Integrating sphere structure and optical measurement system

Abstract

The utility model discloses an integrating sphere structure and an optical measurement system, and relates to the semiconductor laser aging test technology field, the integrating sphere structure comprises a cylinder structure and a heat dissipation member, the cylinder structure is internally provided with a test sphere cavity, the inner wall of the test sphere cavity is coated with a high diffuse nanometer coating, and the heat dissipation member is arranged in the test sphere cavity. The heat dissipation piece comprises two heat dissipation channel parts on the cylinder structure, the two heat dissipation channel parts are arranged at the two ends of the test ball cavity respectively along the axis of the cylinder structure, and the two ends of the heat dissipation channel parts are arranged outside the cylinder structure so as to be used for being connected with an external circulating cooling device; by adopting the integrating sphere structure in the scheme, the light intensity bearing capacity is greatly enhanced, the light power change process in the aging process is effectively reflected, and the integrating sphere structure has a relatively good application prospect.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor laser aging test, especially relates to an integrating sphere structure and optical measuring system. BACKGROUND

[0002] Pump aging mainly refers to the pre-factory aging of the pump source, accelerates the chemical and physical reactions in the chip, and accelerates the polymerization, shortens the early failure time, and makes the defects in the chip exposed rapidly in a short time. Pump aging is an important part of device screening, and the integrating sphere plays an important role in the pump aging process. However, with the continuous increase of optical power, the light collecting integrating sphere in use has limited internal diffuse reflection effect, which easily leads to high light intensity of direct light point and burns through, thereby affecting the test accuracy. UTILITY MODEL CONTENT

[0003] The utility model discloses a kind of integrating sphere structures, to solve the problem that the light collecting integrating sphere in use is limited due to its internal diffuse reflection effect, which easily leads to high light intensity of direct light point and burns through, thereby affecting the test accuracy.

[0004] To achieve the above object, the integrating sphere structure provided by the utility model comprises:

[0005] A cylindrical structure is formed with a test sphere cavity inside, and a high diffuse nanometer coating is coated on the inner wall of the test sphere cavity; and,

[0006] A heat dissipation member comprises two heat dissipation channel portions on the cylindrical structure, and the two heat dissipation channel portions are respectively arranged at the two ends of the test sphere cavity along the axis of the cylindrical structure, and the two ends of the heat dissipation channel portion are arranged outside the cylindrical structure to connect an external circulating cooling device.

[0007] In an embodiment, the cylindrical structure comprises two test portions arranged along the axial direction thereof, and each of the two test portions is provided with a spherical cavity portion at the opposite end thereof, and the opening ends of the two spherical cavity portions are coupled to form the test sphere cavity.

[0008] In an embodiment, each of the test portions is provided with a mounting hole perpendicular to the axis thereof, and each of the mounting holes is provided with a photoelectric detection member.

[0009] In an embodiment, the mounting hole comprises a coaxially arranged circular hole segment portion and a threaded hole segment portion, the circular hole segment portion is connected to the test sphere cavity, the threaded hole segment portion is arranged at one end of the circular hole segment portion, and the photoelectric detection member is arranged in the threaded hole segment portion.

[0010] In an embodiment, the photoelectric detection member comprises:

[0011] An outer threaded block is installed in the threaded hole section, and a through hole is arranged at the center of the outer threaded block and penetrates through the two flat ends of the outer threaded block.

[0012] A PD photodetector tube is installed in the through hole, and one end of the PD photodetector tube corresponds to the circular hole section.

[0013] In an embodiment, the circular hole section and the threaded hole section are arranged in a stepped hole, and the cross-sectional area of the threaded hole section is greater than the cross-sectional area of the circular hole section.

[0014] A sunken groove is arranged on the stepped surface of the circular hole section and the threaded hole section, and a protective glass is installed in the sunken groove.

[0015] In an embodiment, one of the test sections is an incident test section, and an incident hole is arranged on the arc-shaped bottom of the incident test section corresponding to the spherical cavity section.

[0016] An installation platform is arranged on the outer wall of the incident test section corresponding to the position of the incident hole.

[0017] In an embodiment, the arc-shaped side walls of the two test sections each include a partial flat section, and the flat section is arranged parallel to the installation surface of the installation platform.

[0018] In an embodiment, the two heat dissipation channel sections are arranged in a U-shaped structure; and / or,

[0019] The two test sections are fixedly connected by a bolt.

[0020] The utility model also includes an optical measurement system, the optical measurement system includes an integrating sphere structure, the integrating sphere structure includes:

[0021] A column structure, a test spherical cavity is formed in the column structure, and a high-mat nano coating is coated on the inner wall of the test spherical cavity; and,

[0022] A heat dissipation member includes two heat dissipation channel sections on the column structure, the two heat dissipation channel sections are arranged at two ends of the test spherical cavity along the axis of the column structure, and the two ends of the heat dissipation channel sections are arranged outside the column structure to connect an external circulating cooling device.

[0023] In this invention, both the front and rear test sections utilize an 80µm high-diffuse nano-coating. Due to its high reflectivity, the nano-coating exhibits excellent optical properties, strong uniformity, and adhesion, solving the problem of burn-through from prolonged laser irradiation and improving service life. It also enhances the measurement accuracy of the integrating sphere. Furthermore, the circular test sphere cavity, coated with a high-diffuse-reflection coating, effectively disperses laser irradiation intensity, effectively preventing heat buildup and ensuring a uniform temperature across the entire sphere. This reduces the complexity of thermal design and manufacturing. In practical use, a simple U-shaped heat dissipation channel can effectively remove the generated heat. During actual testing, the average value of two optical signals is calculated, improving the accuracy of the hardware system's response. The integrating sphere structure of this invention significantly enhances the light intensity carrying capacity and effectively reflects the changes in optical power during aging. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0025] Figure 1 A schematic diagram of the overall structure of an embodiment of the integrating sphere structure provided by this utility model;

[0026] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure of the integrator sphere along a plane of its axis;

[0027] Figure 3 for Figure 1 A schematic diagram of the cross-sectional structure of the heat dissipation channel section in the integrator sphere structure;

[0028] Figure 4 for Figure 1 Exploded view of part of the installation structure of the photoelectric detection device in the integrator sphere structure.

[0029] Explanation of icon numbers:

[0030] 100. Integrating sphere structure; 1. Column structure; 11. Test section; 111. Test sphere cavity; 112. Mounting hole; 1121. Circular hole section; 1122. Threaded hole section; 2. Photoelectric detection component; 21. External threaded block; 211. Through hole section; 22. PD photoelectric detection tube; 3. Heat dissipation channel section; 4. Entrance hole; 5. Mounting platform section; 6. Flat section; 7. Recessed groove; 8. Protective glass slide.

[0031] The purposes, functional features and advantages of the utility model will be further explained in combination with embodiments with reference to the drawings. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0033] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0034] In addition, if the embodiments of the utility model involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one feature. In addition, "and / or" or "and / or" appears in the whole text, which means that the three parallel schemes include "A and / or B", which includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or cannot be realized, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0035] Pump aging mainly refers to aging of the pump source before leaving the factory, accelerating the chemical and physical reactions in the chip and polymerization, shortening the early failure time, so that the defects in the chip can be rapidly exposed in a short time. Pump aging is an important part of device screening, and the integrating sphere plays an important role in the pump aging process. However, with the continuous increase of optical power, the light collecting integrating sphere used at present is limited in internal diffuse reflection effect, which easily leads to high light intensity of direct light point and burns through, thereby affecting the accuracy of the test.

[0036] The utility model provides an integrating sphere structure 100 for solving the above problems.

[0037] Please refer to Figures 1 to 4In an embodiment of the utility model, the integrating sphere structure 100 is used for the aging test of semiconductor laser, and the pump aging mainly refers to the pre-shipment aging of the pump source, promotes the acceleration of chemical and physical reactions in the chip and the polymerization, shortens the early failure time, and makes the defects in the chip rapidly exposed in a short time. The pump aging is an important link of device screening, and the integrating sphere plays an important role in the pump aging process. Although the high-power and high-precision test integrating sphere can accurately reflect the light power attenuation process, the use cost is high when it is put into the aging equipment. In the embodiment, an integrating sphere structure 100 is provided, which not only has good test precision, but also can fully guarantee the stability in the test process. Specifically, the appearance of the integrating sphere structure 100 is provided as a cylindrical structure 1, a test sphere cavity 111 is arranged in the cylindrical structure 1, and the center of the test sphere cavity 111 is arranged on the central axis of the cylindrical structure 1. The arc-shaped inner wall of the test sphere cavity 111 is a laser reflection surface. In order to improve the laser reflection effect in the test process and guarantee the accuracy of the test result, the arc-shaped inner wall of the test sphere cavity 111 is first polished and sandblasted, and then a 80um thick reflection rate 96% high diffuse reflection nano coating is sprayed. During the test, since the inner wall of the test sphere cavity 111 is treated as above, the reflection uniformity and precision of the test sphere cavity 111 can be improved, so that the accuracy of the test result is guaranteed, and the reflection rate of the diffuse reflection material in the sphere reaches 96%. The intensity of the direct light point is effectively reduced by the diffuse reflection of the direct laser, so that the burning problem is solved. Therefore, the stability of the entire integrating sphere structure 100 in the test process is greatly improved. During the test, the laser continuously forms diffuse reflection in the test sphere cavity 111, and the temperature of the entire cylindrical structure 1 also rises to a certain extent. In order to further improve the stability of the entire integrating sphere structure 1 in the use process, a heat dissipation member is further arranged on the cylindrical structure 1. Specifically, the heat dissipation member includes two U-shaped heat dissipation channel parts 3, the two heat dissipation channel parts 3 are arranged at the two ends of the test sphere cavity 111 along the axis of the cylindrical structure 1, and the two ends of the heat dissipation channel part 3 are arranged outside the cylindrical structure 1. In the actual use process, the two ends of the heat dissipation channel part 3 can be connected with an external low-temperature circulation device, such as a low-temperature water circulation device or a low-temperature gas circulation device, so that the heat generated on the cylindrical structure 1 can be timely removed through the two heat dissipation channel parts 3 during the test, which helps to improve the test accuracy and stability of the entire structure in the use process.

[0038] The column structure 1 includes two test parts 11 arranged along the axial direction, and a plurality of corresponding connecting holes are arranged on the two test parts 11, and the corresponding two connecting holes are fixedly installed through bolts, so that the two test parts 11 can be detachably installed. Wherein, the opposite ends of the two test parts 11 are concave and form two arc-shaped spherical cavity parts, and after the two test part ends are connected, the two spherical cavity parts are jointly buckled to form the test spherical cavity 111. The column structure 1 is divided into two relatively symmetrical structures, which has certain advantages in manufacturing convenience and cost. Specifically, one of the test parts 11 is machined, including machining the spherical cavity part, then machining the heat dissipation channel part 3, and one-time forming and spraying a high-manganese reflective layer coating. Then the other test part 11 is processed in the same way. After the two test parts 11 are machined, the two test parts 11 are fixed as a whole through the corresponding installation structure. Through the above processing method, the internal structure of the entire integrating sphere structure 100 can be conveniently observed and maintained during use, which helps to improve the convenience of the entire structure during use.

[0039] In the traditional test method, a single detection element is arranged on the integrating sphere to collect photoelectric signals. In the present scheme, mounting holes 112 perpendicular to the axis are arranged on the two test parts 11, and photoelectric detection pieces 2 are arranged at the two mounting holes 112. The two photoelectric detection pieces 2 can be connected to an external computing device at the same time, and the average value of the two-way electrical signal change reflects the power change trend, thereby further improving the accuracy of the test result.

[0040] Because the output power of the device during the aging process is composed of the rising transient state, the steady state and the closing transient state. The output power changes sharply in the rising and closing stages, and the hardware device precision and software algorithm response precision required for capturing abnormal changes in this stage are much higher than those in the steady state. In the steady state, the power input, the device power output, the software reading value, the environmental temperature and the device optical junction temperature are in a relatively stable state, and the interference factors for capturing abnormal changes in the device power in this stage are few. In addition, in the present scheme, the reflection uniformity and precision in the test spherical cavity 111 are improved, and the average value of the two-way electrical signal is collected to reflect the relative change trend, and the device complexity and overall cost are greatly reduced.

[0041] The mounting hole 112 specifically includes two sections, a circular hole section 1121 with a smaller cross section connected to the test spherical cavity 111, and a threaded hole section 1122 with a larger cross section connected to the other end of the circular hole section 1121, and the photoelectric detection piece 2 is installed in the threaded hole section 1122.

[0042] Specifically, the photoelectric detection piece 2 comprises two parts of an outer threaded block 21 and a PD photoelectric detection tube 22. The outer threaded block 21 is threadedly fitted and installed with the threaded hole section 1122. In order to facilitate the installation and removal of the outer threaded block 21, a strip-shaped groove is arranged on the end of the outer threaded block 21 away from the test ball cavity 111. During actual installation or removal, an external tool can be used in cooperation with the strip-shaped groove to drive the outer threaded block 21 to rotate. A through hole 211 is arranged at the center position of the outer threaded block 21 and penetrates through the two plane ends. The PD photoelectric detection tube 22 is installed inside the through hole 211, and one end thereof corresponds to the round hole section 1121, so as to facilitate the acquisition of the corresponding photoelectric signal.

[0043] In addition, considering that the receiving power of the PD photoelectric detection tube 22 has a certain range, in order to prevent the power of the reflected light from being too large and exceeding the bearing range of the PD photoelectric detection tube 22, thereby causing damage to the PD photoelectric detection tube 22, a sunken groove 7 is arranged on the stepped surface of the round hole section 1121 and the threaded hole section 1122. A protective glass 8 is installed inside the sunken groove 7. After installation is completed, one end of the outer threaded block 21 located inside the test part 11 is in contact with the protective glass 8, so as to ensure the stability of the installation of the protective glass 8 inside the sunken groove 7. During the specific test process, the protective glass 8 can protect the PD photoelectric detection tube 22 within a certain range, thereby ensuring the stable performance of the entire test process.

[0044] In the entire integral sphere structure 100, one of the test parts 11 is an incident test part 11. An incident hole 4 is arranged on the incident test part 11 corresponding to the arc-shaped bottom position of the ball cavity part, and a mounting table part 5 is arranged on the outer wall of the incident test part 11 corresponding to the position of the incident hole 4. The mounting table part 5 is the mounting position of the optical fiber tool structure. During actual use, the tool structure of the incident optical fiber is mounted on the mounting surface of the mounting table part 5, and then the incident optical fiber is fixed through the tool structure. The actual part of the tool structure also has a certain adjustment function, which can adjust the direction of the output end of the incident optical fiber according to the actual test requirement.

[0045] The column structure 1 is similar to a standard cylindrical structure, and in order to facilitate fixation and prevent rotation around the axis, a part of the arc-shaped side wall of each test part 11 is provided with a flat part 6, and the flat parts 6 are flush after the two test parts 11 are fixedly connected, so that the column structure 1 can be placed stably.

[0046] In addition, in the embodiment, the two heat dissipation channel parts 3 are provided in a U-shaped structure, and the two ends of the U-shaped structure are arranged outside the test part 11, and the test part 11 can be cooled by connecting a circulating cooling device as described above.

[0047] The utility model discloses still a kind of optical measurement systems, the optical measurement system includes integrating sphere structure 100, the specific structure of the integrating sphere structure 100 is as described above in the embodiment, since the optical measurement system includes all the technical solutions of the integrating sphere structure 100, so the optical measurement system at least includes all the beneficial effects of the integrating sphere structure 100, here no longer one by one elaboration.

[0048] The above is only exemplary embodiment of the utility model, and not therefore limit the patent range of the utility model, all equivalent structural transformation made in the technical concept of the utility model using the utility model specification and drawing contents, or direct / indirectly applied in other related technical fields are included in the patent protection range of the utility model.

Claims

1. An integrating sphere structure, characterized by, include: The cylindrical structure has a test sphere cavity inside, and the inner wall of the test sphere cavity is coated with a high-diffuse nano-coating. as well as, The heat dissipation component includes two heat dissipation channels on the column structure. The two heat dissipation channels are respectively disposed at both ends of the test ball cavity along the axis of the column structure, and the two ends of the heat dissipation channels are disposed outside the column structure for connecting to an external circulating cooling device.

2. The integrating sphere structure of claim 1, wherein, The column structure includes two test sections arranged along its axial direction. Each of the two test sections has a ball cavity at one of its opposite ends. The opening ends of the two ball cavities are engaged to form the test ball cavity.

3. The integrating sphere structure of claim 2, wherein, Each of the aforementioned test sections is provided with a mounting hole perpendicular to its axis, and each of the aforementioned mounting holes is provided with a photoelectric detection element.

4. The integrating sphere structure of claim 3, wherein, The mounting hole includes a circular hole section and a threaded hole section arranged coaxially. The circular hole section is connected to the test ball cavity, and the threaded hole section is located at one end of the circular hole section. The photoelectric detection element is located inside the threaded hole section.

5. The integrating sphere structure of claim 4, wherein, The photoelectric detection element includes: An external threaded block is installed within the threaded hole section, and a through hole penetrating its two planar ends is provided at the center of the external threaded block; and, A PD photoelectric detection tube is installed inside the through hole, with one end of it corresponding to the circular hole section.

6. The integrating sphere structure of claim 4, wherein, The circular hole section and the threaded hole section are provided in a stepped hole configuration, and the cross-sectional area of ​​the threaded hole section is larger than the cross-sectional area of ​​the circular hole section. The stepped surfaces of the circular hole section and the threaded hole section are provided with recessed grooves, and a protective glass sheet is installed inside the recessed grooves.

7. The integrating sphere structure of claim 2, wherein, One of the test sections is an incident test section, and the incident test section has an incident hole at the arc-shaped bottom position corresponding to the ball cavity; The outer wall of the incident test section is provided with a mounting platform corresponding to the position of the incident hole.

8. The integrating sphere structure of claim 7, wherein, Both of the arc-shaped sidewalls of the test section include a portion of flat surface, which is arranged parallel to the mounting surface of the mounting platform.

9. The integrating sphere structure of claim 2, wherein, Both of the aforementioned heat dissipation channels are configured with a U-shaped structure; and / or, The two test sections are fixedly connected by bolts.

10. An optical measurement system, characterized by Including the integral sphere structure as described in any one of claims 1-9.

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