Aluminum boat structure
By designing a new aluminum boat structure, the bottom of the silicon wafer only contacts the support rod, increasing the airflow space and solving the problem of uneven alumina winding after silicon wafer passivation, thus improving the performance and consistency of the silicon wafer.
Patent Information
- Application Number
- CN202520263726.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-18
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-02-18
AI Technical Summary
In existing technologies, the uniformity of alumina winding on the back side of silicon wafers after passivation is poor, which affects the performance and consistency of the silicon wafers.
Design an aluminum boat structure including two oppositely arranged end plates, a first positioning rod group, a second positioning rod group, and a support rod group. The silicon wafer is installed in the first and second silicon wafer mounting slots. The bottom of the silicon wafer only contacts the support rod, which only serves a supporting function, increasing the airflow space and separating the silicon wafer by airflow.
This improved the uniformity of alumina winding on the back of the silicon wafer, enhanced the performance and consistency of the wafer, and solved the problem of uneven alumina winding on the back of the silicon wafer.
Smart Images
Figure CN223899644U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photovoltaic technology, and more specifically, to an aluminum boat structure. Background Technology
[0002] Currently, technologies such as Topcon in the photovoltaic industry use atomic deposition for passivation, which involves placing silicon wafers into an aluminum boat structure and then performing atomic deposition in a cavity.
[0003] In existing technologies, aluminum boat structures typically employ a combination of single-sided and bottom-tooth structures, coupled with automated 3° angle silicon wafer insertion and removal. However, due to the electrostatic attraction of the silicon wafers, they adhere back-to-back, affecting the uniformity of the alumina winding on the back of the wafers. Utility Model Content
[0004] The main objective of this invention is to provide an aluminum boat structure to solve the problem of poor uniformity of aluminum oxide winding on the back side of silicon wafers after passivation in the prior art.
[0005] To achieve the above objectives, this utility model provides an aluminum boat structure, comprising: two oppositely arranged end plates; a first positioning rod group disposed between the two end plates, the first positioning rod group comprising a plurality of first positioning rods spaced apart along a first direction, each first positioning rod having a plurality of first silicon wafer mounting slots spaced apart along a second direction; a second positioning rod group disposed between the two end plates, the second positioning rod group comprising a plurality of second positioning rods spaced apart along the first direction, each second positioning rod having a plurality of second silicon wafer mounting slots spaced apart along the second direction; and a support rod group disposed between the two end plates, the support rod group comprising a plurality of support rods spaced apart along the first direction, the support rod group being used to support the silicon wafers; wherein, along a third direction, the second positioning rod group is located between the first positioning rod group and the support rod group; the first direction and the second direction are parallel to each other, and the third direction is at an angle to the first direction.
[0006] Furthermore, the distance between two adjacent support rods is greater than or equal to 50mm and less than or equal to 70mm.
[0007] Furthermore, the support rod is a round rod with a diameter greater than or equal to 4 mm and less than or equal to 6 mm.
[0008] Furthermore, multiple first positioning rods are arranged in a one-to-one correspondence with multiple second positioning rods, and the distance between each first positioning rod and its corresponding second positioning rod is greater than or equal to 70mm and less than or equal to 100mm.
[0009] Furthermore, the first positioning rod is a first rectangular rod, and a first silicon wafer mounting groove is provided on each of the two opposite sides of the first rectangular rod; and / or, the second positioning rod is a second rectangular rod, and a second silicon wafer mounting groove is provided on each of the two opposite sides of the second rectangular rod.
[0010] Furthermore, the first silicon wafer mounting groove is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove; and / or, the second silicon wafer mounting groove is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove.
[0011] Furthermore, the spacing between two adjacent first silicon wafer mounting slots is greater than or equal to 1.0 mm and less than or equal to 2.0 mm; and / or, the spacing between two adjacent second silicon wafer mounting slots is greater than or equal to 1.0 mm and less than or equal to 2.0 mm.
[0012] Furthermore, the distance between the second positioning rod group and the support rod group is less than the distance between the second positioning rod group and the first positioning rod group.
[0013] Furthermore, the multiple first silicon wafer mounting slots on each first positioning rod are configured in a one-to-one correspondence with the multiple second silicon wafer mounting slots on the corresponding second positioning rod.
[0014] Furthermore, there is a preset space between each pair of adjacent support rods, and each first positioning rod is positioned relative to the preset space; and / or, each second positioning rod is positioned relative to the preset space.
[0015] The aluminum boat structure, employing the technical solution of this utility model, includes two opposing end plates, a first positioning rod group, a second positioning rod group, and a support rod group. The first positioning rod group is disposed between the two end plates and includes multiple first positioning rods spaced apart along a first direction. Each first positioning rod has multiple first silicon wafer mounting slots spaced apart along a second direction. The second positioning rod group is disposed between the two end plates and includes multiple second positioning rods spaced apart along the first direction. Each second positioning rod has multiple second silicon wafer mounting slots spaced apart along the second direction. The support rod group is disposed between the two end plates and includes multiple support rods spaced apart along the first direction. The support rod group is used to support the silicon wafers. The second positioning rod group is located between the first positioning rod group and the support rod group along a third direction. Thus, the first positioning rod group is positioned above the second positioning rod group and the support rod group. During the silicon wafer processing, each silicon wafer is installed in the first and second silicon wafer mounting slots so that the bottom of the silicon wafer contacts the support rod. Compared with the existing technology where the bottom of the silicon wafer is inserted into the bottom tooth structure of the aluminum boat, the aluminum boat structure in this application allows the bottom of the silicon wafer to only contact the support rod, which only plays a supporting role. This reduces the contact area under the silicon wafer and increases the airflow space, so that the silicon wafer can be separated by airflow. This solves the problem of poor uniformity of alumina winding on the back of the silicon wafer after passivation in the prior art, and improves the uniformity of alumina winding on the back of the silicon wafer. Attached Figure Description
[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:
[0017] Figure 1 A three-dimensional structural schematic diagram of an embodiment of the aluminum boat structure according to the present invention is shown;
[0018] Figure 2 It shows Figure 1 Enlarged schematic diagram of point A in the aluminum boat structure;
[0019] Figure 3 It shows Figure 1 A side view of the aluminum boat structure in the image.
[0020] The above figures include the following reference numerals:
[0021] 10. End plate; 20. First positioning rod group; 21. First positioning rod; 211. First silicon wafer mounting slot; 30. Second positioning rod group; 31. Second positioning rod; 311. Second silicon wafer mounting slot; 40. Support rod group; 41. Support rod. Detailed Implementation
[0022] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.
[0023] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.
[0024] In this utility model, unless otherwise stated, directional terms such as "upper" and "lower" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" are generally used in relation to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.
[0025] To address the problem of poor uniformity of alumina winding on the back side of silicon wafers after passivation in existing technologies, this application provides an aluminum boat structure.
[0026] like Figures 1 to 3 As shown, the aluminum boat structure includes two opposing end plates 10, a first positioning rod group 20, a second positioning rod group 30, and a support rod group 40. The first positioning rod group 20 is disposed between the two end plates 10 and includes multiple first positioning rods 21 spaced apart along a first direction. Each first positioning rod 21 has multiple first silicon wafer mounting slots 211 spaced apart along a second direction. The second positioning rod group 30 is disposed between the two end plates 10 and includes multiple second positioning rods 31 spaced apart along the first direction. Each second positioning rod 31 has multiple second silicon wafer mounting slots 311 spaced apart along the second direction. The support rod group 40 is disposed between the two end plates 10 and includes multiple support rods 41 spaced apart along the first direction. The support rod group 40 is used to support the silicon wafers. The second positioning rod group 30 is located between the first positioning rod group 20 and the support rod group 40 along a third direction. The first and second directions are parallel to each other, and the third direction forms an angle with the first direction.
[0027] Applying the technical solution of this embodiment, the first positioning rod group 20 is located above the second positioning rod group 30 and the support rod group 40. During the silicon wafer processing, each silicon wafer is installed in the first silicon wafer mounting groove 211 and the second silicon wafer mounting groove 311 so that the bottom of the silicon wafer contacts the support rod 41. Compared with the prior art where the bottom of the silicon wafer is inserted into the bottom tooth structure of the aluminum boat, the aluminum boat structure in this embodiment makes the bottom of the silicon wafer only contact the support rod 41, and the support rod 41 only plays a supporting role, thereby reducing the contact area under the silicon wafer and increasing the airflow space to separate the silicon wafer by airflow. This solves the problem of poor uniformity of alumina winding on the back of the silicon wafer after passivation in the prior art, and improves the uniformity of alumina winding on the back of the silicon wafer.
[0028] In this embodiment, the first direction is the length direction of the end plate 10. Along the first direction, the number of first positioning rods 21 is the same as the number of second positioning rods 31, and they are arranged opposite to each other.
[0029] In this embodiment, the third direction is perpendicular to the first direction and is the width direction of the end plate 10.
[0030] Optionally, the distance between two adjacent support rods 41 is greater than or equal to 50 mm and less than or equal to 70 mm. This spacing design increases the space for airflow, thereby ensuring the uniformity of atomic deposition on the silicon wafer.
[0031] In this embodiment, the distance between two adjacent support rods 41 is 60mm.
[0032] It should be noted that the distance between two adjacent support rods 41 is not limited to this and can be adjusted according to working conditions and usage requirements. Optionally, the distance between two adjacent support rods 41 can be 55mm, 58mm, 62mm, 65mm, or 68mm.
[0033] Optionally, the support rod 41 is a round rod with a diameter greater than or equal to 4 mm and less than or equal to 6 mm. In this way, by using a round rod with a diameter between 4 mm and 6 mm as the support rod 41, the uniformity and consistency of the silicon wafer alumina winding during the passivation process can be ensured, thereby improving the performance and consistency of the product.
[0034] In this embodiment, the diameter of the round rod is 5mm.
[0035] It should be noted that the diameter of the round rod is not limited to this value and can be adjusted according to working conditions and usage requirements. Optionally, the diameter of the round rod may be 4.2mm, 4.5mm, 4.8mm, 5.2mm, 5.5mm, or 5.8mm.
[0036] Optionally, multiple first positioning rods 21 are arranged in a one-to-one correspondence with multiple second positioning rods 31, and the distance between each first positioning rod 21 and its corresponding second positioning rod 31 is greater than or equal to 70 mm and less than or equal to 100 mm. In this way, by controlling the distance between the first positioning rods 21 and the second positioning rods 31 to be between 70 mm and 100 mm, it can be ensured that the position of the silicon wafer does not shift during the atomic deposition process, avoiding alignment problems that may be encountered in subsequent processes, and improving the overall process accuracy and efficiency.
[0037] In this embodiment, the distance between each first positioning rod 21 and its corresponding second positioning rod 31 is 86mm.
[0038] It should be noted that the distance between each first positioning rod 21 and its corresponding second positioning rod 31 is not limited to this value and can be adjusted according to working conditions and usage requirements. Optionally, the distance between each first positioning rod 21 and its corresponding second positioning rod 31 can be 75mm, 78mm, 80mm, 82mm, 88mm, 90mm, 92mm, 95mm, or 98mm.
[0039] Optionally, the first positioning rod 21 is a first rectangular rod, and a first silicon wafer mounting groove 211 is provided on each of the two opposite sides of the first rectangular rod; and / or, the second positioning rod 31 is a second rectangular rod, and a second silicon wafer mounting groove 311 is provided on each of the two opposite sides of the second rectangular rod. In this way, the above-mentioned arrangement of the rectangular rod increases the strength of the positioning rod, while providing more mounting grooves, improving the loading capacity of the aluminum boat structure, and making it suitable for production environments requiring the loading of large quantities of silicon wafers.
[0040] In this embodiment, the first positioning rod 21 is a first rectangular rod, and a first silicon wafer mounting groove 211 is provided on each of the two opposite sides of the first rectangular rod, with the opening of the first silicon wafer mounting groove 211 facing away from its corresponding side. The second positioning rod 31 is a second rectangular rod, and a second silicon wafer mounting groove 311 is provided on each of the two opposite sides of the second rectangular rod, with the opening of the second silicon wafer mounting groove 311 facing away from its corresponding side.
[0041] Specifically, the length direction of the first rectangular rod and the length direction of the second rectangular rod are both consistent with the first direction.
[0042] Optionally, the first silicon wafer mounting groove 211 is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove; and / or, the second silicon wafer mounting groove 311 is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove. In this way, different groove designs can adapt to different types of silicon wafers, improving the versatility of the aluminum boat structure and making it suitable for production environments handling silicon wafers of various specifications. At the same time, the above-mentioned configuration allows for more flexible selection of the shapes of the first and second silicon wafer mounting grooves 211 to meet different usage requirements and working conditions, and also improves the processing flexibility of the workers.
[0043] In this embodiment, both the first silicon wafer mounting groove 211 and the second silicon wafer mounting groove 311 are trapezoidal grooves. This arrangement increases the contact area between the silicon wafer and the first and second silicon wafer mounting grooves 211 and 311, thereby improving the stability of the aluminum boat structure in supporting the silicon wafer.
[0044] Optionally, the spacing between two adjacent first silicon wafer mounting slots 211 is greater than or equal to 1.0 mm and less than or equal to 2.0 mm; and / or, the spacing between two adjacent second silicon wafer mounting slots 311 is greater than or equal to 1.0 mm and less than or equal to 2.0 mm. This precise slot spacing control ensures sufficient airflow space between the silicon wafers, thereby separating them through airflow and improving the uniformity of the alumina winding on the back of the silicon wafers.
[0045] In this embodiment, the distance between two adjacent first silicon wafer mounting slots 211 is 1.6 mm, and the distance between two adjacent second silicon wafer mounting slots 311 is 1.6 mm.
[0046] It should be noted that the spacing between two adjacent first silicon wafer mounting slots 211 is not limited to this value and can be adjusted according to working conditions and usage requirements. Optionally, the spacing between two adjacent first silicon wafer mounting slots 211 is 1.2mm, 1.5mm, or 1.8mm.
[0047] It should be noted that the spacing between two adjacent second silicon wafer mounting slots 311 is not limited to this value and can be adjusted according to working conditions and usage requirements. Optionally, the spacing between two adjacent second silicon wafer mounting slots 311 can be 1.2mm, 1.5mm, or 1.8mm.
[0048] Optionally, the distance between the second positioning rod group 30 and the support rod group 40 is smaller than the distance between the second positioning rod group 30 and the first positioning rod group 20. This configuration optimizes the airflow distribution during the passivation process, further improving the uniformity of the alumina winding on the back side of the silicon wafer.
[0049] Optionally, the plurality of first silicon wafer mounting slots 211 on each of the first positioning rods 21 are configured in a one-to-one correspondence with the plurality of second silicon wafer mounting slots 311 on their corresponding second positioning rods 31. In this way, by ensuring that the mounting slots on the first positioning rods 21 and the second positioning rods 31 correspond one-to-one, precise alignment of the silicon wafers can be achieved.
[0050] Optionally, a preset space exists between each pair of adjacent support rods 41, with each first positioning rod 21 positioned opposite to the preset space; and / or, each second positioning rod 31 positioned opposite to the preset space. This arrangement ensures that all first positioning rods 21 are staggered from all support rods 41, and all second positioning rods 31 are staggered from all support rods 41. This staggered arrangement further increases the airflow space between the positioning rods and support rods 41, optimizing the airflow distribution during the passivation process and further improving the uniformity of the alumina winding on the back of the silicon wafer.
[0051] Optionally, color markings are provided on the end plate 10 to help operators identify the correct loading direction of the aluminum boat structure, ensuring efficiency and accuracy in the production process.
[0052] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:
[0053] The aluminum boat structure includes two opposing end plates, a first positioning rod group, a second positioning rod group, and a support rod group. The first positioning rod group is positioned between the two end plates and includes multiple first positioning rods spaced apart along a first direction. Each first positioning rod has multiple first silicon wafer mounting slots spaced apart along a second direction. The second positioning rod group is positioned between the two end plates and includes multiple second positioning rods spaced apart along the first direction. Each second positioning rod has multiple second silicon wafer mounting slots spaced apart along the second direction. The support rod group is positioned between the two end plates and includes multiple support rods spaced apart along the first direction. The support rod group is used to support the silicon wafers. The second positioning rod group is located between the first positioning rod group and the support rod group along a third direction. Thus, the first positioning rod group is positioned above the second positioning rod group and the support rod group. During the silicon wafer processing, each silicon wafer is installed in the first and second silicon wafer mounting slots so that the bottom of the silicon wafer contacts the support rod. Compared with the existing technology where the bottom of the silicon wafer is inserted into the bottom tooth structure of the aluminum boat, the aluminum boat structure in this application allows the bottom of the silicon wafer to only contact the support rod, which only plays a supporting role. This reduces the contact area under the silicon wafer and increases the airflow space, so that the silicon wafer can be separated by airflow. This solves the problem of poor uniformity of alumina winding on the back of the silicon wafer after passivation in the prior art, and improves the uniformity of alumina winding on the back of the silicon wafer.
[0054] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.
[0055] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0056] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.
[0057] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. An aluminum boat structure, characterized in that, include: Two oppositely positioned end plates (10); A first positioning rod group (20) is disposed between the two end plates (10). The first positioning rod group (20) includes a plurality of first positioning rods (21) spaced apart along a first direction. Each first positioning rod (21) has a plurality of first silicon wafer mounting grooves (211) spaced apart along a second direction. The second positioning rod group (30) is disposed between the two end plates (10). The second positioning rod group (30) includes a plurality of second positioning rods (31) spaced apart along a first direction. Each second positioning rod (31) has a plurality of second silicon wafer mounting slots (311) spaced apart along a second direction. A support rod assembly (40) is disposed between the two end plates (10). The support rod assembly (40) includes a plurality of support rods (41) spaced apart along a first direction. The support rod assembly (40) is used to support the silicon wafer. Along the third direction, the second positioning rod group (30) is located between the first positioning rod group (20) and the support rod group (40); the first direction and the second direction are arranged parallel to each other, and the third direction is arranged at an angle to the first direction.
2. The aluminum boat structure according to claim 1, characterized in that, The distance between two adjacent support rods (41) is greater than or equal to 50 mm and less than or equal to 70 mm.
3. The aluminum boat structure according to claim 1, characterized in that, The support rod (41) is a round rod with a diameter greater than or equal to 4 mm and less than or equal to 6 mm.
4. The aluminum boat structure according to claim 1, characterized in that, Multiple first positioning rods (21) are provided in a one-to-one correspondence with multiple second positioning rods (31), and the distance between each first positioning rod (21) and its corresponding second positioning rod (31) is greater than or equal to 70 mm and less than or equal to 100 mm.
5. The aluminum boat structure according to claim 1, characterized in that, The first positioning rod (21) is a first rectangular rod, and the first silicon wafer mounting groove (211) is provided on both opposite sides of the first rectangular rod; and / or, the second positioning rod (31) is a second rectangular rod, and the second silicon wafer mounting groove (311) is provided on both opposite sides of the second rectangular rod.
6. The aluminum boat structure according to claim 1, characterized in that, The first silicon wafer mounting groove (211) is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove; and / or, the second silicon wafer mounting groove (311) is at least one of a trapezoidal groove, a rectangular groove, a V-shaped groove, and an arc-shaped groove.
7. The aluminum boat structure according to claim 1, characterized in that, The spacing between two adjacent first silicon wafer mounting slots (211) is greater than or equal to 1.0 mm and less than or equal to 2.0 mm; and / or, the spacing between two adjacent second silicon wafer mounting slots (311) is greater than or equal to 1.0 mm and less than or equal to 2.0 mm.
8. The aluminum boat structure according to claim 1, characterized in that, The distance between the second positioning rod group (30) and the support rod group (40) is less than the distance between the second positioning rod group (30) and the first positioning rod group (20).
9. The aluminum boat structure according to claim 1, characterized in that, Each of the first silicon wafer mounting slots (211) on the first positioning rod (21) is provided with a corresponding first silicon wafer mounting slot (311) on the second positioning rod (31).
10. The aluminum boat structure according to claim 1, characterized in that, There is a preset space between each pair of adjacent support rods (41), and each of the first positioning rods (21) is arranged opposite to the preset space; and / or, each of the second positioning rods (31) is arranged opposite to the preset space.