Protection module, carrying device and machining equipment

Abstract

The utility model discloses a protection module, a carrying device and machining equipment. The protection module comprises a box body and a protection assembly. A containing cavity is defined by the box body, the box body is further provided with a through hole, the through hole is communicated with the containing cavity, the through hole is further communicated with the space outside the box body, and the depth direction of the through hole is set as the first direction. The protection assembly comprises a first air pipe, the first air pipe is installed on the box body, the first air pipe can communicate with a first positive pressure air source, the first air pipe is provided with a first air outlet hole, and the first air outlet hole is used for spraying air towards the through hole to form a first air curtain; the projection of the inner side face of the through hole in the first direction coincides with the first air curtain. According to the protection module, the protection effect on the parts can be effectively improved.

Description

Technical Field

[0001] This application relates to the field of solar cell processing equipment technology, and in particular to a protective module, a handling device, and processing equipment. Background Technology

[0002] With the continuous development of the solar cell industry, crystalline silicon cells are showing a trend towards low cost, high efficiency, and large-scale production. In the manufacturing process of crystalline silicon cells, the crystalline silicon needs to be immersed in chemical solutions in multiple tanks. The crystalline silicon is typically placed in a basket, and a transport device moves the basket between the tanks.

[0003] During the process of transporting flower baskets by the handling device, corrosive gases overflowing from the trough can easily enter the handling device. After the handling device has been running for a long time, the parts are prone to damage, and the corrosion of the parts can also lead to the precipitation of metal ions.

[0004] In related technologies, handling devices surround components with enclosures to protect them. However, corrosive gases can still enter the enclosure through openings, rendering the enclosure ineffective in protecting the components. Utility Model Content

[0005] Therefore, this application proposes a protection module that can effectively improve the protection of components.

[0006] This application also proposes a handling device having the above-mentioned protection module.

[0007] This application also proposes a processing device having the above-mentioned handling device.

[0008] The protection module according to the first aspect embodiment of this application includes:

[0009] The box body encloses a receiving cavity, and the box body is also provided with a through hole, which communicates with the receiving cavity and also communicates with the space outside the box body. The depth direction of the through hole is defined as a first direction.

[0010] The protective component includes a first air pipe installed in the housing, the first air pipe being able to communicate with a first positive pressure air source, the first air pipe having a first air outlet for spraying air toward the through hole to form a first air curtain; the projection of the inner side of the through hole along the first direction coincides with the first air curtain.

[0011] The protection module according to the embodiments of this application has at least the following beneficial effects: a first air curtain is provided around the through hole of the housing, and the projection of the inner side of the through hole along the first direction coincides with the first air curtain, thereby the first air curtain can block the air entering and exiting the through hole; when the component is located in the accommodating cavity, the corrosive gas outside the housing is difficult to enter the accommodating cavity through the through hole, and the protection effect of the housing on the component can be effectively improved.

[0012] According to some embodiments of this application, the first air pipe is installed on the outer surface of the box.

[0013] According to some embodiments of this application, the through holes are provided in two or more, the number of first air tubes is not less than the number of through holes, and each through hole is sprayed by at least one first air tube.

[0014] According to some embodiments of this application, the number of first air tubes is the same as the number of through holes, and the first air tubes are used to spray air into the through holes in a one-to-one correspondence.

[0015] According to some embodiments of this application, the first air tube is provided with two or more first air outlets.

[0016] According to some embodiments of this application, the first vent hole includes one of a circular hole, an elliptical hole, and a strip-shaped hole.

[0017] According to some embodiments of this application, the protection component further includes:

[0018] The second air pipe is installed in the housing and can be connected to the second positive pressure air source. The second air pipe is provided with a second air outlet for spraying air into the accommodating cavity.

[0019] According to some embodiments of this application, the housing includes:

[0020] The main body is provided with the through hole, and the main body is also provided with a window;

[0021] Inspection panel, used to close or open the window.

[0022] The conveying device according to a second aspect embodiment of this application includes:

[0023] The aforementioned protection module;

[0024] A crossbeam, the first end of which is located in the through hole and the receiving cavity;

[0025] A robotic arm is installed at the second end of the crossbeam and is used to pick up or put down products.

[0026] A drive module is installed in the housing and located within the accommodating cavity. The output end of the drive module is connected to the first end of the crossbeam. The drive module is used for...

[0027] The handling device according to the embodiments of this application has at least the following beneficial effects: by using the above-mentioned protection module, the protection effect on the drive module can be effectively improved, the drive module is not easily damaged, and the service life of the handling device can be longer.

[0028] The processing apparatus according to a third aspect embodiment of this application includes:

[0029] The container is provided with a receiving tank for holding liquid;

[0030] In the aforementioned conveying device, the drive module is used to drive the crossbeam to move so that the product picked up by the robot arm enters or leaves the receiving slot.

[0031] The processing equipment according to the embodiments of this application has at least the following beneficial effects: by using the above-described handling device, it is beneficial to reduce the maintenance cost of the processing equipment and to extend the service life of the processing equipment.

[0032] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0033] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0034] Figure 1 This is a cross-sectional view of the protection module according to an embodiment of this application;

[0035] Figure 2 A perspective view of a conveying device according to an embodiment of this application;

[0036] Figure 3 for Figure 2 A 3D view of the transport device after a portion of the box has been removed;

[0037] Figure 4 for Figure 2 A three-dimensional view from another angle after part of the box has been removed from the transport device;

[0038] Figure 5 for Figure 2 A three-dimensional view of the conveying device from another angle;

[0039] Figure 6 This is a schematic diagram of the processing equipment according to an embodiment of this application.

[0040] Reference numerals: housing 100, through hole 110, inner side 111, outer surface 120, accommodating cavity 130, main body 140, window 141, inspection plate 150;

[0041] Protection component 200, first air pipe 210, first air outlet 211, first air curtain 212, second air pipe 220, second air outlet 221, valve 230;

[0042] 300mm for the crossbeam, 310mm for the first end, and 320mm for the second end;

[0043] Drive module 400;

[0044] Container 500, receiving tank 510;

[0045] Robotic arm 600. Detailed Implementation

[0046] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0047] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0048] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc., are understood to exclude the stated number, and "above," "below," "within," etc., are understood to exclude the stated number. If "first" or "second" is used, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0049] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0050] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0051] Reference Figures 1 to 3 According to a first aspect embodiment of this application, the protection module includes a housing 100 and a protection component 200. The housing 100 encloses a receiving cavity 130, and the housing 100 also has a through hole 110 communicating with the receiving cavity 130 and also communicating with space outside the housing 100. The depth direction of the through hole 110 is defined as a first direction (refer to...). Figure 1 For example, the first direction is the front-to-back direction.

[0052] The protective assembly 200 includes a first air pipe 210, which is installed in the housing 100 and can be connected to a first positive pressure air source. The first air pipe 210 has a first air outlet 211 for spraying air towards the through hole 110 to form a first air curtain 212. The projection of the inner side surface 111 of the through hole 110 along a first direction coincides with the first air curtain 212.

[0053] The protection module according to the embodiments of this application has at least the following beneficial effects: a first air curtain 212 is provided around the through hole 110 of the housing 100, and the projection of the inner side surface 111 of the through hole 110 along the first direction coincides with the first air curtain 212, thereby the first air curtain 212 can block the air entering and exiting the through hole 110; when the component is located in the accommodating cavity 130, the corrosive gas outside the housing 100 is difficult to enter the accommodating cavity 130 through the through hole 110, and the protection effect of the housing 100 on the component can be effectively improved.

[0054] It should be noted that the first positive pressure gas source can be one of compressed air, compressed nitrogen, and compressed inert gas.

[0055] Reference Figure 2 In some embodiments of this application, the first air pipe 210 is installed on the outer surface 120 of the housing 100.

[0056] The first air pipe 210 is installed on the outer surface 120 of the housing 100. The first air curtain 212 can intercept corrosive gases outside the through hole 110, making it difficult for corrosive gases to enter the through hole 110, thus improving the protection effect of the protection module.

[0057] Specifically, the first air tube 210 can be fixed to the housing 100 by tube clamps and fasteners.

[0058] Reference Figure 2 In some embodiments of this application, the through holes 110 are provided with two or more, and the number of first air pipes 210 is not less than the number of through holes 110, and each through hole 110 is sprayed by at least one first air pipe 210.

[0059] By providing more through holes 110 to the housing 100, the components inside the accommodating cavity 130 can be more easily connected to the outside. Each through hole 110 is sprayed by at least one first air pipe 210, which effectively prevents corrosive gases from entering the accommodating cavity 130, thus providing better protection.

[0060] Specifically, the number of through holes 110 can be two, three, four, or other numbers.

[0061] Reference Figure 2 In some embodiments of this application, the number of first air pipes 210 is the same as the number of through holes 110, and the first air pipes 210 are used to spray air into the through holes 110 in a one-to-one correspondence.

[0062] By spraying air into the through hole 110 through the first air pipe 210 in a one-to-one correspondence, the material cost of the first air pipe 210 can be saved while ensuring the protection effect, thereby helping to reduce the equipment cost of the protection module.

[0063] Reference Figure 2 In some embodiments of this application, the first air pipe 210 is provided with two or more first air outlets 211.

[0064] By opening two or more first air outlets 211, the first air curtain 212 can be formed at a lower processing cost, and the processing cost of the first air pipe 210 is also lower.

[0065] Reference Figure 2 In the improved embodiment described above, the length direction of the through hole 110 is set as the second direction, and the first air outlet 211 are arranged at intervals along the second direction.

[0066] The first air vents 211 are arranged at intervals along the second direction, so that the first air curtain 212 can extend along the second direction, thereby completely blocking the through hole 110 and providing better protection.

[0067] Reference Figure 2 In some embodiments of this application, the first vent 211 includes one of a round hole, an elliptical hole, and a strip hole.

[0068] Round holes, elliptical holes, and strip-shaped holes are all regular-shaped holes that are easy to process, which helps to reduce the processing cost of the first air tube 210.

[0069] Reference Figure 4 In some embodiments of this application, the protection component 200 further includes a second air pipe 220, which is installed in the housing 100 and can be connected to a second positive pressure air source. The second air pipe 220 is provided with a second air outlet 221, which is used to spray air into the accommodating cavity 130.

[0070] By spraying air into the accommodating cavity 130 through the second vent 221, the air pressure inside the accommodating cavity 130 is made to be greater than the atmospheric pressure outside the housing 100. As a result, corrosive gases are less likely to enter the accommodating cavity 130, and the protective effect of the protection module is better.

[0071] It should be noted that the second positive pressure gas source can be one of compressed air, compressed nitrogen, and compressed inert gas.

[0072] Reference Figure 5 In some embodiments of this application, the housing 100 includes a main body 140 and an access panel 150. The main body 140 is provided with a through hole 110 and a window 141. The access panel 150 is used to close or open the window 141.

[0073] By disassembling the inspection plate 150, the components inside the accommodating cavity 130 can be easily inspected and repaired, thus reducing the maintenance cost of the protection module.

[0074] Specifically, the inspection plate 150 can be detachably fixed to the main body 140 by fasteners, or one end of the inspection plate 150 is rotatably connected to the main body 140, and the other end of the inspection plate 150 is connected to the main body 140 by a latch.

[0075] Reference Figure 4 In the improved embodiment described above, the accommodating cavity 130 is provided with a first air pipe 210 and a second air pipe 220 for air supply. The air supply pipeline includes a valve 230, which is located at the window 141. After opening the inspection plate 150, the valve 230 can be easily adjusted.

[0076] Reference Figure 3 and Figure 6 The handling device according to a second aspect embodiment of this application includes a protection module, a crossbeam 300, a drive module 400, and a robot 600. The first end 310 of the crossbeam 300 is located in the through hole 110 and the receiving cavity 130. The robot 600 is mounted on the second end 320 of the crossbeam 300 (see reference 1). Figure 6The robotic arm 600 is used to pick up or put down products. The drive module 400 is installed in the housing 100 and is located in the accommodating cavity 130. The output end of the drive module 400 is connected to the first end 310 of the crossbeam 300. The drive module 400 is used to drive the crossbeam 300 to move.

[0077] The handling device according to the embodiments of this application has at least the following beneficial effects: by using the above-mentioned protection module, the protection effect of the drive module 400 can be effectively improved, the drive module 400 is not easily damaged, and the service life of the handling device can be longer.

[0078] Specifically, the drive module 400 can be one of the following: linear motor, cylinder, hydraulic cylinder, motor-driven lead screw and nut mechanism, motor-driven gear and rack mechanism, motor-driven synchronous pulley and synchronous belt mechanism, motor-driven sprocket and chain mechanism, motor-driven crank and slider mechanism, and motor-driven connecting rod mechanism.

[0079] Reference Figure 6 The processing equipment according to a third aspect embodiment of this application includes a container 500 and a conveying device. The container 500 is provided with a receiving tank 510 for holding liquid. A drive module 400 is used to drive a crossbeam 300 to move so that a product picked up by a robot arm 600 enters or leaves the receiving tank 510.

[0080] The processing equipment according to the embodiments of this application has at least the following beneficial effects: by using the above-described handling device, it is beneficial to reduce the maintenance cost of the processing equipment and to extend the service life of the processing equipment.

[0081] Specifically, the processing equipment can be cleaning equipment or texturing equipment. The cleaning equipment can be used to clean impurities on the surface of the silicon wafer to prevent impurities from interfering with the texturing process of the silicon wafer.

[0082] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A protection module, characterized in that, include: The box body encloses a receiving cavity, and the box body is also provided with a through hole, which communicates with the receiving cavity and also communicates with the space outside the box body. The depth direction of the through hole is defined as a first direction. The protective component includes a first air pipe installed in the housing, the first air pipe being able to communicate with a first positive pressure air source, the first air pipe having a first air outlet for spraying air toward the through hole to form a first air curtain; the projection of the inner side of the through hole along the first direction coincides with the first air curtain.

2. The protection module according to claim 1, characterized in that, The first air pipe is installed on the outer surface of the box.

3. The protection module according to claim 1, characterized in that, The through holes are provided in two or more, and the number of first air tubes is not less than the number of through holes. Each through hole is sprayed by at least one first air tube.

4. The protection module according to claim 3, characterized in that, The number of first air tubes is the same as the number of through holes, and the first air tubes are used to spray air into the through holes one by one.

5. The protection module according to claim 1, characterized in that, The first air tube is provided with two or more first air outlets.

6. The protection module according to claim 1, characterized in that, The first vent hole includes one of a round hole, an elliptical hole, and a strip-shaped hole.

7. The protection module according to any one of claims 1 to 6, characterized in that, The protection component also includes: The second air pipe is installed in the housing and can be connected to the second positive pressure air source. The second air pipe is provided with a second air outlet for spraying air into the accommodating cavity.

8. The protection module according to any one of claims 1 to 6, characterized in that, The enclosure includes: The main body is provided with the through hole, and the main body is also provided with a window; Inspection panel, used to close or open the window.

9. A conveying device, characterized in that, include: The protection module according to any one of claims 1 to 8; A crossbeam, the first end of which is located in the through hole and the receiving cavity; A robotic arm is installed at the second end of the crossbeam and is used to pick up or put down products. A drive module is installed in the housing and located within the accommodating cavity. The output end of the drive module is connected to the first end of the crossbeam, and the drive module is used to drive the crossbeam to move.

10. Processing equipment, characterized in that, include: The container is provided with a receiving tank for holding liquid; The conveying device of claim 9, wherein the drive module is used to drive the crossbeam to move so that the product picked up by the robot arm enters or leaves the receiving slot.

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