Positioning mechanism of objective table for chip testing

Abstract

The utility model belongs to the technical field of chip testing, and particularly relates to a positioning mechanism of an objective table for chip testing, which comprises an objective table main body and a chip main body, the top of the chip main body is mounted through a clamping mechanism, the clamping mechanism comprises two moving tables positioned on the inner side of the top of the objective table main body, and the moving tables are in sliding connection with the objective table main body. L-shaped moving seats are arranged at the two ends of the top of the moving table. According to the utility model, the contact area with the chip main body can be reduced through the balls, so that the risk of abrasion and damage of the chip main body is effectively reduced. In the positioning process, the balls not only can roll on the chip main body, but also can be lubricated by chip lubricating liquid when being in contact with the chip main body, so that the possibility of abrasion and damage of the chip main body is further reduced. Therefore, the contact area is reduced, the friction force is reduced, meanwhile, an effective lubricating effect is provided, and the quality and the reliability of the chip are ensured.

Description

TECHNICAL FIELD

[0001] The utility model belongs to chip test technical field, concretely relates to a positioning mechanism of object table for chip test. BACKGROUND

[0002] When the chip production is completed, it usually needs to test, to detect manufacturing defects, circuit connection problem, voltage leakage potential problems, such as to ensure the quality and reliability of chip. In order to achieve this goal, usually use chip testing device, and install object table on chip testing device. Object table is equipped with chip positioning mechanism, its main function is to ensure that the chip sample is accurately positioned and kept in the correct position, so as to carry out various test and evaluation operation. This positioning mechanism plays a vital role, helps to ensure the accuracy and consistency of the test process, so as to ensure that the performance and quality of chip reach the expected standard;

[0003] However, the positioning mechanism of the existing object table for chip test usually has a serious problem, that is, when positioning the chip, the contact area between the parts on the positioning mechanism and the chip is large. This large area of contact leads to significant increase in friction, which causes excessive wear and damage. This friction problem not only increases the cost and resource waste in the production process, but also poses a potential threat to the quality and reliability of the chip body. SUMMARY

[0004] The utility model aims at providing a positioning mechanism of object table for chip test, which can reduce friction when positioning the chip and ensure the quality and reliability of the chip.

[0005] The technical scheme adopted by the utility model is as follows:

[0006] A positioning mechanism of object table for chip test, comprising an object table body and a chip body mounted on the top of the object table body through a clamping mechanism, the clamping mechanism comprising two moving tables located on the inner side of the top of the object table body, and the moving tables are in sliding connection with the object table body, the top of each moving table is provided with an L-shaped moving seat, the L-shaped moving seats on the two moving tables are symmetrically arranged, and the four L-shaped moving seats are respectively located at the bottom side positions of the four end corners of the chip body.

[0007] The top of each L-shaped moving seat is fixedly provided with two supporting columns, and the top of each supporting column is provided with a working box, and every two adjacent working boxes are respectively located on the two sides of the end corner position of the chip body.

[0008] The corner positions of the inside of the working box and the top of the L-shaped moving seat are provided with rectangular boxes, the rectangular box in the inside of the working box is in sliding connection with the working box, the rectangular box on the top of the L-shaped moving seat is in fixed connection with the L-shaped moving seat, the rectangular box in the inside of the working box is horizontally arranged, the rectangular box on the top of the L-shaped moving seat is vertically arranged, and four vertically arranged rectangular boxes are respectively arranged at the bottom positions of the four end corners of the chip main body, and every two adjacent horizontally arranged rectangular boxes are respectively arranged at the two sides of the end corner of the chip main body.

[0009] The end of the rectangular box close to the chip main body is provided with a ball, the inside of the rectangular box is provided with chip lubricating liquid, and the ball is in abutment with the chip main body, and a spring is arranged between the rectangular box in the inside of the working box and the working box.

[0010] The inside of the objective table main body is provided with a first bidirectional screw rod, two moving tables are respectively arranged at the outer sides of the two ends of the first bidirectional screw rod, and the first bidirectional screw rod is in threaded connection with the moving tables, when the first bidirectional screw rod is rotated, the two moving tables can move in the directions of moving away from or moving close to each other at the outer sides of the first bidirectional screw rod.

[0011] The moving table is provided with a second bidirectional screw rod, two L-shaped moving seats close to the second bidirectional screw rod are respectively arranged at the outer sides of the two ends of the second bidirectional screw rod, and the second bidirectional screw rod is in threaded connection with the L-shaped moving seats, when the second bidirectional screw rod is rotated, the two L-shaped moving seats at the outer sides of the second bidirectional screw rod move in the directions of moving away from or moving close to each other.

[0012] The utility model discloses the technical effect achieved is:

[0013] The utility model discloses, through the ball, the contact area with chip main body can be reduced, thereby effectively reduce the risk of chip main body wear and damage. In the positioning process, the ball can not only roll on the chip main body, but also can be applied chip lubricating liquid to lubricate when contacting with the chip main body, further reducing the possibility of wear and damage of the chip main body. Thus, the contact area is reduced, the friction is reduced, and effective lubrication is provided, ensuring the quality and reliability of the chip. ACCURACY OF DRAWINGS

[0014] Figure 1 It is the structure schematic diagram of the utility model discloses;

[0015] Figure 2 It is the explosion drawing of the top of the objective table main body in the utility model discloses;

[0016] Figure 3 It is the structure schematic diagram of the top of the moving table in the utility model discloses;

[0017] Figure 4It is the sectional view of the rectangular box inside the utility model;

[0018] Figure 5 It is the sectional view of the working box inside the utility model.

[0019] In the drawings, the component list represented by each sign is as follows:

[0020] 1, stage main body; 2, first two-way threaded rod; 3, moving table; 4, second two-way threaded rod; 5, L-shaped moving seat; 6, rectangular box; 7, ball; 8, working box; 9, spring; 10, guide rod; 11, limit plate; 12, plug; 13, support column. DETAILED DESCRIPTION

[0021] In order to make the purpose and advantages of the utility model more clear and apparent, the utility model is specifically described below in combination with examples. It should be understood that the following text is only used to describe one or several specific embodiments of the utility model, and does not strictly limit the protection scope specifically requested by the utility model.

[0022] As Figures 1-5 Indicated, a kind of positioning mechanism of stage for chip testing, including installation in chip testing device stage main body 1, the outside of four end corners of stage main body 1 is fixed with mounting plate, and mounting plate is opened with one mounting hole.

[0023] When using, can be fixed in the specified position of chip testing device by bolt passing through mounting hole with stage main body 1;

[0024] The top of stage main body 1 is equipped with chip main body by clamping mechanism, and clamping mechanism includes two moving tables 3 in the inside of the top of stage main body 1, and moving table 3 is slidably connected with stage main body 1, and the top of moving table 3 is equipped with L-shaped moving seat 5 at both ends, and the L-shaped moving seat 5 on two moving tables 3 is symmetrically arranged, and four L-shaped moving seats 5 are respectively located at the bottom side position of four end corners of chip main body;

[0025] Referring to the attached Figure 4 And the attached Figure 5 , the top of L-shaped moving seat 5 is fixed with two support columns 13, and the top of support column 13 is equipped with working box 8, and the included angle between every two adjacent working boxes 8 is 90 degrees, and every two adjacent working boxes 8 are respectively located at the two sides of end corner position of chip main body;

[0026] The inside of the working box 8 and the corner position of the top of the L-shaped moving seat 5 are provided with rectangular boxes 6, the rectangular box 6 in the inside of the working box 8 is in sliding connection with the working box 8, the rectangular box 6 in the top of the L-shaped moving seat 5 is in fixed connection with the L-shaped moving seat 5, the rectangular box 6 in the inside of the working box 8 is horizontally arranged, the rectangular box 6 in the top of the L-shaped moving seat 5 is vertically arranged, meanwhile, the rectangular box 6 in the inside of the working box 8 is higher than the rectangular box 6 in the top of the L-shaped moving seat 5, four vertically arranged rectangular boxes 6 are respectively arranged at the bottom of the four end corners of the chip main body, and every two adjacent horizontally arranged rectangular boxes 6 are respectively arranged at the two sides of the end corner of the chip main body;

[0027] Referring to the drawings Figure 4 The end of the rectangular box 6 close to the chip main body is provided with a movable groove, the inner side of the movable groove is provided with a ball 7, the ball 7 is in contact with the chip main body, and the rectangular box 6 in the inside of the working box 8 is provided with a spring 9 between the rectangular box 6 and the working box 8;

[0028] According to the above structure, when the chip main body needs to be positioned, the chip main body can be held and moved towards the direction close to the L-shaped moving seat 5, so that the four end corners of the chip main body are respectively arranged on the four vertically arranged rectangular boxes 6. At this time, the balls 7 on the four vertically arranged rectangular boxes 6 support the four end corners of the chip main body. In this process, the two sides of the four end corners of the chip main body are in contact with the balls 7 on every two adjacent horizontally arranged rectangular boxes 6. In the contact process, the balls 7 roll on the chip main body, so that the friction between the balls 7 and the chip main body can be reduced. At this time, the spring 9 is forced to contract, and the rectangular box 6 can be slid to the inside of the working box 8. When the four end corners of the chip main body are respectively arranged on the four vertically arranged rectangular boxes 6, the balls 7 on every two adjacent horizontally arranged rectangular boxes 6 can always be in abutment with the end corners of the chip main body through the elastic property of the spring 9, so that the chip main body can only be moved towards the direction away from the L-shaped moving seat 5, thereby realizing the positioning of the chip main body;

[0029] Referring to the drawings Figure 5 In order to reduce the excessive abutment of the balls 7 on the horizontally arranged rectangular boxes 6 and the end corners of the chip main body, a guide rod 10 is fixed at the end of the horizontally arranged rectangular box 6 away from the ball 7 and inside the spring 9, the guide rod 10 is in sliding connection with the working box 8, the end of the guide rod 10 away from the rectangular box 6 is fixed with a limiting plate 11, and the abutment degree of the rectangular box 6 and the end corner of the chip main body can be limited through the limiting plate 11 and the guide rod 10;

[0030] Referring to the drawings Figure 4 In order to further reduce the friction between the ball 7 and the chip main body, a liquid storage groove is arranged in the inside of the rectangular box 6, the chip lubricating liquid is stored in the liquid storage groove, the liquid storage groove is communicated with the movable groove, and part of the ball 7 is soaked in the chip lubricating liquid;

[0031] According to the above structure, in order to further reduce the friction between the ball 7 and the chip body, a liquid storage tank is arranged in the rectangular box 6, and the liquid storage tank is filled with chip lubricating liquid, and the liquid storage tank is communicated with the movable groove, so that part of the area of the ball 7 is soaked in the chip lubricating liquid.

[0032] When the ball 7 rolls on the chip body, part of the area soaked in the chip lubricating liquid will contact the body, thereby providing lubrication and further reducing the friction between the ball 7 and the chip body. This design effectively reduces the friction and improves the performance of the mechanism.

[0033] Referring to the accompanying drawings Figures 3-5 In addition, the rectangular box 6 is made of transparent material, such as glass, acrylic, polycarbonate, fluorinated polymer, etc. The remaining situation of the chip lubricating liquid in the rectangular box 6 can be directly and clearly observed through the material. If the chip lubricating liquid is low, the ball 7 does not contact the chip lubricating liquid, and the chip lubricating liquid can be injected into the interior of the rectangular box 6.

[0034] Referring to the accompanying drawings Figure 4 In order to facilitate the injection of chip lubricating liquid into the interior of the rectangular box 6, a liquid injection hole is provided on the rectangular box 6, and a plug 12 is arranged in the liquid injection hole. The plug 12 can be made of elastic material such as silica gel or latex. After injecting the chip lubricating liquid into the interior of the rectangular box 6 through the liquid injection hole, the plug 12 can be inserted into the liquid injection hole. At this time, the plug 12 is deformed under stress, which can block the liquid injection hole to prevent the chip lubricating liquid from flowing out.

[0035] Referring to the accompanying drawings Figures 1-3 Since the size of the chip body can be different, a first bidirectional threaded rod 2 is arranged in the interior of the object table body 1, and the two ends of the first bidirectional threaded rod 2 respectively penetrate the interiors of the two moving tables 3, and the moving tables 3 are threadedly connected with the first bidirectional threaded rod 2.

[0036] When the first bidirectional threaded rod 2 is rotated, the two moving tables 3 can move away from or close to each other on the outside of the first bidirectional threaded rod 2, so as to adjust the distance between the two moving tables 3 to adapt to chip bodies of different widths.

[0037] Meanwhile, a second bidirectional threaded rod 4 is arranged on the moving table 3, and two L-shaped moving seats 5 close to the second bidirectional threaded rod 4 are respectively located on the outside of the two ends of the second bidirectional threaded rod 4, and the second bidirectional threaded rod 4 is threadedly connected with the L-shaped moving seats 5.

[0038] When the second bidirectional threaded rod 4 is rotated, the two L-shaped moving seats 5 on the outside of the second bidirectional threaded rod 4 move away from or close to each other, so as to adjust the distance between the two L-shaped moving seats 5 on the moving table 3 to adapt to chip bodies of different lengths.

[0039] In order to facilitate the rotation of the first bidirectional threaded rod 2 or the second bidirectional threaded rod 4, one end of the first bidirectional threaded rod 2 and the second bidirectional threaded rod 4 is fixed with a handle, so that the first bidirectional threaded rod 2 or the second bidirectional threaded rod 4 can be easily rotated;

[0040] Referring to the drawings Figure 2 In order to reduce the rotation phenomenon of the L-shaped moving seat 5 when the second bidirectional threaded rod 4 rotates, the bottom of the L-shaped moving seat 5 is fixed with a dovetail sliding block, and the top of the moving table 3 is provided with a dovetail sliding groove matched with the dovetail sliding block. The sliding connection between the L-shaped moving seat 5 and the moving table 3 is realized through the setting of the dovetail sliding block and the dovetail sliding groove, which makes the L-shaped moving seat 5 guided by the dovetail sliding block and the dovetail sliding groove when moving, so that it can only move horizontally, effectively preventing the displacement or rotation phenomenon of the L-shaped moving seat 5 when moving;

[0041] In order to reduce the rotation phenomenon of the moving table 3 when the first bidirectional threaded rod 2 rotates, the two ends of the moving table 3 are fixed with rectangular plates, and the inside of the object table main body 1 is provided with rectangular sliding grooves matched with the rectangular plates. The sliding connection between the moving table 3 and the object table main body 1 is realized through the setting of the rectangular plates and the rectangular sliding grooves, which makes the moving table 3 guided by the rectangular plates and the rectangular sliding grooves when moving, so that it can only move horizontally, effectively preventing the displacement or rotation phenomenon of the moving table 3 when moving;

[0042] Referring to the drawings Figure 5 In addition, the top of the working box 8 is provided with an observation slot, and the plug 12 is located in the inside of the observation slot. The condition of the chip lubricating liquid in the rectangular box 6 can be directly and clearly observed through the observation slot, and the chip lubricating liquid can be injected into the inside of the horizontally arranged rectangular box 6 without disassembling the working box 8, so that the operation is more convenient and visualized.

[0043] The utility model discloses, through the contact area of ball 7 can reduce with chip main part, thereby effectively reduced the risk of chip main part wear and damage. In the positioning process, ball 7 can not only roll on chip main part, but also can be applied chip lubricating liquid to lubricate when contacting with chip main part, further reduce the possibility of chip main part wear and damage. Thus realize to reduce the contact area, reduce friction, simultaneously provide effective lubricating effect, ensure the quality and reliability of chip.

[0044] The above is only the preferred embodiment of the utility model, it should be pointed out, for ordinary skilled person in the art, without departing from the principle of the utility model, under the premise of, can make a number of improvements and refinements, these improvements and refinements also should be regarded as the protection scope of the utility model. The structure, device and operation method not specifically described and explained in the utility model, if no special description and limitation, all are carried out according to the conventional means of the field.

Claims

1. A positioning mechanism of a stage for testing a chip, comprising a stage main body (1) and a chip main body mounted on the top of the stage main body by a clamping mechanism, characterized in that: The clamping mechanism comprises two moving tables (3) on the inner side of the top of the object table body (1), and the moving tables (3) are in sliding connection with the object table body (1), the top of the moving table (3) is provided with an L-shaped moving seat (5) at both ends, the L-shaped moving seats (5) on the two moving tables (3) are symmetrically arranged, and the four L-shaped moving seats (5) are respectively located at the bottom side positions of the four end corners of the chip body. The top of the L-shaped moving seat (5) is fixedly provided with two supporting columns (13), and the top of the supporting column (13) is provided with a working box (8), and every two adjacent working boxes (8) are respectively located at the two sides of the end corner position of the chip body. The inside of the working box (8) and the corner position of the top of the L-shaped moving seat (5) are provided with a rectangular box (6), the rectangular box (6) in the working box (8) is in sliding connection with the working box (8), the rectangular box (6) on the top of the L-shaped moving seat (5) is in fixed connection with the L-shaped moving seat (5), the rectangular box (6) in the working box (8) is horizontally arranged, the rectangular box (6) on the top of the L-shaped moving seat (5) is vertically arranged, and the four vertically arranged rectangular boxes (6) are respectively located at the bottom positions of the four end corners of the chip body. The rectangular box (6) is provided with a ball (7) at one end close to the chip body, the inside of the rectangular box (6) contains chip lubricating liquid, and the ball (7) is in abutment with the chip body.

2. The positioning mechanism of a wafer stage for testing a chip according to claim 1, wherein: The inside of the working box (8) is provided with a first bidirectional threaded rod (2), and the two moving tables (3) are respectively located at the outer sides of the two ends of the first bidirectional threaded rod (2), and the first bidirectional threaded rod (2) is in threaded connection with the moving table (3), when the first bidirectional threaded rod (2) is rotated, the two moving tables (3) can move in the direction of moving away from or moving close to each other on the outer side of the first bidirectional threaded rod (2).

3. The positioning mechanism of a wafer stage for testing a chip according to claim 1, wherein: The moving table (3) is provided with a second bidirectional threaded rod (4), and the two L-shaped moving seats (5) close to the second bidirectional threaded rod (4) are respectively located at the outer sides of the two ends of the second bidirectional threaded rod (4), and the second bidirectional threaded rod (4) is in threaded connection with the L-shaped moving seat (5), when the second bidirectional threaded rod (4) is rotated, the two L-shaped moving seats (5) on the outer side of the second bidirectional threaded rod (4) move in the direction of moving away from or moving close to each other.

4. The positioning mechanism of a wafer stage for testing a chip according to claim 1, wherein: The rectangular box (6) is provided with a liquid injection hole, and the inside of the liquid injection hole is provided with a plug (12).

5. The positioning mechanism of a wafer stage for testing a chip according to claim 1, wherein: The end of the horizontally arranged rectangular box (6) away from the ball (7) and located on the inner side of the spring (9) is fixedly provided with a guide rod (10), the guide rod (10) is in sliding connection with the working box (8), and the end of the guide rod (10) away from the rectangular box (6) is fixedly provided with a limiting plate (11).

6. The positioning mechanism of a wafer stage for testing a chip according to claim 1, wherein: The top of the working box (8) is provided with an observation groove, and the plug (12) on the rectangular box (6) in the working box (8) is located on the inner side of the observation groove.

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