Cavity cover and edge type coating equipment

Abstract

The utility model discloses a chamber cover and edge type coating equipment, including the chamber cover body that is used for matching and covering the chamber body of reaction chamber, the chamber cover body is at least correspondingly equipped with one jacking structure, the jacking structure includes mounting base, jacking drive device, limit piece and guide rod; a jacking driving device is arranged on the mounting base, at least one limiting piece is further arranged on the mounting base on each of the two sides of the jacking driving device, each limiting piece is arranged on the corresponding guide rod in a sleeving manner and is in sliding connection with the guide rod, and the top of each guide rod is connected with the cavity cover body; and the output end of the jacking driving device is connected with the guide rod. According to the utility model, the cavity cover of the reaction cavity is automatically opened or closed through the jacking structure, so that the safety coefficient when the cavity cover is dismounted or opened is greatly improved, and the safety of operators and equipment is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device technology, and in particular to a cavity cover and edge coating equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry and the increasing demand for production capacity, the emergence of half-wafer encapsulation for solar cells can significantly increase production capacity. This necessitates passivation coating treatment on the cut surfaces of the slicing half-wafers. However, the jetting components of the reaction chamber in edge passivation equipment require regular maintenance to prevent process gases from accumulating in the jetting holes and causing blockages, thus affecting equipment performance. Therefore, it is necessary to periodically open the reaction chamber cover to remove the internal jetting components for maintenance, cleaning, and any abnormalities requiring repair.

[0003] However, the existing reaction chamber consists of a chamber body and a matching chamber lid, and the chamber lid has the following shortcomings during production and use:

[0004] Because the jet assembly is mounted on the chamber cover, the chamber cover is relatively heavy. Therefore, when maintenance is required, manual removal or opening of the chamber cover usually requires the use of auxiliary tools such as forklifts, which greatly reduces the safety factor when removing or opening the chamber cover. Utility Model Content

[0005] In view of this, the present invention provides a cavity cover and edge coating equipment to solve the problem of low safety factor when removing or opening the cavity cover in the prior art.

[0006] The technical solution of this utility model is a cavity cover, including a cavity cover body for matching and covering a cavity of a reaction cavity. The cavity cover body is provided with at least one lifting structure, and the lifting structure includes a mounting base, a lifting drive device, a limiting member and a guide rod.

[0007] The mounting base is provided with a lifting drive device, and at least one limiting member is provided on the mounting base on both sides of the lifting drive device. Each limiting member is sleeved on the corresponding guide rod and slidably connected to the guide rod. The top of all the guide rods is connected to the cavity cover body.

[0008] The output end of the lifting drive device is connected to the guide rod.

[0009] Furthermore, the lifting structure also includes a fall protection device;

[0010] At least one anti-fall device is provided in the middle of the mounting base corresponding to the guide rod, and the output end of the anti-fall device faces the guide rod;

[0011] The output end of the fall arrestor can extend and contact the corresponding guide rod.

[0012] Furthermore, each of the cavity cover bodies has a protrusion extending outward on one side corresponding to the lifting structure, and a first connector is connected to the protrusion. The first connector is connected to the top of all the guide rods.

[0013] Furthermore, the lifting structure also includes a guide rod reinforcement member, the middle part of which is connected to the output end of the lifting drive device, and the two ends of which are horizontally connected to the corresponding guide rods.

[0014] Furthermore, a second connecting member is vertically provided between the guide rod reinforcement and the first connecting member.

[0015] Furthermore, the lifting drive device is vertically provided in the middle of the mounting base, and limiting members are provided on the upper part of the mounting base and on both sides of the lifting drive device.

[0016] Furthermore, the cavity cover body is provided with multiple reinforcing plates on the top facing away from the cavity.

[0017] Furthermore, the reinforcing plates located on top of the cavity cover body are arranged in a grid pattern.

[0018] Furthermore, the bottom of each guide rod is equipped with an anti-detachment component.

[0019] This utility model also proposes an edge-type coating device, including a frame, on which a reaction chamber is provided, the reaction chamber including the chamber cover described above.

[0020] Compared with the prior art, the present invention has at least the following beneficial effects:

[0021] This invention uses a lifting structure to automatically open or close the chamber cover of the reaction chamber, which greatly improves the safety factor when removing or opening the chamber cover and ensures the safety of operators and equipment. Attached Figure Description

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the cavity cover proposed in this utility model;

[0025] Figure 2 for Figure 1 An enlarged schematic diagram of reference numeral A in the attached figure;

[0026] Figure 3 This is a front view of the lifting structure proposed in this utility model.

[0027] Figure label:

[0028] 1. Reaction chamber; 11. Chamber cover body;

[0029] 111. Reinforcing plate; 112. Boss;

[0030] 2. Rack;

[0031] 3. Lifting structure;

[0032] 31. Mounting base; 32. Lifting drive device; 33. Limiting component; 34. Guide rod; 35. First connecting component; 36. Anti-fall device; 37. Guide rod reinforcement component; 38. Second connecting component; 39. Anti-detachment component. Detailed Implementation

[0033] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0034] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0035] Example 1

[0036] The existing edge passivation equipment's reaction chamber jet assembly requires regular maintenance to prevent process gas residue from clogging the jet holes and affecting equipment performance. Therefore, it's necessary to periodically open the reaction chamber cover to remove the internal jet assembly for maintenance, cleaning, and any abnormalities. However, because the jet assembly is mounted on the cover, making the cover quite heavy, manual removal or opening of the cover usually requires forklifts or other auxiliary tools, significantly reducing the safety factor during this process.

[0037] Therefore, to solve the above problems, refer to the appendix. Figure 1 and 3 The present invention proposes a cavity cover, including a cavity cover body 11 for matching and covering the cavity of the reaction cavity 1. The cavity cover body 11 is provided with at least one lifting structure 3. The lifting structure 3 includes a mounting base 31, a lifting drive device 32, a limiting member 33 and a guide rod 34.

[0038] The mounting base 31 is provided with a lifting drive device 32. At least one limiting member 33 is provided on the mounting base 31 on both sides of the lifting drive device 32. Each limiting member 33 is sleeved on the corresponding guide rod 34 and slidably connected to the guide rod 34. The top of all the guide rods 34 is connected to the cavity cover body 11.

[0039] The output end of the lifting drive device 32 is connected to the guide rod 34.

[0040] It should be noted that the lifting structure 3 in this embodiment is also provided with a main control unit (not shown, the same throughout the text). The main control unit is electrically connected to the host computer and the lifting drive device 32 respectively. The user can control the opening or closing of the cavity cover relative to the cavity of the reaction chamber 1 through the host computer. The lifting drive device 32 in this embodiment is preferably a lifting cylinder. And the bottom of the cavity cover facing the cavity of the reaction chamber 1 is provided with an air jet assembly. The air jet assembly is used to passivate the cross-section of the half silicon wafer placed in the cavity after slicing.

[0041] Specifically, refer to the appendix Figure 3 In order to better and more stably open or close the cavity cover body 11 relative to the cavity of the reaction cavity 1, a lifting structure 3 is connected to each of the opposite sides of the cavity cover body 11.

[0042] The lifting drive device 32 is vertically provided in the middle of the mounting base 31, and the upper part of the mounting base 31 and the two sides of the lifting drive device 32 are provided with limiting members 33.

[0043] It should be noted that the lifting drive devices 32 of both lifting structures 3 are electrically connected to the same solenoid valve (not shown, the same throughout the text). This solenoid valve is electrically connected to the main control unit so that the main control unit can synchronously control the lifting drive devices 32 of the two lifting structures 3 to perform lifting or lowering movements. Of course, the lifting structures 3 can also be set in three or more depending on the actual situation, which is not limited here.

[0044] In this embodiment, after the cavity cover is matched and closed with the cavity body of the reaction chamber 1, when the cavity cover needs to be opened relative to the cavity body of the reaction chamber 1, the main control unit activates the lifting drive device 32. The lifting drive device 32 drives the cavity cover body 11 to perform a lifting movement through the guide rod 34, so as to open the cavity cover relative to the cavity body of the reaction chamber 1 and prevent the cavity cover from tipping over. Similarly, after the cavity cover is opened relative to the cavity body of the reaction chamber 1, when the cavity cover needs to be matched and closed with the cavity body of the reaction chamber 1, the main control unit activates the lifting drive device 32. The lifting drive device 32 drives the cavity cover body 11 to perform a lowering movement through the guide rod 34, so as to close the cavity cover relative to the cavity body of the reaction chamber 1.

[0045] Furthermore, when the cavity cover body 11 is closed relative to the cavity of the reaction chamber 1, the lifting structure 3 can always provide a downward force to the cavity cover body 11, so that the cavity cover body 11 fits perfectly into the cavity and plays a pressing role, thereby obtaining the vacuum degree required when the reaction chamber 1 is working in a vacuum.

[0046] Therefore, compared to the traditional solution where "forklifts and other auxiliary tools are usually needed when removing or opening the chamber cover of the reaction chamber", this application only needs to use the lifting structure 3 to automatically open or close the chamber cover of the reaction chamber 1, which greatly improves the safety factor when removing or opening the chamber cover and ensures the safety of operators and equipment.

[0047] To further improve the safety factor when removing or opening the cavity cover, please refer to the attached document. Figure 1 and 3 The lifting structure 3 also includes a fall protection device 36;

[0048] The mounting base 31 has an inwardly accommodating groove (not shown, same throughout) corresponding to the guide rod 34 in the middle. Each accommodating groove is matched with a fall protection device 36, and the output end of the fall protection device 36 faces the guide rod 34.

[0049] The output end of the fall arrestor 36 can extend and contact the corresponding guide rod 34.

[0050] It should be noted that the anti-fall device 36 in this embodiment is preferably an anti-fall cylinder.

[0051] Thus, when the main control unit controls the guide rod 34 to perform a lifting movement through the lifting drive device 32, and the cavity cover is fully opened relative to the cavity of the reaction chamber 1, the main control unit then activates the anti-fall device 36, so that the anti-fall device 36 extends its output end (equivalent to the piston rod of the anti-fall device 36) to contact the guide rod 34, thereby supporting and locking the corresponding guide rod 34, preventing the cavity cover body 11, the limiting member 33, and the guide rod 34 from falling, ensuring the stability of the cavity cover body 11 and / or the guide rod 34 in its lifting position, and ensuring the safety of operators and equipment.

[0052] Furthermore, when the lifting drive device 32 controls the guide rod 34 to descend, the main control unit will first control the fall protection device 36 to retract its output end, and then control the lifting drive device 32 and the guide rod 34 to descend.

[0053] To prevent damage to the sealing surface of the cavity cover from the connection between the cavity cover body 11 and the first connecting member 35, please refer to the attached document. Figure 1-2 The cavity cover body 11 has a square protrusion 112 extending outward on both sides corresponding to the lifting structure 3. A first connector 35 is connected to the protrusion 112, and the first connector 35 is connected to the top of all the guide rods 34.

[0054] It should be noted that the first connector 35 is fitted onto the top of the boss 112 and bolted together, which ensures that the bolts will not damage the sealing surface of the cavity cover.

[0055] To enhance the rigidity and stability of the guide rod 34 and prevent deformation or damage during lifting or lowering, please refer to the appendix. Figure 1 and 3 The lifting structure 3 also includes a guide rod reinforcement 37, the middle part of which is connected to the output end of the lifting drive device 32, and the two ends of which are horizontally connected to the corresponding guide rods 34.

[0056] In order to enable the lifting drive device 32 to open the cavity cover relative to the reaction cavity 1 more effectively and smoothly, refer to the attached document. Figure 1 and 3 A second connecting member 38 is vertically provided between the guide rod reinforcement 37 and the first connecting member 35.

[0057] It should be noted that the second connector 38 is preferably an "I" shaped structure.

[0058] One issue is that the sealing surface area of ​​the chamber cover is too large, causing slight stress deformation between the sealing surface of the chamber cover and the chamber body during vacuum production in reaction chamber 1. This results in the vacuum level not meeting the standard. To solve this problem, refer to the attached... Figure 1 and 3The cavity cover body 11 is provided with multiple reinforcing plates 111 on the top facing away from the cavity, so as to prevent the cavity cover body 11 from deforming when it is closed relative to the cavity of the reaction cavity 1.

[0059] To further prevent deformation of the cavity cover body 11 when it closes relative to the cavity of the reaction chamber 1, the reinforcing plate 111 located on the top of the cavity cover body 11 is arranged in a grid pattern.

[0060] To prevent the guide rod 34 from disengaging from the corresponding limiting member 33 during the lifting movement, refer to the attached document. Figure 1 and 3 Each guide rod 34 has an anti-detachment component 39 at its bottom away from the first connector 35.

[0061] It should be noted that the size of the anti-detachment component 39 is larger than the size of the guide rod 34, and the anti-detachment component 39 cannot pass through the corresponding limiting component 33.

[0062] Example 2

[0063] See attached document Figure 1 This utility model also proposes an edge coating device, including a frame 2, on which a reaction chamber 1 is provided. The reaction chamber 1 includes the aforementioned chamber cover and a cavity body that matches and fits the chamber cover.

[0064] The mounting base 31 is installed on the side of the frame 2, and the cavity cover is provided with an air jet assembly facing the bottom of the cavity. The air jet assembly is used to passivate the cross-section of the half silicon wafer after slicing placed in the cavity.

[0065] The usage process of this embodiment is as follows:

[0066] When it is necessary to open the cavity cover relative to the cavity, the main control unit controls the lifting drive device 32 to perform a lifting motion, so that the lifting drive device 32 drives the cavity cover body 11 to perform a lifting motion through the guide rod 34, so as to fully open the cavity cover relative to the cavity. Then the main control unit controls the output end of the anti-fall device 36 to extend towards the corresponding guide rod 34 and make contact.

[0067] Similarly, when it is necessary to close the cavity cover relative to the cavity, the main control unit first controls the output end of the anti-fall device 36 to retract to its original position, and then the main control unit controls the lifting drive device 32 to perform a downward movement, so that the lifting drive device 32 drives the cavity cover body 11 to perform a downward movement through the guide rod 34, so as to close the cavity cover relative to the cavity.

[0068] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A cavity cover comprising a cavity cover body (11) for fitting and closing a cavity of a reaction chamber (1), characterized in that, The cavity cover body (11) is provided with at least one lifting structure (3), the lifting structure (3) includes a mounting base (31), a lifting drive device (32), a limiting member (33) and a guide rod (34); The mounting base (31) is provided with a lifting drive device (32), and the mounting base (31) on both sides of the lifting drive device (32) is also provided with at least one limiting member (33). Each limiting member (33) is sleeved on the corresponding guide rod (34) and slidably connected to the guide rod (34). The top of all the guide rods (34) is connected to the cavity cover body (11). The output end of the lifting drive device (32) is connected to the guide rod (34).

2. The cavity cover according to claim 1, characterized in that, The lifting structure (3) also includes a fall protection device (36); At least one anti-fall device (36) is provided in the middle of the mounting base (31) corresponding to the guide rod (34), and the output end of the anti-fall device (36) faces the guide rod (34); The output end of the fall arrestor (36) can extend and contact the corresponding guide rod (34).

3. The cavity cover according to claim 1, characterized in that, The cavity cover body (11) has a boss (112) extending outward on one side corresponding to the lifting structure (3). A first connector (35) is connected to the boss (112), and the first connector (35) is connected to the top of all the guide rods (34).

4. The cavity cover according to claim 3, characterized in that, The lifting structure (3) also includes a guide rod reinforcement (37), the middle part of which is connected to the output end of the lifting drive device (32), and the two ends of which are horizontally connected to the corresponding guide rods (34).

5. The cavity cover according to claim 4, characterized in that, A second connector (38) is vertically provided between the guide rod reinforcement (37) and the first connector (35).

6. The cavity cover according to claim 1, characterized in that, The lifting drive device (32) is vertically provided in the middle of the mounting base (31), and limiting members (33) are provided on the upper part of the mounting base (31) and on both sides of the lifting drive device (32).

7. The cavity cover according to claim 1, characterized in that, The cavity cover body (11) has multiple reinforcing plates (111) on its top facing away from the cavity.

8. The cavity cover according to claim 7, characterized in that, The reinforcing plate (111) located on the top of the cavity cover body (11) is arranged in a grid pattern.

9. The cavity cover according to claim 1, characterized in that, The bottom of each guide rod (34) is provided with an anti-detachment component (39).

10. An edge-coating apparatus, comprising a frame (2), wherein a reaction chamber (1) is provided on the frame (2), characterized in that, The reaction chamber (1) includes the chamber cover as described in any one of claims 1-9.

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