Boat support mechanism of ALD (atomic layer deposition) equipment and in-out boat conveying device

Abstract

The utility model provides a boat supporting mechanism of ALD equipment and an in-out boat conveying device. The boat supporting mechanism comprises a support and a plurality of supporting columns. The support comprises a plurality of supporting side plates arranged oppositely and a plurality of supporting top plates connected between the supporting side plates at intervals, and the supporting side plates are placed on a synchronous belt of the conveying mechanism. The plurality of supporting columns are vertically arranged on the plurality of supporting top plates and are used for jointly supporting the slide glass boat; according to the utility model, the independent boat supporting mechanism is used for supporting the wafer carrying boat, so that separated supporting and conveying are realized, the fragmentation rate of the battery piece caused by impact vibration generated during operation of a supporting and conveying integrated structure is reduced, and the convenience of equipment installation and maintenance is improved.

Description

Technical Field

[0001] This utility model belongs to the field of solar cell technology, and more specifically, it relates to a boat support mechanism and a boat inlet / outlet conveying device for an ALD device. Background Technology

[0002] With the continuous development of the photovoltaic industry and the upgrading of solar cell technology, ALD (atomic layer deposition) equipment is being used more and more widely in the production process of solar cells.

[0003] like Figure 1 As shown, the current mainstream method for transporting solar cell carriers is to use a sliding block guide rail type conveying mechanism to transport the carrier support mechanism. The existing carrier support mechanism consists of a mounting plate and multiple support columns erected on this mounting plate to support the solar cell carrier. This mounting plate is locked to the sliding block of the conveying mechanism with screws. In this mainstream method, transportation and support are integrated, resulting in relatively high manufacturing, installation, and maintenance costs. Furthermore, because the existing carrier support mechanism is rigidly connected to the conveying mechanism, this integrated structure increases the breakage rate of solar cells inside the carrier due to mechanical impact and vibration. Utility Model Content

[0004] The purpose of this utility model is to provide a boat support mechanism and a boat loading and unloading conveying device for an ALD device, so as to solve the problem of increased cell breakage rate in the carrier boat due to mechanical impact and vibration in the existing integrated transportation and support structure.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a boat support mechanism for an ALD device, characterized in that it includes:

[0007] The support includes a plurality of opposing support side plates and a plurality of support top plates spaced apart between the plurality of support side plates, the support side plates being placed on the timing belt of the conveying mechanism.

[0008] Multiple support columns are erected on multiple support top plates and are used to jointly support the slide boat.

[0009] Furthermore, the feature is that each of the supporting side plates is provided with guide wheels at both ends, and each guide wheel cooperates with the corresponding guide block in the conveying mechanism to form a guiding and positioning structure.

[0010] Furthermore, the support is characterized in that there are two support side plates and two support top plates, and the bracket includes a first support side plate, a first support top plate, a second support side plate, and a second support top plate that are sequentially spliced ​​together.

[0011] Furthermore, the first supporting side plate, the first supporting top plate, the second supporting side plate, and the second supporting top plate together form a receiving area, and a buffer pad is provided in the receiving area for catching the battery cells falling from the supporting carrier boat.

[0012] Furthermore, the cushioning pad is made of thermal insulation material.

[0013] Furthermore, the number of support columns is four, including two first support columns that are erected at intervals on the first support top plate and two second support columns that are erected at intervals on the second support top plate.

[0014] Furthermore, each of the first support columns is provided with a positioning pin at its top, which is used to position the slide boat when it is placed on the four support columns.

[0015] Furthermore, the support is made of metal.

[0016] This utility model also provides an inlet and outlet boat conveying device for ALD equipment, including a fixed frame, a conveying mechanism installed on the fixed frame, and a boat support mechanism for ALD equipment as described above. The conveying mechanism includes multiple synchronous belts arranged opposite to each other, and the multiple synchronous belts move synchronously to drive the boat support mechanism located thereon to move.

[0017] Furthermore, each of the synchronous belts has two guide blocks spaced apart on one side. Each guide block cooperates with the corresponding guide wheel in the boat support mechanism to form a guide alignment structure. Each guide block has at least one waist-shaped hole, which is used to adjust the installation position of the guide block.

[0018] Compared with the prior art, the advantages of the boat support mechanism and boat inlet / outlet conveying device of the ALD equipment provided by this utility model are as follows:

[0019] 1. An independent boat support mechanism is used to support the cell carrier boat, realizing separate support and transportation. This reduces the cell breakage rate caused by the impact vibration generated during operation of the integrated support and transportation structure, and improves the convenience of equipment installation and maintenance.

[0020] 2. A guiding and positioning structure is adopted on the boat support mechanism and the conveying mechanism. The designed guiding and positioning structure can achieve accurate positioning of the boat support mechanism in actual movement.

[0021] 3. The boat support mechanism is equipped with a buffer pad, which is made of heat insulation cotton. The buffer pad is designed to effectively cushion the falling battery cells, reducing the breakage rate of the battery cells during the process. It also reduces the heat transferred from the process boat to the conveying mechanism, thereby protecting the normal operation of the conveying mechanism. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of an integrated support and conveying structure for existing ALD equipment;

[0024] Figure 2 A schematic diagram of the inlet and outlet conveyor device of the ALD equipment provided in the preferred embodiment of this utility model;

[0025] Figure 3 A schematic diagram of the boat support mechanism for the ALD device carrying the sheet carrier boat provided in a preferred embodiment of this utility model;

[0026] Figure 4 A three-dimensional structural diagram of the boat support mechanism of the ALD device provided in the preferred embodiment of this utility model;

[0027] Figure 5 A top view of the boat support mechanism of the ALD device provided in the preferred embodiment of this utility model;

[0028] Figure 6 for Figure 5 Enlarged structural diagram at point A in the middle;

[0029] The main markings in the attached figures are as follows:

[0030] 1. Carrying boat; 2. Boat support mechanism; 3. Conveying mechanism; 4. Fixing frame;

[0031] 20. Mounting plate; 21. Support column; 22. Bracket; 23. Buffer pad; 24. Positioning pin; 25. Guide wheel;

[0032] 221. Supporting side panels; 223. Supporting top panel;

[0033] 2110, First support column; 2112, Second support column; 2211, First support side plate; 2212, Second support side plate; 2231, First support top plate; 2232, Second support top plate;

[0034] 30. Slider; 32. Synchronous belt; 33. Guide block;

[0035] 331. Waist-shaped hole; 332. Round hole. Detailed Implementation

[0036] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0037] like Figure 1 As shown, the existing boat support mechanism 2 consists of a mounting plate 20 and multiple support columns 21. The multiple support columns 21 are erected on this mounting plate 20 and are used to jointly support the slide boat 1. This mounting plate 20 is locked to the slider 30, which moves along the linear slide rail, by screws. Currently, the mainstream method for conveying the slide boat 1 is to movably mount the boat support mechanism 2 on the linear slide rail and realize the conveying of the slide boat 1 through a gear and rack transmission. However, the existing mainstream conveying method has the following disadvantages:

[0038] 1) The boat support mechanism 2 and the conveying mechanism 3 are designed as an integrated unit, which results in relatively high manufacturing precision, installation requirements and maintenance costs.

[0039] 2) The linear guide rail and power transmission rack are relatively long, requiring multiple segments to be spliced ​​together, which makes installation and positioning difficult, maintenance difficult, and manufacturing cost high.

[0040] 3) The mounting plate 20 in the boat support mechanism 2 is rigidly connected to the linear slide rail in the conveying mechanism 3. Impact vibration is easily generated at the splicing point of the linear slide rail and the power transmission rack, which leads to an increase in the fragmentation rate of the battery cells in the carrier boat 1 and a large transmission noise.

[0041] 4) During the transport process, the solar cells in the carrier boat 1 may fall onto the mounting plate 20 in the boat support mechanism 2. At this time, the solar cells are easily broken, which increases the fragmentation rate of the solar cells.

[0042] To address the aforementioned problems, this utility model proposes a new boat support mechanism and boat loading / unloading conveyor for ALD equipment.

[0043] like Figure 2 As shown, the inbound and outbound boat conveying device of the ALD equipment includes at least a fixed frame 4, a conveying mechanism 3, and a boat support mechanism 2. The conveying mechanism 3 is mounted on the fixed frame 4, while the boat support mechanism 2 and the conveying mechanism 3 are designed separately.

[0044] The conveying mechanism 3 includes multiple synchronous belts 32 arranged opposite each other. The synchronous movement of the multiple synchronous belts 32 drives the boat support mechanism 2 located on them to move. It should be understood that when the boat support mechanism 2 is placed on the conveying mechanism 3, the boat support mechanism 2 does not need to be rigidly connected to the conveying mechanism 3 by screws.

[0045] like Figure 3 As shown, the boat support mechanism 2 includes at least one bracket 22 and multiple support columns 21.

[0046] like Figure 2 , Figure 4 and Figure 5 As shown, the bracket 22 includes a plurality of support side plates 221 arranged opposite to each other, and a plurality of support top plates 223 spaced apart between the plurality of support side plates 221. The support side plates 221 are placed on the synchronous belt 32 of the conveying mechanism 3.

[0047] Multiple support columns 21 are erected on multiple support top plates 223, and the multiple support columns 21 are used to jointly support a slide boat 1.

[0048] In practical applications, the specific number of supporting side plates 221, supporting top plates 223, and supporting columns 21 can be flexibly set according to actual needs.

[0049] For ease of understanding, the following description uses a preferred embodiment of the boat support mechanism 2, which includes two supporting side plates 221, two supporting top plates 223, and four supporting columns 21. Figure 4 As shown, the two supporting side plates 221 are respectively referred to as the first supporting side plate 2211 and the second supporting side plate 2212; the two supporting top plates 223 are respectively referred to as the first supporting top plate 2231 and the second supporting top plate 2232; the four supporting columns 21 include two first supporting columns 2110 and two second supporting columns 2112.

[0050] In a preferred embodiment, the bracket 22 includes a first support side plate 2211, a first support top plate 2231, a second support side plate 2212, and a second support top plate 2232, which are connected in sequence. The bracket 22 adopts a splicing design, which facilitates disassembly and maintenance.

[0051] It should be understood that in other embodiments, the bracket 22 may be an integral design, in which case the first support side plate 2211, the first support top plate 2231, the second support side plate 2212 and the second support top plate 2232 are not detachable from each other.

[0052] In a preferred embodiment, such as Figure 4 As shown, the first support side plate 2211, the first support top plate 2231, the second support side plate 2212 and the second support top plate 2232 together form a receiving area. A buffer pad 23 is provided in the receiving area. The buffer pad 23 is used to catch the battery cells that fall from the support carrier boat 1.

[0053] The support 22 is equipped with a buffer pad 23. When the solar cells in the carrier boat 1 fall onto the buffer pad 23 during the transportation process, the buffer pad 23 can play a good cushioning role, preventing the solar cells from breaking when they fall, thereby reducing the breakage rate of the solar cells.

[0054] The buffer pad 23 is made of thermal insulation material. For example, the buffer pad 23 is made of thermal insulation cotton, which can play the role of heat insulation and buffering at the same time. While reducing the breakage rate of the battery cells during the process, it also reduces the heat transferred from the completed cell carrier boat 1 to the conveying mechanism 3, thereby protecting the normal operation of the conveying mechanism 3.

[0055] In a preferred embodiment, two first support columns 2110 are erected at intervals on the first support top plate 2231, and two second support columns 2112 are erected at intervals on the second support top plate 2232.

[0056] like Figure 4 As shown, each first support column 2110 has a positioning pin 24 at its top, which is used to position the slide boat 1 when it is placed on the four support columns 21. It should be understood that the top of the positioning pin 24 is provided with a conical surface, which is beneficial for guiding and positioning.

[0057] Positioning pins 24 are provided on the two first support columns 2110 to prevent the tray boat 1 from slipping due to inertia or accidental collisions during transport by the tray support mechanism 2. Positioning pins 24 are not provided on the two second support columns 2112 to allow for installation errors in the length direction of the bracket 22; the two second support columns 2112 only need to provide support for the tray boat 1. Compared to the implementation where all four support columns 21 are equipped with positioning pins 24, this preferred embodiment reduces the installation accuracy requirements and saves processing and labor resources.

[0058] In a preferred embodiment, both the bracket 22 and the carrier boat 1 are made of metal. For example, the bracket 22 can be made of aluminum or other metal materials. It should be understood that if the bracket 22 is assembled sequentially from a first supporting side plate 2211, a first supporting top plate 2231, a second supporting side plate 2212, and a second supporting top plate 2232, then the first supporting side plate 2211, the first supporting top plate 2231, the second supporting side plate 2212, and the second supporting top plate 2232 are all made of aluminum or other metal materials. This ensures that the bracket 22 plays a core supporting role in the boat support mechanism 2, used to install components such as the support column 21 and the buffer pad.

[0059] This utility model also adopts a guide and positioning structure on the conveying mechanism 3 and the boat support mechanism 2. In actual movement, the guide and positioning structure can achieve accurate positioning of the boat support mechanism 2.

[0060] like Figure 5 , Figure 6As shown, the guiding and positioning structure is formed by the cooperation of guide block 33 and guide wheel 25. After installation, guide block 33 is locked and cannot automatically deflect. When guide wheel 25 contacts guide block 33, guide wheel 25 is forced to adapt to the current shape of guide block 33 under strong force. It should be understood that the function of the guiding and positioning structure is to correct the shape of the entire boat support mechanism 2 when it is in place. The subsequent boat lifting mechanism needs to grab the carrier boat 1 on the boat support mechanism 2, and the boat lifting mechanism will also have errors during installation. Therefore, the current shape of guide block 33 is determined by the boat lifting mechanism. By forcibly changing the position of guide wheel 25 through guide block 33, the shape of the entire boat support mechanism 2 is changed.

[0061] For example, if the guide wheel 25 is mounted on the boat support mechanism 2 and the guide block 33 is mounted on the conveying mechanism 3, this mounting configuration of the guide block 33 and the guide wheel 25 can be called "active guidance". Alternatively, if the guide wheel 25 is mounted on the conveying mechanism 3 and the guide block 33 is mounted on the boat support mechanism 2, this mounting configuration of the guide block 33 and the guide wheel 25 can be called "passive guidance".

[0062] In a preferred embodiment, such as Figures 2 to 6 As shown, the boat support mechanism 2 is equipped with four guide wheels 25, and the conveying mechanism 3 is equipped with four guide blocks 33. It should be understood that these four guide blocks 33 are fixed to the conveying mechanism 3 and positioned to the sides of the four guide wheels 25 when the boat support mechanism 2 is in place. Through the guiding and positioning structure formed by the four guide blocks 33 and their corresponding guide wheels 25, the offset of the boat support mechanism 2 on the conveying mechanism 3 is controlled, thereby more precisely controlling the position of the boat support mechanism 2 and improving the accuracy of boat handling.

[0063] like Figure 5 As shown, four guide wheels 25 in the boat support mechanism 2 are installed at the four corners of the bracket 22. In other words, each support side plate 221 in the bracket 22 has guide wheels 25 at both ends.

[0064] like Figure 2 As shown, the conveying mechanism 3 includes two synchronous belts 32 arranged opposite each other, and two guide blocks 33 are spaced apart on one side of each synchronous belt 32. Each guide block 33 is provided with at least one oblong hole 331, which is used to adjust the installation position of the guide block 33.

[0065] Specifically, each guide block 33 has three alternately distributed oblong holes 331 and two circular holes 332. Each guide block 33 is mounted on the conveying mechanism 3 by a screw passing through the corresponding oblong hole 331 and a set screw passing through the corresponding circular hole 332. It should be understood that the oblong holes 331 allow for adjustment of the installation position of the guide block 33, and the screw will tighten once the installation position is determined. Because of the oblong holes 331, the screw has a certain amount of room to move. If the force exerted by the guide block 33 on the guide wheel 25 is too great, the guide wheel 25 may not move and may instead push the guide block 33 out. At the same time, the set screw can increase the tightening strength of the screw.

[0066] Compared with the prior art, the advantages of the boat support mechanism and boat inlet / outlet conveying device of the ALD equipment provided by this utility model are as follows:

[0067] 1. An independent boat support mechanism is used to support the cell carrier boat, realizing separate support and transportation. This reduces the cell breakage rate caused by the impact vibration generated during operation of the integrated support and transportation structure, and improves the convenience of equipment installation and maintenance.

[0068] 2. A guiding and positioning structure is adopted on the boat support mechanism and the conveying mechanism. The designed guiding and positioning structure can achieve accurate positioning of the boat support mechanism in actual movement.

[0069] 3. The boat support mechanism is equipped with a buffer pad, which is made of heat insulation cotton. The buffer pad is designed to effectively cushion the falling battery cells, reducing the breakage rate of the battery cells during the process. It also reduces the heat transferred from the process boat to the conveying mechanism, thereby protecting the normal operation of the conveying mechanism.

[0070] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A boat support mechanism for an ALD device, characterized in that, include: The support includes a plurality of opposing support side plates and a plurality of support top plates spaced apart between the plurality of support side plates, the support side plates being placed on the timing belt of the conveying mechanism; Multiple support columns are erected on multiple support top plates to jointly support the slide boat.

2. The boat support mechanism of the ALD device as described in claim 1, characterized in that, Each of the supporting side plates is provided with guide wheels at both ends, and each guide wheel cooperates with the corresponding guide block in the conveying mechanism to form a guiding and positioning structure.

3. The boat support mechanism of the ALD device as described in claim 1, characterized in that, The number of the supporting side plates and the supporting top plates are both two, and the bracket includes a first supporting side plate, a first supporting top plate, a second supporting side plate, and a second supporting top plate that are connected in sequence.

4. The boat support mechanism of the ALD device as described in claim 3, characterized in that, The first support side plate, the first support top plate, the second support side plate, and the second support top plate together form a receiving area. A buffer pad is provided in the receiving area to catch the battery cells that fall from the support carrier boat.

5. The boat support mechanism of the ALD device as described in claim 4, characterized in that, The cushioning pad is made of thermal insulation material.

6. The boat support mechanism of the ALD device as described in claim 3, characterized in that, The number of support columns is four, including two first support columns that are erected at intervals on the first support top plate and two second support columns that are erected at intervals on the second support top plate.

7. The boat support mechanism of the ALD device as described in claim 6, characterized in that, Each of the first support columns is provided with a positioning pin at its top, which is used to position the slide boat when it is placed on the four support columns.

8. The boat support mechanism of the ALD device as described in claim 1, characterized in that, The support is made of metal.

9. A conveying device for loading and unloading boats in an ALD (Automatic Drainage) device, characterized in that, The device includes a fixed frame, a conveying mechanism mounted on the fixed frame, and a boat support mechanism for the ALD device as described in any one of claims 1-8. The conveying mechanism includes a plurality of synchronous belts arranged opposite each other, and the synchronous movement of the plurality of synchronous belts drives the boat support mechanism located thereon to move.

10. The inlet and outlet conveyor device for the ALD equipment as described in claim 9, characterized in that, Two guide blocks are spaced apart on one side of each synchronous belt. Each guide block cooperates with the corresponding guide wheel in the boat support mechanism to form a guide alignment structure. Each guide block has at least one waist-shaped hole, which is used to adjust the installation position of the guide block.

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