Floating mechanism and detection device

Abstract

The utility model discloses a floating mechanism and a detection device, and the floating mechanism comprises a fixed frame which is provided with a top plate and a side plate; the fixed plate is spaced from the top plate and the side plate of the fixed frame and is suitable for being connected with an electrical property detector; the connecting assembly is arranged between the top wall of the fixing plate and the bottom wall of the top plate of the fixing frame, and the connecting assembly is matched with the fixing frame to balance the gravity of the fixing plate and the electrical property detector; one end of the horizontal supporting assembly is hinged to the middle of the side wall of the fixing plate, and the other end is connected to the fixing frame. When the end face of the silicon rod is in contact with the electrical property detector, the electrical property detector swings along with the end face of the silicon rod under the extrusion of the silicon rod, so that the end face of the silicon rod is completely attached to the detection end face of the electrical property detector, the measurement accuracy of the electrical property detector is ensured, and the measurement error is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon rod detection technical field, specifically related to a floating mechanism and detection device. BACKGROUND

[0002] The information provided in this section is background information only and constitutes no prior art.

[0003] The electrical performance detector is a device that can measure the minority carrier lifetime of P-type or N-type single crystal or polycrystalline silicon block. Minority carrier lifetime is an important parameter of semiconductor materials and devices, which directly reflects the quality of the material and the characteristics of the device.

[0004] During the detection process, the probe of the electrical performance detector needs to be in close contact with the end face of the silicon rod to ensure the accuracy and reliability of the measurement. Due to the uncertainty of the cutting position of the silicon rod cross section, it is difficult for the end face of the cut silicon rod to automatically fit the electrical performance detector completely. When the probe of the electrical performance detector does not completely fit the end face of the silicon rod, it will cause measurement error and affect the measurement accuracy of the electrical performance. UTILITY MODEL CONTENT

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the defect that the end face of the silicon rod is difficult to automatically fit the electrical performance detector completely, so as to provide a floating mechanism and detection device.

[0006] To achieve the above purpose, the technical scheme adopted by the utility model is:

[0007] A floating mechanism, comprising:

[0008] A fixed frame with a top plate and side plates;

[0009] A fixed plate with a spacing between the top plate and side plates of the fixed frame, the fixed plate is adapted to connect the electrical performance detector;

[0010] A connecting assembly is arranged between the top wall of the fixed plate and the bottom wall of the top plate of the fixed frame, the connecting assembly cooperates with the fixed frame to balance the gravity of the fixed plate and the electrical performance detector;

[0011] A horizontal support assembly is connected to the middle part of the side wall of the fixed plate at one end and connected to the fixed frame at the other end; when the end face of the silicon rod contacts the electrical performance detector, the electrical performance detector and the fixed plate swing around the horizontal support assembly to make the end face of the silicon rod fit the detection end face of the electrical performance detector.

[0012] Further optimization of the technical scheme also includes:

[0013] A reset assembly is arranged between the fixing plate and the fixing frame, and is adapted to automatically reset the fixing plate after the fixing plate swings.

[0014] Further optimization of the technical scheme, the reset assembly comprises:

[0015] At least one first spring group is connected between the upper part of the side wall of the fixing plate and the side plate of the fixing frame, and each first spring group comprises two first springs.

[0016] At least one second spring group is connected between the lower part of the side wall of the fixing plate and the side plate of the fixing frame, and each second spring group comprises two second springs.

[0017] Further optimization of the technical scheme, the first spring and the second spring are symmetrically arranged with respect to the central axis of the horizontal support assembly; the two first springs in each pair of the first spring group are symmetrically arranged with respect to the vertical axis of the fixing plate; and the two second springs in each pair of the second spring group are symmetrically arranged with respect to the vertical axis of the fixing plate.

[0018] Further optimization of the technical scheme, the horizontal support assembly comprises:

[0019] A holder is arranged on the side plate of the fixing frame.

[0020] A connecting rod assembly is connected with the holder.

[0021] A ball is connected with the end of the connecting rod assembly.

[0022] A fixing shaft is arranged on the side wall of the fixing plate and is arranged opposite to the connecting rod assembly, and the fixing shaft is provided with a groove opposite to the end of the connecting rod assembly, and the ball is arranged in the groove in a rolling manner.

[0023] Further optimization of the technical scheme, the connecting rod assembly is a telescopic connecting rod assembly, and the connecting rod assembly comprises:

[0024] A connecting rod is connected with the holder.

[0025] An oil buffer is connected at a fixed end with the connecting rod and connected at a telescopic end with the ball.

[0026] Further optimization of the technical scheme, the holder has a rotating end, the rotating end of the holder extends into the connecting rod and is threadedly connected with the connecting rod, and the fixed end of the oil buffer is fixedly arranged in the connecting rod.

[0027] A holder knob is arranged on the holder, the holder knob drives the rotating end of the holder to rotate, adjusts the lateral position of the connecting rod, and adjusts the supporting force of the fixing plate.

[0028] Further optimization technical solutions, the side wall of the fixed plate is provided with an opening;

[0029] The connecting assembly can adjust the vertical position of the fixed plate and the electrical performance detector, and the connecting assembly comprises:

[0030] At least one third spring, the bottom end is connected with the top end of the stud, and the top end is connected with the top plate of the fixed frame;

[0031] At least one stud, the bottom end is screwed on the top wall of the fixed plate and extends into the opening position, and the stud is telescopic when rotating to adjust the elastic force of the third spring.

[0032] Further optimization technical solutions, the top end face of the fixed plate is provided with a mounting groove, the mounting groove is provided with a connecting plate, and the stud is arranged in the connecting plate;

[0033] And / or, the top end of the third spring is connected to the fixed seat, and the fixed seat is connected with the top plate of the fixed frame.

[0034] A detection device comprises:

[0035] The floating mechanism;

[0036] The electrical performance detector is arranged on the fixed plate of the floating mechanism through at least one insulating plate.

[0037] Further optimization technical solutions, the floating mechanism is arranged on the moving truss or robot through the moving mechanism.

[0038] The technical scheme of the utility model has the following advantages:

[0039] 1. The floating mechanism provided by the utility model, when the detection end face of the electrical performance detector gradually approaches the end face of the silicon rod, because the truncated end face of the silicon rod has a slope, and the middle part of the fixed plate can rotate around the horizontal support assembly, and then when the end face of the silicon rod contacts the electrical performance detector, the electrical performance detector swings with the end face of the silicon rod under the extrusion of the silicon rod, so that the end face of the silicon rod completely matches the detection end face of the electrical performance detector, ensuring the measurement accuracy of the electrical performance detector and reducing the measurement error.

[0040] 2. The floating mechanism provided by the utility model, the reset assembly is arranged between the fixed plate and the fixed frame, and the reset assembly is suitable for automatically resetting the fixed plate after the fixed plate swings, so that manual resetting is not needed, and the electrical performance detector positioned on the floating mechanism can continuously detect multiple silicon rods.

[0041] 3. The utility model provides a kind of floating mechanism, first spring is connected between the side wall upper portion of fixed plate and the side plate of fixed frame, second spring is connected between the side wall lower portion of fixed plate and the side plate of fixed frame.When electric performance detector is contacted with fixed plate, when fixed plate swings, whether fixed plate swings clockwise, or counterclockwise, fixed plate can be automatically reset.

[0042] 4. The utility model provides a kind of floating mechanism, the fixed shaft of fixed plate middle part can swing multidirectionally around ball, not limited to swing up and down, further can be applicable to different section silicon rod, so that the application range of the device is wider.

[0043] 5. The utility model provides a kind of floating mechanism, the fixed end of oil pressure buffer is connected with connecting rod, and the telescopic end of oil pressure buffer is connected with ball.Oil pressure buffer can avoid the situation that electric performance detector and the end surface of silicon rod appear hard contact, can avoid electric performance detector and the end surface of silicon rod from being damaged when being collided by excessive force.

[0044] 6. The utility model provides a kind of floating mechanism, the bottom end of stud is screw fitted on the top wall of fixed plate and extends to opening position, stud can be forward and reverse, stud is telescopic when rotating, further to the elasticity of third spring is adjusted, so that fixed plate, first spring, second spring is kept in suitable position, balance gravity. DRAWINGS

[0045] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description, obviously, the drawings in the following description are some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor according to these drawings.

[0046] Figure 1 It is a structure schematic view of the floating mechanism provided by the utility model;

[0047] Figure 2 It is a structure schematic view of horizontal support assembly in the floating mechanism provided by the utility model;

[0048] Figure 3 It is a cutaway view of horizontal support assembly in the floating mechanism provided by the utility model;

[0049] Figure 4 It is a structure schematic view of connecting assembly in the floating mechanism provided by the utility model;

[0050] Figure 5The utility model provides a kind of floating mechanism reference surface position diagram when swinging is provided, and the utility model discloses a kind of floating mechanism reference surface position diagram when swinging is provided.

[0051] Figure 6 The utility model provides a kind of detection device's structural schematic diagram.

[0052] Figure 7 The utility model provides a kind of detection device and the structural schematic diagram when silicon rod is contacted.

[0053] Reference signs:

[0054] 1, floating mechanism;101, fixed frame;102, fixed plate, 1021, opening;103, first spring;104, second spring;105, horizontal support assembly, 1051, holder, 1052, connecting rod, 1053, oil buffer, 1054, ball, 1055, fixed shaft, 1056, holder knob, 1057, rotating end;106, connecting assembly, 1061, connecting plate, 1062, stud, 1063, third spring, 1064, fixed seat;

[0055] 2, electrical performance detector;201, insulating plate;

[0056] 3, silicon rod. DETAILED DESCRIPTION

[0057] Exemplary embodiments of the present disclosure will be described more fully hereinafter with reference to the accompanying drawings; although example embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure can be more thoroughly understood, and the scope of the present disclosure can be conveyed completely to those skilled in the art. It should be noted that the utility model utilizes the swingability of the floating mechanism, so that the electrical performance detector positioned on the floating mechanism can swing with the end face of the silicon rod. The floating mechanism of the utility model is only a preferred embodiment, and is not a limitation on the protection scope of the floating mechanism.

[0058] It should be understood that the terms used herein are for the purpose of describing particular example embodiments only and are not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises", "comprising", "includes", "including" and "has", "having" are inclusive and therefore specify the presence of stated features, elements, and / or components, but do not preclude the presence or addition of one or more other features, elements, components, and / or groups thereof.

[0059] Although the terms first, second, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can be only used to distinguish one element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates otherwise, terms such as "first", "second" and other numerical terms when used in the description of the present application do not imply an order or sequence unless the context clearly indicates otherwise. In addition, in the description of the present application, unless otherwise clearly specified and limited, the terms "provided", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0060] In order to facilitate the description, spatial relative relationship terms can be used in the description to describe the relationship of one element or feature relative to another element or feature as shown in the figure, such as "front", "back", "middle", "inner", "longitudinal", "transverse", "side", "vertical", "outer" and the like. Such spatial relative relationship terms are intended to include different orientations of the mechanism in use or operation in addition to the orientation depicted in the figure. For example, if the mechanism in the figure is turned over, the element described as "under" or "below" the other element or feature will then be oriented as "above" or "over" the other element or feature. Therefore, the example term "below" can include both upward and downward orientations. The mechanism can be additionally oriented (rotated by 90 degrees or in other directions) and the spatial relative relationship descriptors used in the text are interpreted accordingly.

[0061] The electrical performance detector is used for measuring the electrical performance parameters of the silicon rod, such as resistivity, carrier concentration and the like, and is a device capable of measuring the minority carrier lifetime of P-type or N-type single crystal or polycrystalline silicon block. The minority carrier lifetime is an important parameter of semiconductor materials and devices, which directly reflects the quality of the material and the characteristics of the device.

[0062] During the detection process, the probe of the electrical performance detector needs to be in close contact with the end face of the silicon rod to ensure the accuracy and reliability of the measurement. When the probe is not completely attached to the end face of the silicon rod, the following problems may occur:

[0063] 1. Measurement error: The air gap or slight distance between the probe and the end face of the silicon rod may cause the measured value to deviate from the actual value, because the dielectric constant of air is different from that of silicon material, which will affect the measurement accuracy of electrical performance.

[0064] 2. Poor contact: Incomplete adhesion can cause the contact resistance to increase, affecting the flow of current and the distribution of voltage, and thus affecting the accuracy of the measurement results.

[0065] 3. Local overheating: If the contact is poor, it may cause local overheating, damaging the silicon rod or the probe of the detector.

[0066] Therefore, when performing electrical performance detection, it is very important to ensure that the probe is fully attached to the end face of the silicon rod. The uncertainty of the cutting position of the silicon rod cross section makes it difficult for the cut silicon rod end face to be fully attached to the electrical performance detector automatically.

[0067] Therefore, when performing electrical performance detection, it is very important to ensure that the probe is fully attached to the end face of the silicon rod. The uncertainty of the cutting position of the silicon rod cross section makes it difficult for the cut silicon rod end face to be fully attached to the electrical performance detector automatically.

[0068] The specific embodiments of the present application will be described in detail below in combination with the floating mechanism of the first aspect of the present application.

[0069] It should be noted that the floating mechanism of the first aspect of the present application is only a preferred embodiment of the present application, and the floating mechanism of the present application can also use other structures. In order to facilitate the description, the floating mechanism of the first aspect of the present application will be described in detail below.

[0070] In combination with Figures 1 to 5 As shown in the figure, the embodiment discloses a floating mechanism, which comprises a fixed frame 101, a fixed plate 102, a connecting assembly 106 and a horizontal support assembly 105. The fixed frame 101 has a top plate and a side plate. The fixed plate 102 has a spacing between the top plate and the side plate of the fixed frame 101, and the fixed plate 102 is suitable for connecting the electrical performance detector 2. The connecting assembly 106 is arranged between the top wall of the fixed plate 102 and the bottom wall of the top plate of the fixed frame 101, and the connecting assembly 106 cooperates with the fixed frame 101 to balance the gravity of the fixed plate 102 and the electrical performance detector 2. One end of the horizontal support assembly 105 is hingedly connected to the middle of the side wall of the fixed plate 102, and the other end of the horizontal support assembly 105 is connected to the fixed frame 101.

[0071] The floating mechanism gradually approaches the end surface of the silicon rod 3 when the detection end surface of the electrical performance detector 2 gradually approaches the end surface of the silicon rod 3. Because the truncated end surface of the silicon rod 3 has a slope, and the middle part of the fixed plate 102 can rotate around the horizontal support assembly 105, the electrical performance detector 2 swings along the end surface of the silicon rod 3 under the extrusion of the silicon rod 3 after the end surface of the silicon rod 3 contacts the electrical performance detector 2. The electrical performance detector 2 and the silicon rod 3 are not parallel when the detection end surface of the electrical performance detector 2 and the end surface of the silicon rod 3 begin to contact, and the contact gradually changes from a point to a surface. Because the electrical performance detector 2 and the rear structure are not rigidly connected, the electrical performance detector 2 can slightly swing around, the detection end surface of the electrical performance detector 2 gradually approaches the end surface of the silicon rod 3, and the contact surface is a rectangle at this time, so that the end surface of the silicon rod 3 and the detection end surface of the electrical performance detector 2 are completely attached, the measurement accuracy of the electrical performance detector 2 is ensured, the measurement error is reduced, and the problem that the probe of the electrical performance detector 2 and the silicon rod 3 are damaged due to local overheating is avoided.

[0072] It should be noted that the silicon rod 3 in the embodiment is a cylindrical single crystal silicon rod 3 obtained by cutting a round silicon rod 3.

[0073] In some embodiments, the floating mechanism further includes a reset assembly. The reset assembly is arranged between the fixed plate 102 and the fixed frame 101, and is adapted to automatically reset the fixed plate 102 after the fixed plate 102 swings, so that the electrical performance detector 2 positioned on the floating mechanism can continuously detect a plurality of silicon rods 3 without manual resetting.

[0074] The reset assembly includes a first spring group and a second spring group. The first spring group is provided with at least one, and each first spring group includes two first springs 103 connected between the upper part of the side wall of the fixed plate 102 and the side plate of the fixed frame 101. The second spring group is provided with at least one, and each second spring group includes two second springs 104 connected between the lower part of the side wall of the fixed plate 102 and the side plate of the fixed frame 101. When the electrical performance detector 2 contacts the fixed plate 102 and the fixed plate 102 swings, the first spring 103 is compressed, and the second spring 104 is stretched; or the first spring 103 is stretched, and the second spring 104 is compressed. Therefore, whether the fixed plate 102 swings clockwise or counterclockwise, the fixed plate 102 can be automatically reset.

[0075] As a preferred embodiment, the first springs 103 and the second springs 104 are symmetrically arranged relative to the central axis of the horizontal support assembly 105, so that the upper part and the lower part of the fixed plate 102 are subjected to the same spring force in size and opposite in direction when the fixed plate 102 swings, so that the fixed plate 102 can be better reset to the vertical state, and the floating mechanism as a whole keeps a balanced state. The two first springs 103 in each pair of first spring groups are symmetrically arranged relative to the vertical axis of the fixed plate 102, and the two second springs 104 in each pair of second spring groups are symmetrically arranged relative to the vertical axis of the fixed plate 102, so that the fixed plate 102 can also be automatically reset when it swings left and right.

[0076] In some embodiments, in combination Figure 2 As shown, the horizontal support assembly 105 includes a gimbal 1051, a linkage assembly, a ball 1054, and a fixed shaft 1055. The fixed end of the gimbal 1051 is arranged on the side plate of the fixed frame 101. The linkage assembly is connected with the gimbal 1051. The ball 1054 is connected with the end of the linkage assembly, and the ball 1054 is a steel ball. The fixed shaft 1055 is arranged on the side wall of the fixed plate 102 and is arranged opposite to the linkage assembly, and the fixed shaft 1055 is provided with a groove opposite to the end of the linkage assembly, and the ball 1054 is arranged in the groove in a rolling manner. In this embodiment, the fixed shaft 1055 in the middle of the fixed plate 102 can swing in multiple directions around the ball 1054, not limited to up and down, and thus can be suitable for silicon rods 3 of different cross sections, so that the application range of the device is wider.

[0077] The linkage assembly is a telescopic linkage assembly. The linkage assembly includes a connecting rod 1052 and an oil pressure buffer 1053. The connecting rod 1052 is connected with the gimbal 1051. The fixed end of the oil pressure buffer 1053 is connected with the connecting rod 1052, and the telescopic end of the oil pressure buffer 1053 is connected with the ball 1054. In this embodiment, when the electrical performance detector 2 contacts the end face of the silicon rod 3, the end face of the silicon rod 3 will be extruded with the electrical performance detector 2, at which time the oil pressure buffer 1053 will be extruded, and the oil pressure buffer 1053 will provide a certain lateral support to the fixed plate 102. The oil pressure buffer 1053 in this embodiment can avoid the hard contact between the electrical performance detector 2 and the end face of the silicon rod 3, and can avoid the damage of the electrical performance detector 2 and the end face of the silicon rod 3 due to the excessive force caused by the collision.

[0078] In combination Figure 3As shown, the gimbal 1051 has a rotating end 1057, the rotating end 1057 of the gimbal 1051 extends into the connecting rod 1052 and is threadedly fitted with the connecting rod 1052, and the fixed end of the oil buffer 1053 is slidingly arranged in the connecting rod 1052. The gimbal knob 1056 is arranged on the gimbal 1051, the gimbal knob 1056 drives the rotating end 1057 of the gimbal 1051 to rotate, adjusts the lateral position of the connecting rod 1052, and then adjusts the damping of the gimbal 1051, and adjusts the support force of the fixed plate 102. When the damping of the gimbal 1051 increases, the support force of the fixed plate 102 increases, and the fixed plate 102 is more difficult to swing. Conversely, when the damping of the gimbal 1051 decreases, the support force of the fixed plate 102 decreases, and the fixed plate 102 is more likely to swing.

[0079] More specifically, the gimbal knob 1056 is connected with the rotating end 1057 of the gimbal 1051 through a pair of meshing bevel gears, and then can drive the rotating end 1057 of the gimbal 1051 to rotate. When the rotating end 1057 of the gimbal 1051 rotates, the connecting rod 1052 can be driven to move linearly because the rotating end 1057 of the gimbal 1051 is threadedly fitted with the connecting rod 1052.

[0080] In some embodiments, the connecting assembly 106 is a fixing assembly such as a connecting rope.

[0081] As an alternative embodiment, the connecting assembly 106 is an adjusting assembly, which can adjust the vertical position of the fixed plate 102 and the electrical performance detector 2. The side wall of the fixed plate 102 is provided with an opening 1021. In combination with the adjusting assembly, the opening 1021 can be used as a guide rail for the adjusting assembly. Figure 4 As shown, the connecting assembly 106 includes a threaded stud 1062 and a third spring 1063. The third spring 1063 is provided with at least one, the bottom end of the third spring 1063 is connected with the top end of the threaded stud 1062, and the top end of the third spring 1063 is connected with the top plate of the fixed frame 101. The threaded stud 1062 is provided with at least one, the bottom end of the threaded stud 1062 is threadedly fitted on the top wall of the fixed plate 102 and extends into the opening 1021, the threaded stud 1062 can be positively rotated and reversely rotated, the threaded stud 1062 is adjusted in extension and retraction when rotating, that is, the length of the threaded stud 1062 extending upward from the fixed plate 102 is adjusted, and then the elastic force of the third spring 1063 is adjusted, so that the fixed plate 102, the first spring 103 and the second spring 104 are kept in a proper position and the gravity is balanced.

[0082] In order to facilitate the installation and positioning of each stud 1062, a mounting groove is arranged on the top end face of the fixed plate 102, a connecting plate 1061 is arranged in the mounting groove, and the stud 1062 is arranged on the connecting plate 1061. The top end of the third spring 1063 is connected to a fixed seat 1064, and the fixed seat 1064 is connected to the top plate of the fixed frame 101. When assembling the connecting assembly 106, the bottom end of each stud 1062 can be positioned on the connecting plate 1061, the top end of each stud 1062 can be arranged on the fixed seat 1064, then the fixed seat 1064 is positioned with the fixed frame 101, and finally the connecting plate 1061 is positioned in the mounting groove of the fixed plate 102.

[0083] The specific embodiments of the utility model will be described in detail below in combination with the detection device of the second aspect of the utility model.

[0084] It should be noted that the detection device of the second aspect of the utility model is only a preferred embodiment of the utility model, and the detection device of the utility model can adopt the detection device of the second aspect of the utility model or other structures. In order to facilitate the description, the detection device of the second aspect of the utility model will be described in detail below.

[0085] In combination with Figures 1 to 7 The embodiment discloses a kind of detection device, including electrical performance detector 2 and floating mechanism 1. At least one vertical insulation plate 201 is arranged on the side wall corresponding to the floating mechanism 1 of fixed plate 102, and the insulation plate 201 is a non-metallic piece. Preferably, the insulation plate 201 is provided with a pair, and the electrical performance detector 2 is positioned between the two insulation plates 201.

[0086] The floating mechanism 1 is arranged on the moving truss or robot by the moving mechanism. The moving mechanism includes a linear module, allowing the floating mechanism 1 to move. The moving mechanism also includes a rotary cylinder, allowing the floating mechanism 1 to rotate.

[0087] The specific working process of the above detection device is as follows:

[0088] The silicon rod 3 is transported to the detection position by the conveying roller (or other conveying structure), and then stopped at the detection position.

[0089] The linear module drives the floating mechanism 1 to move to the detection position. When the detection end face of the electrical performance detector 2 contacts the end face of the silicon rod 3, the electrical performance detector 2 and the silicon rod 3 end face not parallel to each other begin to point contact, and the first spring 103 or the second spring 104 is compressed because the fixed plate 102 is pushed by the ball 1054 at the front end of the holder 1051 and begins to rotate. The fixed plate 102 and the electrical performance detector 2 are displaced, and the detection end face of the electrical performance detector 2 gradually changes to face contact with the end face of the silicon rod 3.

[0090] The detection end face of the electrical performance detector 2 gradually becomes parallel to the end face of the silicon rod 3, and the floating mechanism 1 is combined with the silicon rod 3. Figure 5 As shown, the reference surface of the fixed plate 102 is offset from the original position, and the spring (horizontal) side is compressed and the other side is stretched.

[0091] After the detection end face of the electrical performance detector 2 completely adheres to the end face of the silicon rod 3, the floating mechanism 1 stops moving, and the electrical performance detector starts detecting.

[0092] Obviously, the above embodiments are only examples for clearly illustrating, but not limit the embodiments. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A floating mechanism, characterized by, The utility model relates to a kind of electric performance detector fixing device, including: Fixed frame (101) with top plate and side plate; Fixed plate (102) with the spacing between the top plate and side plate of the fixed frame (101), the fixed plate (102) is suitable for connecting electric performance detector (2); Connecting assembly (106) is arranged between the top wall of the fixed plate (102) and the bottom wall of the top plate of the fixed frame (101), and the connecting assembly (106) is matched with the fixed frame (101) to balance the gravity of the fixed plate (102) and electric performance detector (2); Horizontal support assembly (105) is hinged to the middle of the side wall of the fixed plate (102) at one end, and is connected to the fixed frame (101) at the other end;When the end face of silicon rod (3) contacts with electric performance detector (2), the electric performance detector (2) and fixed plate (102) swing around the horizontal support assembly (105), so that the end face of silicon rod (3) is attached to the detection end face of electric performance detector (2).

2. The floating mechanism according to claim 1, characterized in that, Also including: Reset component is arranged between the fixed plate (102) and the fixed frame (101), and the reset component is suitable for automatically resetting the fixed plate (102) after swinging.

3. The floatation mechanism of claim 2, wherein, The reset component includes: At least one first spring group is connected between the upper part of the side wall of the fixed plate (102) and the side plate of the fixed frame (101), and each first spring group includes two first springs (103); At least one second spring group is connected between the lower part of the side wall of the fixed plate (102) and the side plate of the fixed frame (101), and each second spring group includes two second springs (104).

4. The float mechanism of claim 3, wherein, The first spring (103) and the second spring (104) are symmetrically arranged relative to the central axis of the horizontal support assembly (105);Two first springs (103) in each pair of first spring groups are symmetrically arranged relative to the vertical axis of the fixed plate (102);Two second springs (104) in each pair of second spring groups are symmetrically arranged relative to the vertical axis of the fixed plate (102).

5. A floating mechanism according to any one of claims 1-4, characterized in that The horizontal support assembly (105) includes: Holder (1051) is arranged on the side plate of the fixed frame (101); Connecting rod assembly is connected with the holder (1051); Rolling ball (1054) is connected with the end of the connecting rod assembly; Fixed shaft (1055) is arranged on the side wall of the fixed plate (102) and is arranged opposite to the connecting rod assembly, and the fixed shaft (1055) is provided with a groove relative to the end of the connecting rod assembly, and the rolling ball (1054) is arranged in the groove.

6. The float mechanism of claim 5, wherein, The connecting rod assembly is a telescopic connecting rod assembly, and the connecting rod assembly includes: Connecting rod (1052) is connected with the holder (1051); Oil pressure buffer (1053) is connected with the connecting rod (1052) at fixed end, and is connected with the rolling ball (1054) at telescopic end.

7. The float mechanism of claim 6, wherein, The holder (1051) has a rotating end (1057) which extends into the connecting rod (1052) and is screwed with the connecting rod (1052), and the fixed end of the oil buffer (1053) is fixedly arranged in the connecting rod (1052); The holder (1051) is provided with a holder knob (1056), the holder knob (1056) drives the rotating end (1057) of the holder (1051) to rotate, adjusts the lateral position of the connecting rod (1052), and adjusts the supporting force of the fixed plate (102).

8. The floating mechanism according to any one of claims 1 to 4, characterized in that The side wall of the fixed plate (102) is provided with an opening (1021); The connecting assembly (106) can adjust the vertical position of the fixed plate (102) and the electrical performance detector (2), and the connecting assembly (106) comprises: At least one third spring (1063) is connected with the bottom end of the stud (1062) and the top end of the fixed frame (101); At least one stud (1062) is screwed on the top wall of the fixed plate (102) and extends into the opening (1021), and the stud (1062) is adjusted in extension and retraction when rotated, so as to adjust the elastic force of the third spring (1063).

9. The floatation mechanism of claim 8, wherein, The top surface of the fixed plate (102) is provided with a mounting groove, the mounting groove is provided with a connecting plate (1061), and the stud (1062) is arranged in the connecting plate (1061); And / or, the top end of the third spring (1063) is connected with the fixed seat (1064), and the fixed seat (1064) is connected with the top plate of the fixed frame (101).

10. A detection device, characterized in that It comprises: The floating mechanism (1) of any one of claims 1-9; The electrical performance detector (2) is arranged on the fixed plate (102) of the floating mechanism by at least one insulating plate (201).

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