of different specifications. The tightness of the support frames can be adjusted by tightening screws, making it easy to operate. It will not scratch the silicon wafers when performing minority carrier lifetime tests, and it can also ensure that the silicon wafers are placed in a fixed position.

[0017] It should be noted that the structures not described in this utility model are the same as or can be implemented using existing technology, and will not be elaborated here, as they do not involve the design points and improvement directions of this utility model. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the miniature air knife of this utility model in operation;

[0020] Figure 3 This is a side view of the miniature air knife of this utility model in operation;

[0021] Figure 4 This is a schematic diagram of the support frame structure of this utility model.

[0022] Figure label:

[0023] 1. Concave connecting block; 11. First connecting hole; 2. Minority carrier lifetime test platform; 3. Sliding groove; 4. Support frame; 41. Sliding ball; 42. Threaded groove; 43. Locking screw; 44. Limiting slider; 31. Scale; 32. Concave mounting groove; 33. Miniature air knife; 5. L-shaped step. Detailed Implementation

[0024] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0025] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0027] In this utility model, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," "provided with," and "located in" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0028] It should be noted that structures not described in this invention do not involve the design points and improvement directions of this invention, and can all be achieved using existing technologies known to those skilled in the art.

[0029] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0030] See attached document Figure 1-4 A minority carrier lifetime testing platform support includes a concave connecting block 1, which connects to a minority carrier lifetime testing platform 2 at its recessed portion. A sliding groove 3 is formed on one side of the top of the concave connecting block 1, and two symmetrically arranged support frames 4 are matched and connected to the sliding groove 3. An L-shaped step 5 is provided on the inner side of each support frame 4. During operation, the concave connecting block 1 is engaged with the minority carrier lifetime testing platform 2, and then the silicon wafer to be tested is placed on the L-shaped step 5 using a suction cup. The support frames 4 can slide on the sliding groove 3, thereby adjusting the spacing to accommodate silicon wafers of different sizes. After the silicon wafer is placed on the L-shaped step 5, the minority carrier lifetime testing platform 2 performs the testing operation. At this time, only the edge area of ​​the silicon wafer provides support, so the bottom of the silicon wafer will not come into contact with the surface of the minority carrier lifetime testing platform 2, preventing scratches. Furthermore, since the spacing of the support frames is the same for silicon wafers of the same specifications, the positions of silicon wafers of different specifications are the same during testing, improving testing accuracy. It should be noted that the minority carrier lifetime testing platform 2 is existing technology and will not be described in detail here.

[0031] The concave connecting block 1 has symmetrical first connecting holes 11 on both sides, and the minority carrier lifetime test platform 2 has corresponding second connecting holes on both sides. When this device is needed for testing, it is inserted into the side of the minority carrier lifetime test platform 2, and the installation is completed by passing screws through the first connecting holes 11 and the second connecting holes. The installation is simple and convenient.

[0032] The support frame 4 has a sliding ball 41 at one end, and a threaded groove 42 is opened on the top of the sliding ball 41. The threaded groove 42 is matched and connected to a locking screw 43. The locking screw 43 is provided with a limiting slider 44. In order to facilitate the testing of silicon wafers of different specifications, the tightness of the support frame 4 can be adjusted by rotating the locking screw 43. When it is necessary to adjust the position of the support frame 4, rotate the locking screw 43 so that the limiting slider 44 cannot exert pressure on the sliding groove 3, so that it can be moved freely. After moving to the preset position, tighten the locking screw 43.

[0033] The sliding groove 3 is provided with a scale 31 on its side, which facilitates quick adjustment of the distance between the two support frames 4.

[0034] The sliding groove 3 has symmetrically opened concave mounting grooves 32, and a micro air knife 33 is connected in the concave mounting groove 32. The micro air knife 33 blows air at a downward angle. After the silicon wafer is inspected, the micro air knife 33 can be opened to blow air at the bottom of the silicon wafer, thereby blowing up one corner of the silicon wafer. The operator can use a suction ball to adsorb and remove the raised end of the silicon wafer.

[0035] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A minority carrier lifetime testing platform support, characterized in that: It includes a concave connecting block (1), the concave connecting block (1) is connected to a minority carrier lifetime test platform (2) at the concave part, a sliding groove (3) is opened on one side of the top of the concave connecting block (1), the sliding groove (3) is matched and connected to two symmetrically arranged support frames (4), and an L-shaped step (5) is provided on the inner side of the support frame (4).

2. The minority carrier lifetime testing platform support according to claim 1, characterized in that: The concave connecting block (1) has first connecting holes (11) symmetrically opened on both sides, and the minority carrier lifetime test platform (2) has second connecting holes at corresponding positions on both sides.

3. The minority carrier lifetime testing platform support according to claim 1, characterized in that: The support frame (4) has a sliding ball (41) at one end, and a threaded groove (42) is opened on the top of the sliding ball (41). The threaded groove (42) is matched and connected to the locking screw (43), and the locking screw (43) is provided with a limiting slider (44).

4. The minority carrier lifetime testing platform support according to claim 3, characterized in that: The sliding groove (3) is provided with a scale (31) on its side.

5. The minority carrier lifetime testing platform support according to claim 1, characterized in that: The sliding groove (3) has symmetrically opened concave mounting grooves (32), and the concave mounting grooves (32) are connected to the micro air knife (33).

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