Vacuum coating positioning turnover device

Abstract

The utility model discloses a vacuum coating positioning turnover device which is characterized in that a turnover bracket is arranged, a first fixed tray and a second fixed tray are connected in the turnover bracket in a sliding manner through a sliding device, fixed blocks are arranged on the first fixed tray and the second fixed tray, and a first sliding block is fixed on the turnover bracket; a second sliding block in sliding connection with the first sliding block is arranged, and a tension ring and a dowel bar are arranged on the second sliding block; the tension ring comprises a first tension ring and a second tension ring, the first tension ring and the second tension ring are rotationally connected to the same rotating pin with the second sliding block, and the first fixed tray and the second fixed tray can be driven to be synchronously clamped by pushing the dowel bar; positioning and overturning operations can be realized; compared with the prior art, positioning and overturning are conveniently achieved, and the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a positioning turnover device, especially a vacuum coating positioning turnover device. BACKGROUND

[0002] Vacuum coating refers to the technology that the object surface obtains the required film layer under the vacuum condition through physical or chemical methods; physical vapor deposition and chemical vapor deposition are adopted; physical vapor deposition (PVD) is that in the vacuum environment, the film material is converted into gaseous atoms or molecules through heating, sputtering or ion implantation and the like, and the gaseous atoms or molecules are deposited on the substrate surface to form a thin film; common PVD methods include vacuum evaporation, sputtering coating and ion coating and the like; chemical vapor deposition (CVD) is that in the vacuum or inert gas environment, the gaseous compound is generated through chemical reaction, and the gaseous compound is deposited on the substrate surface to form a thin film.

[0003] In the coating process, the workpiece (such as a silicon wafer) needs to be turned over so that the workpiece surface is coated on both sides, which requires a turnover and positioning device to fix and turn over; in the current vacuum coating equipment, the turnover and positioning mechanism are separated, occupy the size of the vacuum environment and are relatively cumbersome, and the coating efficiency is reduced. SUMMARY

[0004] The utility model overcomes the insufficient prior art and provides a vacuum coating positioning turnover device.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of a vacuum coating positioning turnover device, which comprises: a cavity, a rotating disc rotatably connected to the cavity side wall, a turnover support connected to the rotating disc, a fixed tray provided on the turnover support, a first sliding block connected to the top end of the turnover support, a second sliding block slidingly connected to the first sliding block, a tension ring rotatably connected to the second sliding block, and a force transmission rod fixed to the top end of the second sliding block.

[0006] The turnover support and the cavity side wall are provided with an inlet;

[0007] The other end of the tension ring is rotatably connected to the fixed tray, the turnover support is provided with an opening through which the force transmission rod passes, and a sliding device is arranged between the turnover support and the fixed tray for sliding connection.

[0008] In a preferred embodiment of the utility model, the fixed tray comprises a first fixed tray and a second fixed tray provided on the turnover support, the first fixed tray and the second fixed tray are oppositely arranged, and the top end of the first fixed tray and the second fixed tray is provided with a limiting key.

[0009] In a preferred embodiment of the utility model, the limiting key comprises a plurality of fixed blocks provided at the top end of the first fixed tray and the second fixed tray, and the side wall of each fixed block is provided with a fixed groove.

[0010] In a preferred embodiment of the utility model, the tension ring comprises a first tension ring and a second tension ring rotatably connected with the second sliding block, one end of the first tension ring is rotatably connected with the first fixed tray, and the other end of the second tension ring is rotatably connected with the second fixed tray.

[0011] In a preferred embodiment of the utility model, the first tension ring and the second tension ring are rotatably connected with the second sliding block on the same rotating pin.

[0012] In a preferred embodiment of the utility model, the feeding port comprises a feeding slot formed in the side wall of the cavity, two feeding holes corresponding to the feeding slot are arranged on the side wall of the turnover support, and the two feeding holes and the fixed tray are located on the same horizontal plane.

[0013] In a preferred embodiment of the utility model, the sliding device comprises a sliding rail 32 mounted on the turnover support and a third sliding block 33 mounted at the bottom end of the fixed tray, and the third sliding block 33 is slidably connected with the sliding rail 32.

[0014] In a preferred embodiment of the utility model, two spring hooks 34 are symmetrically fixed on the outer wall of the turnover support, springs are connected to the bottom ends of the spring hooks 34, and the two springs pass through the turnover support and are connected with the first fixed tray and the second fixed tray respectively.

[0015] In a preferred embodiment of the utility model, the force transmission rod passes through the opening and is located outside the turnover support at the end away from the rotating disc.

[0016] In a preferred embodiment of the utility model, a clamping mechanism is arranged between the rotating disc and the turnover support, the clamping mechanism comprises two arc-shaped sleeves symmetrically arranged on the outer wall of the rotating disc, and the arc-shaped sleeves are fixed with the rotating disc and the turnover support through bolts.

[0017] The utility model solves the defects in the background art and has the following beneficial effects:

[0018] (1) By arranging the turnover support, the first fixed tray and the second fixed tray are slidably connected through the sliding device in the turnover support, the fixed blocks are arranged on the first fixed tray and the second fixed tray, the first sliding block is fixed on the turnover support, the second sliding block is slidably connected with the first sliding block, the tension ring and the force transmission rod are arranged on the second sliding block, positioning and turnover operation can be realized, and compared with the prior art, positioning and turnover are more convenient, and the work efficiency is improved.

[0019] (2) by fixing the first slider on the turnover support, and setting the second slider in sliding connection with the first slider, by setting the first tension ring and the second tension ring on the second slider, the first tension ring and the second tension ring are rotationally connected to the same rotation pin on the second slider, and the force transmission rod is fixed on the second slider; by pushing the force transmission rod, the first fixed tray and the second fixed tray can be driven to be clamped synchronously; compared with the prior art, the instability of clamping is reduced, and damage to the workpiece is avoided.

[0020] (3) by fixing two spring hooks 34 on the outer wall of the turnover support, the bottom end of the spring hook 34 is connected with a spring, and the two springs pass through the turnover support and are connected with the first fixed tray and the second fixed tray respectively; wherein the spring hook 34 and the spring can provide additional buffering and stabilizing effect; compared with the prior art, the impact during clamping and turning is reduced, and the workpiece is protected from damage. BRIEF DESCRIPTION OF DRAWINGS

[0021] The utility model will be further explained in connection with the drawings and embodiments;

[0022] Figure 1 is the top view of the preferred embodiment of the utility model;

[0023] Figure 2 is the perspective view of the turnover support of the utility model;

[0024] Figure 3 is the sectional view of the turnover support of the utility model;

[0025] Figure 4 is the perspective view of the preferred embodiment of the utility model

[0026] In the drawing: 1, cavity; 11, feeding slot; 2, rotating disc; 3, turnover support; 31, feeding hole; 4, fixed tray; 41, first fixed tray; 42, second fixed tray; 5, tension ring; 51, first tension ring; 52, second tension ring; 6, first slider; 7, second slider; 8, force transmission rod DETAILED DESCRIPTION

[0027] The utility model will be further explained in connection with the drawings and embodiments;

[0028] As Figure 1As shown, a vacuum coating positioning and overturning device comprises a cavity 1, a rotating disc 2 connected with the side wall of the cavity 1, an overturning support 3 connected with the rotating disc 2, a fixed tray 4 arranged on the overturning support 3, a first sliding block 6 connected with the top end of the overturning support 3, a second sliding block 7 connected with the first sliding block 6, a tension ring 5 connected with the second sliding block 7, and a force transmission rod 8 fixed with the top end of the second sliding block 7.

[0029] The overturning support 3 and the side wall of the cavity 1 are provided with an inlet;

[0030] The other end of the tension ring 5 is connected with the fixed tray 4, the overturning support 3 is provided with an opening through which the force transmission rod 8 passes, and a sliding device is arranged between the overturning support 3 and the fixed tray 4 for sliding connection.

[0031] It should be noted that the rotating disc 2 is a customized magnetic fluid which can exhibit the characteristics of a solid under the action of a magnetic field, and is used to realize the stable and frictionless rotation of the overturning support 3. Through external magnetic field control, the overturning support 3 can realize precise rotation while reducing friction loss and energy consumption.

[0032] As shown in Figure 2 Further, the fixed tray 4 comprises a first fixed tray 41 and a second fixed tray 42 arranged on the overturning support 3, the first fixed tray 41 and the second fixed tray 42 are oppositely arranged, and the top ends of the first fixed tray 41 and the second fixed tray 42 are provided with limiting keys.

[0033] Specifically, the first fixed tray 41 and the second fixed tray 42 are oppositely arranged to form an adjustable clamping space suitable for workpieces of different sizes, and the limiting keys arranged thereon are used to further realize clamping operation, reduce the displacement of the workpiece, and improve the precision of coating.

[0034] Further, the limiting keys comprise a plurality of fixed blocks arranged at the top ends of the first fixed tray 41 and the second fixed tray 42, and the side walls of the fixed blocks are provided with fixed grooves.

[0035] Specifically, the plurality of fixed blocks can preliminarily fix the workpiece to avoid falling after being placed.

[0036] Further, the tension ring 5 comprises a first tension ring 51 and a second tension ring 52 connected with the second sliding block 7, the other end of the first tension ring 51 is connected with the first fixed tray 41, and the other end of the second tension ring 52 is connected with the second fixed tray 42.

[0037] Further, the first tension ring 51 and the second tension ring 52 are connected with the second sliding block 7 on the same rotating pin.

[0038] Specifically, the first tension ring 51 and the second tension ring 52 are connected to the second sliding block 7 through a rotating pin and are rotatably connected to the fixed tray 4 through the other end. When the second sliding block 7 slides in the first sliding block 6, the other end of the first tension ring 51 and the second tension ring 52 rotatably connected to the second sliding block 7 can rotate on the fixed tray 4, thereby reducing the distance between the first fixed tray 41 and the second fixed tray 42, fixing the workpiece by the limiting key, and further clamping the workpiece in the case of shortening the distance.

[0039] As shown in Figure 4 Further, the feeding port includes a feeding slot 11 opened in the side wall of the cavity 1, and two feeding holes 31 arranged on the side wall of the turnover support 3 corresponding to the feeding slot 11, and the two feeding holes 31 and the fixed tray 4 are located in the same horizontal plane.

[0040] As shown in Figure 3 Further, the sliding device includes a sliding rail 32 mounted on the turnover support 3, and a third sliding block 33 mounted at the bottom end of the fixed tray 4, and the third sliding block 33 is slidably connected with the sliding rail 32.

[0041] Specifically, the combination of the sliding rail 32 and the third sliding block 33 ensures that the fixed tray 4 slides smoothly on the turnover support 3, and meets the needs of different turnover angles.

[0042] Further, two spring hooks 34 are symmetrically fixed on the outer wall of the turnover support 3, and the bottom end of the spring hook 34 is connected with a spring, and the two springs pass through the turnover support 3 and are connected with the first fixed tray 41 and the second fixed tray 42 respectively.

[0043] Specifically, the spring hook 34 and the spring can provide additional buffering and stabilizing effect, reduce the impact during clamping and turning, and protect the workpiece from damage.

[0044] Further, the end of the force transmission rod 8 away from the rotating disc 2 passes through the opening and is located outside the turnover support 3.

[0045] In addition, a mechanical hand is arranged outside the cavity 1, and the workpiece is placed on the mechanical hand, which can deliver the workpiece to the turnover support 3 in the cavity 1 and touch the force transmission rod 8.

[0046] The force transmission rod 8 is arranged outside the turnover support 3, which can be more easily touched to trigger the clamping operation.

[0047] Further, a clamping mechanism is arranged between the rotating disc 2 and the turnover support 3, and the clamping mechanism includes two arc-shaped sleeves symmetrically arranged on the outer wall of the rotating disc 2, and the arc-shaped sleeves are fixed to the rotating disc 2 and the turnover support 3 through bolts.

[0048] Specifically, the rotating disc 2 is fixed on the turnover support 3 by the arc sleeve and the bolt, so that loosening is prevented during rotation, and the accuracy and safety of the turnover action are ensured.

[0049] When the utility model is used, the workpiece enters the cavity 1 through the feed inlet, reaches the inner side of the first fixed tray 41 and the second fixed tray, is located in the fixed groove of the fixed block, is preliminarily fixed in the first fixed tray 41 and the second fixed tray, touches the force transmission rod 8, drives the second sliding block 7 to slide on the first sliding block 6, the first tension ring 51 and the second tension ring 52 located on the second sliding block 7 are rotationally connected with the first fixed tray 41 and the second fixed tray, under the sliding action, the first fixed tray 41 and the second fixed tray are pulled close, further clamping of the workpiece is realized, and then the turnover support 3 is rotated by rotating the rotating disc to realize turnover.

[0050] The above is according to the ideal embodiment of the utility model for inspiration, through the above description, the relevant personnel can make various changes and modifications without deviating from the technical idea of the utility model. The technical scope of the utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of claims.

Claims

1. A vacuum coating positioning and inverting device, characterized in that Include: The cavity (1), the rotation disc (2) is connected with the side wall of the cavity (1), the turnover support (3) is connected with the rotation disc (2), the fixed tray (4) is arranged on the turnover support (3), the first sliding block (6) is connected with the top end of the turnover support (3), the second sliding block (7) is connected with the first sliding block (6), the tension ring (5) is connected with the second sliding block (7), the force transmission rod (8) is fixed with the top end of the second sliding block (7); The turnover support (3) is provided with a feeding port in the side wall of the cavity (1); The other end of the tension ring (5) is rotatably connected with the fixed tray (4), the turnover support (3) is provided with an opening for the force transmission rod (8) to pass through, and the sliding device is arranged between the turnover support (3) and the fixed tray (4) and is connected in a sliding manner.

2. The vacuum coating positioning and turnover device according to claim 1, characterized in that: The fixed tray (4) includes a first fixed tray (41) and a second fixed tray (42) arranged on the turnover support (3), the first fixed tray (41) and the second fixed tray (42) are oppositely arranged, and the first fixed tray (41) and the second fixed tray (42) are provided with limit keys at the top ends.

3. The vacuum coating positioning and turnover device according to claim 2, characterized in that: The limit key includes a plurality of fixed blocks arranged at the top ends of the first fixed tray (41) and the second fixed tray (42), and a plurality of fixed grooves are formed in the side walls of the fixed blocks.

4. The vacuum coating positioning and turnover device according to claim 2, characterized in that: The tension ring (5) includes a first tension ring (51) and a second tension ring (52) rotatably connected with the second sliding block (7), the other end of the first tension ring (51) is rotatably connected with the first fixed tray (41), and the other end of the second tension ring (52) is rotatably connected with the second fixed tray (42).

5. The vacuum coating positioning and turnover device according to claim 4, characterized in that: The first tension ring (51) and the second tension ring (52) are rotatably connected with the second sliding block (7) on the same rotating pin.

6. The vacuum coating positioning and turnover device according to claim 1, characterized in that: The feeding port includes a feeding slot (11) formed in the side wall of the cavity (1), two feeding holes (31) arranged on the side wall of the turnover support (3) corresponding to the feeding slot (11), and the two feeding holes (31) and the fixed tray (4) are located on the same horizontal plane.

7. The vacuum coating positioning and turnover device according to claim 1, characterized in that: The sliding device includes a sliding rail (32) mounted on the turnover support (3), and a third sliding block (33) mounted at the bottom end of the fixed tray (4), and the third sliding block (33) is slidably connected with the sliding rail (32).

8. The vacuum coating positioning and turnover device according to claim 3, characterized in that: The outer wall of the turnover support (3) is symmetrically fixed with two spring hooks (34), the bottom end of the spring hook (34) is connected with a spring, and the two springs pass through the turnover support (3) and are connected with the first fixed tray (41) and the second fixed tray (42) respectively.

9. The vacuum coating positioning and turnover device according to claim 1, characterized in that: The end of the force transmission rod (8) away from the rotating disc (2) passes through the opening and is located outside the turnover support (3).

10. The vacuum coating positioning and turnover device according to claim 1, characterized in that: The clamping mechanism is arranged between the rotating disc (2) and the turnover support (3), and the clamping mechanism includes two arc-shaped sleeves symmetrically arranged on the outer wall of the rotating disc (2), and the arc-shaped sleeves are fixed with the rotating disc (2) and the turnover support (3) through bolts.

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