Exposure machine with automatic vacuumizing function

Abstract

The utility model relates to the technical field of exposure machines, in particular to an exposure machine with an automatic vacuumizing function, which comprises an exposure mechanism and a film pressing mechanism, the vacuum suction device is arranged on the front side of the exposure mechanism, and the vacuum suction device is used for vacuumizing the exposed plate; and the feeding mechanism is arranged between the vacuum suction device and the exposure mechanism. When a plate is specifically placed, the base plate and the transfer printing plate are placed in the bottom frame together, the edge limiting frame limits the base plate and the transfer printing plate, in this way, after the base plate and the transfer printing plate are pressed through the negative pressure film on the edge limiting frame, it needs to be explained that a silica gel layer is arranged between the bottom of the edge limiting frame and the bottom frame; the silica gel layers can form a sealing state after being contacted, so that when the negative pressure vacuum device sucks the air valve nozzle, the inside can form a sealing state, and the condition of air leakage can be prevented.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an exposure machine with an automatic vacuuming function. Background Technology

[0002] An exposure machine is a key piece of equipment used in photolithography processes, widely applied in semiconductor manufacturing, printed circuit board (PCB) production, microelectromechanical systems (MEMS) fabrication, and other high-precision manufacturing fields. Its main function is to transfer design patterns from a photomask (or photomask) onto a substrate coated with photoresist using a specific light source.

[0003] Vacuuming in the exposure machine is commonly used in the photolithography process to ensure that the photoresist is in close contact with the wafer or substrate surface, achieving better pattern transfer.

[0004] The applicant discovered that in the existing process, directly setting the suction device at the location of the exposure structure requires vacuuming before exposure, which is time-consuming, has poor continuity, and results in disjointed intermediate exposure processes, leading to low efficiency. Utility Model Content

[0005] The purpose of this invention is to provide an exposure machine with an automatic vacuum function, thereby solving the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an exposure machine with automatic vacuuming function, comprising:

[0007] Exposure mechanism and lamination mechanism;

[0008] A vacuum suction device is provided on the front side of the exposure mechanism and is used to vacuum the exposed substrate.

[0009] A feeding mechanism is provided between the vacuum suction device and the exposure mechanism, and the outer end of the feeding mechanism located at the vacuum suction device protrudes outward from the vacuum suction device. A placement platform is provided on the top of the feeding mechanism.

[0010] A board placement mechanism is placed on top of the placement platform. The board placement mechanism is used to restrict the board, and the board placement area is in a vacuum state under the action of the vacuum suction device.

[0011] The vacuum suction device includes a negative pressure vacuum device inside. The negative pressure vacuum device moves up and down under the action of the film pressing mechanism. When the negative pressure vacuum device comes into contact with the board placement mechanism, the board placement mechanism is drawn into a vacuum state by the negative pressure vacuum device.

[0012] Furthermore, the feeding mechanism includes a slide rail table, on which a sliding seat is provided, and on the sliding seat are two drive slide rods. One end of each drive slide rod is fixedly connected to a forward and reverse motor. The drive slide rod is a lead screw, and two ball bearing sleeves are fitted on the drive slide rods. The ball bearing sleeves are fixedly connected to a lifting seat of the slide table base. The tops of the four slide tables bases are detachably connected to the bottom of the placement platform.

[0013] Furthermore, the lifting seat includes a mounting platform and a mounting portion disposed on the ball sleeve, the mounting portion being fixedly connected to the mounting platform via a hydraulic telescopic cylinder.

[0014] By configuring the feeding mechanism, during the exposure operation, the feeding mechanism has three placement stations. After the first board is placed, the forward and reverse motor rotates, driving the lead screw to rotate. This allows the first placement platform to move from the unloading station to the bottom of the negative pressure vacuum device for vacuuming. During vacuuming, the unloading station continues to feed material, then moves further inward. The vacuumed placement platform enters the exposure mechanism for exposure, while the second placed board enters the negative pressure vacuum device for vacuuming. Then, the unloading station continues feeding material. It should be noted that... Figure 1 In the diagram shown, the feeding mechanism is located outside the vacuum suction device and to the right of the exposure mechanism. In actual implementation, space is reserved for three mounting platforms to ensure that all three platforms are on the outside during the initial feeding state. The material is then fed from the position closest to the vacuum suction device, and the material on the third platform is exposed when the first platform moves to the rightmost position of the exposure mechanism. After that, the material can be unloaded.

[0015] During the vacuuming process, in order to ensure tightness after docking, the lifting seat can be moved upward a certain distance after docking, which can better ensure a tight docking.

[0016] Furthermore, the plate placement mechanism includes a base frame with a space for placing the plate. An edge limiting frame is fitted on the base frame to limit the exposure of the plate. A notch is provided in the middle of the edge limiting frame. A film pressing frame is also fitted inside the base frame, and a negative pressure film is provided inside the film pressing frame. The negative pressure film is attached to the surface of the plate. An air valve nozzle is also provided on the base frame, and the suction port of the air valve nozzle is located on one side of the plate.

[0017] When placing the substrate, the substrate and the transfer plate are placed together in the bottom frame, and the edge limiting frame limits the substrate and the transfer plate. After the negative pressure film on the edge limiting frame presses the substrate and the transfer plate, it should be noted that a silicone layer is set between the bottom of the edge limiting frame and the bottom frame. The silicone layer can form a seal when in contact. This way, when the negative pressure vacuum device draws air from the valve nozzle, the inside can form a seal and prevent air leakage.

[0018] Furthermore, the film pressing mechanism includes a lower pressure plate, the top of which is fixedly connected to the top of the inner wall of the vacuum suction device via a lifting cylinder, and a suction device is fixedly connected to the bottom of the inner wall of the lower pressure plate. The suction device is provided with four docking nozzles located directly above the air valve nozzle.

[0019] Furthermore, the negative pressure vacuum device includes a pressure plate, which is fixedly connected to the bottom of the lower pressure plate by a plurality of flexible connecting rods. A booster pump is provided on the pressure plate, and the air outlet of the booster pump is located in the inner cavity of the pressure plate.

[0020] Furthermore, the pressure plate includes a hollow plate, an air-membrane air pressure barrier layer is sleeved inside the hollow plate, a connecting airbag is movably sleeved inside the hollow plate, the inner cavity of the connecting airbag is connected to the inner cavity of the hollow plate, a flexible bonding plate is fixedly connected to the bottom of the connecting airbag, and air sleeve suction nozzles are fixedly connected to the four right angles at the bottom of the hollow plate, and the air sleeve suction nozzles are connected to the docking nozzles.

[0021] By improving the negative pressure vacuum device, when the pressure plate moves to the position of the board placement mechanism, the suction nozzle can connect with the air valve nozzle. During the downward movement of the air valve nozzle, an air passage is formed. In this way, the suction nozzle can draw the board placement mechanism into a vacuum state, thus completing the vacuuming operation. Before vacuuming, the booster pump increases the air pressure inside the hollow plate. Then, the air pressure barrier layer gradually makes way for the space under the push of the air pressure. Moreover, after the connecting airbag is gradually filled with air pressure, it bulges from the center to the periphery. When the flexible laminated plate comes into contact with the negative pressure membrane, it can drive the gas in the negative pressure membrane to the periphery. As the air pressure barrier layer gradually makes way for the space, the air pressure barrier layer moves downward with the connecting airbag. This creates a squeezing force at the top of the negative pressure membrane, which can improve the vacuuming speed, ensure that no air bubbles are formed inside, and thus make the vacuuming more thorough.

[0022] The technical effects and advantages of this utility model are as follows:

[0023] 1. Through the design of the feeding mechanism, during the exposure operation, the feeding mechanism has three placement stations. After the first plate is placed, the forward and reverse motor rotates, driving the lead screw to rotate. This allows the first placement platform to move from the unloading station to the bottom of the negative pressure vacuum device for vacuuming. During vacuuming, the unloading station continues to feed material, then moves further inward. The vacuumed placement platform enters the exposure mechanism for exposure, while the second plate is placed into the negative pressure vacuum device for vacuuming. Then, the unloading station continues feeding material. It should be noted that, if... Figure 1 In the diagram shown, the feeding mechanism is located outside the vacuum suction device and to the right of the exposure mechanism. In actual implementation, space is reserved for three mounting platforms to ensure that all three platforms are on the outside during the initial feeding state. The material is then fed from the position closest to the vacuum suction device, and the material on the third platform is exposed when the first platform moves to the rightmost position of the exposure mechanism. After that, the material can be unloaded.

[0024] 2. When placing the substrate, place the substrate and transfer plate together in the bottom frame, and limit the substrate and transfer plate with the edge limiting frame. Then, press the substrate and transfer plate with the negative pressure film on the edge limiting frame. It should be noted that a silicone layer is set between the bottom of the edge limiting frame and the bottom frame. The silicone layer can form a seal when in contact. This way, when the negative pressure vacuum device draws air from the valve nozzle, the inside can form a seal and prevent air leakage.

[0025] 3. Through improvements to the negative pressure vacuum device, when the pressure plate moves to the position of the board placement mechanism, the suction nozzle can connect with the air valve nozzle. During the downward movement of the air valve nozzle, an air passage is formed. In this way, the suction nozzle can draw the board placement mechanism into a vacuum state, thus completing the vacuuming operation. Before vacuuming, the booster pump increases the air pressure inside the hollow plate. Then, the air pressure barrier layer gradually makes way for the space under the push of the air pressure. Moreover, after the connecting airbag is gradually filled with air pressure, it bulges from the center to the periphery. When the flexible laminated plate comes into contact with the negative pressure membrane, it can drive the gas in the negative pressure membrane to the periphery. As the air pressure barrier layer gradually makes way for the space, the air pressure barrier layer moves downward with the connecting airbag. This creates a squeezing force at the top of the negative pressure membrane, which can improve the vacuuming speed, ensure that no air bubbles are formed inside, and thus make the vacuuming more thorough. Attached Figure Description

[0026] Figure 1 This is a side view of the present invention;

[0027] Figure 2 This is a perspective view of the present utility model;

[0028] Figure 3 This is a schematic diagram of the plate placement mechanism in this utility model;

[0029] Figure 4 This is a partial schematic diagram of the present invention;

[0030] Figure 5 This is a cross-sectional view of the pressure diaphragm plate of this utility model.

[0031] In the picture:

[0032] 1. Vacuum suction device; 2. Exposure mechanism; 3. Feeding mechanism; 31. Slide rail; 32. Drive slide rod; 33. Sliding seat; 34. Slide table seat; 4. Placement table; 5. Sheet placement mechanism; 51. Base frame; 52. Edge limiting frame; 53. Film pressing frame; 54. Negative pressure film; 55. Air valve nozzle; 6. Film pressing mechanism; 61. Lower pressure plate; 62. Lifting cylinder; 63. Suction device; 7. Negative pressure vacuum device; 71. Film pressing plate; 711. Hollow plate; 712. Air pressure barrier layer; 713. Connecting airbag; 714. Flexible bonding plate; 715. Suction nozzle; 72. Flexible connecting rod; 73. Pressurizing nozzle. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Reference Figures 1 to 5 An exposure machine with an automatic vacuum function is shown, comprising:

[0035] Exposure mechanism 2 and lamination mechanism 6;

[0036] Vacuum suction device 1 is located in front of exposure mechanism 2 and is used to vacuum the exposed substrate.

[0037] The feeding mechanism 3 is located between the vacuum suction device 1 and the exposure mechanism 2, and the outer end of the feeding mechanism 3 located at the vacuum suction device 1 protrudes outward from the vacuum suction device 1. The top of the feeding mechanism 3 is provided with a placement platform 4.

[0038] The board placement mechanism 5 is placed on top of the placement table 4. The board placement mechanism 5 is used to restrict the board, and under the action of the vacuum suction device 1, the board placement area is in a vacuum state.

[0039] The vacuum suction device 1 includes a negative pressure vacuum device 7 installed inside it. The negative pressure vacuum device 7 moves up and down under the action of the film pressing mechanism 6. When the negative pressure vacuum device 7 comes into contact with the board placement mechanism 5, the board placement mechanism 5 is drawn into a vacuum state by the negative pressure vacuum device 7.

[0040] The feeding mechanism 3 includes a slide rail table 31, a sliding seat 33 is provided on the slide rail table 31, and two drive slide rods 32 are provided on the sliding seat 33. One end of the drive slide rod 32 is fixedly connected to a forward and reverse motor. The drive slide rod 32 is a lead screw. Two ball sleeves are sleeved on the drive slide rod 32. The lifting seat of the slide table 34 is fixedly connected to the ball sleeve. The top of the four slide tables 34 is detachably connected to the bottom of the placement table 4.

[0041] The lifting seat includes a mounting platform and a mounting part set on the ball bearing sleeve. The mounting part is fixedly connected to the mounting platform by a hydraulic telescopic cylinder.

[0042] By configuring the feeding mechanism 3, during the exposure operation, the feeding mechanism 3 has three placement stations. After the first board is placed, the forward and reverse motor rotates, driving the lead screw to rotate, so that the first placement platform 4 can move from the unloading station to the bottom of the negative pressure vacuum device 7 for vacuuming. During the vacuuming process, the original unloading station continues to feed material and then continues to move inward. The vacuumed placement platform 4 enters the exposure mechanism 2 for exposure, while the second placed board enters the negative pressure vacuum device 7 for vacuuming. Then the unloading station continues to feed material. It should be noted that, as Figure 1 In the diagram shown, the feeding mechanism 3 is located outside the vacuum suction device 1 and to the right of the exposure mechanism 2. In actual implementation, space is reserved for three mounting platforms 4 to ensure that all three platforms 4 are on the outside during the initial feeding state. The material is then fed from the position close to the vacuum suction device 1, and the material on the third platform 4 is exposed when the first platform moves to the rightmost position of the exposure mechanism 2. After that, the material can be unloaded.

[0043] During the vacuuming process, in order to ensure tightness after docking, the lifting seat can be moved upward a certain distance after docking, which can better ensure a tight docking.

[0044] The board placement mechanism 5 includes a base frame 51, which has a space for placing the board. An edge limiting frame 52 is fitted on the base frame 51 to limit the exposure of the board. The edge limiting frame 52 has a notch in the middle. A film pressing frame 53 is also fitted inside the base frame 51. A negative pressure film 54 is set inside the film pressing frame 53 and is attached to the surface of the board. An air valve nozzle 55 is also set on the base frame 51. The suction port of the air valve nozzle 55 is located on one side of the board.

[0045] When placing the substrate, the substrate and the transfer plate are placed together in the bottom frame 51, and the edge limiting frame 52 limits the substrate and the transfer plate. After the negative pressure film 54 on the edge limiting frame 52 presses the substrate and the transfer plate, it should be noted that a silicone layer is provided between the bottom of the edge limiting frame 52 and the bottom frame 51. The silicone layer can form a seal after contact. In this way, when the negative pressure vacuum device 7 draws air from the valve nozzle 55, the inside can form a seal and prevent air leakage.

[0046] The film pressing mechanism 6 includes a lower pressing plate 61. The top of the lower pressing plate 61 is fixedly connected to the top of the inner wall of the vacuum suction device 1 via a lifting cylinder 62. A suction device 63 is fixedly connected to the bottom of the inner wall of the lower pressing plate 61. The suction device 63 is provided with four docking nozzles located directly above the air valve nozzle 55.

[0047] The negative pressure vacuum device 7 includes a pressure plate 71, which is fixedly connected to the bottom of the lower pressure plate 61 by a plurality of flexible connecting rods 72. A booster pump is provided on the pressure plate 71, and the air outlet 73 of the booster pump is located in the inner cavity of the pressure plate 71.

[0048] The pressure plate 71 includes a hollow plate 711, an air pressure barrier layer 712 is provided inside the hollow plate 711, a connecting airbag 713 is movably provided inside the hollow plate 711, the inner cavity of the connecting airbag 713 is connected to the inner cavity of the hollow plate 711, a flexible bonding plate 714 is fixedly connected to the bottom of the connecting airbag 713, and air sleeve suction nozzles 715 are fixedly connected to the four right angles at the bottom of the hollow plate 711, and the air sleeve suction nozzles 715 are connected to the docking nozzle.

[0049] By improving the negative pressure vacuum device 7, when the pressure plate 71 moves to the position of the board placement mechanism 5, the suction nozzle 715 can communicate with the air valve nozzle 55. The air valve nozzle 55 can create a ventilation state during its downward movement. This allows the suction nozzle 715 to create a vacuum within the board placement mechanism 5, thus completing the vacuuming operation. Before vacuuming, the booster pump increases the air pressure inside the hollow plate 711. Under this pressure, the air pressure barrier layer 712 gradually moves away from the space, and the connecting airbag 713 gradually fills with air pressure, bulging from the center to the periphery. When the flexible bonding plate 714 contacts the negative pressure membrane 54, it can push the gas in the negative pressure membrane 54 to the surrounding areas. As the air pressure barrier layer 712 gradually moves away from the space, it moves downward with the connecting airbag 713, creating a squeezing force at the top of the negative pressure membrane 54. This increases the vacuuming speed, prevents air bubbles from forming inside, and makes the vacuuming more thorough.

[0050] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An exposure machine with automatic vacuuming function, characterized in that, include: Exposure mechanism (2) and lamination mechanism (6); Vacuum suction device (1), the vacuum suction device (1) is disposed on the front side of the exposure mechanism (2), the vacuum suction device (1) is used to vacuum the exposed plate; Feeding mechanism (3), the feeding mechanism (3) is located between the vacuum suction device (1) and the exposure mechanism (2), and the outer end of the feeding mechanism (3) located at the vacuum suction device (1) protrudes outward from the vacuum suction device (1), and a placement platform (4) is provided on the top of the feeding mechanism (3). The board placement mechanism (5) is placed on top of the placement platform (4). The board placement mechanism (5) is used to restrict the board, and the board placement area is in a vacuum state under the action of the vacuum suction device (1). The vacuum suction device (1) includes a negative pressure vacuum device (7) inside it. The negative pressure vacuum device (7) moves up and down under the action of the pressing mechanism (6). When the negative pressure vacuum device (7) comes into contact with the plate placement mechanism (5), the plate placement mechanism (5) is drawn into a vacuum state by the negative pressure vacuum device (7).

2. The exposure machine with automatic vacuuming function according to claim 1, characterized in that, The feeding mechanism (3) includes a slide rail table (31), a sliding seat (33) is provided on the slide rail table (31), and two drive slide rods (32) are provided on the sliding seat (33). One end of the drive slide rod (32) is fixedly connected to a forward and reverse motor. The drive slide rod (32) is a lead screw. Two ball sleeves are sleeved on the drive slide rod (32). The lifting seat of the slide table seat (34) is fixedly connected to the ball sleeve. The top of the four slide table seats (34) is detachably connected to the bottom of the placement table (4).

3. An exposure machine with automatic vacuuming function according to claim 2, characterized in that, The lifting seat includes a mounting platform and a mounting portion disposed on the ball bearing sleeve. The mounting portion is fixedly connected to the mounting platform via a hydraulic telescopic cylinder.

4. An exposure machine with automatic vacuuming function according to claim 3, characterized in that, The plate placement mechanism (5) includes a bottom frame (51), which has a space for placing the plate. An edge limiting frame (52) is fitted on the bottom frame (51) to limit the exposure of the plate. A notch is provided in the middle of the edge limiting frame (52). A film pressing frame (53) is also fitted inside the bottom frame (51). A negative pressure film (54) is provided inside the film pressing frame (53). The negative pressure film (54) is attached to the surface of the plate. An air valve nozzle (55) is also provided on the bottom frame (51). The suction port of the air valve nozzle (55) is located on one side of the plate.

5. An exposure machine with automatic vacuuming function according to claim 4, characterized in that, The pressing mechanism (6) includes a lower pressing plate (61). The top of the lower pressing plate (61) is fixedly connected to the top of the inner wall of the vacuum suction device (1) by a lifting cylinder (62). A suction device (63) is fixedly connected to the bottom of the inner wall of the lower pressing plate (61). The suction device (63) is provided with four docking nozzles located directly above the air valve nozzle (55).

6. An exposure machine with automatic vacuuming function according to claim 5, characterized in that, The negative pressure vacuum device (7) includes a pressure plate (71), which is fixedly connected to the bottom of the lower pressure plate (61) by a plurality of flexible connecting rods (72). A booster pump is provided on the pressure plate (71), and the air outlet (73) of the booster pump is located in the inner cavity of the pressure plate (71).

7. An exposure machine with automatic vacuuming function according to claim 6, characterized in that, The pressure plate (71) includes a hollow plate (711), an air pressure barrier layer (712) is provided inside the hollow plate (711), a connecting airbag (713) is movably provided inside the hollow plate (711), the inner cavity of the connecting airbag (713) is connected to the inner cavity of the hollow plate (711), a flexible bonding plate (714) is fixedly connected to the bottom of the connecting airbag (713), and air sleeve suction nozzles (715) are fixedly connected to the four right angles at the bottom of the hollow plate (711), and the air sleeve suction nozzles (715) are connected to the docking nozzle.

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