Dispensing head cleaning device capable of automatically adding cleaning fluid

Abstract

The utility model discloses a dispensing head cleaning device capable of automatically adding cleaning liquid. The dispensing head cleaning device comprises a cleaning table, an automatic liquid adding unit, a liquid storage unit, a placing plate, a drying unit and a lifting mechanism, the cleaning table is provided with a cleaning tank. The drying units are arranged on the two sides of the cleaning tank. The lifting mechanism is arranged on the cleaning table, the placing plate is connected with the lifting mechanism, the placing plate comprises a plurality of placing holes used for placing to-be-cleaned dispensing heads, and the placing plate is arranged above the cleaning tank; the liquid storage unit is arranged on the cleaning table and is in liquid guide communication with the cleaning tank through the automatic liquid adding unit. According to the automatic cleaning device, the cleaning liquid is automatically added, the pollution risk of a clean room caused by frequent manual operation is avoided, the multiple dispensing heads are cleaned and dried with the same force and the same time length, the cleaning work efficiency is improved, and the cleaning effect is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the dispensing head cleaning technical field of semiconductor technology especially relates to a dispensing head cleaning device of automatic addition cleaning liquid. BACKGROUND

[0002] In the semiconductor manufacturing process, dispensing is widely used in chip packaging, assembly, testing and other links, for accurate coating of adhesive, sealant, conductive adhesive and other materials. The performance of the dispensing head directly affects the accuracy and consistency of dispensing, and thus affects the reliability and performance of semiconductor devices. In the dispensing process, the dispensing head is easily contaminated by residual glue, epoxy resin, flux and other substances. These pollutants will gradually accumulate and block the dispensing hole, resulting in unstable dispensing amount, precision decline, and even complete failure, which seriously affects the yield and production efficiency of semiconductor products. Therefore, regular cleaning of the dispensing head is an important part of the semiconductor manufacturing process.

[0003] At present, there are various dispensing head cleaning devices on the market, and their main cleaning methods include ultrasonic cleaning, solvent soaking cleaning, mechanical wiping cleaning and plasma cleaning. These cleaning devices can clean the dispensing head to some extent, but generally have the following shortcomings:

[0004] 1. Most of the existing dispensing head cleaning devices need to be manually added cleaning liquid regularly, increasing the workload of the operators, and in the semiconductor clean room environment, frequent manual operation can introduce pollution sources, and may cause insufficient cleaning liquid due to negligence, affecting the cleaning effect, and the degree of automation is low.

[0005] 2. In the semiconductor manufacturing environment, time cost is particularly important. At present, manual cleaning or semi-automatic cleaning method is generally used, and manual cleaning efficiency is very low. For example, the current manual cleaning method requires a dedicated person to clean, and at most 10 dispensing heads can be cleaned in a day. It takes an average of 25 minutes to clean one dispensing head, which seriously affects the production efficiency and increases the manufacturing cost of semiconductor devices. In the process of manual cleaning, the cleaning force and cleaning time are difficult to keep consistent, resulting in unstable cleaning effect, which may cause incomplete cleaning of some dispensing heads, affecting the dispensing accuracy and thus affecting the reliability of semiconductor products.

[0006] 3. After cleaning, the dispensing head needs to be dried to prevent residual cleaning liquid from affecting the subsequent dispensing effect, especially for semiconductor materials sensitive to moisture, which may cause performance degradation or failure of the device. The natural air drying or simple wiping method currently used takes a long time, usually more than 5 minutes, affecting the cleaning efficiency. INVENTION CONTENTS

[0007] The utility model provides a kind of point glue head cleaning device of automatic addition cleaning fluid, and specific technical solutions are as follows:

[0008] Including cleaning table, automatic liquid adding unit, liquid storage unit, placement plate, drying unit and lifting mechanism;

[0009] The cleaning tank is equipped on the cleaning table, and the drying unit is arranged on the two sides of the cleaning tank.

[0010] The lifting mechanism is arranged on the cleaning table, the placement plate is connected with the lifting mechanism, the placement plate includes a plurality of placement holes for placing the point glue head to be cleaned, and the placement plate is arranged above the cleaning tank.

[0011] The liquid storage unit is arranged on the cleaning table and is in liquid communication with the cleaning tank through the automatic liquid adding unit.

[0012] Further, the automatic liquid adding unit includes a float ball, a linkage mechanism and a liquid guide unit.

[0013] One end of the liquid guide unit is connected to the cleaning tank, and the other end is connected to the liquid storage unit. The float ball is connected to one end of the linkage mechanism, and the float ball is placed in the cleaning tank. The other end of the linkage mechanism links the liquid guide unit and the liquid storage unit to discharge liquid.

[0014] Further, the liquid storage unit includes a liquid storage tank and a liquid storage box. The liquid storage box is arranged on one side of the end surface of the cleaning table. The liquid storage tank is connected to the liquid storage box in an inverted manner. The liquid storage box is in communication with the liquid guide unit.

[0015] Further, the liquid guide unit includes a mounting seat and a liquid guide pipe. The mounting seat is fixed to the cleaning table. The liquid guide pipe is arranged on the mounting seat. One end of the liquid guide pipe extends to the cleaning tank, and the other end extends into the liquid storage box. The liquid guide pipe is also connected to the linkage end of the linkage mechanism.

[0016] Through the linkage of the linkage mechanism, the liquid guide pipe is driven to slide on the mounting seat in the axial direction, achieving automatic addition of cleaning fluid in the liquid storage box.

[0017] Further, a plurality of annular limiting rings are arranged on the mounting seat, and the annular limiting rings are arranged around the liquid guide pipe.

[0018] Through the annular limiting ring, the direction of the liquid guide pipe is prevented from deviating from the mounting seat when sliding.

[0019] Further, one side of the mounting seat, where the liquid guide pipe is placed, is provided with an arc-shaped recess, and the liquid guide pipe is placed in the arc-shaped recess.

[0020] Through the arc-shaped recess, the liquid guide pipe can ensure that the pipe body does not bend when sliding, and the flow of the cleaning liquid is not affected.

[0021] Further, the linkage mechanism comprises a supporting rod, a supporting frame, a connecting piece, a limiting plate, a sliding column, a gear, a fixing base and a cam.

[0022] The supporting rod is rotationally connected with the supporting frame to form a lever structure, one end of the supporting rod is connected with the floating ball, and the other end is movably connected with the connecting piece.

[0023] The limiting plate is fixed on the cleaning table, the connecting piece is connected with the sliding column, the sliding column is arranged in the limiting plate and slides along the limiting plate, and the sliding column is provided with a gear rack on the other side relative to the connecting piece and is adapted to be docked with the gear.

[0024] The fixing base is fixedly connected with the limiting plate, the fixing base is fixed outside the limiting plate, and the gear is rotationally connected with the fixing base through a rotating shaft.

[0025] The cam is linked with the gear through the rotating shaft, and one side of the cam is connected with the liquid guide pipe.

[0026] Further, the lifting mechanism comprises a mounting frame, a guide column, a motor and a threaded rod.

[0027] The mounting frame is a U-shaped plate structure, the U-shaped opening faces the cleaning table, and one end of the placing plate is arranged between the mounting frame and the cleaning table.

[0028] The guide column is vertically connected between the mounting frame and the cleaning table, and the guide column vertically penetrates the placing plate.

[0029] The mounting frame is further provided with a motor on the plate body parallel to the cleaning table, the motor is connected with the threaded rod, and the threaded rod is connected with the placing plate through a threaded hole.

[0030] Further, the mounting frame is further provided with a pressing switch on the inner side of the plate body parallel to the cleaning table, and the pressing switch is connected with the drying unit.

[0031] Further, the drying unit comprises a plurality of air injection pipes, and the air injection pipes are parallel to the placing plate.

[0032] The beneficial effects of the utility model are as follows:

[0033] The utility model discloses a cleaning table, cleaning tank, air jet pipe, mounting frame, guide column, motor, threaded rod, press switch, placing plate, placing hole, float ball, support, support frame, mounting seat, liquid guide pipe, connecting piece, limit board, slide column, gear, cam, liquid storage tank, liquid storage tank, fixed base, annular limit ring are provided. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 It is the overall structure schematic diagram of the utility model.

[0035] Figure 2 It is the linkage structure schematic diagram of the utility model.

[0036] Figure 3 It is the linkage structure drive place structure schematic diagram of the utility model.

[0037] Mark explanation: 1-cleaning table, 2-cleaning tank, 3-air jet pipe, 4-mounting frame, 5-guide column, 6-motor, 7-threaded rod, 8-press switch, 9-placing plate, 10-placing hole, 11-float ball, 12-support, 13-support frame, 14-mounting seat, 15-liquid guide pipe, 16-connecting piece, 17-limit board, 18-slide column, 19-gear, 20-cam, 21-liquid storage tank, 22-liquid storage tank, 23-fixed base, 24-annular limit ring. DETAILED DESCRIPTION

[0038] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor belong to the scope of protection of the utility model.

[0039] In the description of the embodiments of the utility model, it needs to be explained that the indicated direction or position relation is based on the direction or position relation shown in the drawing, or the direction or position relation when the utility model product is usually placed, or the direction or position relation usually understood by the person skilled in the art, or the direction or position relation when the utility model product is usually placed, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a specific direction, structure and operation, therefore, it cannot be understood as the limitation of the utility model. In addition, the terms "first", "second" are only used for distinguishing the description, and cannot be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "set", "connected" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected, it can be directly connected, or indirectly connected through an intermediate medium. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0041] Embodiment 1

[0042] Embodiment 1 of the utility model discloses a kind of glue dispensing head cleaning devices of automatic addition cleaning fluid, as shown in Fig. Figure 1 Device includes cleaning table 1, automatic liquid adding unit, liquid storage unit, placement plate 9, drying unit and lifting mechanism;

[0043] The cleaning tank 2 is provided on the cleaning table 1, and the drying unit is arranged on both sides of the cleaning tank 2.

[0044] As a preferred embodiment, the drying unit includes a plurality of air jets 3, and the air outlet direction of the air jets 3 is parallel to the placement plate 9.

[0045] Specifically, the air jets 3 are arranged in two rows and symmetrically arranged on both sides of the cleaning tank 2, and the placement plate 9 is placed between the two rows of air jets 3.

[0046] The lifting mechanism is arranged on the cleaning table 1, the placement plate 9 is connected to the lifting mechanism, the placement plate 9 includes a plurality of placement holes 10 for placing the glue dispensing heads to be cleaned, and the placement plate 9 is arranged above the cleaning tank 2.

[0047] As a preferred embodiment, the lifting mechanism includes a mounting bracket 4, a guide column 5, a motor 6 and a threaded rod 7.

[0048] The mounting bracket 4 is a U-shaped plate structure, and the U-shaped opening is fixed towards the cleaning table 1, and one end of the placement plate 9 is placed between the mounting bracket 4 and the cleaning table 1.

[0049] The guide column 5 is vertically connected between the mounting frame 4 and the cleaning table 1, and vertically penetrates the placement plate 9;

[0050] The mounting frame 4 is further provided with a motor 6 on the plate body parallel to the cleaning table 1, the motor 6 is connected with the threaded rod 7, and the threaded rod 7 is connected with the placement plate 9 through a threaded hole.

[0051] Specifically, the mounting frame 4 is further provided with a press switch 8 on the inner side of the plate body parallel to the cleaning table 1, and the press switch 8 is connected with the drying unit.

[0052] The liquid storage unit is arranged on the cleaning table 1 and is in liquid communication with the cleaning tank 2 through an automatic liquid adding unit.

[0053] As a preferred embodiment, the automatic liquid adding unit comprises a floating ball 11, a linkage mechanism and a liquid guiding unit;

[0054] One end of the liquid guiding unit penetrates the cleaning tank 2, and the other end communicates with the liquid storage unit, the floating ball 11 is connected with one end of the linkage mechanism, the floating ball 11 is arranged in the cleaning tank 2, and the other end of the linkage mechanism links the liquid guiding unit and the liquid storage unit to discharge liquid.

[0055] As a preferred embodiment, the liquid storage unit comprises a liquid storage tank 21 and a liquid storage box 22, the liquid storage box 22 is arranged on one side of the end face of the cleaning table 1, the liquid storage tank 21 is connected upside down on the liquid storage box 22, and the liquid storage box 22 communicates with the liquid guiding unit.

[0056] As a preferred embodiment, the liquid guiding unit comprises a mounting seat 14 and a liquid guiding pipe 15, the mounting seat 14 is fixed on the cleaning table 1, the liquid guiding pipe 15 is arranged on the mounting seat 14, one end of the liquid guiding pipe 15 extends to the cleaning tank 2, the other end extends into the liquid storage box 22, and the liquid guiding pipe 15 is further connected with the linkage end of the linkage mechanism.

[0057] As a preferred embodiment, a plurality of annular limiting rings 24 are arranged on the mounting seat 14 and surround the liquid guiding pipe 15;

[0058] One side of the mounting seat 14 where the liquid guiding pipe 15 is arranged is further provided with an arc-shaped recess, and the liquid guiding pipe 15 is arranged in the arc-shaped recess.

[0059] Through the arc-shaped recess, the liquid guiding pipe 15 can slide without bending, which affects the flow of cleaning liquid.

[0060] As a preferred embodiment, as Figure 2and Figure 3 As shown, the linkage mechanism comprises a support rod 12, a support frame 13, a connecting piece 16, a limiting plate 17, a sliding column 18, a gear 19, a fixed seat 23 and a cam 20;

[0061] The support rod 12 is rotationally connected with the support frame 13, forming a lever structure, one end of the support rod 12 is connected with the floating ball 11, and the other end is movably connected with the connecting piece 16;

[0062] Specifically, the connecting piece 16 is in the shape of an I-beam, both ends of which are provided with connecting holes, and the end of the support rod 12 connected with the connecting piece 16 is in the shape of a flat plate and is also provided with a connecting hole, so that the connecting piece 16 and the support rod 12 are rotationally connected through the connecting shaft of the I-beam structure;

[0063] The limiting plate 17 is fixed on the cleaning table 1 and is connected perpendicularly with the cleaning table 1, and the connecting piece 16 is connected with the sliding column 18;

[0064] Specifically, the side of the sliding column 18 connected with the connecting piece 16 is provided with a protrusion, the protrusion is provided with a connecting hole, and the connecting piece 16 and the protrusion are rotationally connected through the connecting shaft of the I-beam structure, so as to realize the linkage connection between the support rod 12 and the sliding column 18.

[0065] The sliding column 18 is placed in the limiting plate 17 and can slide along the limiting plate 17, and the other side of the sliding column 18 relative to the connecting piece 16 is provided with a rack and is adapted to be connected with the gear 19;

[0066] The fixed seat 23 is fixedly connected with the limiting plate 17, the fixed seat 23 is fixed outside the limiting plate 17, and the gear 19 is rotationally connected with the fixed seat 23 through a rotating shaft;

[0067] The cam 20 is linked with the gear 19 through the rotating shaft, and one side of the cam 20 is connected with the liquid guide pipe 15;

[0068] Specifically, the rotating shaft is fixedly connected with one side of the cam 20, and the end of the liquid guide pipe 15 inserted into the top of the liquid storage tank 22 is provided with a baffle, the baffle is parallel to the tank opening of the liquid storage tank 21, and when the liquid guide pipe 15 is inserted into the liquid storage tank 22, the baffle blocks the liquid storage tank 21.

[0069] When the liquid level in the cleaning tank 2 drops, the floating ball 11 drops accordingly, according to the lever structure formed by the support frame 13 and the support rod 12, the other end of the support rod 12 connected with the floating ball 11 rises, which drives the sliding column 18 to slide up along the limiting plate 17, the rack on one side of the sliding column 18 drives the gear 19 to rotate, the gear 19 drives the cam 20 to swing through the rotating shaft, the cam 20 drives the liquid guide pipe 15 to move along the mounting base 14 towards the cleaning tank 2, so that the tank opening of the liquid storage tank 21 is blocked, and the cleaning liquid in the liquid storage tank 21 flows into the liquid storage tank 22, under the action of gravity and pressure, the cleaning liquid in the liquid storage tank 22 is pressed into the liquid guide pipe 15 and flows into the cleaning tank 2.

[0070] When the liquid level in the cleaning tank 2 rises, the floating ball 11 rises accordingly, the support rod 12 drives the connecting piece 16 to drive the sliding column 18 to drop, so that the gear 19 rotates reversely, and then the cam 20 swings reversely, so that the liquid guide pipe 15 slides along the mounting base 14 towards the liquid storage tank 22, and the tank opening of the liquid storage tank 21 is blocked, so that the cleaning liquid is stopped from being added.

[0071] The above is only an embodiment of the present application, and does not limit the patent range of the present application, and any equivalent structure or equivalent process transformation according to the content of the present application and the drawings, or direct or indirect application in other related technical fields, are also included in the patent protection range of the present application.

Claims

1. A dispensing head cleaning device with automatic addition of cleaning fluid, characterized in that, It includes a cleaning station, an automatic liquid dispensing unit, a liquid storage unit, a placement plate, a drying unit, and a lifting mechanism; The cleaning table is equipped with a cleaning tank, and the drying unit is located on both sides of the cleaning tank; The lifting mechanism is located on the cleaning platform, the placement plate is connected to the lifting mechanism, the placement plate includes a plurality of placement holes for placing the dispensing heads to be cleaned, and the placement plate is located above the cleaning tank. The liquid storage unit is located on the cleaning platform and is connected to the cleaning tank via an automatic liquid addition unit.

2. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 1, characterized in that, The automatic liquid dispensing unit includes a float, a linkage mechanism, and a liquid guiding unit; One end of the liquid guiding unit is connected to the cleaning tank, and the other end is connected to the liquid storage unit. The float is connected to one end of the linkage mechanism. The float is placed in the cleaning tank, and the other end of the linkage mechanism links the liquid guiding unit and the liquid storage unit to discharge liquid.

3. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 2, characterized in that, The liquid storage unit includes a liquid storage tank and a liquid storage container. The liquid storage container is located on one side of the end face of the cleaning table. The liquid storage tank is connected upside down to the liquid storage container. The liquid storage container is connected to the liquid guiding unit.

4. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 3, characterized in that, The liquid guiding unit includes a mounting base and a liquid guiding pipe. The mounting base is fixed on the cleaning table, and the liquid guiding pipe is disposed on the mounting base. One end of the liquid guiding pipe extends to the cleaning tank, and the other end extends into the liquid storage tank. The liquid guiding pipe is also connected to the linkage end of the linkage mechanism.

5. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 4, characterized in that, The mounting base is provided with several annular limiting rings, which are wound around the liquid guide tube.

6. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 4, characterized in that, The mounting base has a concave arc-shaped groove on one side where the liquid guide tube is placed, and the liquid guide tube is placed in the arc-shaped groove.

7. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 4, characterized in that, The linkage mechanism includes a support rod, a support frame, a connector, a limiting plate, a sliding column, a gear, a fixed base, and a cam; The support rod is rotatably connected to the support frame to form a lever structure. One end of the support rod is connected to the float, and the other end is movably connected to the connector. The limiting plate is fixed on the cleaning table, the connecting member is connected to the sliding column, the sliding column is placed in the limiting plate and slides along the limiting plate, and the sliding column is provided with a rack on the other side opposite to the connecting member and is adapted to engage with the gear. The fixed seat is fixedly connected to the limiting plate, and the fixed seat is fixed to the outside of the limiting plate. The gear is rotatably connected to the fixed seat through a rotating shaft. The cam is linked to the gear via the rotating shaft, and one side of the cam is connected to the liquid guide tube.

8. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 1, characterized in that, The lifting mechanism includes a mounting frame, guide columns, a motor, and a threaded rod; The mounting frame is a U-shaped plate structure with the U-shaped opening facing the cleaning table and fixed thereon. One end of the placement plate is placed between the mounting frame and the cleaning table. The guide post is vertically connected between the mounting frame and the cleaning table, and the guide post vertically penetrates the placement plate; The mounting bracket is also equipped with a motor on the plate parallel to the cleaning table. The motor is connected to the threaded rod, and the threaded rod is connected to the placement plate through a threaded hole.

9. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 8, characterized in that, The mounting bracket is also equipped with a push-button switch on the inner side of the plate parallel to the cleaning table, and the push-button switch is connected to the drying unit for control.

10. The automatic dispensing head cleaning device for adding cleaning fluid according to claim 1, characterized in that, The drying unit includes several jet pipes, and the exhaust direction of the jet pipes is parallel to the placement plate.

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