Small substrate machining auxiliary clamp

Abstract

The utility model provides a small substrate processing auxiliary clamp, relates to the technical field of semiconductor integrated circuit processing auxiliary devices, and aims to solve the problems of low working efficiency, long time consumption and increased processing cost due to the fact that a single small substrate structure used for semiconductor production is conveyed to equipment for processing in the prior art. A plurality of groups of positioning grooves are formed in the carrying disc, substrates are placed in the positioning grooves, a groove is formed in the carrying disc, a cover plate is movably connected to the upper portion of the carrying disc, and the groove and the cover plate are matched with each other.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor integrated circuit processing auxiliary devices, and in particular to a small substrate processing auxiliary fixture. Background Technology

[0002] Semiconductor processing equipment is used to manufacture semiconductor materials, chips, and devices. Its main functions include processing, attaching, etching, and cleaning materials during transistor manufacturing, as well as testing and screening chips. This equipment is a crucial tool for integrated circuit production, and its performance and technological level directly determine the development and competitiveness of the semiconductor manufacturing field.

[0003] Existing small substrate structures used in semiconductor production are transported individually to equipment for processing, resulting in low efficiency, long processing time, and increased processing costs. Therefore, it is particularly important to design an auxiliary fixture for small substrate processing to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to solve the problems of low efficiency, long processing time, and increased processing costs associated with the existing small substrate structures used in semiconductor production, which are individually transported to the equipment for processing. Therefore, this invention proposes an auxiliary fixture for small substrate processing.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a small substrate processing auxiliary fixture, including a carrier plate, each carrier plate having multiple sets of positioning grooves, each positioning groove being provided with an air storage groove, a substrate being installed above the air storage groove, the carrier plate having a groove, a cover plate being movably connected above the carrier plate, the groove and the cover plate fitting together, the carrier plate having multiple sets of gas passage holes, a nitrogen-hydrogen mixed gas pipe being connected to the left side of the carrier plate, and a gas passage being formed between the cover plate and the carrier plate after the cover plate is installed on the carrier plate.

[0006] Preferably, the cover plate is made of a magnetically conductive material, and the positioning groove is provided with high-temperature magnets around the substrate. The cover plate is magnetically attracted to the surface of the carrier plate by the high-temperature magnets.

[0007] Preferably, the positioning slots are distributed in a matrix on the carrier plate, and the gas storage tank has a bowl-shaped structure design.

[0008] Preferably, the substrate adopts a lead frame structure design, and the shape of the substrate and the positioning groove are matched.

[0009] Preferably, the carrier disk is made of a high-temperature resistant material.

[0010] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0011] In this invention, a carrier tray is designed with multiple positioning grooves. An air storage groove structure is set within each positioning groove to create a structural constraint on the substrate structure. The substrate is placed in the carrier tray, acting as a lead frame, allowing for multiple rows to be arranged. This improves efficiency and significantly reduces labor costs. Compared to the conventional method of manually transporting substrates to equipment one by one without a carrier tray, this invention greatly improves substrate processing efficiency, reduces the workload of workers, and solves the problems of low efficiency, long processing times, and increased processing costs associated with the current method of transporting small substrates individually to equipment for semiconductor production. Attached Figure Description

[0012] Figure 1 This is an overall view of the auxiliary fixture for small substrate processing of this utility model;

[0013] Legend: 1. Carrier plate; 101. Groove; 102. Gas passage hole; 2. Positioning groove; 201. High-temperature magnet; 202. Gas storage tank; 3. Substrate; 4. Cover plate; 5. Nitrogen-hydrogen mixed gas pipe. Detailed Implementation

[0014] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0015] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0016] This utility model provides a small substrate processing auxiliary fixture, including a carrier tray 1. The carrier tray 1 has multiple sets of positioning grooves 2, each positioning groove 2 having an air storage groove 202. A substrate 3 is mounted above the air storage groove 202. The positioning grooves 2 are distributed in a matrix on the carrier tray 1. The substrate 3 adopts a lead frame structure design, and the air storage groove has a bowl-shaped structure design. The substrate 3 and the positioning grooves 2 are fitted together. A groove 101 is provided on the carrier tray 1, and a cover plate 4 is movably connected to the top of the carrier tray 1. The groove 101 and... The cover plate 4 fits into each other. The carrier plate 1 is provided with multiple sets of air passage holes 102. A nitrogen-hydrogen mixed gas pipe 5 is connected to the left side of the carrier plate 1. After the cover plate 4 is installed on the carrier plate 1, an air passage is formed between the cover plate 4 and the carrier plate 1. The cover plate 4 is made of magnetic material. The positioning groove 2 is provided with high temperature magnets 201 around the base plate 3. The cover plate 4 is attracted to the surface of the carrier plate 1 by the magnets of the high temperature magnets 201. The carrier plate 1 is made of high temperature resistant material to ensure that the carrier plate 1 is not easily damaged when used frequently for a long time.

[0017] In practical use, the small substrate processing auxiliary fixture uses substrate 3 to shape a basic lead frame shape, allowing it to enter the track for operation. According to customer requirements, the components are arranged in a matrix. An air storage tank structure 202, with a bowl-shaped design, is provided in the positioning groove 2 to structurally restrict the relative position of substrate 3 on the carrier plate 1. The cover plate 4 is magnetically attached to the surface of the carrier plate 1 by the high-temperature magnet 201, acting as a pressure seal to achieve complete positioning of substrate 3 before it is moved to the track for operation. A nitrogen-hydrogen mixed gas pipe 5 is connected to the left side of the carrier plate 1. Through the connection of gas passage holes 102, gas is transferred to the surface of the carrier plate 1 via gas passage channels (interconnected gas passage holes form the necessary path for gas flow). Bowl-shaped air storage tanks 202 are formed on the surface of the carrier plate 1, allowing gas to be distributed and stored on both sides. The carrier plate 1 acts as a gas storage tank, replenishing lost gas and coating the frame surface with a protective gas layer, effectively isolating it from surrounding oxygen and preventing oxidation. Multiple positioning grooves 2 are set on the carrier plate 1, with gas storage grooves within them, forming a structural limit on the substrate structure. A high-temperature magnet 201, in conjunction with a cover plate 4, fixes the substrate 3 within the carrier plate 1. Placing the substrate 3 in the carrier plate 1, it acts as a lead frame, allowing for multiple rows to be arranged, improving efficiency and significantly reducing labor costs. Compared to the conventional method of manually transporting substrates 3 to the equipment one by one without a carrier plate 1, this invention greatly improves substrate processing efficiency and reduces the workload of workers.

[0018] Working Principle: A basic lead frame is shaped using a substrate, allowing it to enter the track for operation. The lead frame is arranged in a matrix according to customer requirements. A bowl-shaped gas storage tank structure is incorporated within the positioning slot, structurally restricting the relative position of the substrate on the carrier. A cover plate, using the magnetic force of a high-temperature magnet, adheres to the carrier surface, acting as a pressure seal to ensure complete positioning of the substrate before it is moved to the track. A nitrogen-hydrogen mixed gas pipe is connected to the left side of carrier 1. Gas is transferred to the surface of carrier 1 through gas passages (interconnected gas passages form the necessary path for gas flow). Bowl-shaped gas storage tanks on the surface of carrier 1 allow the gas to disperse and be stored on both sides, acting as a gas reservoir to replenish lost gas. This creates a protective gas layer on the frame surface, effectively isolating it from surrounding oxygen and preventing oxidation.

Claims

1. A small substrate processing auxiliary jig comprising a carrier plate (1), characterized by, The tray (1) has multiple sets of positioning grooves (2), the positioning grooves (2) are provided with gas storage grooves (202), the upper part of the gas storage grooves (202) is provided with a base plate (3), the tray (1) is provided with a groove (101), the upper part of the tray (1) is movably connected with a cover plate (4), the groove (101) and the cover plate (4) are matched with each other, the tray (1) is provided with multiple sets of gas path holes (102), the left side of the tray (1) is externally connected with a nitrogen-hydrogen mixed gas pipe (5), and a gas path channel is formed between the cover plate (4) and the tray (1) after the cover plate (4) is mounted on the tray (1).

2. The small substrate processing aid jig according to claim 1, wherein The cover plate (4) is made of magnetic material, the positioning grooves (2) are provided with high-temperature magnets (201) around the base plate (3), and the cover plate (4) is adsorbed on the surface of the tray (1) by the magnets of the high-temperature magnets (201).

3. The small substrate processing aid jig according to claim 1, wherein The positioning grooves (2) are distributed in a matrix on the tray (1), and the gas storage grooves (202) are designed in a bowl-shaped structure.

4. The small substrate processing aid jig according to claim 1, wherein The base plate (3) adopts a lead frame structure design, and the shape of the base plate (3) is matched with the shape of the gas storage groove (202).

5. The small substrate processing aid jig according to claim 1, wherein The tray (1) is made of high-temperature-resistant material.

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