Tube shell packaging structure with getter and detector
By employing a recessed groove structure in the uncooled infrared detector, the getter and chip are arranged in layers, solving the problem of the large area occupied by the getter and achieving the effect of reducing the size of the detector while ensuring vacuum reliability.
Patent Information
- Application Number
- CN202520148430.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2035-01-22
AI Technical Summary
In existing ceramic packaging structures for uncooled infrared detectors, the getter occupies a large area, resulting in a larger detector size, making it difficult to reduce the packaging size while ensuring vacuum reliability.
The sinking groove structure changes the getter and chip from being horizontally side by side to being arranged in upper and lower layers. The getter is placed on the boss and fixed by welding. The top surface is lower than the inner surface of the bottom plate. The window seals the top opening of the tube shell, forming an upper and lower layered tube shell packaging structure.
Within the limited internal space of the tube shell, the area occupied by the getter is reduced, the overall size of the detector is reduced, while maintaining good vacuum reliability and getter performance.
Smart Images
Figure CN223885585U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of detector packaging technology, specifically a tube shell packaging structure with getter and detector. BACKGROUND
[0002] The ceramic packaging structure used by the current non-refrigeration infrared detector generally comprises: a ceramic tube shell, a chip, a boss, a getter, and a window sheet. The chip is in surface contact with the inner surface of the vacuum cavity of the ceramic tube shell and the surface of the ceramic tube shell. The boss is located at one end inside the tube shell and is fixedly connected with the tube shell. The getter is located on the upper surface of the boss. The window sheet is located on the top surface of the tube shell. A vacuum cavity is formed through the window sheet and the ceramic tube shell. The getter plays a role in maintaining the vacuum of the cavity after being activated. Figure 1 and Figure 2 As shown, the conventional method is to weld a piece of getter in the cavity of the tube shell, and the getter and the chip are laid side by side on the inner surface of the tube shell.
[0003] The current detector packaging method occupies a large area for the getter under the premise of ensuring the reliability of the vacuum, thereby making the detector larger in size. UTILITY MODEL CONTENT
[0004] The utility model aims to provide a tube shell packaging structure with getter and detector, which can at least solve some defects in the prior art.
[0005] To achieve the above-mentioned purpose, the utility model embodiment provides the following technical scheme: a tube shell packaging structure with getter, comprising a tube shell with an inner cavity and a getter arranged in the tube shell, in the inner cavity, a portion of the bottom plate of the tube shell is recessed to form a groove, a boss is arranged in the groove, the getter is placed on the boss, and the top surface of the getter is not higher than the inner surface of the bottom plate.
[0006] Further, two bosses are arranged in the middle of the groove, and the two ends of the getter are placed on the bosses, respectively.
[0007] Further, the getter is welded with the boss.
[0008] Further, the groove has a plurality of grooves, and at least one of the grooves is provided with the getter.
[0009] Further, the getter in the groove has a plurality of getters, and the getters are arranged side by side.
[0010] Further, the groove is located at the edge of the tube shell.
[0011] The utility model discloses an embodiment provides another technical scheme: a detector, including chip, still include the tube shell package structure with getter of above -mentioned, the chip is located on the bottom plate.
[0012] Further, when the edge of the chip extends above the sink, the top surface of the getter is lower than the inner surface of the bottom plate.
[0013] Further, the top of the tube shell is open, and the top of the tube shell is provided with a window sheet, and the window sheet blocks the opening.
[0014] Further, the window sheet is welded on the tube shell.
[0015] Compared with the prior art, the utility model has the beneficial effects that: in the limited tube shell inner cavity space, the sink structure is used, when the tube shell package structure is used for packaging device chip, the getter and the device chip can be changed from the original horizontal parallel structure to the upper and lower layered structure, the occupation area of the getter can be reduced, and when the tube shell package structure is used in the detector, the size of the detector can also be reduced. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 is the vertical sectional view of the prior detector;
[0017] Figure 2 is the top view of the prior detector (the window sheet is not shown);
[0018] Figure 3 is the exploded view of the detector provided by the utility model embodiment;
[0019] Figure 4 is the schematic view of the tube shell package structure with getter provided by the utility model embodiment;
[0020] Figure 5 is the vertical sectional view of the tube shell package structure with getter provided by the utility model embodiment;
[0021] Figure 6 is the local structure schematic view of the tube shell package structure with getter provided by the utility model embodiment;
[0022] Figure 7 is Figure 5 is the schematic view of the getter;
[0023] Figure 8 is the vertical sectional view of the detector provided by the utility model embodiment;
[0024] Figure 9 is the vertical sectional view of the detector provided by the utility model embodiment (showing multiple sinks and multiple getters);
[0025] In the drawing: 1 - window sheet; 2 - chip; 3 - getter; 4 - boss; 5 - tube shell; 6 - sink. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.
[0027] Referring to Figures 3 to 9 The embodiment of the present application provides a tube shell packaging structure with a getter, which comprises a tube shell 5 with an inner cavity and a getter 3 arranged in the tube shell 5. In the inner cavity, a bottom plate part of the tube shell 5 is recessed to form a sink 6, the sink 6 is provided with a boss 4, the getter 3 is placed on the boss 4, and the top surface of the getter 3 is not higher than the inner surface of the bottom plate. In the embodiment, in the limited inner cavity space of the tube shell 5, the sink 6 structure is used, so that the getter 3 and the infrared detector chip 2 can change from the original horizontal parallel structure to the upper and lower layered structure, the occupied area of the getter 3 can be reduced, and the size of the detector can be reduced. Specifically, as shown in Figure 1 and Figure 2 It can be seen that the getter 3 and the chip 2 are laid flat in parallel on the inner surface of the tube shell 5. In order to ensure the reliability of the vacuum, the getter 3 will occupy a large inner cavity space, so that the size of the detector is also increased. The embodiment ingeniously uses the thickness of the tube shell 5 to dig a groove on the bottom plate, and the chip 2 is staggered by the height space, so that the two change from the existing parallel arrangement to the upper and lower layered structure. By limiting the top surface of the getter 3 to be not higher than the inner surface of the bottom plate, the chip 2 is always in the upper layer after being arranged on the bottom plate. As shown in Figure 8 and Figure 9 When the chip 2 extends above the sink 6, the top surface of the getter 3 needs to be lower than the inner surface of the bottom plate, so that the getter 3 and the chip 2 have a spacing, and the getter 3 needs to be suspended in a large area without contacting other components to achieve better effect. Preferably, the tube shell 5 is a ceramic tube shell.
[0028] Referring to Figures 3 to 9The two bosses 4 are arranged in the middle of the sink 6, and the two ends of the getter 3 are respectively placed on the bosses 4. The design of the two bosses 4 can ensure the stable posture of the getter 3. If the getter 3 is lighter, and the welding of one end with the boss 4 can ensure that the getter 3 will not fall, then only one end of the boss 4 can also meet the requirement of large-area suspension of the getter 3. Preferably, the boss 4 is an electrode boss, and the welding form can realize electric activation. The electric activation of the getter 3 is realized by electrifying the electrode boss.
[0029] Please refer to Figures 3 to 9 The sink 6 has a plurality of sink 6, at least one of which is provided with the getter 3. In another embodiment, as shown in Figure 9 two sink 6 can be designed, and the getter 3 can be arranged in each sink 6 to ensure the getter effect. Of course, one of the sink 6 can be selected to arrange the getter 3, and the other sink 6 is not provided with the getter 3, and not every one needs to be provided with the getter 3. Moreover, the number of sink 6 is not limited to two in the embodiment, and more numbers can be designed, and the position is not limited to being arranged near the edge of the shell 5. For example, when four sink 6 are designed, since the shell 5 is square, the four sink 6 can be arranged along the four edges of the shell 5, so that a larger and more regular platform can be formed between the four sink 6 to install the chip 2. For example, the sink 6 can also be arranged at any position on the bottom plate, and the chip 2 can also be arranged on the sink 6, as long as the sink 6 and the chip 2 are not sealed, and the air in the inner cavity can contact the getter 3. Similarly, the size of the sink 6 can be selected according to the size of the getter 3, and when more numbers of getter 3 are selected, the size of the sink 6 can be appropriately reduced. These are all feasible setting schemes, and the embodiment does not limit this.
[0030] Please refer to Figures 3 to 9 The getter 3 in the sink 6 has a plurality of getters 3, and each getter 3 is arranged side by side. When designing the sink 6, a sink 6 with a larger width can be designed, so that a plurality of getters 3 can be arranged side by side to improve the getter efficiency. For example, a plurality of groups of bosses 4 are designed side by side in the sink 6, specifically, two groups of bosses 4 are designed, one getter 3 is placed in cooperation with each two bosses 4, and two getters 3 can be arranged side by side. This form can be flexibly selected according to needs. However, preferably, the boss 4 is arranged only at both ends of the sink 6, and is not arranged in the middle of the sink 6, so as to increase the contact area of the getter 3 and the air and improve the getter efficiency.
[0031] Please refer to Figures 3 to 9The sink 6 is located at the edge of the tube shell 5. In order to form a larger platform on the bottom plate for the chip 2 to be placed, the sink 6 can be arranged at the edge of the tube shell 5. The size of the platform is determined by the size of the sink 6, and the platform is naturally formed after the sink 6 is recessed on the bottom plate.
[0032] Please refer to Figures 3 to 9 The embodiment of the utility model provides a detector, including chip 2 and the tube shell package structure with getter above-mentioned, chip 2 is located on the bottom plate. In this embodiment, the tube shell package structure with getter above-mentioned is used in detector, for the package cavity of detector, in the case where the cavity is same size, the area of getter 3 is larger, can better play the gettering effect, fully guarantee the vacuum degree of detector package, and guarantee the vacuum degree under the premise, reduce the package size.
[0033] Please refer to Figures 3 to 9 When the edge of the chip 2 extends above the sink 6, the top surface of the getter 3 is lower than the inner surface of the bottom plate. In this embodiment, since the getter 3 needs to be suspended in a large area without contacting other components to achieve better results, when the chip 2 extends above the sink 6, the top surface of the getter 3 needs to be lower than the inner surface of the bottom plate, so that the getter 3 has a spacing with the chip 2.
[0034] Please refer to Figures 3 to 9 The top of the tube shell 5 is open, and the window sheet 1 is arranged on the top of the tube shell 5, the window sheet 1 seals the opening, and the window sheet 1 is welded on the tube shell 5. The window sheet 1 is packaged by welding at the opening of the top of the tube shell 5. During packaging, the getter 3 is first welded on the boss 4, then the chip 2 is welded on the bottom plate of the tube shell 5, and finally the light window sheet 1 is welded at the opening of the top of the tube shell 5.
[0035] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.
Claims
1. A tube package structure having a getter, comprising a tube having an inner cavity and a getter provided in the tube, characterized in that: In the inner cavity, the bottom plate portion of the tube shell is recessed to form a sink, a boss is arranged in the sink, and the getter is placed on the boss, and the top surface of the getter is not higher than the inner surface of the bottom plate.
2. The tube package structure with a getter according to claim 1, wherein: Two bosses are arranged in the sink at intervals, and the two ends of the getter are placed on the bosses, respectively.
3. The package structure with a getter according to claim 1, wherein: The getter is welded to the boss.
4. The package structure with a getter according to claim 1, wherein: There are multiple sinks, and the getter is arranged in at least one of the sinks.
5. The hermetic package structure with a getter according to claim 1, wherein: There are multiple getters in the sink, and each of the getters is arranged side by side.
6. The tube package structure with a getter according to claim 1, wherein: The sink is located at the edge of the tube shell.
7. A detector comprising a chip, characterized by: Also included is the tube shell packaging structure with the getter as claimed in any one of claims 1-6, and the chip is arranged on the bottom plate.
8. The probe of claim 7, wherein: When the edge of the chip extends above the sink, the top surface of the getter is lower than the inner surface of the bottom plate.
9. The probe of claim 7, wherein: The top of the tube shell is open, and a window sheet is arranged on the top of the tube shell to block the opening.
10. The probe of claim 9, wherein: The window sheet is welded to the tube shell.