Transfer device of chip sorting equipment

Abstract

The utility model relates to the technical field of chip sorting, and discloses a transfer device of chip sorting equipment, which comprises a rotary grabbing assembly and a pushing assembly, the rotary grabbing assembly is arranged below the pushing assembly, the rotary grabbing assembly comprises a fixed bottom plate, the lower side of the fixed bottom plate is connected with a fixed supporting leg, and the fixed supporting leg is connected with the pushing assembly. The upper side of the fixed bottom plate is connected with a rotating motor, the output end of the rotating motor is fixedly connected with a first gear, one side of the first gear is connected with a second gear, the second gear is connected with a hydraulic telescopic rod, the upper end of the hydraulic telescopic rod is connected with a connecting plate, and meanwhile one side of the connecting plate is provided with a suction nozzle. According to the utility model, the transfer device can slightly rotate in the horizontal plane, so that the operation range can be expanded, the flexibility and adaptability of equipment can be improved, chips can be stably pushed to move, equipment shutdown and flow interruption caused by falling can be avoided, and the continuity of the sorting and transfer process can be ensured.

Description

Technical Field

[0001] This utility model relates to the field of chip sorting technology, specifically to a transfer device for chip sorting equipment. Background Technology

[0002] In the semiconductor manufacturing industry, chip sorting is a key step in the integrated circuit production process. With the continuous development of semiconductor technology, the size of chips is getting smaller and the integration level is getting higher and higher, which puts increasing demands on the accuracy, speed and stability of chip sorting equipment.

[0003] The existing chip sorting equipment still has some shortcomings in its use: the existing chip sorting equipment's transfer device is often unable to rotate the chip in the horizontal plane during chip transfer, which reduces the flexibility of the equipment. In addition, the existing chip sorting equipment's transfer device is often prone to falling, which can easily lead to process interruption. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a transfer device for chip sorting equipment.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a transfer device for a chip sorting equipment, comprising a rotating gripping component and a pushing component, wherein the rotating gripping component is disposed below the pushing component, and the rotating gripping component includes a fixed base plate, a fixed support leg connected to the lower side of the fixed base plate, and a rotating motor connected to the upper side of the fixed base plate, wherein a first gear is fixedly connected to the output end of the rotating motor, a second gear is connected to one side of the first gear, and a hydraulic telescopic rod is connected to the second gear, wherein a connecting plate is connected to the upper end of the hydraulic telescopic rod, and a suction nozzle is provided on one side of the connecting plate; a drive motor is connected to the upper side of the fixed base plate, and a placement frame is fixedly connected to the output end of the drive motor, wherein an auxiliary support column is connected to the lower side of the placement frame, and a sliding groove is connected to the auxiliary support column.

[0006] As a further description of the above technical solution:

[0007] The upper end of the fixed support leg is fixedly connected to the fixed base plate, and the rotary motor is fixedly connected to the fixed base plate, with one side of the first gear meshing with the second gear.

[0008] As a further description of the above technical solution:

[0009] The second gear is fixed to the hydraulic telescopic rod, and the lower end of the hydraulic telescopic rod is rotatably connected to the fixed base plate. One end of the connecting plate is fixed to the upper end of the hydraulic telescopic rod, and the suction nozzle is installed on the end of the connecting plate away from the hydraulic telescopic rod.

[0010] As a further description of the above technical solution:

[0011] The drive motor is fixed to the fixed base plate, and the upper end of the auxiliary support column is fixed to the placement frame, and the auxiliary support column is slidably connected to the sliding groove provided on the fixed base plate.

[0012] As a further description of the above technical solution:

[0013] The pushing component includes a pushing motor, and a threaded rod is fixedly connected to the output end of the pushing motor. The threaded rod is connected to a pushing plate. A rubber pad is provided on one side of the pushing plate, a baffle is connected to one side of the pushing plate, and a guide post is connected to one end of the pushing plate.

[0014] As a further description of the above technical solution:

[0015] The push motor is fixed to one side of the placement frame via a bracket, and the threaded rod is rotatably connected to a groove on the placement frame, with one end of the push plate threadedly connected to the threaded rod.

[0016] As a further description of the above technical solution:

[0017] The end of the push plate away from the threaded rod is slidably connected to the guide post, and the guide post is fixedly connected to the groove provided on the placement frame.

[0018] As a further description of the above technical solution:

[0019] The rubber pad is fixed to one side of the push plate, and one end of the baffle is fixed to one side of the push plate. A rotating shaft is rotatably connected to the placement frame.

[0020] This utility model has the following beneficial effects:

[0021] 1. By starting the drive motor, the drive motor drives the placement frame to rotate. The rotation of the placement frame causes the auxiliary support column to slide in the groove provided on the fixed base plate for auxiliary support and guidance. This causes the chip placed above to adjust its transfer position, allowing the transfer device to rotate slightly in the horizontal plane, which helps to expand the working range and improve the flexibility and adaptability of the equipment.

[0022] 2. The push motor drives the threaded rod to rotate, and the rotation of the threaded rod causes the push plate to slide on the guide post, thereby moving the rubber pad and pushing the chip to move on the rotating shaft. The baffle can reduce the possibility of the chip falling, so as to stably push the chip to move and avoid equipment downtime and process interruption caused by falling, thus ensuring the continuity of the sorting and transfer process. Attached Figure Description

[0023] Figure 1This is a three-dimensional structural diagram of the transfer device of a chip sorting equipment proposed in this utility model;

[0024] Figure 2 This is a partial structural diagram of the transfer device of a chip sorting equipment proposed in this utility model. Figure 1 ;

[0025] Figure 3 This is a partial exploded view of the transfer device of a chip sorting equipment proposed in this utility model;

[0026] Figure 4 This is a partial structural diagram of the transfer device of a chip sorting equipment proposed in this utility model. Figure 2 .

[0027] Legend:

[0028] 1. Rotary gripping assembly; 2. Pushing assembly; 101. Fixed base plate; 102. Fixed support leg; 103. Rotary motor; 104. First gear; 105. Second gear; 106. Hydraulic telescopic rod; 107. Connecting plate; 108. Suction nozzle; 109. Drive motor; 110. Placement rack; 111. Auxiliary support column; 112. Slide groove; 201. Pushing motor; 202. Rotating shaft; 203. Threaded rod; 204. Push plate; 205. Rubber pad; 206. Baffle; 207. Guide column. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Reference Figures 1-4 This utility model provides a transfer device for a chip sorting equipment, including: a rotating gripping component 1 and a pushing component 2.

[0031] Specifically, the rotating gripping component 1 is located below the pushing component 2, and the rotating gripping component 1 includes a fixed base plate 101. A fixed support leg 102 is connected to the lower side of the fixed base plate 101, and a rotating motor 103 is connected to the upper side of the fixed base plate 101. A first gear 104 is fixedly connected to the output end of the rotating motor 103. A second gear 105 is connected to one side of the first gear 104, and a hydraulic telescopic rod 106 is connected to the second gear 105. A connecting plate 107 is connected to the upper end of the hydraulic telescopic rod 106, and a suction nozzle 108 is provided on one side of the connecting plate 107. A drive motor 109 is connected to the upper side of the base plate 101, and a placement frame 110 is fixedly connected to the output end of the drive motor 109. An auxiliary support column 111 is connected to the lower side of the placement frame 110, and a slide groove 112 is connected to the auxiliary support column 111. The push assembly 2 includes a push motor 201, and a threaded rod 203 is fixedly connected to the output end of the push motor 201. A push plate 204 is connected to the threaded rod 203. A rubber pad 205 is provided on one side of the push plate 204, and a baffle 206 is connected to one side of the push plate 204. A guide column 207 is connected to one end of the push plate 204.

[0032] In this embodiment, the rotating gripping component 1 and the pushing component 2 constitute the transfer device of the chip sorting equipment involved in this application, realizing the gripping and pushing of chips.

[0033] In this embodiment, the chip involved is a microelectronic circuit that integrates a large number of tiny electronic components on a single semiconductor substrate.

[0034] In this embodiment, wheels are provided below the fixed support leg 102 to drive the entire device to move.

[0035] It should be noted that the rotating shaft 202 is rotatably connected to the placement frame 110, and multiple sets of rotating shaft 202 are provided.

[0036] Specifically, the upper end of the fixed support leg 102 is fixed to the fixed base plate 101, and the rotary motor 103 is fixed to the fixed base plate 101. The first gear 104 meshes with the second gear 105 on one side. The second gear 105 is fixed to the hydraulic telescopic rod 106, and the lower end of the hydraulic telescopic rod 106 is rotatably connected to the fixed base plate 101. One end of the connecting plate 107 is fixed to the upper end of the hydraulic telescopic rod 106. At the same time, the suction nozzle 108 is installed on the end of the connecting plate 107 away from the hydraulic telescopic rod 106. The drive motor 109 is fixed to the fixed base plate 101, and the upper end of the auxiliary support column 111 is fixed to the placement frame 110. The auxiliary support column 111 is slidably connected to the sliding groove 112 provided on the fixed base plate 101.

[0037] As a preferred implementation, when using the suction nozzle 108, the air in the suction nozzle 108 is drawn out, and a low-pressure area is formed inside the suction nozzle 108. The surrounding air will move from the high-pressure area to the low-pressure area, creating a pressure difference, thereby adsorbing the chip.

[0038] In a preferred embodiment, the auxiliary support column 111 is slidably connected in the slide groove 112 to provide auxiliary support for the placement rack 110.

[0039] Specifically, the push motor 201 is fixed to one side of the placement frame 110 via a bracket, and the threaded rod 203 is rotatably connected to a groove on the placement frame 110. One end of the push plate 204 is threaded to the threaded rod 203, and the end of the push plate 204 away from the threaded rod 203 is slidably connected to the guide post 207. The guide post 207 is fixed to a groove on the placement frame 110. The rubber pad 205 is fixed to one side of the push plate 204, and one end of the baffle 206 is fixed to one side of the push plate 204. A rotating shaft 202 is rotatably connected to the placement frame 110.

[0040] In a preferred embodiment, the lower side of the push plate 204 is attached to the upper surface of the rotating shaft 202, so that the push plate 204 can push the chip to move on the upper side of the rotating shaft 202.

[0041] It should be noted that the rubber pad 205 is located on the side of the pusher plate 204 used to push the chip, which can prevent the pusher plate 204 from damaging the chip during the push.

[0042] In use, move the transfer device to a suitable position, start the rotary motor, which drives the first gear to rotate, and the first gear to rotate the second gear. This, in turn, drives the connecting plate to rotate via the hydraulic telescopic rod, bringing the suction nozzle closer to the chip. The chip is then adsorbed by the suction nozzle and placed on the rotating shaft. When transferring the chip, start the drive motor, which drives the placement frame to rotate. The rotation of the placement frame causes the auxiliary support column to slide within the groove on the fixed base plate for auxiliary support and guidance, thereby adjusting the transfer position of the chip placed above. Then, start the push motor, which drives the threaded rod to rotate. The rotation of the threaded rod causes the push plate to slide on the guide column, thereby moving the rubber pad and pushing the chip on the rotating shaft. The baffle provided reduces the possibility of the chip falling.

[0043] The transfer device of this chip sorting equipment can rotate slightly in the horizontal plane, which helps to expand the working range, improve the flexibility and adaptability of the equipment, and can stably push the chips to move, avoiding equipment downtime and process interruption due to falling, and ensuring the continuity of the sorting and transfer process.

[0044] It should be noted that all electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device that can be controlled by a computer or other means. The detailed description of known functions and known components is omitted in the specific embodiments disclosed herein. In order to ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.

[0045] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A transfer device for a chip sorting equipment, characterized in that: The device includes a rotating gripping component (1) and a pushing component (2). The rotating gripping component (1) is located below the pushing component (2). The rotating gripping component (1) includes a fixed base plate (101). A fixed support leg (102) is connected to the lower side of the fixed base plate (101), and a rotating motor (103) is connected to the upper side of the fixed base plate (101). A first gear (104) is fixedly connected to the output end of the rotating motor (103), and a second gear (105) is connected to one side of the first gear (104). The second gear (105) is connected to a hydraulic telescopic rod (106), and the upper end of the hydraulic telescopic rod (106) is connected to a connecting plate (107). At the same time, a suction nozzle (108) is provided on one side of the connecting plate (107). The upper side of the fixed base plate (101) is connected to a drive motor (109), and the output end of the drive motor (109) is fixed to a placement frame (110). The lower side of the placement frame (110) is connected to an auxiliary support column (111), and the auxiliary support column (111) is connected to a slide groove (112).

2. The transfer device of a chip sorting equipment according to claim 1, characterized in that: The upper end of the fixed support leg (102) is fixed to the fixed base plate (101), and the rotary motor (103) is fixed to the fixed base plate (101), and the first gear (104) meshes with the second gear (105) on one side.

3. The transfer device of a chip sorting equipment according to claim 2, characterized in that: The second gear (105) is fixed to the hydraulic telescopic rod (106), and the lower end of the hydraulic telescopic rod (106) is rotatably connected to the fixed base plate (101). One end of the connecting plate (107) is fixed to the upper end of the hydraulic telescopic rod (106), and the suction nozzle (108) is installed on the end of the connecting plate (107) away from the hydraulic telescopic rod (106).

4. The transfer device of a chip sorting equipment according to claim 3, characterized in that: The drive motor (109) is fixed to the fixed base plate (101), and the upper end of the auxiliary support column (111) is fixed to the placement frame (110), and the auxiliary support column (111) is slidably connected to the sliding groove (112) provided on the fixed base plate (101).

5. The transfer device of a chip sorting equipment according to claim 4, characterized in that: The pushing component (2) includes a pushing motor (201), and a threaded rod (203) is fixedly connected to the output end of the pushing motor (201). The threaded rod (203) is connected to a push plate (204). A rubber pad (205) is provided on one side of the push plate (204), and a baffle (206) is connected to one side of the push plate (204). A guide post (207) is connected to one end of the push plate (204).

6. The transfer device of a chip sorting equipment according to claim 5, characterized in that: The push motor (201) is fixed to one side of the placement frame (110) by a bracket, and the threaded rod (203) is rotatably connected to the groove provided on the placement frame (110), and one end of the push plate (204) is threaded to the threaded rod (203).

7. The transfer device of a chip sorting equipment according to claim 6, characterized in that: The push plate (204) is slidably connected to the guide post (207) at one end away from the threaded rod (203), and the guide post (207) is fixedly connected to the groove provided on the placement frame (110).

8. The transfer device of a chip sorting equipment according to claim 7, characterized in that: The rubber pad (205) is fixed to one side of the push plate (204), and one end of the baffle (206) is fixed to one side of the push plate (204), and a rotating shaft (202) is rotatably connected to the placement frame (110).

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