Tray carrying device and processing equipment

Abstract

The utility model relates to a tray carrying device and processing equipment, the tray carrying device comprises a bottom plate, a power assembly and clamping jaw assemblies arranged on the bottom plate, the power assembly is used for driving the clamping jaw assemblies arranged oppositely to move, each clamping jaw assembly comprises a mounting seat and a hook claw, the hook claw is rotatably connected with the mounting seat, and the power assembly comprises a main body. The first push rod and the second push rod are arranged on the two sides of the main body, and the first push rod and the second push rod respectively drive the two symmetrically-arranged claws to move synchronously. The tray device is miniaturized, the structure is more compact, and the clamping stability is better.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material handling and processing technology, and in particular to pallet handling device and processing equipment. Background Technology

[0002] During the processing of semiconductor devices such as chips, material handling is required. Furthermore, during the processing of semiconductor devices, semi-finished or finished products also need to be handled. Semiconductor components are typically handled on trays (also known as pallets in the industry). Several chips are placed in the grooves of the tray, and the tray is moved by grippers. For example, when chips are processed by a semiconductor dicing and sorting machine, the chips on the chip strip are cut into individual chips and placed in trays. The trays are stacked, and the handling device moves the trays from top to bottom. The handling process typically includes three basic actions: gripping, moving, and placing. A combination of pneumatic and electric linear motion is a common design for this structure. However, existing handling devices typically have multiple grippers controlled independently by multiple cylinders, resulting in a complex structure and a large footprint. When used in processing equipment, this requires more internal space, leading to space constraints. Additionally, when the tray contains products, there is a risk of product movement when the robotic arm grips the tray, potentially causing the products to scatter within the tray. Utility Model Content

[0003] One objective of this invention is to solve the existing technical problems by providing a pallet device that addresses the issue of pallet handling devices being too large and not compact enough.

[0004] Another objective of this invention is to provide a processing device with more ample internal space.

[0005] To achieve the objectives of this utility model, the embodiments of this utility model adopt the following technical solutions:

[0006] A pallet handling device includes a base plate, a power unit, and a gripper assembly disposed on the base plate. The power unit drives the gripper assembly to move in opposite directions. The gripper assembly includes a mounting base and a hook. The hook is rotatably connected to the mounting base. The power unit includes a main body and a first push rod and a second push rod disposed on both sides of the main body. The first push rod and the second push rod respectively drive two symmetrically disposed hooks to move synchronously.

[0007] In some embodiments, the gripper assembly includes a sensor corresponding to the gripper for detecting the opening and closing state of the gripper.

[0008] In some embodiments, one end of the claw is correspondingly disposed to the sensor, and the other end is provided with a hook that extends to the bottom plate, and the sensor is disposed on the mounting base;

[0009] And / or, the sensor is a slotted photoelectric sensor.

[0010] In some embodiments, the base plate is provided with guide rods, the lower ends of which extend below the base plate and have guide ramps. The spacing between the oppositely arranged guide rods corresponds to the width of the pallet, and the guide ramps abut against the pallet to straighten the pallet.

[0011] In some embodiments, an elastic element is provided between the hook and the mounting base. When the first push rod and the second push rod extend, they push the hook to open and compress the elastic element. When the first push rod and the second push rod retract, the elastic element releases its elastic force to close the hook.

[0012] And / or, the gripper assemblies are symmetrically arranged on both sides of the base plate.

[0013] In some embodiments, the main body is disposed in the hollow portion of the base plate.

[0014] In some embodiments, the base plate includes a first end face and a third end face disposed opposite to each other, and a second end face and a fourth end face disposed opposite to each other. The hook is located on the second end face and the fourth end face. The first push rod and the second push rod extend and retract from the second end face and the fourth end face, respectively. The hook clamps from the side of the tray. The hollow portion is disposed on the first end face and the fourth end face.

[0015] In some embodiments, the main body is provided with a first power unit and a second power unit. The first drive rod of the first power unit and the second drive rod of the second power unit are respectively connected to the first and second push rods. The first push rod and the second push rod pass through the through holes on both sides of the hollow part and are opposite to the hook claw. The first push rod and the second push rod are coaxially arranged.

[0016] In some embodiments, the main body is provided with a speed regulating valve, which is connected to the first and second power components through the fluid channel of the main body, and is used to regulate the movement speed of the first power unit and the second power unit;

[0017] And / or, the first power unit and the second power unit are plunger cylinders.

[0018] In some embodiments, the bottom of the base plate is provided with a pressing component, which presses the tray when it comes into contact with the tray.

[0019] In some embodiments, the pressing assembly includes a pressure plate, an elastic member, and a guide mechanism. The guide mechanism is connected to the pressure plate, the pressure plate is suspended below the base plate, the elastic member is located between the pressure plate and the base, and the elastic member is compressed when the pressure plate abuts against the tray. The height of the pressure plate is greater than the height of the guide slope of the base plate guide rod.

[0020] In some embodiments, the guiding mechanism includes a guide shaft and a guide portion. The guide portion is disposed on the base plate, the guide shaft passes through the guide portion and is connected to the pressure plate, and a limiting ring is provided at the top of the guide shaft.

[0021] In some embodiments, the pallet handling device further includes a first moving module, a second moving module, and a support base. The first moving module and the second moving module move in perpendicular directions. The first moving module is disposed on the support base, the gripper assembly is disposed on the second moving module, and the second moving module is disposed on the first moving module.

[0022] A processing device, including a pallet handling device.

[0023] The present invention has the following main advantages:

[0024] (1) A set of power components is used to drive two hooks synchronously, which reduces the size of the power components and makes them smaller. At the same time, the opening and closing of the hooks are more synchronized. (2) The gripper assembly integrates a sensor to quickly detect the status of the hooks. (3) The guide rod guides the unstacked pallet to the correct position before gripping, which improves the gripping success rate. (4) The pressing component presses the pallet before gripping to prevent it from shaking.

[0025] Other advantages of this utility model's technical solution are explained in the specific embodiments. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a top view of the pallet handling device provided in an embodiment of the present utility model.

[0028] Figure 2 This is a utility model Figure 1 A schematic diagram of section AA.

[0029] Figure 3 This is an exploded view of the pallet handling device provided in an embodiment of this utility model.

[0030] Figure 4 This is a schematic diagram of the gripper assembly provided in an embodiment of the present invention.

[0031] Figure 5 This is an exploded view of the gripper assembly provided in an embodiment of the present invention.

[0032] Figure 6 This is a cross-sectional view of the gripper assembly provided in an embodiment of this utility model.

[0033] Figure 7 This is a schematic diagram of the power assembly provided in an embodiment of the present invention.

[0034] Figure 8 This is an exploded view of the first power unit and the second power unit provided in the embodiment of this utility model.

[0035] Figure 9 This is a cross-sectional view of the power assembly provided in an embodiment of this utility model.

[0036] Figure 10 This is a schematic diagram of the gripper assembly provided in this embodiment of the present invention when it is opened.

[0037] Figure 11 This is a perspective view of the gripper assembly provided in an embodiment of the present invention.

[0038] Figure 12 This is a schematic diagram of the pallet handling device provided in an embodiment of the present utility model.

[0039] Figure 13 This is an exploded view of the mobile module provided in an embodiment of this utility model.

[0040] Figure 14 This is a schematic diagram of the tray provided in an embodiment of the present utility model.

[0041] In the attached image:

[0042] 10. Pallet; 11. Frame; 12. Feed trough; 13. Groove opening; 100. Base plate; 110. Guide rod; 111. Guide slope; 120. Hollowed-out section; 121. Through hole; 130. Arm; 140. First end face; 150. Second end face; 160. Third end face; 170. Fourth end face; 200. Power assembly; 210. First push rod; 220. Second push rod; 230. Main body; 231. First power unit; 232. Second power unit; 233. Speed ​​control valve; 234. Fluid channel; 300. Gripper assembly; 310. Mounting base; 311. Mounting 312. Slot; 320. Plunger; 321. Hook; 322. Free end; 323. Hole; 330. Sensor; 331. Groove; 332. Transceiver; 340. Elastic element; 400. Pressing assembly; 410. Pressure plate; 420. Elastic element; 430. Guide mechanism; 431. Guide shaft; 432. Guide part; 433. Limiting ring; 500. First moving module; 501. First servo motor; 600. Second moving module; 601. Second servo motor; 700. Support base; 2311. First drive rod; 2321. Second drive rod. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0044] In this embodiment, "several" and "more than" refer to two or more. In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] like Figure 14 As shown, the pallet handling device is used to handle the pallet 10. In this embodiment, the pallet 10 includes a frame 11 and a material trough 12. Several material troughs 12 are spaced apart and are used to store processed materials, such as semiconductor materials like chips. The pallets 10 are stacked, that is, placed one on top of another. When the pallet handling device needs to handle the pallet 10, it clamps the slot 13 of the frame 11 of the top pallet 10, moves it to the designated area, and then releases the pallet 10.

[0047] <Example 1>

[0048] like Figures 1 to 11As shown, the pallet handling device provided in this embodiment includes a base plate 100, a power assembly 200, and a gripper assembly 300 disposed on the base plate. The power assembly 200 drives the gripper assembly 300 to move, and the gripper assembly 300 is used to grip or release the pallet 10. In this embodiment, four sets of gripper assemblies 300 are provided, symmetrically arranged in pairs on both sides of the base plate 100, so that they can clamp the pallet 10 from four positions. The gripper assembly 300 includes a mounting base 310 and a hook 320. The hook 320 is rotatably connected to the mounting base 310. The rotation of the hook 320 can clamp or release the pallet 10. When clamping, the hook 320 engages in the slot 13. Specifically, the hook 320 is L-shaped and disposed in the mounting slot 311 of the mounting base 310, and connected by a pin 312, so that the hook 320 can rotate. The hook 320 has a hook portion 321 at one end and a free end 322 at the other end. The hook portion 321 extends below the base plate 100 for easy clamping, while the free end 322 is located above the base plate. The power assembly 200 includes a main body 230 and a first push rod 210 and a second push rod 220 disposed on both sides of the main body 230. The first push rod 210 and the second push rod 220 respectively drive two symmetrically arranged hooks 320 to move synchronously. Each set of power assemblies corresponds to a pair of oppositely arranged gripper assemblies 300. This embodiment has two sets of power assemblies, which can open or close four hooks simultaneously. The specific number can be flexibly adjusted according to the size of the pallet and other requirements. The first and second push rods can synchronously control the two hooks 320 to open or close simultaneously, thereby clamping or closing the tray 10. When it is necessary to clamp the tray 10, the first and second push rods extend to drive the hooks 320 on both sides. When the hooks 320 move to the clamping position, the first and second push rods retract, allowing the hooks 320 to clamp the tray 10. By setting the first and second push rods in one main body, the size of the power component can be reduced, making it more compact; at the same time, the hooks 320 on both sides can be opened or closed synchronously, facilitating the clamping and release of the tray. The push rods and hooks can be linked together or not, and those skilled in the art can adjust them according to actual needs. In this embodiment, the push rods are not connected to the hooks 320. When the push rods extend, they contact the inner wall of the hooks 320, pushing the hooks 320 to open. When the push rods retract, the hooks 320 return to their original position due to the elastic force of the elastic element 340. An elastic element 340 is provided between the hook 320 and the mounting base 310. When the first push rod 210 and the second push rod 220 extend, they push the hook 320 to open, and the elastic element 340 is compressed. When the first push rod 210 and the second push rod 220 retract, the elastic element 340 releases its elastic force to close the hook 320. This eliminates the need for a connection structure between the hook 320 and the push rod, simplifying the hook structure. In this embodiment, the elastic element is a compression spring.

[0049] Furthermore, the gripper assembly 300 includes a sensor 330, which corresponds to the hook 320 and is used to detect the opening and closing state of the hook 320. The sensor 330 is electrically connected to the control module. When the sensor 330 senses that the hook 320 is in an open or closed state, the control module controls the gripper assembly 300 to move horizontally or vertically. Specifically, the sensor 330 is mounted on the mounting base 310 and is correspondingly positioned to the free end 322 of the hook 320. The free end 322 has a hole 323. The sensor 330 is a slot-type photoelectric sensor with a slot 331. The free end 322 is positioned in the slot 331, so that the hole 323 corresponds to the transceiver part 332 of the sensor 330. When the hook 320 rotates, the positions of the hole 323 and the transceiver part 332 coincide or deviate, thereby enabling the sensor 330 to acquire the corresponding signal. The above technical solution enables the sensor to be integrated into the mounting base and to quickly and accurately detect signal changes through the swing of the hook 320, thereby determining the hook's state. The elastic element 340 is located on the lower rear side of the hook 230 and exerts an upward force on the hook 230. When the hook is closed, the elastic element 340 is lifted, allowing light to pass through the sensor 330; conversely, when the hook is open, the elastic element 340 is compressed, blocking the sensor's light.

[0050] like Figure 3 and Figure 10 As shown, the base plate 100 is further provided with guide rods 110, the lower end of which has a guide slope 111. The spacing between the oppositely arranged guide rods 110 corresponds to the width of the tray 10. The guide slope 111 abuts against the tray 10 to straighten the tray 10. The guide rods 110 are L-shaped and are arranged adjacent to the hooks 320. At least one guide rod 110 is provided on one side of the base plate 100. When the base plate 100 moves downward, the hooks 320 are in the open state. The spacing between the hooks 320 is greater than the width of the tray 10 and will not contact the tray 10. The spacing between the two guide rods 110 is slightly greater than the width of the tray 10. Since the trays 10 are stacked, when the tray 10 is not placed in place and becomes offset, the guide slope 111 collides with the tray 10 during the downward movement of the guide rods 110. The tray 10 is guided and straightened by the guide slope 111, thus facilitating the next step of the hooks 320 to grip it.

[0051] like Figure 1 and Figure 2As shown, the main body 230 is further disposed in the hollow portion 120 of the base plate 100, thereby allowing the main body 230 to be integrated into the base plate 100. Both sides are protected by the arms 130 of the base plate 100, and the gripper assembly 300 is disposed on the arms 130, resulting in a more compact overall structure and making the main body less susceptible to collision damage. Because two push rods are driven by a single main body, the size of the main body is reduced, resulting in a smaller hollow portion 120 created in the base plate 100, thus avoiding affecting the structural strength of the base plate. The base plate 100 includes a first end face 140 and a third end face 160 disposed opposite to each other, and a second end face 150 and a fourth end face 170 disposed opposite to each other. The hook 320 is located on the second end face 150 and the fourth end face 170. The first push rod 210 and the second push rod 20 extend and retract from the second end face 150 and the fourth end face 160, respectively. The first push rod 210 and the second push rod 220 pass through the arm portion 130. The hook 320 clamps the tray 10 from the side. The hollow portion 120 is disposed on the first end face 140 and the fourth end face 170. The main body 230 is inserted into the hollow portion between the first and fourth end faces of the base plate.

[0052] like Figures 7 to 10 As shown, further, the main body 230 is provided with a first power unit 231 and a second power unit 232. The first drive rod 2311 of the first power unit 231 and the second drive rod 2321 of the second power unit 232 are respectively connected to the first and second push rods. The first push rod 210 and the second push rod 220 pass through the through holes 121 on both sides of the hollow part 120 and are opposite to the hook 320. The first push rod 210 and the second push rod 220 are coaxially arranged. The first push rod 210 and the second push rod 220 are driven by the two power units respectively. The two power units are symmetrically arranged so that the hook moves synchronously. The main body 230 is provided with a speed regulating valve 233, which is connected to the first and second power units through the fluid channel 234 of the main body and is used to regulate the movement speed of the first power unit 231 and the second power unit 232. Speed ​​control valve 233 is connected to the gas source. When gas is input, gas enters fluid channel 234, causing the first and second drive rods of the first and second power units to extend. When the gas is cut off, the first and second drive rods retract under the action of springs in the power units, thereby enabling the two power units to perform telescopic movements synchronously. In this embodiment, the first and second power units are plunger cylinders.

[0053] like Figure 2 and Figure 3As shown, the bottom of the base plate 100 is provided with a pressing component 400. When the pressing component 400 abuts against the tray 10, it presses the tray 10 tightly. When the gripper assembly 300 moves down and approaches the tray 10, the pressing component 400 applies pressure to the tray 10, so that the tray 10 can be pressed tightly, thereby preventing it from shaking when the gripper assembly 300 clamps, and improving the gripping stability. Specifically, the pressing assembly 400 includes a pressure plate 410, an elastic element 420, and a guiding mechanism 430. The guiding mechanism 430 is connected to the pressure plate 410, which is suspended below the base plate 100. The elastic element 420 is located between the pressure plate 410 and the base 100. When the pressure plate 410 abuts against the tray 10, the elastic element 420 is compressed. The elastic element 430 is a spring. The up-and-down movement of the pressure plate 410 is guided by the guiding mechanism 430 to make its movement smoother. In this embodiment, the pressure plate 410 is a strip-shaped pressure plate. Each pressure plate is provided with two sets of elastic elements 420 and guiding mechanisms 430. The specific number can be adjusted according to the size of the pressure plate. If the base plate 100 is provided with a guide rod 110, the height of the pressure plate 410 is greater than the height of the guide slope 111 of the guide rod of the base plate 100. When the base plate moves downward, the guide slope 111 first contacts the tray 10 to guide the tray, and then the pressure plate 410 presses the tray. The guiding mechanism 430 includes a guide shaft 431 and a guide section 432. The guide section 432 is mounted on the base plate 100, and the guide shaft 431 passes through the guide section 432 and is connected to the pressure plate 410. A limiting ring 433 is provided at the top of the guide shaft 431. When the pressure plate 410 moves, the guide shaft 431 moves within the guide section 432. The guide section 432 can use existing guiding devices such as linear bearings. By setting the limiting ring 433, the guide shaft 431 can be limited to prevent it from coming out.

[0054] like Figures 11 to 13As shown, the pallet handling device further includes a first moving module 500, a second moving module 600, and a support base 700. The first moving module 500 and the second moving module 600 move in perpendicular directions. The first moving module 500 is mounted on the support base 700, and the gripper assembly 300 is mounted on the second moving module 600. The second moving module 600 drives the gripper assembly 300 to move vertically. The second moving module 600 is mounted on the first moving module 500, and the first moving module 500 drives the second moving module 600 to move horizontally, thereby enabling the gripper assembly 300 to move horizontally. Through the first and second moving modules, the gripper assembly 300 can move in both vertical and horizontal directions to handle the pallet 10. Both the first and second moving modules are linear modules, driven by a first servo motor 501 and a second servo motor 601, respectively. The first servo motor 501 drives the first moving module 500 to move the gripper assembly above the tray pick-up / placement position, and the second servo motor 601 drives the second moving module 600 to move the gripper assembly up and down. The first servo motor 501 drives the first moving module 500 through a belt drive mechanism 502, which is mounted on the adapter plate 503.

[0055] <Example 2>

[0056] In this embodiment, the parts that are the same as in Embodiment 1 are given the same reference numerals, and the same text descriptions are omitted.

[0057] Compared to Embodiment 1, this embodiment provides a processing device, mainly used for chip processing, sorting, and screening, such as a semiconductor dicing and sorting machine. The processing device incorporates the pallet handling device described in Embodiment 1. Because the pallet handling device is more compact and smaller in size than existing technologies, it allows for more internal space within the processing device.

[0058] In the above embodiments one and two, during the working process, depending on the different working environments, some of the technical implementation methods of embodiments one and two can be combined or replaced.

[0059] The technical principles of this utility model have been described above in conjunction with specific embodiments. However, it should be noted that these descriptions are merely for explaining the principles of this utility model and should not be construed as limiting the scope of protection of this utility model in any way. Based on this explanation, other specific embodiments or equivalent substitutions of this utility model that can be conceived by those skilled in the art without creative effort will all fall within the scope of protection of this utility model.

Claims

1. A pallet handling device, characterized in that, It includes a base plate, a power assembly, and a gripper assembly mounted on the base plate. The power assembly is used to drive the relative gripper assemblies to move. The gripper assembly includes a mounting base and a hook. The hook is rotatably connected to the mounting base. The power assembly includes a main body and a first push rod and a second push rod mounted on both sides of the main body. The first push rod and the second push rod respectively drive the two symmetrically mounted hooks to move synchronously.

2. The pallet handling device according to claim 1, characterized in that, The gripper assembly includes a sensor, which corresponds to the gripper and is used to detect the opening and closing state of the gripper.

3. The pallet handling device according to claim 2, characterized in that, One end of the hook is corresponding to the sensor, and the other end is provided with a hook that extends to the bottom plate. The sensor is mounted on the mounting base. And / or, the sensor is a slotted photoelectric sensor.

4. The pallet handling device according to claim 1, characterized in that, The base plate is provided with guide rods, the lower end of which extends to the bottom of the base plate and has a guide slope. The spacing between the oppositely arranged guide rods corresponds to the width of the pallet, and the guide slope abuts against the pallet to straighten the pallet.

5. The pallet handling device according to claim 1, characterized in that, An elastic element is provided between the hook and the mounting base. When the first push rod and the second push rod extend, they push the hook to open and compress the elastic element. When the first push rod and the second push rod retract, the elastic element releases its elastic force to close the hook. And / or, the gripper assemblies are symmetrically arranged on both sides of the base plate.

6. The pallet handling device according to claim 1, characterized in that, The main body is set in the hollow part of the base plate.

7. The pallet handling device according to claim 6, characterized in that, The base plate includes a first end face and a third end face that are arranged opposite to each other, and a second end face and a fourth end face that are arranged opposite to each other. The hook is located on the second end face and the fourth end face. The first push rod and the second push rod extend and retract from the second end face and the fourth end face respectively. The hook clamps from the side of the tray. The hollow part is provided on the first end face and the fourth end face.

8. The pallet handling device according to claim 7, characterized in that, The main body is provided with a first power unit and a second power unit. The first drive rod of the first power unit and the second drive rod of the second power unit are respectively connected to the first and second push rods. The first push rod and the second push rod pass through the through holes on both sides of the hollow part and are opposite to the hook claw. The first push rod and the second push rod are coaxially arranged.

9. The pallet handling device according to claim 8, characterized in that, The main body is equipped with a speed regulating valve, which is connected to the first and second power components through the fluid channel of the main body, and is used to regulate the movement speed of the first and second power components. And / or, the first power unit and the second power unit are plunger cylinders.

10. The pallet handling device according to claim 1 or 4, characterized in that, The bottom of the base plate is provided with a pressing component, which presses the pallet together when it comes into contact with the pallet.

11. The pallet handling device according to claim 10, characterized in that, The pressure assembly includes a pressure plate, an elastic element, and a guide mechanism. The guide mechanism is connected to the pressure plate, which is suspended below the base plate. The elastic element is located between the pressure plate and the base. When the pressure plate abuts against the tray, the elastic element is compressed. The height of the pressure plate is greater than the height of the guide slope of the base plate guide rod.

12. The pallet handling device according to claim 11, characterized in that, The guiding mechanism includes a guide shaft and a guide part. The guide part is set on the base plate, the guide shaft passes through the guide part and is connected to the pressure plate, and a limiting ring is provided at the top of the guide shaft.

13. The pallet handling device according to claim 1, characterized in that, The pallet handling device also includes a first moving module, a second moving module, and a support base. The first moving module and the second moving module move in perpendicular directions. The first moving module is mounted on the support base, the gripper assembly is mounted on the second moving module, and the second moving module is mounted on the first moving module.

14. A processing equipment, comprising a pallet handling device, characterized in that, The pallet handling device is the pallet handling device described in any one of claims 1 to 13.

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