Liquid leakage detection device and semiconductor equipment

Abstract

The utility model discloses a liquid leakage detection device and semiconductor equipment. The liquid leakage detection device comprises a fixed base; the upper leakage containing plate and the fixed base are fixedly arranged, and a through hole is formed in the upper leakage containing plate; the lower leakage containing plate comprises a base plate and a boss protruding out of the base plate, the top face of the base plate makes contact with the bottom face of the upper leakage containing plate, the boss is embedded into the through hole, the side wall of the boss makes contact with the side wall of the through hole, and the lower leakage containing plate can longitudinally move relative to the upper leakage containing plate; the detection assembly comprises a first detection structure arranged on the fixed base or the upper leakage containing plate and a second detection structure arranged on the lower leakage containing plate, and the detection assembly is used for detecting the moving distance of the lower leakage containing plate. According to the utility model, detection and alarm of leakage of a small amount of liquid can be realized, and the risk of overflow of leaked liquid can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model embodiment relates to the field of semiconductor equipment, and particularly relates to a liquid leakage detection device and a semiconductor equipment. BACKGROUND

[0002] In factory production, some semiconductor process equipment, pipelines (valve connection), acid and alkali storage tanks, waste water and liquid, air conditioning systems and the like are prone to leakage in long-term operation. If the leakage is not discovered and controlled in time, it will cause serious environmental pollution and stop production line operation. The setting of the liquid leakage detector can ensure production safety, reduce economic losses and improve the safety of workshop staff. CONTENT OF THE UTILITY MODEL

[0003] The utility model embodiment solves the problem of providing a liquid leakage detection device and a semiconductor equipment, which is beneficial to realize the detection and alarm of a small amount of liquid leakage, and is beneficial to avoid the risk of liquid leakage overflow.

[0004] To solve the above problems, the utility model embodiment provides a liquid leakage detection device, which comprises: a fixed base; an upper drip plate, which is fixedly arranged with the fixed base, and is provided with a through hole in the upper drip plate; a lower drip plate, which comprises a base plate and a boss protruding from the base plate, the top surface of the base plate is in contact with the bottom surface of the upper drip plate, the boss is embedded in the through hole, and the side wall of the boss is in contact with the side wall of the through hole, and the lower drip plate is longitudinally movable relative to the upper drip plate; a detection assembly, which comprises a first detection structure arranged on the fixed base or the upper drip plate, and a second detection structure arranged on the lower drip plate, and the detection assembly is used for detecting the moving distance of the lower drip plate.

[0005] Optionally, the top surface of the boss of the lower drip plate is lower than the top surface of the upper drip plate.

[0006] Optionally, the fixed base is arranged below the upper drip plate; the lower drip plate is longitudinally slidably arranged between the upper drip plate and the fixed base, and the liquid leakage detection device further comprises: an elastic support structure, which is located between the base plate and the fixed base, and one end of the elastic support structure is fixed to the bottom of the base plate and the other end is fixed to the fixed base.

[0007] Optionally, the elastic support structure comprises a spring.

[0008] Optionally, the lower drip plate further comprises a support structure fixedly connected to the bottom of the base plate.

[0009] Optionally, the fixed base is a barrel structure with an open top and a closed bottom; the support structure is a tubular structure with open ends, and the inner diameter of the support structure is larger than the outer diameter of the fixed base, or the outer diameter of the support structure is smaller than the inner diameter of the fixed base; the elastic support structure is fixed at one end to the bottom of the lower drip plate and at the other end to the barrel-shaped bottom of the fixed base, and longitudinally penetrates the inside of the support structure and the fixed base.

[0010] Optionally, in the detection assembly, the first detection structure is a magnetic structure arranged in any one of the upper drip plate and the substrate, the second detection structure is a magnetic detection sensor arranged in the other one of the upper drip plate and the substrate, and the magnetic structure and the magnetic detection sensor are arranged opposite to each other.

[0011] Optionally, the magnetic induction intensity alarm threshold value of the magnetic detection sensor corresponds to the distance between the bottom surface of the upper drip plate and the top surface of the substrate equal to the height of the boss.

[0012] Optionally, the magnetic structure is a magnetic steel.

[0013] Optionally, the magnetic detection sensor is a Hall switch sensor, and the closing magnetic induction intensity of the Hall switch sensor serves as the magnetic induction intensity alarm threshold value of the magnetic detection sensor.

[0014] Optionally, two detection assemblies are arranged in the upper drip plate and the substrate.

[0015] Optionally, the two detection assemblies are symmetrically arranged about the center of the upper drip plate.

[0016] Optionally, in the detection assembly, the first detection structure is a first electrical connection structure arranged on the support structure, the first electrical connection structure is connected to one end of an electric circuit, the second detection structure is a second electrical connection structure arranged on the fixed base, the second electrical connection structure is connected to the other end of the electric circuit, and the lower drip plate can slide longitudinally to realize contact between the first electrical connection structure and the second electrical connection structure to turn on the electric circuit.

[0017] Optionally, the longitudinal initial distance between the first electrical connection structure and the second electrical connection structure is equal to the height of the boss.

[0018] Optionally, the fixed base is a barrel structure with an open top and a closed bottom; the support structure is a tubular structure with open ends, and the inner diameter of the support structure is larger than the outer diameter of the fixed base, or the outer diameter of the support structure is smaller than the inner diameter of the fixed base, so that the two faces of the support structure and the fixed base closest to each other in the transverse direction are respectively taken as a first reference face and a second reference face; the first electrical connection structure is a moving contact structure arranged on the first reference face and facing the second reference face; the second electrical connection structure is a stationary contact structure arranged on the second reference face and facing the first reference face, and the moving contact structure and the stationary contact structure are arranged in longitudinal alignment.

[0019] Optionally, the movable contact structure is a movable contact point protruding from the first reference surface towards the second reference surface, and a transverse dimension of the movable contact point is equal to a transverse distance between the first reference surface and the second reference surface; and the stationary contact structure is a stationary contact strip extending in a longitudinal direction.

[0020] Optionally, the liquid leakage detection device further comprises a support fixedly connected at one end to the bottom of the fixed base and at the other end to the upper leakage plate.

[0021] Optionally, the support extends from the bottom of the fixed base to a position at the edge of the upper leakage plate in a transverse direction, then extends in a longitudinal direction to fixedly contact the edge of the upper leakage plate and extends to protrude from the upper leakage plate, and finally extends to the outside in a transverse direction.

[0022] Optionally, the support is a hollow structure.

[0023] The utility model embodiment further provides a semiconductor device, include: pipeline device, including placement warehouse, and the pipeline of suspension in placement warehouse, the bottom surface of placement warehouse is provided with leakage port, and the horizontal height of bottom surface of placement warehouse reduces from the periphery of leakage port to leakage port, the utility model provides a leakage detection device, sets up in leakage port.

[0024] Compared with the prior art, the technical scheme of the utility model embodiment has the following advantages:

[0025] In the liquid leakage detection device provided by the utility model embodiment, the upper leakage plate and the fixed base are fixedly arranged, the upper leakage plate is provided with a through hole, the lower leakage plate comprises a base plate and a boss protruding from the base plate, the top surface of the base plate is in contact with the bottom surface of the upper leakage plate, the boss is embedded in the through hole, and the side wall of the boss is in contact with the side wall of the through hole, the lower leakage plate is longitudinally movable relative to the upper leakage plate, the detection assembly comprises a first detection structure arranged on the fixed base or the upper leakage plate and a second detection structure arranged on the lower leakage plate, and the detection assembly is used for detecting the moving distance of the lower leakage plate; in the utility model embodiment, the liquid leakage is collected in the space formed by the top surface of the boss and the through hole, so that the moving distance of the lower leakage plate can be detected when the lower leakage plate slides longitudally, liquid leakage detection and alarm can be performed, the influence of the type of liquid leakage liquid is avoided, the detection and alarm of a small amount of liquid leakage can be realized, and in addition, the top surface of the base plate is in contact with the bottom surface of the upper leakage plate, and the boss is embedded in the through hole, so that the liquid leakage can be discharged when the lower leakage plate slides downward to a position where the top surface of the boss is lower than the bottom surface of the upper leakage plate, and the risk of reverse overflow of liquid leakage is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a structure schematic view of one embodiment of the liquid leakage detection device according to the utility model embodiment from one viewing angle;

[0027] Figure 2is a structural schematic view of the upper leakage plate in the leakage detection device one embodiment of the utility model embodiment;

[0028] Figures 3-4 is a structural schematic view of the upper leakage plate in the leakage detection device one embodiment of the utility model embodiment;

[0029] Figures 5-6 is a structural schematic view of the lower leakage plate in the leakage detection device one embodiment of the utility model embodiment;

[0030] Figure 7 is a structural schematic view of another view of the leakage detection device one embodiment of the utility model embodiment;

[0031] Figure 8 is a structural schematic view of the support in the leakage detection device one embodiment of the utility model embodiment;

[0032] Figure 9 is a structural schematic view of another view of the leakage detection device one embodiment of the utility model embodiment;

[0033] Figure 10 is a structural schematic view of a view of the leakage detection device another embodiment of the utility model embodiment;

[0034] Figure 11 is a structural schematic view of the support structure in the leakage detection device another embodiment of the utility model embodiment;

[0035] Figure 12 is a structural schematic view of the fixed base in the leakage detection device another embodiment of the utility model embodiment;

[0036] Figure 13 is a structural schematic view of a view of the semiconductor equipment of the utility model embodiment;

[0037] Figure 14 is a local enlarged structural schematic view of the leakage port of the semiconductor equipment of the utility model embodiment. DETAILED DESCRIPTION

[0038] From the background art, in factory production, some semiconductor process equipment, pipeline (valve connection), acid and alkali storage tank, waste water and waste liquid, air conditioning system and the like, in the long-term operation, aging and damage occur, leakage is prone to occur at these positions.When leakage occurs, if it is not found and controlled in time, it will cause serious environmental pollution and production line stop running, the setting of the leakage detector can guarantee production safety, reduce economic loss and improve the safety of workshop workers.

[0039] The current method is to set a light spot detector near a drain port, and to determine whether there is leakage by receiving a point-to-point light signal, but when early leakage occurs, the amount of leakage is small, and the liquid does not pass through the light spot detector and is directly discharged into the drain port, so that early detection cannot be achieved.

[0040] To solve the above technical problems, the sensor position adjusting device provided by the embodiment of the utility model includes: a fixed base; an upper drip plate fixedly arranged with the fixed base, a through hole being arranged in the upper drip plate; a lower drip plate including a base plate and a boss protruding from the base plate, the top surface of the base plate being in contact with the bottom surface of the upper drip plate, the boss being embedded in the through hole, and the side wall of the boss being in contact with the side wall of the through hole, the lower drip plate being longitudinally movable relative to the upper drip plate; a detection assembly including a first detection structure arranged on the fixed base or the upper drip plate, and a second detection structure arranged on the lower drip plate, the detection assembly being used for detecting the moving distance of the lower drip plate.

[0041] In the embodiment of the utility model, the leakage is collected in the space formed by the top surface of the boss and the through hole, so that the moving distance of the lower drip plate can be detected when the lower drip plate slides longitudally, and the leakage detection alarm can be performed, thereby being not affected by the type of the leakage liquid, and being conducive to achieving the detection alarm of the small amount of liquid leakage. Moreover, the top surface of the base plate is in contact with the bottom surface of the upper drip plate, and the boss is embedded in the through hole, so that when the lower drip plate slides and moves to the position where the top surface of the boss is lower than the bottom surface of the upper drip plate, the discharge of the leakage can be achieved, thereby being conducive to avoiding the risk of reverse overflow of the leakage.

[0042] In order to make the above-mentioned purpose, features and advantages of the embodiment of the utility model more obvious and easy to understand, the specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0043] Figures 1-9 is a structural schematic diagram of one embodiment of the leakage detection device of the embodiment of the utility model, wherein, Figure 1 is a structural schematic diagram of one embodiment of the leakage detection device of the embodiment of the utility model from one perspective; Figure 2 is a structural schematic diagram of the upper drip plate and the lower drip plate in one embodiment of the leakage detection device of the embodiment of the utility model; Figures 3-4 is a structural schematic diagram of the upper drip plate in one embodiment of the leakage detection device of the embodiment of the utility model; Figures 5-6 is a structural schematic diagram of the lower drip plate in one embodiment of the leakage detection device of the embodiment of the utility model; Figure 7 is a structural schematic diagram of another perspective of one embodiment of the leakage detection device of the embodiment of the utility model; Figure 8 is a structural schematic diagram of the bracket in one embodiment of the leakage detection device of the embodiment of the utility model; Figure 9 is a structural schematic diagram of another perspective of one embodiment of the leakage detection device of the embodiment of the utility model.

[0044] By reference Figures 1-9 The liquid leakage detection device comprises a fixed base 120, an upper leakage plate 110 fixedly arranged with the fixed base 120, wherein a through hole 130 is arranged in the upper leakage plate 110; a lower leakage plate 210 comprising a base plate 240 and a boss 230 protruding from the base plate 240, wherein the top surface of the base plate 240 is in contact with the bottom surface of the upper leakage plate 110, the boss 230 is embedded in the through hole 130, and the side wall of the boss 230 is in contact with the side wall of the through hole 130, and the lower leakage plate 210 is longitudinally movable relative to the upper leakage plate 110; a detection assembly 300 comprising a first detection structure 310 arranged on the fixed base 120 or the upper leakage plate 110, and a second detection structure 320 arranged on the lower leakage plate 210, wherein the detection assembly 300 is used to detect the moving distance of the lower leakage plate 210.

[0045] In this embodiment, the liquid leakage detection device is used to detect liquid leakage, and is placed in a liquid leakage port to detect liquid leakage dripping from above.

[0046] By reference Figure 1 The fixed base 120 is used to fix the upper leakage plate 110.

[0047] In this embodiment, the fixed base 120 is arranged below the upper leakage plate 110.

[0048] In this embodiment, the lower leakage plate 210 is longitudinally arranged between the upper leakage plate 110 and the fixed base 120.

[0049] By reference Figure 1 The upper leakage plate 110 and the lower leakage plate 210 form a structure capable of containing liquid leakage, and the collected liquid leakage flows to the through hole 130, so that when containing liquid leakage, the lower leakage plate 210 can slide longitudinally relative to the upper leakage plate 110 or the fixed base 120 with the increase of liquid leakage in the through hole 130, so that the liquid leakage can be detected by the sliding of the lower leakage plate 210.

[0050] By reference Figure 3 and Figure 4 , Figure 3 is a bottom view of the upper leakage plate 110, Figure 4 is a top view of the upper leakage plate 110, which is used to surround liquid leakage when the liquid leakage drips.

[0051] Specifically, in this embodiment, the through hole 130 is arranged in the upper leakage plate 110, and the liquid leakage drips into the through hole 130 when the liquid leakage drips, and the through hole 130 surrounds the liquid leakage.

[0052] By reference Figure 5 and Figure 6 , Figure 5 is a bottom view of the lower leakage plate 210, Figure 6Figure 8 is a top view of the lower drip-receiving plate 210, which is used to receive the dripping liquid.

[0053] Specifically, in this embodiment, the lower drip-receiving plate 210 includes a base plate 240 and a boss 230 protruding from the base plate 240. The top surface of the base plate 240 is in contact with the bottom surface of the upper drip-receiving plate 110, and the boss 230 is embedded in the through hole 130. That is, in the initial state, the lower drip-receiving plate 210 covers the through hole 130 from below. As the liquid drips into the through hole 130, the boss 230 is pushed down by the gravity of the liquid. The liquid accumulates in the space enclosed by the boss 230 and the through hole 130. As the liquid continues to drip into the through hole 130, the boss 230 is continuously pushed down by the gravity of the liquid. When the boss 230 is completely out of the through hole 130, the liquid can flow out from the side of the boss 230 (as shown in Figure 8, which shows the relative positions of the upper drip-receiving plate 110 and the lower drip-receiving plate 210 when they are separated). Figure 2

[0054] In this embodiment, the side wall of the boss 230 of the lower drip-receiving plate 210 is in contact with the side wall of the through hole 130.

[0055] The side wall of the boss 230 of the lower drip-receiving plate 210 is in contact with the side wall of the through hole 130, so the boss 230 can fill the through hole 130 in the lateral direction. When the liquid drips into the through hole 130, the liquid accumulates in the space enclosed by the boss 230 and the through hole 130, forming a columnar shape with a flat bottom surface. This makes it easy to calculate the accumulated liquid based on the longitudinal sliding of the lower drip-receiving plate 210 relative to the upper drip-receiving plate 110, thereby making the detection of the liquid more convenient.

[0056] In this embodiment, the top surface of the boss 230 of the lower drip-receiving plate 210 is lower than the top surface of the upper drip-receiving plate 110.

[0057] The top surface of the boss 230 of the lower drip-receiving plate 210 is lower than the top surface of the upper drip-receiving plate 110, which provides space for receiving the liquid.

[0058] In this embodiment, the lower drip-receiving plate 210 further includes a support structure 220 fixedly connected to the bottom of the base plate 240.

[0059] The support structure 220 is used to support the base plate 240.

[0060] Reference Figure 7 , Figure 7 It is also shown that the fixed base 120 and the support structure 220 are cross-sectional views. The fixed base 120 is a barrel-shaped structure with an open top and a closed bottom.

[0061] The fixed base 120 is a barrel-shaped structure with an open top and a closed bottom, so that the fixed base 120 can not only be used for fixation, but also has the function of containing as a barrel-shaped structure.

[0062] ​The support structure 220 is fixedly connected to the bottom of the substrate 240, and the support structure 220 slides together with the substrate 240 when sliding in the longitudinal direction.

[0063] In this embodiment, the support structure 220 is a tubular structure with both ends open, and the inner diameter of the support structure 220 is larger than the outer diameter of the fixed base 120, or the outer diameter of the support structure 220 is smaller than the inner diameter of the fixed base 120.

[0064] The support structure 220 is a tubular structure with both ends open, so that the support structure 220 can have a containing function while serving as a support.

[0065] In this embodiment, the inner diameter of the support structure 220 is larger than the outer diameter of the fixed base 120, or the outer diameter of the support structure 220 is smaller than the inner diameter of the fixed base 120, that is, when the lower drip plate 210 slides relative to the upper drip plate 110 in the longitudinal direction, the support structure 220 slides relative to the fixed base 120 in the longitudinal direction, and when the support structure 220 approaches the fixed base 120, the inner diameter of the support structure 220 is larger than the outer diameter of the fixed base 120, so that the fixed base 120 can extend into the support structure 220, so that the support structure 220 is not hindered by the fixed base 120, and the support structure 220 can continue to slide when the bottom of the support structure 220 is lower than the top of the fixed base 120, which is beneficial to improve the sliding window of the lower drip plate 210, or the outer diameter of the support structure 220 is smaller than the inner diameter of the fixed base 120, so that the support structure 220 can extend into the fixed base 120, so that the support structure 220 is not hindered by the fixed base 120, and the support structure 220 can continue to slide when the bottom of the support structure 220 is lower than the top of the fixed base 120, which is beneficial to improve the sliding window of the lower drip plate 210.

[0066] In this embodiment, the liquid leakage detection device further comprises an elastic support structure 260 located between the substrate 240 and the fixed base 120, and one end of the elastic support structure 260 is fixed to the bottom of the substrate 240 and the other end is fixed to the fixed base 120.

[0067] The elastic support structure 260 is used to support the substrate 240 while sliding the lower drip plate 210 relative to the upper drip plate 110, and as the liquid continues to drip into the through hole 130, the gravity of the liquid continues to push the boss 230 downward, until the boss 230 is completely out of the through hole 130, the liquid flows out from the side of the boss 230, the gravity of the liquid disappears, and the elastic support structure 260 can also rebound to realize the automatic reset of the lower drip plate 210, which is beneficial to improve the continuous detection ability and detection efficiency of the liquid leakage detection device.

[0068] In this embodiment, the fixed base 120 is a barrel-shaped structure with an open top and a closed bottom, and the support structure 220 is a tubular structure with open ends, so that the elastic support structure 260 can be arranged in the support structure 220, with one end fixed to the bottom of the base plate 240, and the elastic support structure 260 is also arranged in the fixed base 120, with the other end fixed to the bottom of the fixed base 120. In this embodiment, the elastic support structure 260 has one end fixed to the bottom of the base plate 240 and the other end fixed to the barrel-shaped bottom of the fixed base 120, and extends longitudinally through the interior of the support structure 220 and the fixed base 120.

[0069] In this embodiment, the elastic support structure 260 includes a spring.

[0070] As an example, in this embodiment, as the liquid leakage drips into the through hole 130, the gravity of the liquid leakage pushes down the boss 230, and the liquid leakage accumulates in the space surrounded by the top surface of the boss 230 and the through hole 130. When the top surface of the boss 230 is flush with the edge of the bottom of the through hole 130, the space surrounded by the top surface of the boss 230 and the through hole 130 reaches the maximum liquid holding capacity. The thickness of the boss 230 of the lower liquid holding plate 210 is set to 1 mm, and the maximum liquid holding capacity of the liquid holding space surrounded by the top surface of the boss 230 and the through hole 130 is set to 1 ml. When the lower liquid holding plate 210 moves down 1 mm, the maximum liquid holding capacity is reached. The spring stiffness is set to 0.01 N / mm. Based on practical experience, the gravity of 1 ml of liquid leakage is basically 0.01 N. Therefore, when the spring is compressed by 1 mm, the liquid leakage reaches the maximum liquid holding capacity, triggering the liquid leakage alarm.

[0071] The detection assembly 300 is used to detect the relative movement of the lower liquid holding plate 210 and the upper liquid holding plate 110 or the fixed base 120, so as to detect the dripping of the liquid leakage.

[0072] In this embodiment, the liquid leakage is held in the space formed by the top surface of the boss 230 and the through hole 130, so that the lower liquid holding plate 210 slides longitudinally. The movement distance of the lower liquid holding plate 210 can be detected to detect the liquid leakage and trigger an alarm. Therefore, the liquid leakage detection and alarm are not affected by the type of liquid, and the detection and alarm of small amount of liquid leakage can be realized. Moreover, the top surface of the base plate 240 is in contact with the bottom surface of the upper liquid holding plate 110, and the boss 230 is embedded in the through hole. When the lower liquid holding plate 210 slides downward to a position where the top surface of the boss 230 is lower than the bottom surface of the upper liquid holding plate 110, the liquid leakage can be discharged, thereby avoiding the risk of reverse overflow of the liquid leakage.

[0073] Specifically, in this embodiment, the second detection structure 320 is longitudinally movable relative to the first detection structure 310, so as to detect the movement distance of the lower liquid holding plate 210 to detect the dripping of the liquid leakage.

[0074] Reference Figure 2In the detection assembly, the first detection structure 310 is a magnetic structure 311 disposed in either the upper drain plate 110 or the substrate 240, and the second detection structure 320 is a magnetic detection sensor 321 disposed in the other of the upper drain plate 110 and the substrate 240, with the magnetic structure 311 and the magnetic detection sensor 321 facing each other.

[0075] The magnetic structure 311 and the magnetic detection sensor 321 are positioned opposite each other. The magnetic detection sensor 321 can detect the magnetic field between the magnetic structure 311 and the magnetic detection sensor 321. As the liquid drips into the through hole 130, the gravity of the liquid pushes the boss 230 down, and the lower drip plate 210 gradually moves away from the upper drip plate 110. As the distance between the magnetic structure 311 and the magnetic detection sensor 321 increases, the magnetic induction intensity between the magnetic structure 311 and the magnetic detection sensor 321 weakens. Thus, the magnetic detection sensor 321 can detect the moving distance of the lower drip plate 210 by the weakening of the magnetic induction intensity, and thus detect the dripping of the liquid.

[0076] As an example, in this embodiment, the magnetic structure 311 is disposed in the upper inlet plate 110, and the magnetic detection sensor 321 is disposed in the substrate 240 of the lower inlet plate 210.

[0077] like Figure 3 As shown, a first mounting hole 140 is provided on the surface of the upper infuser plate 110 facing the lower infuser plate 210 for placing the magnetic structure 311, such as... Figure 6 As shown, a second mounting hole 250 is provided on the surface of the substrate 240 of the lower infiltrator 210 facing the upper infiltrator 110 for placing a magnetic detection sensor 321, as shown. Figure 5 As shown, the bottom surface of the lower inlet plate 210 is also provided with a first groove 211 for placing the circuit of the magnetic detection sensor 321.

[0078] In this embodiment, the magnetic induction intensity alarm threshold value of the magnetic detection sensor 321 corresponds to the distance between the bottom surface of the upper drain plate 110 and the top surface of the substrate 240, which is equal to the height of the boss 230.

[0079] The magnetic detection sensor 321 detects the movement distance of the lower drain plate 210 by the weakening of the magnetic induction intensity. When the lower drain plate 210 moves down to the point where the top surface of the boss 230 is lower than the bottom surface of the upper drain plate 110, the leakage amount reaches its maximum value. At this time, the magnetic detection sensor 321 reaches the magnetic induction intensity alarm threshold. Then, the distance between the magnetic structure 311 and the magnetic detection sensor 321 is the distance between the bottom surface of the upper drain plate 110 and the top surface of the substrate 240, which is set to be equal to the height of the boss 230.

[0080] In this embodiment, the magnetic structure 311 is a magnet.

[0081] The magnetic steel is a magnetized permanent magnetic material, which can generate a stable magnetic field.

[0082] In the embodiment, the magnetic detection sensor 321 is a Hall switch sensor, and the closing magnetic induction intensity of the Hall switch sensor is used as the magnetic induction intensity alarm threshold of the magnetic detection sensor 321.

[0083] The Hall switch sensor is a magnetic field detection device based on the Hall effect, and has a delay switch effect, so that the detection alarm of the magnetic induction intensity is more reliable, thereby facilitating the detection and alarm of a small amount of liquid leakage.

[0084] Specifically, in the initial state, the bottom surface of the upper liquid leakage plate 110 is attached to the top surface of the base plate 240 of the lower liquid leakage plate 210, the distance between the magnetic structure 311 and the magnetic detection sensor 321 is small, the magnetic induction intensity is large, the magnetic induction intensity detected by the Hall switch sensor is higher than the opening magnetic induction intensity, and the Hall switch sensor outputs a low level. When the liquid leakage drips into the through hole 130, the lower liquid leakage plate 210 moves downward under the action of gravity, the distance between the bottom surface of the upper liquid leakage plate 110 and the top surface of the base plate 240 of the lower liquid leakage plate 210 increases, the magnetic induction intensity decreases, the magnetic induction intensity detected by the Hall switch sensor is lower than the opening magnetic induction intensity but still higher than the closing magnetic induction intensity, and the Hall switch sensor outputs a low level unchanged. The liquid leakage continues to drip into the through hole 130 until the top surface of the boss 230 moves to the bottom surface of the upper liquid leakage plate 110, reaches the maximum liquid leakage holding capacity, the distance between the bottom surface of the upper liquid leakage plate 110 and the top surface of the base plate 240 of the lower liquid leakage plate 210 increases to the closing magnetic induction intensity, at this time the Hall switch sensor output jumps from low level to high level, triggering the liquid leakage alarm.

[0085] Therefore, in the embodiment, the closing magnetic induction intensity of the Hall switch sensor is used as the magnetic induction intensity alarm threshold of the magnetic detection sensor 321, that is, the reaction hysteresis between the opening magnetic induction intensity and the closing magnetic induction intensity of the Hall switch sensor, so that the alarm is triggered only when the magnetic induction intensity alarm threshold is reached, which is beneficial to improve the reliability of the liquid leakage detection device.

[0086] In the embodiment, two detection assemblies 300 are arranged in the upper liquid leakage plate 110 and the base plate 240.

[0087] That is, two first detection structures 310 are arranged in the upper liquid leakage plate 110, and two second detection structures 320 are arranged in the base plate 240 correspondingly.

[0088] Two detection components 300 are provided, so that the movement of the lower drip tray 210 relative to the upper drip tray 110 is more accurate, and by connecting the two detection components 300 with the door, the alarm is not triggered when only one detection component 300 reaches the alarm trigger, and the alarm is triggered only when both detection components 300 reach the alarm trigger. For example, in the embodiment, two Hall switch sensors are installed on the lower drip tray 210, and two magnetic steels are installed on the upper drip tray 110. When the lower drip tray 210 moves downward due to containing the liquid leakage, the Hall switch sensor moves away from the magnetic steel and outputs a high level. At this time, if only one Hall switch sensor moves away, the output of the AND gate is still low, and the alarm is not triggered. If both Hall switch sensors move away, the output of the AND gate is high, and the alarm is triggered.

[0089] In the embodiment, the two detection components 300 are symmetrically arranged about the center of the upper drip tray 110.

[0090] The two detection components 300 are symmetrically arranged about the center of the upper drip tray 110, so that the detection components 300 are respectively arranged on both sides of the center of the upper drip tray 110 for detection. The detection positions of the two detection components 300 are far apart, so that the results of the two detection components 300 can better represent the movement of the lower drip tray 210 relative to the upper drip tray 110.

[0091] Reference Figure 7 The liquid leakage detection device further comprises a bracket 410, one end of which is fixedly connected with the bottom of the fixed base 120 and the other end of which is fixedly connected with the upper drip tray 110.

[0092] The fixed base 120 fixes the upper drip tray 110 through the bracket 410.

[0093] In the embodiment, the bracket 410 extends horizontally from the bottom of the fixed base 120 to the edge position of the upper drip tray 110, then extends vertically to fixedly contact the edge of the upper drip tray 110 and extends to protrude from the upper drip tray 110, and then extends outward in the horizontal direction.

[0094] Here, the horizontal direction refers to the horizontal direction perpendicular to the vertical direction, and extending outward in the horizontal direction refers to extending in the direction away from the upper drip tray 110.

[0095] The bracket 410 extends horizontally from the bottom of the fixed base 120 to the edge position of the upper drip tray 110, then extends vertically to fixedly contact the edge of the upper drip tray 110 and extends to protrude from the upper drip tray 110, and then extends outward in the horizontal direction, so as to form a Z-shaped appearance, so that the bracket 410 can be placed more stably by the bending bracket formed by the vertical direction and the horizontal direction of the top.

[0096] For example Figure 9As shown, the bending frame formed by the longitudinal direction of the support 410 and the top transverse direction leans against the equipment wall 500 to place the liquid leakage detection device more stably.

[0097] Reference Figure 8 , Figure 8 The support 410 is a cross-sectional view of the support 410, which is a hollow structure.

[0098] The support 410 is a hollow structure, that is, the support 410 is provided with a second groove 411 for placing a line to transmit signals between the detection assembly 300 and the outside.

[0099] In this embodiment, the liquid leakage detection device further comprises a state lamp 400 arranged on any support 410.

[0100] The state lamp 400 is used to visually display the liquid leakage detection state, for example, when the alarm is not triggered, the state lamp 400 displays green, and when the alarm is triggered, the state lamp displays red.

[0101] Figures 10-12 is a structural schematic view of another embodiment of the liquid leakage detection device of the utility model, wherein, Figure 10 is a structural schematic view of another embodiment of the liquid leakage detection device of the utility model from one angle, Figure 11 is a structural schematic view of a support structure in another embodiment of the liquid leakage detection device of the utility model, Figure 12 is a structural schematic view of a fixed base in another embodiment of the liquid leakage detection device of the utility model.

[0102] The same as the foregoing embodiments, this embodiment will not be repeated here. The difference between this embodiment and the foregoing embodiments is that the detection assembly 300 is different.

[0103] Reference Figure 10 , Figure 10 The cross-sectional view of the fixed base and the support structure is shown, in the detection assembly 300, the first detection structure 310 is a first electrical connection structure 312 arranged on the support structure 220, the first electrical connection structure 312 is connected to one end of the circuit, the second detection structure 320 is a second electrical connection structure 322 arranged on the fixed base 120, the second electrical connection structure 322 is connected to the other end of the circuit, and the lower leakage plate 210 can slide along the longitudinal direction to realize the contact between the first electrical connection structure 312 and the second electrical connection structure 322 to turn on the circuit.

[0104] In the initial state, the support structure 220 is far away from the fixed base 120, and the first electrical connection structure 312 and the second electrical connection structure 322 are spaced apart and not in contact, and the circuit is not turned on. As the liquid leakage drips into the through hole 130, the gravity of the liquid leakage pushes down the boss 230, and the lower liquid leakage plate 210 gradually moves away from the upper liquid leakage plate 110, that is, the support structure 220 moves towards the fixed base 120, until the first electrical connection structure 312 and the second electrical connection structure 322 are in contact to turn on the circuit, triggering the liquid leakage alarm, thereby detecting the dripping of the liquid leakage.

[0105] In this embodiment, the initial longitudinal distance between the first electrical connection structure 312 and the second electrical connection structure 322 is equal to the height of the boss 230.

[0106] The initial longitudinal distance between the first electrical connection structure 312 and the second electrical connection structure 322 is equal to the height of the boss 230, so as the liquid leakage drips into the through hole 130, the gravity of the liquid leakage pushes down the boss 230, and the lower liquid leakage plate 210 gradually moves away from the upper liquid leakage plate 110, until the boss 230 is moved by the height of the boss 230, and the top surface of the boss 230 reaches the bottom surface of the upper liquid leakage plate 110, reaching the maximum liquid leakage receiving capacity. At this time, the first electrical connection structure 312 and the second electrical connection structure 322 are in contact, triggering the liquid leakage alarm.

[0107] In combination with reference Figure 11 and Figure 12 , Figure 11 shows a cross-sectional view of the support structure 220, Figure 12 shows a cross-sectional view of the fixed base 120, with the two faces of the support structure 220 and the fixed base 120 closest in the transverse direction as the first reference surface 221 and the second reference surface 121, respectively.

[0108] That is, when the inner diameter size of the support structure 220 is greater than the outer diameter size of the fixed base 120, the inner surface of the support structure 220 is the first reference surface 221, and the outer surface of the fixed base 120 is the second reference surface 121; when the outer diameter size of the support structure 220 is less than the inner diameter size of the fixed base 120, the outer surface of the support structure 220 is the first reference surface 221, and the inner surface of the fixed base 120 is the second reference surface 121.

[0109] In this embodiment, the first electrical connection structure 312 is a moving contact structure 313 arranged on the first reference surface 221 and facing the second reference surface 121; the second electrical connection structure 322 is a stationary contact structure 323 arranged on the second reference surface 121 and facing the first reference surface 221, and the moving contact structure 313 and the stationary contact structure 323 are arranged in longitudinal alignment.

[0110] When receiving the leakage liquid, the support structure 220 moves close to the fixed base 120, and the movable contact structure 313 moves close to the static contact structure 323 along the longitudinal direction, until the movable contact structure 313 moves to the position of the static contact structure 323, the movable contact structure 313 and the static contact structure 323 are arranged in alignment along the longitudinal direction, and then the movable contact structure 313 and the static contact structure 323 are in contact to conduct the circuit, trigger the leakage liquid alarm, and detect the dripping condition of the leakage liquid.

[0111] In the embodiment, the movable contact structure 313 is a movable contact point protruding from the first reference surface 221 towards the second reference surface 121, and the transverse dimension of the movable contact point is equal to the transverse distance between the first reference surface 221 and the second reference surface 121; and the static contact structure 323 is a static contact strip extending along the longitudinal direction.

[0112] When receiving the leakage liquid, the support structure 220 moves close to the fixed base 120, and the movable contact structure 313 moves close to the static contact structure 323 along the longitudinal direction, until the movable contact structure 313 moves to the position of the static contact structure 323, the movable contact point has a transverse dimension equal to the transverse distance between the first reference surface 221 and the second reference surface 121, so that the movable contact structure 313 and the static contact structure 323 can be in contact to conduct the circuit, and the static contact structure 323 is a static contact strip extending along the longitudinal direction, so that if the lower leakage receiving plate 210 continues to move downward due to errors or human reasons (for example, manually moving the lower leakage receiving plate 210 downward to discharge the leakage liquid), the movable contact point can still be in contact with the static contact strip to keep the circuit conductive, thereby keeping the leakage liquid alarm until the lower leakage receiving plate 210 is reset to release the alarm.

[0113] In the embodiment, as shown in Figure 11 The support structure 220 further comprises a third groove 222 arranged on the inner surface and used for placing a circuit line connected with the first electric connection structure 312, as shown in Figure 12 The fixed base 120 further comprises a fourth groove 122 arranged on the inner surface and used for placing a circuit line connected with the second electric connection structure 322.

[0114] Figures 13-14 is a structural schematic diagram of a semiconductor device in the embodiment of the utility model, wherein, Figure 13 is a structural schematic diagram of a semiconductor device in the embodiment of the utility model from one angle, Figure 14 is a local enlarged structural schematic diagram of a leakage liquid port of a semiconductor device in the embodiment of the utility model.

[0115] Combined with reference Figure 13 and Figure 14The semiconductor device comprises a pipeline device 600, a placing bin 610 and a pipeline 620 suspended in the placing bin 610, a liquid leakage outlet 630 is arranged on the bottom surface of the placing bin 610, and the horizontal height of the bottom surface of the placing bin 610 decreases from the periphery of the liquid leakage outlet 630 to the liquid leakage outlet 630; the liquid leakage detection device provided in the foregoing embodiments is arranged in the liquid leakage outlet 630.

[0116] In the embodiment, the liquid leakage is contained in the space formed by the top surface of the boss and the through hole, so that when the second liquid leakage containing assembly slides longitudinally, the liquid leakage detection alarm can be performed by detecting the moving distance of the second liquid leakage containing assembly, thereby being not affected by the type of the liquid leakage liquid, being beneficial to realize the detection and alarm of the leakage of a small amount of liquid, and the top surface of the substrate is in contact with the bottom surface of the upper liquid leakage plate, and the boss is embedded in the through hole, so that when the second liquid leakage containing assembly slides downward to the position that the top surface of the boss is lower than the bottom surface of the upper liquid leakage plate, the liquid leakage can be discharged, thereby being beneficial to avoid the risk of reverse overflow of the liquid leakage.

[0117] In the embodiment, the horizontal height of the bottom surface of the placing bin 610 decreases from the periphery of the liquid leakage outlet 630 to the liquid leakage outlet 630, so that when the liquid leakage drops on the bottom surface of the placing bin 610 at any position of the pipeline 620, the liquid leakage can flow to the liquid leakage outlet 630, thereby being dropped into the liquid leakage detection device, and the liquid leakage detection of the whole pipeline 620 can be realized.

[0118] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be the range limited by the claims.

Claims

1. A liquid leakage detection device, characterized by, The application relates to a liquid leakage detection device. The device comprises a fixed base, an upper drip plate fixedly arranged on the fixed base, a through hole arranged in the upper drip plate, a lower drip plate comprising a base plate and a boss protruding from the base plate, the top surface of the base plate being in contact with the bottom surface of the upper drip plate, the boss being embedded in the through hole, the side wall of the boss being in contact with the side wall of the through hole, and the lower drip plate being longitudinally movable relative to the upper drip plate, a detection assembly comprising a first detection structure arranged on the fixed base or the upper drip plate and a second detection structure arranged on the lower drip plate, and the detection assembly being used for detecting the moving distance of the lower drip plate. The top surface of the boss of the lower drip plate is lower than the top surface of the upper drip plate. The fixed base is arranged below the upper drip plate. The lower drip plate is longitudinally arranged between the upper drip plate and the fixed base.

2. The liquid leakage detection apparatus according to claim 1, wherein The liquid leakage detection device further comprises an elastic supporting structure arranged between the base plate and the fixed base, one end of the elastic supporting structure being fixed to the bottom of the base plate and the other end being fixed to the fixed base.

3. The liquid leakage detection apparatus according to claim 1, wherein The elastic supporting structure comprises a spring. The lower drip plate further comprises a supporting structure fixedly connected to the bottom of the base plate. The fixed base is a barrel-shaped structure with an open top and a closed bottom.

4. The liquid leakage detection apparatus according to claim 3, wherein The supporting structure is a tubular structure with open ends, and the inner diameter of the supporting structure is larger than the outer diameter of the fixed base, or the outer diameter of the supporting structure is smaller than the inner diameter of the fixed base.

5. The liquid leakage detection apparatus according to claim 3, wherein One end of the elastic supporting structure is fixed to the bottom of the lower drip plate, the other end is fixed to the barrel-shaped bottom of the fixed base, and the elastic supporting structure longitudinally penetrates the inside of the supporting structure and the fixed base.

6. The liquid leakage detection apparatus according to claim 5, wherein In the detection assembly, the first detection structure is a magnetic structure arranged in any one of the upper drip plate and the base plate, the second detection structure is a magnetic detection sensor arranged in the other one of the upper drip plate and the base plate, and the magnetic structure and the magnetic detection sensor are arranged opposite to each other. The magnetic induction intensity alarm threshold of the magnetic detection sensor corresponds to the distance between the bottom surface of the upper drip plate and the top surface of the base plate, which is equal to the height of the boss. The magnetic structure is a magnetic steel.

7. The liquid leakage detection apparatus according to claim 1, wherein The magnetic detection sensor is a Hall switch sensor, and the closing magnetic induction intensity of the Hall switch sensor is used as the magnetic induction intensity alarm threshold of the magnetic detection sensor.

8. The liquid leakage detection apparatus according to claim 7, wherein Two detection assemblies are arranged in the upper drip plate and the base plate.

9. The liquid leakage detection apparatus according to claim 7, wherein The two detection assemblies are symmetrically arranged about the center of the upper drip plate.

10. The liquid leakage detection apparatus according to claim 7, wherein In the detection assembly, the first detection structure is a first electric connection structure arranged on the supporting structure, the first electric connection structure is connected to one end of an electric circuit, the second detection structure is a second electric connection structure arranged on the fixed base, the second electric connection structure is connected to the other end of the electric circuit, and the lower drip plate can be longitudinally slid to realize the contact between the first electric connection structure and the second electric connection structure to turn on the electric circuit.

11. The liquid leakage detection apparatus according to claim 7, wherein The longitudinal initial distance between the first electric connection structure and the second electric connection structure is equal to the height of the boss.

12. The liquid leakage detection apparatus according to claim 11, wherein The fixed base is a barrel-shaped structure with an open top and a closed bottom.

13. The liquid leakage detection apparatus according to claim 5, wherein ​ 14. The liquid leakage detection apparatus according to claim 13, wherein ​ 15. The liquid leakage detection apparatus according to claim 13, wherein ​ The support structure is a tubular structure with open ends, and the inner diameter of the support structure is larger than the outer diameter of the fixed base, or the outer diameter of the support structure is smaller than the inner diameter of the fixed base, so that the two faces of the support structure and the fixed base closest to each other in the transverse direction are respectively the first reference face and the second reference face; The first electric connection structure is a movable contact structure arranged on the first reference face and facing the second reference face; The second electric connection structure is a static contact structure arranged on the second reference face and facing the first reference face, and the movable contact structure and the static contact structure are arranged in longitudinal alignment.

16. The liquid leakage detection apparatus according to claim 15, wherein The movable contact structure is a movable contact point protruding from the first reference face towards the second reference face, and the transverse dimension of the movable contact point is equal to the transverse distance between the first reference face and the second reference face. The static contact structure is a static contact strip extending in a strip shape in the longitudinal direction.

17. The liquid leakage detection apparatus according to claim 1, wherein The liquid leakage detection device further comprises a support, one end of which is fixedly connected to the bottom of the fixed base and the other end is fixedly connected to the upper drip plate.

18. The liquid leakage detection apparatus according to claim 17, wherein The support extends from the bottom of the fixed base to the edge of the upper drip plate in the transverse direction, then extends in the longitudinal direction to be fixedly in contact with the edge of the upper drip plate and extends to protrude from the upper drip plate, and finally extends outward in the transverse direction.

19. The liquid leakage detection apparatus of claim 17, wherein The support is a hollow structure.

20. A semiconductor device, comprising: It comprises: A pipeline device comprising a placement bin and a pipeline suspended in the placement bin, the bottom surface of the placement bin is provided with a liquid leakage port, and the horizontal height of the bottom surface of the placement bin decreases from the surrounding of the liquid leakage port to the liquid leakage port; The liquid leakage detection device according to any one of claims 1-19 is arranged in the liquid leakage port.

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