Efficient and continuous ion exchange resin system

Abstract

The utility model relates to an efficient and continuous ion exchange resin system in the technical field of purification of ultra-clean high-purity reagents. Comprising an anion exchange resin unit, a cation exchange resin unit, a mixed bed ion exchange resin unit, a feeding pipeline system, a discharging pipeline system and a high-purity water system. The anion exchange resin unit, the cation exchange resin unit and the mixed bed ion exchange resin unit are connected in series through pipelines, and the high-purity water system is connected with the anion exchange resin unit, the cation exchange resin unit and the mixed bed ion exchange resin unit through pipelines. Redundant structures such as a connecting rod, a turning mechanism, a transmission shaft and a scraper blade are not arranged in the ion exchange resin tower, so that impurities such as metal ions cannot be separated out; single-tower structures of an anion resin tower, a cation resin tower and a mixed bed ion exchange resin tower are respectively adjusted into double-tower units, one tower operates and the other tower is standby, when resin in the operating towers reaches the service life, the tower is switched into the standby tower to continue to work, and normal production is not influenced by replacement and cleaning.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of super-clean high-purity reagent purification, and belongs to a high-efficiency continuous ion exchange resin system. BACKGROUND

[0002] Super-clean high-purity reagents are a class of chemical reagents widely used in laboratories and industrial production, with extremely high purity and low impurity content. It has a wide range of applications in scientific research, drug development, electronics industry and other fields. With the continuous progress of science and technology and the development of related industries, the market for super-clean high-purity reagents is also showing a rapid growth trend. In the field of semiconductor industry, super-clean high-purity (VLSD) reagents are special chemicals for the manufacturing process of large-scale integrated circuits (IC) and high-end semiconductor devices, usually refined from low-purity reagents or industrial products, mainly used for cleaning, photoetching and etching processes of silicon single crystal wafers. Its purity and cleanliness have a significant impact on the yield, electrical performance and reliability of integrated circuits. Among them, high-purity water, hydrochloric acid, sulfuric acid and hydrogen peroxide are extremely important super-clean high-purity reagents, with very high requirements for anions and metal ions in their technical indicators, and the requirements become more stringent with the development of the semiconductor industry. Ion exchange resin is a high molecular compound with functional groups (active groups with exchangeable ions) and a network structure, which is usually filled into a resin tower. When the liquid to be purified passes through the resin tower, the target anions and cations can exchange with the active exchangeable ions on the resin, thereby achieving the purpose of removal, and can be reused through regeneration, with good effect and high economic benefit.

[0003] CN218590553U discloses an ion exchange device, the upper end of the tank body is provided with a liquid inlet, the lower end is provided with a liquid outlet, and ion exchange resin is arranged in the tank body; a gas cylinder, a piston rod and a turning mechanism are further arranged on the upper end and the inner part of the tank body, the turning mechanism is driven to move up and down by the gas cylinder, the ion exchange resin is fully turned, the regeneration effect is improved, and the service life is prolonged, however, the plug rod and the turning mechanism are arranged in the tank body, and metal ions may be precipitated when the plug rod and the turning mechanism are in contact with the target liquid, so the device is difficult to be applied to purification of ultraclean high-purity electronic chemicals. CN214553603U discloses an ion exchange resin tower, a transmission shaft, a stopper, a sliding block and a scraper are arranged in the tower body, the transmission rod is driven to rotate by a motor, the scraper is driven to move up and down along the inner wall of the tower body by the sliding block under the action of the nut, the ion exchange resin attached to the inner wall of the tower body is scraped and cleaned, the ion exchange resin is prevented from being attached to the inner wall of the tower body, the waste of the resin is reduced, and the normal use of the ion exchange resin tower is ensured, then the plurality of structures in the tower body are in direct contact with the resin and the target liquid, metal ions or other impurities may be precipitated, the device is difficult to be applied to purification of ultraclean high-purity electronic chemicals, and the resin may be broken in the process of scraping the resin, the resin is lost, and the resin screen holes may be blocked, which is not conducive to the outflow of the target liquid. CN200420027960.9 discloses a high-purity hydrogen peroxide purification device, which comprises, in sequence, a raw material tank, a macroporous adsorption resin column, a single anion exchange resin column, a single cation exchange resin column, a mixed column of anion and cation exchange resins, a microporous filter, a finished product receiver, and a pump, a valve and a connecting pipeline, which can effectively remove organic carbon, anion and cation impurities and particulate impurities in hydrogen peroxide, and has the characteristics of small occupied area, high raw material utilization rate, low production cost, easy operation and the like, however, each resin tower in the device is a single tower structure, the resin in each resin tower needs to be replaced and cleaned after reaching the service life, and the service life of the resin used in each resin tower is different, which may lead to frequent shutdown and failure to realize efficient continuous production. Practical new type content

[0004] In view of the above technical problems, the utility model provides a kind of efficient continuous ion exchange resin system, first need to solve the problem that the structure in tower is complex and leads to the precipitation of metal ions and other impurities;It is also necessary to solve the problem of parking loss caused by ion exchange resin replacement and cleaning when reaching service life, and to solve the problem of frequent parking caused by different ion exchange resin service life and unable to efficiently and continuously produce.

[0005] In order to achieve the above purpose, the utility model provides the following technical scheme:

[0006] The application provides a high-efficiency continuous ion exchange resin system, which comprises an anion exchange resin unit, a cation exchange resin unit, a mixed bed ion exchange resin unit, an inlet pipeline system, an outlet pipeline system and a high-purity water system.

[0007] The anion exchange resin unit, the cation exchange resin unit and the mixed bed ion exchange resin unit are sequentially connected in series through pipelines, and the high-purity water system is connected with the anion exchange resin unit, the cation exchange resin unit and the mixed bed ion exchange resin unit through pipelines.

[0008] The anion exchange resin unit comprises a first anion exchange resin tower and a second anion exchange resin tower which are connected in parallel through pipelines, and the input ends of the first anion exchange resin tower and the second anion exchange resin tower are connected with the inlet pipeline system.

[0009] The cation exchange resin unit comprises a first cation exchange resin tower and a second cation exchange resin tower which are connected in parallel through pipelines.

[0010] The mixed bed ion exchange resin unit comprises a first mixed bed ion exchange resin tower and a second mixed bed ion exchange resin tower which are connected in parallel through pipelines, and the output ends of the first mixed bed ion exchange resin tower and the second mixed bed ion exchange resin tower are connected with the outlet pipeline system.

[0011] Preferably, the first anion exchange resin tower and the second anion exchange resin tower are respectively provided with valves M101 and M102 which are connected with the atmosphere, the first anion exchange resin tower is provided with a valve M103 between the first anion exchange resin tower and the inlet pipeline system, and the second anion exchange resin tower is provided with a valve M104 between the second anion exchange resin tower and the inlet pipeline system.

[0012] Preferably, the first cation exchange resin tower and the second cation exchange resin tower are respectively provided with valves M201 and M202 which are connected with the atmosphere, the cation exchange resin unit is provided with a valve M111 between the cation exchange resin unit and the anion exchange resin unit, the valve M111 is respectively provided with a valve M107 and a valve M108 between the valve M111 and the first anion exchange resin tower and the second anion exchange resin tower, the valve M111 is respectively provided with a valve M203 and a valve M204 between the valve M111 and the first cation exchange resin tower and the second cation exchange resin tower, the cation exchange resin unit is provided with a valve M211 between the cation exchange resin unit and the mixed bed ion exchange resin unit, the valve M211 is respectively provided with a valve M208 and a valve M209 between the valve M211 and the first cation exchange resin tower and the second cation exchange resin tower, and the valve M211 is respectively provided with a valve M303 and a valve M304 between the valve M211 and the first mixed bed ion exchange resin tower and the second mixed bed ion exchange resin tower.

[0013] As preferred, the valve M107 is provided in parallel with a valve M109, the valve M108 is provided in parallel with a valve M110, the valve M207 is provided in parallel with a valve M209, and the valve M208 is provided in parallel with a valve M210.

[0014] As preferred, the first mixed bed ion exchange resin tower and the second mixed bed ion exchange resin tower are respectively provided with a valve M301 and a valve M302 in communication with the atmosphere, and a valve M311 is provided between the mixed bed ion exchange resin unit and the discharge pipeline system, and the valve M311 is respectively provided with a valve M307 and a valve M308 between the first mixed bed ion exchange resin tower and the second mixed bed ion exchange resin tower, the valve M307 is provided in parallel with a valve M309, and the valve M308 is provided in parallel with a valve M310.

[0015] As preferred, a valve M105 is provided between the first anion exchange resin tower and the high-purity water system, and a valve M106 is provided between the second anion exchange resin tower and the high-purity water system.

[0016] As preferred, a valve M205 is provided between the first cation exchange resin tower and the high-purity water system, and a valve M206 is provided between the second cation exchange resin tower and the high-purity water system.

[0017] As preferred, a valve M305 is provided between the first mixed bed ion exchange resin tower and the high-purity water system, and a valve M306 is provided between the second mixed bed ion exchange resin tower and the high-purity water system.

[0018] Compared with the prior art, the utility provides a kind of efficient continuous ion exchange resin system, with following beneficial effects:

[0019] The ion exchange resin tower system of the utility model has simple structure, and there are no connecting rods, turnover mechanisms, transmission shafts, scrapers and other redundant structures in the tower, which will not cause the precipitation of impurities such as metal ions; at the same time, the single-tower structure of the anion resin tower, the cation resin tower and the mixed bed ion exchange resin tower is adjusted to a double-tower unit, one tower is in operation and the other is standby, when the resin in the operating tower reaches the service life, it is switched to the standby tower, and the standby tower is switched to the operating tower to continue working, at this time, the resin replacement and cleaning in the standby tower do not affect normal production, and the anion resin tower unit, the cation resin tower unit and the mixed bed ion exchange resin tower unit do not interfere with each other, and are not affected by the different service lives of ion exchange resins, which is conducive to efficient continuous production.

[0020] The features and advantages of the utility model will be described in detail in conjunction with the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a whole structure schematic view of the utility model;

[0022] In the figure: 1, anion exchange resin unit; 2, cation exchange resin unit; 3, mixed bed ion exchange resin unit; 4, feed pipe system; 5, discharge pipe system; 6, high-purity water system; 11, first anion exchange resin tower; 12, second anion exchange resin tower; 21, first cation exchange resin tower; 22, second cation exchange resin tower; 31, first mixed bed ion exchange resin tower; 32, second mixed bed ion exchange resin tower. DETAILED DESCRIPTION

[0023] To make the purpose, technical scheme and advantages of the present application more clear and obvious, the present application is further described in detail below with the help of drawings and examples. However, it should be understood that the specific examples described herein are only used to explain the present application and are not used to limit the scope of the present application. In addition, in the following description, the description of the known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present application.

[0024] Reference Figure 1 The present application provides a kind of efficient continuous ion exchange resin system, including anion exchange resin unit 1, cation exchange resin unit 2, mixed bed ion exchange resin unit 3, feed pipe system 4, discharge pipe system 5 and high-purity water system 6;The anion exchange resin unit 1, cation exchange resin unit 2, mixed bed ion exchange resin unit 3 are sequentially connected in series by pipeline, and the high-purity water system 6 is connected with anion exchange resin unit 1, cation exchange resin unit 2 and mixed bed ion exchange resin unit 3 by pipeline;The anion exchange resin unit 1 includes first anion exchange resin tower 11 and second anion exchange resin tower 12 that are connected in parallel by pipeline, and the input end of the first anion exchange resin tower 11 and the input end of the second anion exchange resin tower 12 are connected with the feed pipe system 4;The cation exchange resin unit 2 includes first cation exchange resin tower 21 and second cation exchange resin tower 22 that are connected in parallel by pipeline;The mixed bed ion exchange resin unit 3 includes first mixed bed ion exchange resin tower 31 and second mixed bed ion exchange resin tower 32 that are connected in parallel by pipeline, and the output end of the first mixed bed ion exchange resin tower 31 and the output end of the second mixed bed ion exchange resin tower 32 are connected with the discharge pipe system 5.

[0025] Specifically, the first anion exchange resin tower 11 and the second anion exchange resin tower 12 are respectively provided with valve M101 and valve M102 communicated with atmosphere, and the first anion exchange resin tower 11 and the feed pipe system 4 are provided with valve M103, and the second anion exchange resin tower 12 and the feed pipe system 4 are provided with valve M104.

[0026] Specifically, the first cation exchange resin tower 21 and the second cation exchange resin tower 22 are respectively provided with valves M201 and M202 which are in communication with the atmosphere, the valve M111 between the cation exchange resin unit 2 and the anion exchange resin unit 1 is respectively provided with valves M107 and M108 between the first anion exchange resin tower 11 and the second anion exchange resin tower 12, the valve M111 is respectively provided with valves M203 and M204 between the first cation exchange resin tower 21 and the second cation exchange resin tower 22, the valve M211 between the cation exchange resin unit 2 and the mixed bed ion exchange resin unit 3 is respectively provided with valves M208 and M209 between the first cation exchange resin tower 21 and the second cation exchange resin tower 22, and the valve M211 is respectively provided with valves M303 and M304 between the first mixed bed ion exchange resin tower 31 and the second mixed bed ion exchange resin tower 32.

[0027] Specifically, the valve M107 is provided with a valve M109 in parallel, the valve M108 is provided with a valve M110 in parallel, the valve M207 is provided with a valve M209 in parallel, the valve M208 is provided with a valve M210 in parallel, and the ports of the valves M109, M110, M209 and M208 are provided with sampling ports for sampling.

[0028] Specifically, the first mixed bed ion exchange resin tower 31 and the second mixed bed ion exchange resin tower 32 are respectively provided with valves M301 and M302 which are in communication with the atmosphere, the valve M311 between the mixed bed ion exchange resin unit 3 and the discharge pipeline system 5 is respectively provided with valves M307 and M308 between the first mixed bed ion exchange resin tower 31 and the second mixed bed ion exchange resin tower 32, the valve M307 is provided with a valve M309 in parallel, the valve M308 is provided with a valve M310 in parallel, and the ports of the valves M309 and M310 are provided with sampling ports for sampling.

[0029] Specifically, the valve M105 is provided between the first anion exchange resin tower 11 and the high-purity water system 6, and the valve M106 is provided between the second anion exchange resin tower 12 and the high-purity water system 6.

[0030] Specifically, the valve M205 is provided between the first cation exchange resin tower 21 and the high-purity water system 6, and the valve M206 is provided between the second cation exchange resin tower 22 and the high-purity water system 6.

[0031] Specifically, the first mixed bed ion exchange resin column 31 and the high-purity water system 6 are provided with a valve M305, and the second mixed bed ion exchange resin column 32 and the high-purity water system 6 are provided with a valve M306.

[0032] The working principle of the utility model:

[0033] Production preparation: select the first anion exchange resin column 11, the first cation exchange resin column 21 and the first mixed bed ion exchange resin column 31 as the running column, and the second anion exchange resin column 12, the second cation exchange resin column 22 and the second mixed bed ion exchange resin column 32 as the standby column. Adjust the liquid level in the first anion exchange resin column 11, the first cation exchange resin column 21 and the first mixed bed ion exchange resin column 31 to the appropriate position through the valves M101, M201 and M301, then open the first anion exchange resin column 11 inlet valve M103 to start replacing the liquid in the first anion exchange resin column 11, the replacement liquid is discharged through the pipeline and the valve M109, and is regularly sampled and detected through the valve M109. When the detection meets the requirements, open the valves M107 and M111, open the valve M203 above the first cation exchange resin column 21, and close the valve M109 to start replacing the liquid in the first cation exchange resin column 21, the replacement liquid is discharged through the pipeline and the valve M209, and is regularly sampled and detected through the valve M209. When the detection meets the requirements, open the valves M207 and M211, open the valve M303 above the first mixed bed ion exchange resin column 31, and close the valve M209 to start replacing the liquid in the first mixed bed ion exchange resin column 31, the replacement liquid is discharged through the pipeline and the valve M309, and is regularly sampled and detected through the valve M309. When the detection meets the requirements, open the valves M307 and M311 to start normal production.

[0034] Normal production: select the first anion exchange resin column 11, the first cation exchange resin column 21 and the first mixed bed ion exchange resin column 31 as the running column, and the second anion exchange resin column 12, the second cation exchange resin column 22 and the second mixed bed ion exchange resin column 32 as the standby column. Regularly sample the liquid in the first anion exchange resin column 11, the first cation exchange resin column 21 and the first mixed bed ion exchange resin column 31 through the pipeline and the valves M109, M209 and M309 to monitor the running state of each column. When the liquid detection index of a certain running column shows that the resin will reach the service life, start preparing to switch.

[0035] Resin tower switching: take the anion exchange resin unit as an example. The first anion exchange resin tower 11 is selected as the running tower, and the second anion exchange resin tower 12 is selected as the standby tower. The liquid in the first anion exchange resin tower 11 is sampled regularly through the pipeline and valve M109, and when the detection index shows that the resin will reach the service life, the switching is started, the liquid level in the second anion exchange resin tower 12 is adjusted to the appropriate position through the pipeline and valve M102, the valves M104 and M110 are opened, the valves M103 and M107 are closed, the replacement is started, the sampling detection is regularly carried out through the valve M110, and after the requirements are met, the valve M108 is opened to restore normal production. At this time, the second anion exchange resin tower 12 is the running tower, and the first anion exchange resin tower 11 is the standby tower after being replaced with resin and cleaned.

[0036] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement or improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A high-efficiency continuous ion exchange resin system comprising an anion exchange resin unit (1), a cation exchange resin unit (2), a mixed bed ion exchange resin unit (3), an inlet pipeline system (4), an outlet pipeline system (5) and a high-purity water system (6), characterized in that: the anion exchange resin unit (1), the cation exchange resin unit (2) and the mixed bed ion exchange resin unit (3) are sequentially connected in series through pipelines, and the high-purity water system (6) is connected to the anion exchange resin unit (1), the cation exchange resin unit (2) and the mixed bed ion exchange resin unit (3) through pipelines; the anion exchange resin unit (1) comprises a first anion exchange resin tower (11) and a second anion exchange resin tower (12) connected in parallel through pipelines, and the input ends of the first anion exchange resin tower (11) and the second anion exchange resin tower (12) are connected to the inlet pipeline system (4); the cation exchange resin unit (2) comprises a first cation exchange resin tower (21) and a second cation exchange resin tower (22) connected in parallel through pipelines; the mixed bed ion exchange resin unit (3) comprises a first mixed bed ion exchange resin tower (31) and a second mixed bed ion exchange resin tower (32) connected in parallel through pipelines, and the output ends of the first mixed bed ion exchange resin tower (31) and the second mixed bed ion exchange resin tower (32) are connected to the outlet pipeline system (5). valves M101 and M102 are respectively provided on the first anion exchange resin tower (11) and the second anion exchange resin tower (12) and are connected to the atmosphere, a valve M103 is provided between the first anion exchange resin tower (11) and the inlet pipeline system (4), and a valve M104 is provided between the second anion exchange resin tower (12) and the inlet pipeline system (4).

2. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: valves M201 and M202 are respectively provided on the first cation exchange resin tower (21) and the second cation exchange resin tower (22) and are connected to the atmosphere, a valve M111 is provided between the cation exchange resin unit (2) and the anion exchange resin unit (1), valves M107 and M108 are respectively provided between the valve M111 and the first anion exchange resin tower (11) and the second anion exchange resin tower (12), valves M203 and M204 are respectively provided between the valve M111 and the first cation exchange resin tower (21) and the second cation exchange resin tower (22), a valve M211 is provided between the cation exchange resin unit (2) and the mixed bed ion exchange resin unit (3), valves M208 and M209 are respectively provided between the valve M211 and the first cation exchange resin tower (21) and the second cation exchange resin tower (22), and valves M303 and M304 are respectively provided between the valve M211 and the first mixed bed ion exchange resin tower (31) and the second mixed bed ion exchange resin tower (32).

3. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: ​ 4. A high efficiency continuous ion exchange resin system as claimed in claim 3, wherein: The valve M107 is provided in parallel with a valve M109, the valve M108 is provided in parallel with a valve M110, the valve M207 is provided in parallel with a valve M209, and the valve M208 is provided in parallel with a valve M210.

5. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: The first mixed bed ion exchange resin column (31) and the second mixed bed ion exchange resin column (32) are respectively provided with valves M301 and M302 which are in communication with the atmosphere, the mixed bed ion exchange resin unit (3) and the discharge pipeline system (5) are provided with a valve M311, the valve M311 and the first mixed bed ion exchange resin column (31) and the second mixed bed ion exchange resin column (32) are respectively provided with valves M307 and M308, the valve M307 is provided in parallel with a valve M309, and the valve M308 is provided in parallel with a valve M310.

6. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: The first anion exchange resin column (11) and the high-purity water system (6) are provided with a valve M105, and the second anion exchange resin column (12) and the high-purity water system (6) are provided with a valve M106.

7. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: The first cation exchange resin column (21) and the high-purity water system (6) are provided with a valve M205, and the second cation exchange resin column (22) and the high-purity water system (6) are provided with a valve M206.

8. A high efficiency continuous ion exchange resin system as claimed in claim 1, wherein: The first mixed bed ion exchange resin column (31) and the high-purity water system (6) are provided with a valve M305, and the second mixed bed ion exchange resin column (32) and the high-purity water system (6) are provided with a valve M306.

Images