Slit device and photoetching system

Abstract

The utility model relates to the technical field of photoetching, and discloses a slit device and a photoetching system, and the slit device comprises a base and a blade assembly. The blade assembly comprises a first blade and a second blade which are vertically connected. The number of the blade assemblies is two, and each blade assembly is movably connected to the base in the first direction and the second direction. The two first blades and the two second blades define a size-adjustable rectangular slit window, and an included angle is formed between the first direction and the second direction. The two blade assemblies are arranged on the base, each blade assembly comprises the first blade and the second blade which are perpendicularly connected, the first blade and the second blade move at the same time, the perpendicularity of every two adjacent blades can be guaranteed all the time, and the perpendicularity among the four blades is facilitated; the rectangular slit window defined by the two first blades and the two second blades is smaller in parallelism and perpendicularity error, and the accuracy of the rectangular slit window is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of photoetching technology, especially slit device and photoetching system. BACKGROUND

[0002] Due to the development of large scale integrated circuit, photoetching technology gradually transits from contact exposure to projection exposure, accompanied by gradually increasing photoetching resolution, and the numerical aperture of exposure system is also increasing, which makes the manufacture of photoetching projection objective lens more and more complex. In order to reduce the design difficulty of photoetching projection objective lens, modern photoetching system generally adopts step scanning mode, and the exposure system adjusts the size of slit through movable knife edge device.

[0003] In the prior art, four blades are usually combined to form a rectangular slit, and the four blades are driven to move in vertical and horizontal directions by separate driving mechanisms. When the blades run at high speed, the movement of the blades is unstable, the accuracy of the rectangular window formed is not high, the parallelism and perpendicularity are poor, which seriously affects the subsequent exposure, and each blade moves separately, so multiple driving mechanisms are needed, which occupies a large space.

[0004] Therefore, it is urgent to provide a slit device and a photoetching system to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a slit device and a photoetching system to solve the technical problems of low accuracy, poor parallelism and perpendicularity, and large space occupation of the slit window in the prior art.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] On the one hand, a slit device is provided, which comprises:

[0008] a base;

[0009] a blade assembly comprising a first blade and a second blade connected vertically;

[0010] The blade assembly is provided with two groups, and each group of the blade assembly is movably connected to the base in a first direction and a second direction; the first blade and the second blade of the two groups of blade assemblies surround to form a rectangular slit window with adjustable size;

[0011] Wherein, the first direction and the second direction are arranged at an angle.

[0012] Optionally, the slit device further comprises two groups of moving assemblies, and the two groups of moving assemblies are arranged one by one corresponding to the two groups of blade assemblies; the moving assembly comprises:

[0013] A first guide rail is arranged on the base, and a first moving part is arranged on the first guide rail and is movably arranged on the first guide rail in a first direction.

[0014] A second guide rail is arranged on the first moving part, and the blade assembly is movably arranged on the second guide rail in a second direction.

[0015] Optionally, each moving assembly includes two first guide rails, and the moving assembly further includes a first placement plate connected to the first moving parts of the two first guide rails, and the second guide rail is arranged on the first placement plate.

[0016] Optionally, a blade placement plate is arranged on the second guide rail, the blade placement plate is movably arranged on the second guide rail in the second direction, and one of the first blade and the second blade is connected to the blade placement plate.

[0017] Optionally, the moving assembly further includes a first driving part and a second driving part.

[0018] The first driving part is arranged on the base and connected to the first placement plate at one end to drive the first placement plate to move along the first guide rail.

[0019] The second driving part is arranged on the first placement plate and connected to the blade assembly at one end to drive the blade assembly to move along the second guide rail.

[0020] Optionally, the slit device further includes a first position detection assembly and a second position detection assembly, the first position detection assembly is used to detect the position of the blade assembly in the first direction, and the second position detection assembly is used to detect the position of the blade assembly in the second direction.

[0021] Optionally, the slit device further includes a first limiting assembly and a second limiting assembly.

[0022] The first limiting assembly includes a first limiting part and a second limiting part, the first limiting part and the second limiting part are arranged on the base in the first direction, and the first placement plate is movably arranged between the first limiting part and the second limiting part.

[0023] The second limiting assembly is provided with a third limiting part and a fourth limiting part, the third limiting part and the fourth limiting part are arranged on the first placement plate in the second direction, and the blade assembly is movably arranged between the third limiting part and the fourth limiting part.

[0024] Optionally, a light-transmitting hole is formed in the middle of the base, and the two groups of blade assemblies are centrally symmetrically arranged about the light-transmitting hole.

[0025] Optionally, the slit device further comprises a buffer member.

[0026] One of the two first blades in the two groups of blade assemblies is provided with the buffer member towards one side of the other;

[0027] And / or, one of the two second blades in the two groups of blade assemblies is provided with the buffer member towards one side of the other.

[0028] In another aspect, a photoetching system is provided, comprising the above slit device.

[0029] The beneficial effects of the present application are as follows:

[0030] The slit device provided by the present application comprises two groups of blade assemblies, each blade assembly comprises a first blade and a second blade which are vertically connected, and the first blade and the second blade on each blade assembly move simultaneously, which can always ensure the perpendicularity of adjacent two blades, and is beneficial to the perpendicularity between the four blades, so that the parallelism and perpendicularity error of the rectangular slit window surrounded by the two first blades and the two second blades are smaller, and the accuracy of the rectangular slit window is improved.

[0031] The photoetching system provided by the present application can reduce the interference of stray light in the optical path, reduce the pattern distortion, and significantly improve the photoetching accuracy and photoetching yield. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the description of the embodiments of the present application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the contents of the embodiments of the present application and the drawings.

[0033] Figure 1 is a front view of the slit device provided by the present application;

[0034] Figure 2 is Figure 1 is an enlarged view of A in FIG.

[0035] Figure 3 is Figure 1 is an enlarged view of B in FIG.

[0036] Figure 4 is a structural schematic view of the slit device provided by the present application;

[0037] Figure 5 is Figure 4 is an enlarged view of C in figure 1;

[0038] Figure 6 is an exploded view of the slit device provided by the present application.

[0039] In the figure:

[0040] 1, base; 11, groove; 12, light transmission hole;

[0041] 2, blade assembly; 21, first blade; 22, second blade;

[0042] 3, moving assembly; 31, first guide rail; 311, first moving piece; 32, second guide rail; 321, blade placement plate; 33, first placement plate;

[0043] 4, first driving piece; 41, fixed support; 42, ball screw; 43, servo motor; 44, shaft coupling; 45, locking nut;

[0044] 5, second driving piece; 51, connecting bracket; 52, tension spring support column; 53, fixed block;

[0045] 61, grating ruler; 62, reading head;

[0046] 7, first limiting assembly; 71, first limiting piece; 72, second limiting piece;

[0047] 8, second limiting assembly; 81, third limiting piece; 82, fourth limiting piece;

[0048] 9, light shielding piece; 10, buffer piece. DETAILED DESCRIPTION

[0049] In order to make the technical problems solved by the present application, the technical scheme adopted and the technical effects achieved more clear, the technical scheme of the present application will be further described below in conjunction with the accompanying drawings and through specific embodiments. It can be understood that the specific embodiments described herein are only used to explain the present application, and not to limit the present application. In addition, it should be noted that, in order to facilitate the description, only the parts related to the present application are shown in the drawings, not all.

[0050] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element indicated must have a particular orientation, a particular orientation and operation, therefore cannot be understood as the limitation of the utility model. In addition, the term "first", "second" is only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0051] In the description of the utility model, it needs to explain, unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixed connection, can also be detachable connection, can be mechanical connection, can also be electrical connection, can be directly connected, can also be indirectly connected through intermediate medium, can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0052] The utility model discloses a kind of slit devices, as shown in Figure 1 And Figure 6 The slit device includes base 1 and blade assembly 2. Blade assembly 2 includes vertically connected first blade 21 and second blade 22. Blade assembly 2 is provided with two groups, and each blade assembly 2 can be movably connected to base 1 in the first direction and the second direction. The first blade 21 and the second blade 22 of the two groups of blade assembly 2 are surrounded to form a rectangular slit window with adjustable size.

[0053] It can be understood that the slit device provided by the utility model, by setting two groups of blade assembly 2 on the base 1, each blade assembly 2 includes vertically connected first blade 21 and second blade 22, and the first blade 21 and the second blade 22 on each blade assembly 2 move simultaneously, which can always ensure the perpendicularity of adjacent two blades, which is beneficial to the perpendicularity between the four blades, so that the parallelism and perpendicularity error of the rectangular slit window formed by the two first blades 21 and the two second blades 22 is smaller, which improves the accuracy of the rectangular slit window, and each blade assembly 2 only needs to be provided with a set of moving device, compared with the prior art, four moving devices are provided to realize the movement of each blade in the vertical direction and the horizontal direction, which greatly reduces the setting of the moving device, and the structure is more compact.

[0054] Specifically, in the embodiment, as Figure 6The first direction is the X direction, the second direction is the Y direction, and the Z direction is perpendicular to the X direction and the Y direction. The first blade 21 is arranged perpendicular to the X direction, and the second blade 22 is arranged perpendicular to the Y direction. The first blade 21 and the second blade 22 are connected perpendicularly to form an L shape. The first blade 21 and the second blade 22 can move simultaneously along the X direction and simultaneously along the Y direction. In this way, only one pair of first blades 21 and one pair of second blades 22 need to be arranged in parallel in the two L-shaped blade assemblies 2 during installation of the overall structure to ensure that the rectangular slit window has smaller parallelism and perpendicularity errors and improves the accuracy of the rectangular slit window. Since the blades need to withstand high thermal loads due to light exposure, the blade material must have high elastic modulus, low linear thermal expansion coefficient, and high thermal conductivity. In some embodiments, the first blade 21 and the second blade 22 are composed of metal or ceramic materials, such as titanium alloy, silicon carbide ceramic, etc.

[0055] More specifically, the connection between the first blade 21 and the second blade 22 includes but is not limited to bonding, screw connection, etc.

[0056] Further, the distance between the first blade 21 and the second blade 22 is 0.1 mm, which ensures that the first blade 21 and the second blade 22 do not wear each other during movement. Specifically, in this embodiment, as shown in Figure 6 The first blade 21 is fixedly connected to the second blade 22 by screws, and the distance between the lower surface of the first blade 21 and the upper surface of the second blade 22 is 0.1 mm.

[0057] In some embodiments, in order to ensure the gap between the first blade 21 and the second blade 22, one of the first blade 21 and the second blade 22 is provided with a gasket roll on the side close to the other. By selecting gaskets of different thicknesses, the gap size of the first blade 21 and the second blade 22 can be adjusted.

[0058] Further, referring to Figure 1 and Figure 6 The slit device further comprises two sets of moving assemblies 3, which are arranged one-to-one corresponding to the two sets of blade assemblies 2. The moving assembly 3 comprises a first guide rail 31 and a second guide rail 32. The first guide rail 31 is arranged on the base 1, and the first guide rail 31 is provided with a first moving part 311 movably arranged thereon along the first direction. The second guide rail 32 is arranged on the first moving part 311, and the blade assembly 2 is movably arranged on the second guide rail 32 along the second direction.

[0059] In this embodiment, as shown in Figure 1 and Figure 6As shown, the first guide rail 31 in each of the two sets of moving assemblies 3 is arranged along the X direction on the base 1, the first moving piece 311 is a slider arranged on the first guide rail 31, two sliders are arranged at intervals and can move along the X direction on the first guide rail 31, thereby driving the second guide rail 32 arranged on the slider to move along the X direction. Such arrangement can realize simultaneous movement of the first blade 21 and the second blade 22 along the X direction and simultaneous movement along the Y direction, and only the movement precision between the two blade assemblies 2 needs to be ensured, and compared with the independent movement of the four blades, the precision of the rectangular slit window is easier to ensure.

[0060] Further, in order to ensure the stability of the blade assembly 2 during movement, referring to Figure 6 each set of moving assemblies 3 includes two first guide rails 31, and the moving assembly 3 further includes a first placement plate 33 arranged on the two first moving pieces 311, and the first placement plate 33 is provided with the second guide rail 32.

[0061] In the embodiment, as shown in Figure 6 two first guide rails 31 are arranged in each set of moving assemblies 3, the two first guide rails 31 are arranged in parallel along the X direction, a first placement plate 33 is arranged above the two first guide rails 31, and the first placement plate 33 can move along the X direction under the driving of the first moving piece 311 arranged on the two first guide rails 31. The arrangement of the two first guide rails 31 and the first placement plate 33 can better share the load borne by the first guide rail 31, improve the precision and stability of the movement of the second guide rail 32 along the first guide rail 31 under the driving of the first placement plate 33, and can also absorb the vibration generated during movement, thereby further ensuring the precision of the blade assembly 2 arranged on the second guide rail 32 during movement.

[0062] Further, in order to ensure the stable connection between the blade assembly 2 and the second guide rail 32, a blade placement plate 321 is arranged on the second guide rail 32, the blade placement plate 321 is movably arranged on the second guide rail 32 along the second direction, and one of the first blade 21 and the second blade 22 is connected with the blade placement plate 321.

[0063] In some specific embodiments, as shown in Figure 6 a blade placement plate 321 is arranged on the second guide rail 32, the second blade 22 is fixed on the blade placement plate 321 by screws, and the second guide rail 32 is a wide-width slide rail, which has the advantages of high-precision positioning and low friction coefficient, and can further improve the stability of the blade assembly 2 during movement.

[0064] In some embodiments, a positioning boss with a small height, such as 1 mm, is arranged on the blade placement plate 321. The positioning boss is rectangular and can match the shape of the blade assembly 2, which is beneficial for the installation and positioning of the blade assembly 2. Meanwhile, the size of the finished surface of the blade placement plate 321 can be reduced, and the processing cost can be reduced.

[0065] In some embodiments, a plurality of reinforcing ribs are arranged on the blade placement plate 321 to improve the structural strength and rigidity of the blade placement plate 321, which can reduce the vibration of the blade assembly 2 during movement, ensure the movement accuracy of the blade assembly 2, and facilitate the stability of the blade assembly 2 during movement.

[0066] Further, the slit device further comprises a first driving member 4 and a second driving member 5. The first driving member 4 is arranged on the base 1 and connected to the first placement plate 33 at one end to drive the first placement plate 33 to move along the first guide rail 31. The second driving member 5 is arranged on the first placement plate 33 and connected to the blade assembly 2 at one end to drive the blade assembly 2 to move along the second guide rail 32.

[0067] Specifically, in the present embodiment, as shown in Figure 2 the first driving member 4 and the second driving member 5 each comprise a fixed support 41, a ball screw 42, a servo motor 43, a coupling 44, and a locking nut 45. The ball screw 42 and the servo motor 43 are arranged on the fixed support 41. The ball screw 42 is locked with the bearing connected to the fixed shaft through the locking nut 45. The output shaft of the servo motor 43 is connected to the screw shaft of the ball screw 42 through the coupling 44. When the servo motor 43 rotates, the screw shaft of the ball screw 42 can rotate through the coupling 44, so that the nut of the ball screw 42 can move axially relative to the screw shaft. The movement of the blade is driven by the ball screw 42 cooperating with the servo motor 43, which can realize power-off protection and prevent the blade from falling and colliding due to power failure, thereby preventing damage to the blade. Compared with the traditional linear motor driving mode, the additional gravity compensation device is not needed to prevent the falling of the power-off blade, a large amount of installation space is saved, and the layout is reasonable and simple, and the control is also simple.

[0068] More specifically, a groove 11 is formed between the two first guide rails 31 along the X direction on the base 1, and the first driving member 4 is arranged in the groove 11. In this way, sufficient accommodation space is provided for the first driving member 4, which ensures that the first placement plate 33 on the first guide rail 31 is connected to the nut of the ball screw 42 of the first driving member 4 and can be placed on the two first guide rails 31 at the same time, thereby ensuring the stable movement of the first placement plate 33.

[0069] Further, as shown in Figure 2 and Figure 6As shown, in order to better utilize the space on the first placement plate 33, the second driving member 5 is arranged on the first placement plate 33 and parallel to the second guide rail 32 away from the other moving assembly 3, and the blade placement plate 321 is connected to the nut of the ball screw 42 of the second driving member 5 through the connecting bracket 51. In this way, the structure is reasonable, and a larger adjustable range can be provided for the rectangular slit window.

[0070] Further, in order to avoid collision with external components when adjusting the blade assembly 2 to increase the rectangular slit window along the X direction, the second driving member 5 is provided with a tension spring support 52 away from the other second driving member 5. Preferably, two tension spring supports 52 are arranged along the Y direction, and the fixed block 53 is arranged on the side of the fixed support 41 close to the servo motor 43, one of the tension spring supports 52 is arranged on the connecting bracket 51, and the other tension spring support 52 is arranged on the fixed block 53.

[0071] Further, the slit device further comprises a first position detection assembly and a second position detection assembly, the first position detection assembly is used for detecting the position of the blade assembly 2 in the first direction, and the second position detection assembly is used for detecting the position of the blade assembly 2 in the second direction.

[0072] Specifically, as shown in Figure 4 and Figure 5 In this embodiment, the movement of the blade assembly 2 is detected by the grating ruler 61 and the reading head 62, the grating ruler 61 is arranged on the first placement plate 33 in a manner of adhesion or screw connection, and can move along the X direction with the first placement plate 33, and the reading head 62 is fixedly arranged on the base 1 to detect the movement of the blade assembly 2 along the X direction. The grating ruler 61 is arranged on the blade placement plate 321 in a manner of adhesion or screw connection, and can move along the Y direction with the blade placement plate 321, and the reading head 62 is fixedly arranged on the first placement plate 33 to detect the movement of the blade assembly 2 along the Y direction. By fixing the reading head 62, the movement of the cable on the reading head 62 can be avoided, thereby affecting the movement of the blade. The principle and detection method of displacement detection of the grating ruler 61 and the reading head 62 are mature technologies in the art, and will not be described in detail in this embodiment. In other embodiments, the first position detection assembly and the second position detection assembly can also include photoelectric sensors, distance sensors, etc., which will not be described in detail in this embodiment.

[0073] Further, in order to limit the limit positions of the first placement plate 33 and the blade placement plate 321, the slit device further comprises a first limiting assembly 7 and a second limiting assembly 8. The first limiting assembly 7 comprises a first limiting member 71 and a second limiting member 72, the first limiting member 71 and the second limiting member 72 are arranged on the base 1 along the first direction, and the first placement plate 33 is at least partially movably located between the first limiting member 71 and the second limiting member 72.

[0074] The second limiting assembly 8 is provided with a third limiting piece 81 and a fourth limiting piece 82, the third limiting piece 81 and the fourth limiting piece 82 are spaced apart along the second direction on the first placement plate 33, and the blade assembly 2 is at least partially movably located between the third limiting piece 81 and the fourth limiting piece 82. Specifically, in the embodiment, the first limiting piece 71, the second limiting piece 72, the third limiting piece 81 and the fourth limiting piece 82 are all pairs of photoelectric sensors, the first limiting piece 71 and the second limiting piece 72 are spaced apart along the X direction on the base 1 and located on one side of the first guide rail 31, and the third limiting piece 81 and the fourth limiting piece 82 are spaced apart along the Y direction on the first placement plate 33 and located on one side of the second guide rail 32. The first placement plate 33 and the blade placement plate 321 are provided with light barriers 9. When the first placement plate 33 moves to the first limiting piece 71 or the second limiting piece 72, the light barrier 9 on the first placement plate 33 blocks the pair of photoelectric sensors, at which time the first driving piece 4 stops working, limiting the distance of the first placement plate 33 moving along the X direction. When the blade placement plate 321 moves to the third limiting piece 81 or the fourth limiting piece 82, the light barrier 9 on the blade placement plate 321 blocks the pair of photoelectric sensors, at which time the second driving piece 5 stops working, which can limit the distance of the blade placement plate 321 moving along the Y direction.

[0075] Further, referring to Figure 6 , the base 1 is provided with a light transmission hole 12 in the middle, and the two groups of blade assemblies 2 are centrally symmetrically arranged about the light transmission hole 12. It can be understood that such arrangement makes the center of gravity of the blade assembly 2 located at the light transmission hole 12, improving the structural stability. Specifically, in the embodiment, one of the blade assemblies 2 is arranged at the upper right of the base 1, and the other blade assembly 2 is arranged at the lower left of the base 1. The two groups of moving assemblies 3 are also centrally symmetrically arranged, so that the structural center of gravity of the entire slit device is located at the light transmission hole 12, and the blade assembly 2 moves more stably and is not easy to fall over.

[0076] Further, the slit device further comprises a buffer 10. One of the two groups of first blades 21 is provided with a buffer 10 towards one side of the other; and / or, one of the two groups of second blades 22 is provided with a buffer 10 towards one side of the other.

[0077] Specifically, in the embodiment, the buffer 10 is a polyurethane limiting bolt, and by arranging the buffer 10, soft collision can be achieved when the two first blades 21 moving along the X direction lose control, avoiding blade collision causing blade scratches or cracks, affecting the exposure effect.

[0078] In some embodiments, the base 1 is designed with a finishing boss, and when the slit device is installed, a high-precision 000-grade square ruler, such as a marble square ruler, can be placed on the boss. When the moving assembly 3 is installed, the finishing surface of the marble square ruler can be used as a reference, so that the parallelism and perpendicularity between the first guide rail 31 and the second guide rail 32 can be ensured, and the installation error between the first blade 21 and the second blade 22 can be reduced. After installation, the square ruler can be removed to reduce the occupied space.

[0079] In some embodiments, the base 1 is provided with a folded edge on one side in the Z direction and towards the direction of the moving assembly 3. A plurality of threaded holes are formed in the folded edge. The plurality of folded edges and threaded holes can ensure that the base 1 is stable and balanced under stress, so that the slit device can be installed vertically.

[0080] Further, in some embodiments, the back of the base 1 is designed with a weight-reducing hole and / or a weight-reducing groove, which can further reduce the weight of the entire slit device, further ensure the accuracy of the movement of the blade assembly 2, and also reduce the pressure of the overall slit mechanism on the installation surface.

[0081] The utility model also discloses a photoetching system, including above-mentioned slit device. Since the photoetching system disclosed by the utility model has the slit device, at least has the beneficial effect of the slit device, and does not repeat here.

[0082] The above embodiments only illustrate the basic principles and characteristics of the utility model, and the utility model is not limited by the above embodiments. Without departing from the spirit and scope of the utility model, the utility model has various changes and changes, and these changes and changes all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.

Claims

1. A slit device, characterized by The slit device comprises: a base (1); a blade assembly (2) comprising a first blade (21) and a second blade (22) connected vertically; two groups of the blade assembly (2) are movably connected to the base (1) along a first direction and a second direction; the first blade (21) and the second blade (22) of the two groups of the blade assembly (2) form a rectangular slit window with adjustable size; wherein the first direction and the second direction are arranged at an angle.

2. The slit device according to claim 1, characterized in that The slit device further comprises two groups of moving assemblies (3) corresponding to the two groups of the blade assembly (2); the moving assembly (3) comprises: a first guide rail (31) arranged on the base (1), wherein a first moving part (311) is arranged on the first guide rail (31), and the first moving part (311) is movably arranged on the first guide rail (31) along a first direction; a second guide rail (32) arranged on the first moving part (311), and the blade assembly (2) is movably arranged on the second guide rail (32) along a second direction.

3. The slit device according to claim 2, characterized in that Each group of the moving assembly (3) comprises two first guide rails (31), and the moving assembly (3) further comprises a first placement plate (33) connected to the first moving parts (311) of the two first guide rails (31), and the second guide rail (32) is arranged on the first placement plate (33).

4. The slit device according to claim 3, characterized in that A blade placement plate (321) is arranged on the second guide rail (32), the blade placement plate (321) is movably arranged on the second guide rail (32) along the second direction, and one of the first blade (21) and the second blade (22) is connected to the blade placement plate (321).

5. The slit device of claim 3, wherein The moving assembly (3) further comprises a first driving part (4) and a second driving part (5); the first driving part (4) is arranged on the base (1) and connected to the first placement plate (33) at one end to drive the first placement plate (33) to move along the first guide rail (31); the second driving part (5) is arranged on the first placement plate (33) and connected to the blade assembly (2) at one end to drive the blade assembly (2) to move along the second guide rail (32).

6. The slit device of claim 5, wherein The slit device further comprises a first position detection assembly and a second position detection assembly, the first position detection assembly is used for detecting the position of the blade assembly (2) in the first direction; and the second position detection assembly is used for detecting the position of the blade assembly (2) in the second direction.

7. The slit device of claim 3, wherein The slit device further comprises a first limiting assembly (7) and a second limiting assembly (8); the first limiting assembly (7) comprises a first limiting part (71) and a second limiting part (72), the first limiting part (71) and the second limiting part (72) are arranged on the base (1) along the first direction, and the first placement plate (33) is movably arranged between the first limiting part (71) and the second limiting part (72). The second limiting component (8) is provided with a third limiting piece (81) and a fourth limiting piece (82), the third limiting piece (81) and the fourth limiting piece (82) are spaced apart along the second direction and arranged on the first placement plate (33), and the blade assembly (2) is at least partially movably arranged between the third limiting piece (81) and the fourth limiting piece (82).

8. The slit device of claim 2, wherein The base (1) is provided with a light transmission hole (12) in the middle, and two groups of the blade assembly (2) are centrally symmetrically arranged about the light transmission hole (12).

9. The slit device of claim 1, wherein The slit device further comprises a buffer (10). One of the two first blades (21) in the two groups of the blade assembly (2) is provided with the buffer (10) on one side facing the other. And / or, one of the two second blades (22) in the two groups of the blade assembly (2) is provided with the buffer (10) on one side facing the other.

10. A lithographic system, characterized by, The slit device comprises the slit device according to any one of claims 1-9.

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