Vacuum coating cavity

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating cavity which comprises a first cavity, a second cavity and a third cavity, the process chamber is arranged at the front end of the first chamber and communicates with the first chamber, a partition plate is arranged at an inlet of the process chamber, a sealing piece is arranged on the circumferential side wall of the partition plate and suitable for sealing the circumferential side wall of the partition plate and the inner wall of the process chamber, and connecting supporting plates are arranged at the top and the bottom of the partition plate correspondingly; the connecting support plate is detachably connected with the process chamber; a penetrating opening is formed in the partition plate, a valve plate is rotationally arranged in the process chamber, and the valve plate is arranged on the side, close to the first chamber, of the partition plate; when the valve plate rotates to the vertical state, the valve plate is attached to the partition plate so as to close the penetrating opening. The rotatable valve plate is arranged on the side, close to the first cavity, of the partition plate to complete opening / closing of the penetrating opening, and opening / closing of the cavities can be completed without independently arranging a gate valve assembly.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum coating technical field, concretely relates to a vacuum coating cavity. BACKGROUND

[0002] Vacuum coating is a kind of technology that thin film is deposited on the surface of material by physical or chemical method in high vacuum environment, and its main purpose is to form high-quality, high-purity thin film under the condition of reducing impurity interference, and it is widely used in battery sheet production process;In the existing vacuum coating production line, it is usually combined by multiple chambers, and a separate door valve assembly is arranged between each chamber to complete the opening / closing of the chamber, and the battery sheet is placed in the carrier plate and is sent into the chamber by conveying vice to complete coating, but the separately arranged door valve assembly makes the overall structure of the production line complex, resulting in the inconvenience of installation and maintenance of the production line.

[0003] Therefore, how to avoid the inconvenience of installation and maintenance of the production line caused by the need to separately arrange the door valve assembly is a technical problem that needs to be solved in the field.

[0004] It should be noted that the above information disclosed in the background section of the present application is only for understanding the background of the concept of the present application, and therefore, the above description is not considered to constitute information of the prior art. CONTENT OF THE UTILITY MODEL

[0005] The embodiments of the present disclosure at least provide a kind of vacuum coating cavity.

[0006] In a first aspect, the embodiments of the present disclosure provide a kind of vacuum coating cavity, comprising: first chamber;Process chamber, which is arranged at the front end of the first chamber and is communicated with the first chamber, the inlet of the process chamber is provided with a partition plate, the circumferential side wall of the partition plate is provided with a sealing element, the sealing element is suitable for sealing the circumferential side wall of the partition plate and the inner wall of the process chamber, the top and bottom of the partition plate are respectively provided with connecting branch plate, and the connecting branch plate is detachably connected with the process chamber;And, through hole is opened in the partition plate, the valve plate is rotatably arranged in the process chamber, and the valve plate is arranged on the side of the partition plate close to the first chamber;Wherein, when the valve plate rotates to vertical state, the valve plate is attached to the partition plate to close the through hole.

[0007] In an alternative embodiment, the circumferential side wall of the partition plate is provided with a placing groove in communication with each other;The sealing element is a sealing strip connected head to tail, the sealing element is clamped in the placing groove, and the sealing element always extrudes the inner wall of the process chamber to seal the partition plate and the process chamber.

[0008] In an alternative embodiment, the side wall of the partition plate is provided with a reinforcing seat;The reinforcing seat is "L" shaped, one side of the reinforcing seat is connected with the side wall of the partition plate, and the other side of the reinforcing seat is connected with the side wall of the process chamber.

[0009] In an alternative embodiment, the partition plate is provided with an auxiliary plate near the side wall of the first chamber, the auxiliary plate is detachably connected with the partition plate, a strip-shaped hole is formed in the auxiliary plate and corresponds to the position of the through hole, and the valve plate is attached to the auxiliary plate to close the strip-shaped hole when the valve plate is turned to the vertical state.

[0010] In an alternative embodiment, a rotating shaft is inserted into the side wall of the process chamber, the two ends of the rotating shaft extend out of the process chamber, a driving seat is arranged on the outer wall of the process chamber, a driving cylinder is hingedly connected to the driving seat, the piston rod of the driving cylinder is connected to the extending end of the rotating shaft through a connecting rod, and the valve plate is detachably connected with the rotating shaft.

[0011] In an alternative embodiment, a connecting plate is arranged on the side wall of the valve plate, a pin column is arranged on the connecting plate, the pin column is inserted into the rotating shaft, and the pin column is connected with the rotating shaft through a fastener.

[0012] In an alternative embodiment, a conveying pair is arranged in the process chamber, the conveying pair comprises a pair of support beams, the support beams are respectively arranged on the inner walls of the process chamber, a plurality of rollers are arranged on the support beams, a belt is sleeved on the rollers to convey a carrier plate, the bottom of the support beam is provided with a driving wheel through a support, the belt is wound on the driving wheel, a driving roller is inserted between the driving wheels, and one end of the driving roller extends out of the process chamber.

[0013] In the second aspect, the embodiments of the present disclosure provide a vacuum coating chamber, comprising: a first chamber; a plurality of communicating process chambers arranged in sequence at the rear end of the first chamber, a partition plate is arranged in each process chamber, a through hole is formed in the partition plate, a valve plate is rotatably arranged at the front end of the partition plate, the valve plate is adapted to open / close the through hole, and an outlet plate is arranged at the end of the last process chamber, a through hole is formed in the outlet plate, and a valve plate is rotatably arranged at the rear end of the outlet plate to close the through hole.

[0014] The vacuum coating chamber of the present application has the following beneficial effects: a partition plate is sealingly arranged in the process chamber, a rotatable valve plate is arranged on the side of the partition plate close to the first chamber, and the opening / closing of the through hole is completed, so that a separate gate valve assembly is not needed, and the opening / closing of the chamber can be completed.

[0015] Other features and advantages of the present application will be set forth in the following description of the application, and in part will become apparent to those skilled in the art upon examination of the following or can be learned from practice of the present application. The objects and other advantages of the present application will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

[0016] In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the preferred embodiments are described in detail below, and the accompanying drawings are described as follows.

[0018] Fig. 1 A perspective view of a vacuum coating chamber according to an embodiment of the present disclosure is provided.

[0019] Fig. 2 A cross-sectional view of a vacuum coating chamber according to an embodiment of the present disclosure is provided.

[0020] Fig. 3 A cross-sectional view of a process chamber according to an embodiment of the present disclosure is provided.

[0021] Fig. 4 A perspective view of a conveying pair according to an embodiment of the present disclosure is provided.

[0022] In the drawings:

[0023] 1. first chamber;

[0024] 2. process chamber; 21. partition plate; 21a. sealing element; 21b. connecting branch plate; 21c. through hole; 21d. placement groove; 21e. reinforcing seat; 21f. auxiliary plate; 21g. strip-shaped hole; 22. valve plate; 22a. connecting plate; 22b. pin column; 23. rotating shaft; 24. driving seat; 25. driving cylinder; 26. conveying pair; 26a. support beam; 26b. roller; 26c. driving wheel; 26d. driving roller; 27. outlet plate. DETAILED DESCRIPTION

[0025] In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the preferred embodiments are described in detail below, and the accompanying drawings are described as follows.

[0026] In this document, when referred to as a first component being on a second component, it can mean that the first component can be formed directly on the second component, or a third component can be interposed between the first component and the second component. Also, in the drawings, the thickness of components can be exaggerated or reduced for effective description of the technical content.

[0027] The terminology used herein is for the purpose of describing particular example configurations only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" can be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order in which they are described, unless specifically identified as an order of performance. Additional or alternative steps can be employed.

[0028] As used herein, the phrases "in an embodiment," "according to an embodiment," "in some embodiments," and the like generally mean the particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of the present disclosure. Thus, appearances of such phrases in various places in the specification do not necessarily all refer to the same embodiment. As used herein, the terms "example," "for example," and the like are utilized herein to mean "serving as an example, instance, or illustration." Any implementation, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations, aspects, or designs. Rather, the term "example" is intended to indicate a non-limiting example. The terms "use," "used," and "using" as utilized herein generally mean "utilized" or "implemented" in some way.

[0029] It is found through research that the existing film plating cavity needs to separately set a door valve assembly at the front end and the rear end, resulting in a complicated overall structure of the production line, which is a problem and purpose to be solved by the utility model.

[0030] Based on the above research, the embodiment of the present disclosure provides a vacuum film plating cavity, which integrates a partition plate and a valve plate in a process chamber to complete the opening / closing of the chamber.

[0031] The defects of the above scheme are the results obtained by the utility model person after practice and careful research, therefore, the discovery process of the above problems and the solutions proposed by the present disclosure for the above problems in this paper should be the contribution of the utility model person to the present disclosure in the process of the present disclosure.

[0032] It should be noted that like reference numerals and letters refer to like items throughout the several views, and once an item is defined in one view, it should not require further defining and explaining in the subsequent views.

[0033] Some embodiments of the present application will be described in detail with reference to the drawings. The following embodiments and features of the embodiments described below can be combined with each other in the case of no conflict.

[0034] Referring to Figs. 1 to 4 , a vacuum coating chamber is shown, comprising: a first chamber 1; a process chamber 2 arranged at the front end of the first chamber 1 and communicating with the first chamber 1, a partition plate 21 is arranged at the inlet of the process chamber 2, a sealing element 21a is arranged on the circumferential side wall of the partition plate 21, the sealing element 21a is adapted to seal the circumferential side wall of the partition plate 21 and the inner wall of the process chamber 2, a connecting branch plate 21b is arranged at the top and bottom of the partition plate 21 respectively, and the connecting branch plate 21b is detachably connected with the process chamber 2; and a through hole 21c is formed in the partition plate 21, a valve plate 22 is rotatably arranged in the process chamber 2, and the valve plate 22 is arranged on the side of the partition plate 21 close to the first chamber 1; wherein when the valve plate 22 is rotated to the vertical state, the valve plate 22 is attached to the partition plate 21 to close the through hole 21c; in short, the vacuum coating chamber completes the opening / closing of the through hole 21c by sealingly arranging a partition plate 21 in the process chamber 2, and arranging a rotatable valve plate 22 on the side of the partition plate 21 close to the first chamber 1, without separately arranging a gate valve assembly, to complete the opening / closing of the chamber; and the connecting branch plate 21b and the process chamber 2 are detachably connected by bolts.

[0035] In some embodiments, the circumferential side wall of the partition plate 21 is provided with mutually communicating placement grooves 21d; the sealing element 21a is a sealing strip connected head to tail, the sealing element 21a is clamped in the placement grooves 21d, and the sealing element 21a always presses the inner wall of the process chamber 2 to seal the partition plate 21 and the process chamber 2; in short, by arranging mutually communicating placement grooves 21d on the circumferential side wall of the partition plate 21, a sealing strip connected head to tail can be clamped therein to realize the sealing of the inner wall of the partition plate 21 and the process chamber 2.

[0036] In some embodiments, the side wall of the partition plate 21 is provided with a reinforcing seat 21e; the reinforcing seat 21e is "L" shaped, one side of the reinforcing seat 21e is connected with the side wall of the partition plate 21, and the other side of the reinforcing seat 21e is connected with the side wall of the process chamber 2; in short, the reinforcing seat 21e is arranged on the short side of the partition plate 21 to strengthen the connection strength of the partition plate 21 and the process chamber 2, and to avoid deformation of the partition plate 21 due to pressure difference on both sides.

[0037] In some embodiments, the partition plate 21 is provided with an auxiliary plate 21f near the side wall of the first chamber 1, the auxiliary plate 21f is detachably connected with the partition plate 21, a strip-shaped hole 21g is formed on the auxiliary plate 21f, the strip-shaped hole 21g corresponds to the position of the through hole 21c, and when the valve plate 22 is rotated to the vertical state, the valve plate 22 is attached to the auxiliary plate 21f to close the strip-shaped hole 21g. In short, since the gap between the valve plate 22 and the partition plate 21 cannot be completely determined when the valve plate 22 is rotated to the vertical state (i.e. there is mechanical error in the installation of the partition plate 21 and the valve plate 22), the auxiliary plate 21f with different thicknesses can be replaced so that there is a stable pressing force between the valve plate 22 and the auxiliary plate 21f, the sealing strength of the valve plate 22 is guaranteed, and the side wall of the valve plate 22 is provided with a sealing ring to improve the sealing effect.

[0038] In some embodiments, the side wall of the process chamber 2 is inserted with a rotating shaft 23, both ends of the rotating shaft 23 extend out of the process chamber 2, the outer wall of the process chamber 2 is provided with a driving seat 24, a driving cylinder 25 is hinged on the driving seat 24, the piston rod of the driving cylinder 25 is connected with the extending end of the rotating shaft 23 through a connecting rod, and the valve plate 22 is detachably connected with the rotating shaft 23. In short, the side wall of the process chamber 2 is provided with a sealed rotating seat, the rotating shaft 23 is inserted therein to realize the sealed rotation of the rotating shaft 23, and the driving of the rotating shaft 23 is realized through the driving cylinder 25.

[0039] In some embodiments, the side wall of the valve plate 22 is provided with a connecting plate 22a, the connecting plate 22a is provided with a pin column 22b, the pin column 22b is inserted on the rotating shaft 23 and connected with the rotating shaft 23 through a fastener. In short, the head of the pin column 22b is provided with a bolt which is inserted in the rotating shaft 23, and a nut is arranged on the bolt to fix the pin column 22b, so as to complete the connection between the valve plate 22 and the rotating shaft 23.

[0040] In some embodiments, a conveying pair 26 is arranged in the process chamber 2; the conveying pair 26 comprises a pair of support beams 26a arranged on the inner wall of the process chamber 2, a plurality of rollers 26b are arranged on the support beams 26a, a belt is sleeved on the rollers 26b to convey a carrier plate, the bottom of the support beam 26a is provided with a driving wheel 26c through a support, the belt is wound on the driving wheel 26c, a driving roller 26d is inserted between the driving wheels 26c, one end of the driving roller 26d extends out of the process chamber 2; in short, the driving roller 26d is installed on the side wall of the process chamber 2 through a sealed rotating seat and connected with a driving mechanism, the belt is wound on the driving wheel 26c and the roller 26b, the driving roller 26d drives the driving wheel 26c to rotate, the rotation of the belt is realized, and the conveying of the carrier plate is completed.

[0041] In a second aspect, the embodiments of the present disclosure provide a vacuum coating cavity, comprising: a first cavity 1; a plurality of communication process cavities 2, which are sequentially arranged at the rear end of the first cavity 1, a partition plate 21 is arranged in the process cavity 2, a through hole 21c is formed in the partition plate 21, and a valve plate 22 is rotatably arranged at the front end of the partition plate 21, and the valve plate 22 is suitable for opening / closing the through hole 21c; and the end of the last process cavity 2 is provided with an outlet plate 27, the outlet plate 27 is provided with a through hole 21c, and the rear end of the outlet plate 27 is rotatably provided with a valve plate 22 to close the through hole 21c; in short, the front end of the first cavity 1 is in communication with the normal pressure area, the valve plate 22 is arranged at the front end to control the opening and closing, after the carrier plate enters the first cavity 1, the inlet of the first cavity 1 is closed, vacuumizing is started, after the vacuum degree requirement is reached, the valve plate 22 of the first process cavity 2 is opened, the carrier plate is transported to the first process cavity 2, the first cavity 1 is closed, coating is started, after completion, the valve plate 22 of the second process cavity 2 is opened, the carrier plate enters the second process cavity 2, until the carrier plate enters the last process cavity 2, after the final coating is completed, the carrier plate is sent out at the through hole 21c of the outlet plate 27 of the last process cavity 2.

[0042] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected, can be mechanically connected, or electrically connected, can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0043] In the description of the present application, it should be explained that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the present application. In addition, terms such as "first", "second" and other numerical terms are used herein, unless otherwise explicitly indicated herein. Therefore, the first element, component, region, layer or section discussed above can be referred to as the second element, component, region, layer or section without departing from the teachings of the example embodiments.

[0044] Spatially relative terms, such as "inner," "outer," "beneath," "below," "lower," "above," "upper," and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. Spatially relative terms can be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" can encompass both an orientation of above and below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0045] In the above discussion, unless otherwise stated, the terms "about," "approximately," "substantially" and the like mean a variation of + / - 10% when used to describe a numerical value.

[0046] With the above ideal embodiments according to the present application as the inspiration, through the above description, relevant personnel can certainly make various changes and modifications without deviating from the technical thought of the present application. The technical scope of the present application is not limited to the content in the specification, and must be determined according to the scope of claims.

Claims

1. A vacuum coating chamber, characterized in that The vacuum coating chamber comprises: a first chamber (1); a process chamber (2) arranged at the front end of the first chamber (1) and communicating with the first chamber (1), an inlet of the process chamber (2) is provided with a partition plate (21), a circumferential side wall of the partition plate (21) is provided with a sealing element (21a), the sealing element (21a) is adapted to seal the circumferential side wall of the partition plate (21) and the inner wall of the process chamber (2), the top and bottom of the partition plate (21) are respectively provided with a connecting branch plate (21b), and the connecting branch plate (21b) is detachably connected with the process chamber (2); and a through hole (21c) is formed in the partition plate (21), a valve plate (22) is rotatably arranged in the process chamber (2), and the valve plate (22) is arranged on the side of the partition plate (21) close to the first chamber (1); wherein when the valve plate (22) is rotated to a vertical state, the valve plate (22) is attached to the partition plate (21) to close the through hole (21c).

2. The vacuum coating chamber of claim 1, wherein the circumferential side wall of the partition plate (21) is provided with a placement groove (21d) in communication with each other; the sealing element (21a) is a sealing strip connected head to tail, the sealing element (21a) is clamped in the placement groove (21d), and the sealing element (21a) is always pressed against the inner wall of the process chamber (2) to seal the partition plate (21) and the process chamber (2).

3. The vacuum coating chamber of claim 1, wherein the side wall of the partition plate (21) is provided with a reinforcing seat (21e); the reinforcing seat (21e) is "L" shaped, one side of the reinforcing seat (21e) is connected with the side wall of the partition plate (21), and the other side of the reinforcing seat (21e) is connected with the side wall of the process chamber (2).

4. The vacuum coating chamber of claim 1, wherein the side wall of the partition plate (21) close to the first chamber (1) is provided with an auxiliary plate (21f), the auxiliary plate (21f) is detachably connected with the partition plate (21), a strip-shaped hole (21g) is formed in the auxiliary plate (21f), and the strip-shaped hole (21g) corresponds to the position of the through hole (21c); and when the valve plate (22) is rotated to a vertical state, the valve plate (22) is attached to the auxiliary plate (21f) to close the strip-shaped hole (21g).

5. The vacuum coating chamber of claim 1, wherein a rotating shaft (23) is inserted into the side wall of the process chamber (2), both ends of the rotating shaft (23) extend out of the process chamber (2), a driving seat (24) is arranged on the outer wall of the process chamber (2), a driving cylinder (25) is hinged to the driving seat (24), and the piston rod of the driving cylinder (25) is connected with the extending end of the rotating shaft (23) through a connecting rod; and the valve plate (22) is detachably connected with the rotating shaft (23).

6. The vacuum coating chamber of claim 5, wherein The side wall of the valve plate (22) is provided with a connecting plate (22a), the connecting plate (22a) is provided with a pin column (22b), the pin column (22b) is inserted on the rotating shaft (23) and connected with the rotating shaft (23) through a fastener.

7. The vacuum coating chamber of claim 1, wherein, The process chamber (2) is provided with a conveying pair (26); The conveying pair (26) comprises a pair of support beams (26a) respectively arranged on the inner wall of the process chamber (2), a plurality of rollers (26b) are arranged on the support beams (26a), a belt is sleeved on the rollers (26b) to convey the carrier plate; and, The bottom of the support beam (26a) is provided with a driving wheel (26c) through a support, the belt is wound on the driving wheel (26c), a driving roller (26d) is inserted between the driving wheels (26c), one end of the driving roller (26d) extends out of the process chamber (2).

8. A vacuum coating chamber, characterized by Comprise: A first chamber (1); A plurality of communicating process chambers (2) are sequentially arranged at the rear end of the first chamber (1), a partition plate (21) is arranged in the process chamber (2), the partition plate (21) is provided with a through hole (21c), the front end of the partition plate (21) is rotatably provided with a valve plate (22), the valve plate (22) is adapted to open / close the through hole (21c); and, The end of the last process chamber (2) is provided with an outlet plate (27), the outlet plate (27) is provided with a through hole (21c), and the rear end of the outlet plate (27) is rotatably provided with a valve plate (22) to close the through hole (21c). The side wall of the valve plate (22) is provided with a connecting plate (22a), the connecting plate (22a) is provided with a pin column (22b), the pin column (22b) is inserted on the rotating shaft (23) and connected with the rotating shaft (23) through a fastener.

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