High-pressure water gun cleaning equipment based on visual identification

Abstract

The utility model discloses high-pressure water gun cleaning equipment based on visual identification, which belongs to the technical field of semiconductor component cleaning and comprises a cleaning machine box and a supporting side frame, a first transverse moving component is arranged between the tops of the opposite sides of the supporting side frame, a cleaning box is arranged on the first transverse moving component, and a second transverse moving component is arranged on the cleaning box. A cleaning spray head part is arranged at the bottom of the cleaning box, a fixing side plate is arranged on one side of the cleaning box, a visual recognition control box is arranged at the top of the fixing side plate, a fixing rod is arranged at the bottom of the fixing side plate, and a mounting bottom block is arranged at the bottom of the fixing rod. A visual camera is arranged in the middle of the bottom of the mounting bottom block, and a first protective outer cover is arranged at the bottom of the mounting bottom block. The visual identification control box, the visual camera and other components are used in cooperation, parts can be identified conveniently, the position of the cleaning nozzle piece is controlled, and the cleaning efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor assembly cleaning, in particular to a high pressure water gun cleaning equipment based on visual identification. BACKGROUND

[0002] Semiconductor cleaning is an important process link throughout the whole semiconductor product manufacturing process, and the cleaning process is the key to improving yield. With the size reduction and structural complexity, the sensitivity of chips to impurity content also increases accordingly, which directly affects the product yield. With the update and iteration of semiconductor products, the number and importance of cleaning processes will continue to improve, and the cleaning equipment and related tooling for different semiconductor products will also be updated.

[0003] However, the existing high pressure water gun cleaning equipment based on visual identification has the following problems in use: because the cleaning equipment cannot well identify the cleaning parts, it cannot quickly move to the position of the parts during cleaning, and it cannot distinguish the cleaned parts, which affects the cleaning efficiency. Therefore, it is necessary to design a corresponding technical scheme to solve the existing technical problems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a high pressure water gun cleaning equipment based on visual identification, which solves the technical problem of affecting the cleaning efficiency caused by the fact that the cleaning equipment cannot well identify the cleaning parts, cannot quickly move to the position of the parts during cleaning, and cannot distinguish the cleaned parts, and meets the actual use requirement.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: including cleaning machine box and support side frame, the support side frame opposite side top between being provided with horizontal shift subassembly no.

[0006] The bottom of the mounting bottom block is provided with a fixed shell, a protective cover two is arranged between the inside and the bottom of the fixed shell, a transmission gear ring is arranged on one end of the top of the protective cover two, a support ring is arranged between the outer edge of the protective cover two and the fixed shell, a drive shell is arranged between the outer edge of the mounting bottom block and the fixed shell, a drive assembly is arranged between the drive shell and the transmission gear ring, and two cleaning blocks are symmetrically arranged on the bottom of the fixed shell.

[0007] In a preferred embodiment of the present invention, a cleaning water tank is provided inside the top of the cleaning machine box, an inspection door is installed on one end of the cleaning machine box, and transverse moving components are provided on both sides of the cleaning machine box near the top, with the supporting side frame mounted on the transverse moving components.

[0008] In a preferred embodiment of this utility model, a cleaning pump body is installed on the cleaning tank, and a water supply pipe is connected to the cleaning pump body. The visual recognition control box includes an image capture module, an intelligent image processing and decision-making module, and a control execution unit. The visual camera is connected to the visual recognition control box.

[0009] In a preferred embodiment of this utility model, both the mounting base and the fixed outer shell are cylindrical, the bottoms of both the first protective cover and the second protective cover are hemispherical, and the bottom of the fixed outer shell is provided with a circular hole for use with the second protective cover.

[0010] In a preferred embodiment of this utility model, the inner ring of the second protective cover is fitted to the outer edge of the first protective cover, the bottom of the supporting outer ring is fitted to the bottom of the fixed outer shell, and the driving assembly includes a driving motor, a transmission column and a transmission gear. The transmission gear is fixed on the transmission column and meshes with the transmission gear ring.

[0011] In a preferred embodiment of this utility model, the cleaning block has an overall arc-shaped curved structure, and one side of the cleaning block is attached to the outer edge of the second protective cover. Both the first protective cover and the second protective cover are made of transparent material.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] By using a visual recognition control box and a visual camera, the parts to be cleaned can be easily identified. During the movement of the cleaning box, the visual camera identifies the parts to be cleaned and determines whether they need to be cleaned. When a cleaned part is encountered, the box can quickly move to another location to clean the parts to be cleaned, thus improving cleaning efficiency. At the same time, during the cleaning process, the drive component, in conjunction with the transmission gear ring, can drive the protective cover to rotate and clean water stains and dirt through the cleaning block, ensuring the accuracy of visual recognition and thus solving the problem that affects cleaning efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall design of this utility model;

[0015] Figure 2 This is a structural diagram of the cleaning box described in this utility model;

[0016] Figure 3 This is a structural diagram of the mounting base block described in this utility model;

[0017] Figure 4 This is a structural diagram of the protective outer cover of this utility model.

[0018] In the diagram: Horizontal movement assembly 2-1, cleaning machine housing-2, inspection door-3, horizontal movement assembly 1-4, cleaning water tank-5, cleaning box-6, support side frame-7, water supply pipe-8, cleaning pump body-9, cleaning nozzle assembly-10, protective cover 2-11, mounting base block-12, fixing rod-13, fixing side plate-14, vision recognition control box-15, drive housing-16, drive assembly-17, protective cover 1-18, vision camera-19, cleaning block-20, fixing housing-21, support outer ring-22, transmission gear ring-23. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figures 1-4 This utility model provides a technical solution: a high-pressure water gun cleaning device based on visual recognition, including: a cleaning machine box 2 and a supporting side frame 7. A transverse moving component 4 is provided between the tops of the opposite sides of the supporting side frame 7. A cleaning box 6 is provided on the transverse moving component 4. A cleaning nozzle 10 is provided on the bottom of the cleaning box 6. A fixed side plate 14 is provided on one side of the cleaning box 6. A visual recognition control box 15 is provided on the top of the fixed side plate 14. A fixed rod 13 is provided on the bottom of the fixed side plate 14. An installation base block 12 is provided on the bottom of the fixed rod 13. A visual camera 19 is provided in the middle of the bottom of the installation base block 12. A protective cover 18 is provided on the bottom of the installation base block 12.

[0021] A fixed housing 21 is provided on the bottom of the mounting base 12. A protective cover 21 is provided inside the fixed housing 21 and between the bottom. A transmission gear ring 23 is provided on the top end of the protective cover 21. A support outer ring 22 is provided between the outer edge of the protective cover 21 and the fixed housing 21. A drive housing 16 is provided between the mounting base 12 and the outer edge of the fixed housing 21. A drive assembly 17 is provided inside the drive housing 16 and between the drive gear ring 23. Two cleaning blocks 20 are symmetrically arranged on the bottom of the fixed housing 21.

[0022] Further improvements include a cleaning water tank 5 inside the top of the cleaning housing 2, an inspection door 3 installed at one end of the cleaning housing 2, and transverse moving components 1 installed on both sides of the cleaning housing 2 near the top, with the supporting side frame 7 installed on the transverse moving components 1.

[0023] Further improvements include a cleaning pump body 9 installed on the cleaning tank 6, with a water supply pipe 8 connected to the cleaning pump body 9. The visual recognition control box 15 includes an image capture module, an intelligent image processing and decision-making module, and a control execution unit. Specifically, the visual recognition control box 15 can process the images captured by the visual camera 19, including image preprocessing, image volume feature extraction, feature analysis and classification, as well as decision-making and command sending, thereby controlling the movement of the transverse component 4 and the transverse component 1, and adjusting the movement of the cleaning nozzle component 10. The visual camera 19 is connected to the visual recognition control box 15.

[0024] Further improvements include a cylindrical structure for both the mounting base 12 and the fixed housing 21, a hemispherical structure for the bottom of both the protective cover 18 and the protective cover 21, and a circular hole for use with the protective cover 21 at the bottom.

[0025] In a further improvement, the inner ring of the second protective cover 11 is fitted to the outer edge of the first protective cover 18, the bottom of the supporting outer ring 22 is fitted to the bottom of the fixed outer shell 21, and the drive assembly 17 includes a drive motor, a transmission column and a transmission gear, the transmission gear is fixed on the transmission column and meshes with the transmission gear ring 23.

[0026] Further improvements include a cleaning block 20 having an overall curved arc structure, with one side of the cleaning block 20 fitting against the outer edge of the second protective cover 11. Both the first protective cover 18 and the second protective cover 11 are made of transparent material.

[0027] In use: First, the parts to be cleaned are placed in the cleaning pool 5. Then, the transverse shift assembly 21 drives the support side frame 7 to move as a whole, and the transverse shift assembly 14 drives the cleaning box 6 to move as a whole. The cleaning nozzle 10 is adjusted to move. Simultaneously, the vision camera 19 identifies the position of the parts and transmits it to the vision recognition control box 15 for identification and judgment. The control box then moves the cleaning nozzle 10 to the position of the parts for cleaning. After cleaning, the position is marked so that it does not need to be moved to the same position again, which improves the cleaning efficiency. At the same time, during the cleaning process, the drive assembly 17 drives the transmission gear ring 23 to rotate, which in turn drives the protective cover 21 to rotate, throwing off the water stains and dirt on the surface through centrifugal force. The cleaning block 20 cleans the water stains and dirt, ensuring the accuracy of identification.

[0028] The components of this utility model, including transverse moving assembly II-1, cleaning machine housing-2, inspection door-3, transverse moving assembly I-4, cleaning water tank-5, cleaning box-6, supporting side frame-7, water supply pipe-8, cleaning pump body-9, cleaning nozzle assembly-10, protective cover II-11, mounting base block-12, fixing rod-13, fixing side plate-14, vision recognition control box-15, drive housing-16, drive assembly-17, protective cover I-18, vision camera-19, cleaning block-20, fixing housing-21, supporting outer ring-22, and transmission gear ring-23, are all general standard parts or parts known to those skilled in the art. Their structure and principle can be learned by those skilled in the art through technical manuals or conventional experimental methods. The problem solved by this utility model is that in cleaning equipment, the cleaning parts cannot be cleaned well. The present invention addresses the technical problem of insufficient speed in identifying and distinguishing cleaned parts during cleaning, which affects cleaning efficiency. Through the combination of the aforementioned components, including the visual recognition control box 15 and the visual camera 10, the present invention can conveniently identify semiconductor components placed in the cleaning pool 5 and control the horizontal movement components 1-4 and 2-1 to adjust the position of the cleaning nozzle 10. When encountering cleaned parts, it can quickly move to other positions to clean the parts to be cleaned, improving cleaning efficiency. Simultaneously, during the cleaning process, the drive component 17, in conjunction with the transmission gear ring 23, can drive the protective cover 2-11 to rotate, and the cleaning block 20 cleans water stains and dirt, ensuring the accuracy of visual recognition.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0030] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A high-pressure water gun cleaning device based on visual recognition, characterized in that: It includes a cleaning machine housing (2) and a support side frame (7). A transverse component (4) is provided between the tops of the opposite sides of the support side frame (7). A cleaning box (6) is provided on the transverse component (4). A cleaning nozzle (10) is provided on the bottom of the cleaning box (6). A fixed side plate (14) is provided on one side of the cleaning box (6). A visual recognition control box (15) is provided on the top of the fixed side plate (14). A fixed rod (13) is provided on the bottom of the fixed side plate (14). An installation base block (12) is provided on the bottom of the fixed rod (13). A visual camera (19) is provided in the middle of the bottom of the installation base block (12). A protective cover (18) is provided on the bottom of the installation base block (12). A fixed outer shell (21) is provided on the bottom of the mounting base (12). A protective outer cover (11) is provided between the inside and bottom of the fixed outer shell (21). A transmission gear ring (23) is provided on one top end of the protective outer cover (11). A supporting outer ring (22) is provided between the outer edge of the protective outer cover (11) and the fixed outer shell (21). A driving outer shell (16) is provided between the mounting base (12) and the outer edge of the fixed outer shell (21). A driving assembly (17) is provided between the inside of the driving outer shell (16) and the transmission gear ring (23). Two cleaning blocks (20) are symmetrically arranged on the bottom of the fixed outer shell (21).

2. The high-pressure water gun cleaning device based on visual recognition according to claim 1, characterized in that: The cleaning machine box (2) is provided with a cleaning water tank (5) at the top. An inspection door (3) is installed on one end of the cleaning machine box (2). Horizontal moving components (1) are provided on both sides of the cleaning machine box (2) near the top. The support side frame (7) is installed on the horizontal moving components (1).

3. The high-pressure water gun cleaning device based on visual recognition according to claim 1, characterized in that: The cleaning tank (6) is equipped with a cleaning pump body (9), and a water supply pipe (8) is connected to the cleaning pump body (9). The visual recognition control box (15) includes an image capture module, an intelligent image processing and decision-making module, and a control execution unit. The visual camera (19) is connected to the visual recognition control box (15).

4. The high-pressure water gun cleaning device based on visual recognition according to claim 1, characterized in that: The mounting base (12) and the fixed outer shell (21) are both cylindrical in shape. The bottom of the first protective cover (18) and the second protective cover (11) are both hemispherical in shape. The bottom of the fixed outer shell (21) is provided with a circular hole for use with the second protective cover (11).

5. The high-pressure water gun cleaning device based on visual recognition according to claim 1, characterized in that: The inner ring of the second protective cover (11) is attached to the outer edge of the first protective cover (18), the bottom of the supporting outer ring (22) is attached to the bottom of the fixed outer shell (21), and the driving assembly (17) includes a driving motor, a transmission column and a transmission gear. The transmission gear is fixed on the transmission column and meshes with the transmission gear ring (23).

6. The high-pressure water gun cleaning device based on visual recognition according to claim 1, characterized in that: The cleaning block (20) has an overall arc-shaped curved structure. One side of the cleaning block (20) is attached to the outer edge of the second protective cover (11). Both the first protective cover (18) and the second protective cover (11) are made of transparent material.

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