Chuck module
By combining guide grooves and micro-control switches, the problem of large space occupation by components in existing furnace tube equipment is solved, achieving compact equipment structure and precise control, reducing baffles and sensors, and saving internal space.
Patent Information
- Application Number
- CN202520468109.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-17
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-03-17
AI Technical Summary
In existing furnace tube equipment, the addition of sensors and baffles has led to an increase in the number of components, resulting in excessive space occupation and an uncompacted structure.
The push rod adopts a combination structure of guide groove and micro-control switch. The front end of the push rod extends into the guide groove, and the micro-control switch is installed on the front end face of the push rod. The rear end face of the push block is provided with guide groove. There is a constraint structure between the push rod and the guide groove. The movement of the push rod and the push block is controlled by the micro-control switch, reducing the need for additional baffles and sensors.
This results in a more compact overall structure for the equipment, saving space, and enabling precise and rapid control of the movement of the push rod and push block.
Smart Images
Figure CN223899684U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the semiconductor field, specifically to a chuck module. Background Technology
[0002] like Figure 4 As shown, in existing furnace tube equipment, the wafer transfer mechanism includes a cylinder 31 and a push rod 32 driven by the cylinder 31, with a push block 33 fixed at the front end of the push rod 32. To ensure that the push block can move accurately to a preset position, a baffle 34 is connected to the push rod, and a sensor 35 is set on the front side of the baffle. During operation, the cylinder 31 is activated, driving the push rod 32 to move forward with the push block 33, and the baffle 34 also moves forward. When the sensor 35 detects the baffle, it indicates that the push block 33 has moved into place, the sensor 35 sends a signal, the cylinder 31 stops, and then subsequent production operations are carried out. However, due to the addition of the sensor and the baffle, the number of components in the equipment increases, resulting in excessive space occupation. Utility Model Content
[0003] The purpose of this invention is to provide a chuck module, which makes the overall structure of the device more compact and saves space.
[0004] The objective of this utility model can be achieved through the following technical solutions:
[0005] A chuck module includes a cylinder, a push rod driven by the cylinder, and a push block located in front of the push rod. The push block has an axially extending guide groove on its rear end face. The front end of the push rod extends into the guide groove. A micro-control switch is mounted on the front end face of the push rod. The micro-control switch has a gap with the front wall of the guide groove to form a movable stroke. A constraint structure exists between the push rod and the guide groove. When the push block is not obstructed, the constraint structure causes the micro-control switch to be in a state away from the front wall of the guide groove, enabling the push rod to drive the push block. When the push block is obstructed, the push rod can overcome the constraint force of the constraint structure and move forward within the guide groove until the micro-control switch moves forward and abuts against the front wall of the guide groove.
[0006] Using the above technical solution, the front end of the push rod extends into the guide groove. A microcontroller switch is installed on the front surface of the push rod. The microcontroller switch has a travel distance from the front wall of the guide groove, and a constraint structure exists between the push rod and the guide groove. Thus, when the push rod is driven forward, the push block can follow. When the push block moves forward and contacts the wafer, it is stopped by the wafer. The push rod can overcome the constraint force of the constraint structure and move forward along the guide groove, causing the microcontroller switch to contact the front wall of the guide groove. Once contact is made, the microcontroller switch sends a signal, the cylinder stops working, and the push rod stops moving forward. Compared to existing technologies, this reduces the need for additional baffles and sensors, making the overall structure of the equipment more compact and saving space.
[0007] In a specific embodiment of this utility model: the constraint structure includes a triangular wedge and a spring. The push rod has a groove on its side. The front end of the wedge is rotatably mounted in the groove via a pin. The top of the guide groove has a slot that fits the wedge. The bottom surface of the wedge has a downwardly extending upper positioning post. A lower positioning post is provided on the bottom surface of the groove corresponding to the position of the upper positioning post. The spring is sleeved on the upper and lower positioning posts. One end of the spring abuts against the bottom surface of the wedge, and the other end abuts against the bottom surface of the groove, so that the upper corner of the wedge is inserted into the slot to form an interlocking action.
[0008] In a specific embodiment of this utility model: an inspection hole is provided at the top of the guide groove corresponding to the position of the inclined block. The inspection hole facilitates disassembly and maintenance.
[0009] In summary, the present invention provides a guide groove on the rear end face of the push block, and the front end of the push rod extends into the guide groove. A micro-control switch is installed on the front end face of the push rod. There is a gap between the micro-control switch and the front wall of the guide groove to form an active stroke. There is a constraint structure between the push rod and the guide groove. When the push block is not obstructed in front of the push block, the push block can move with the push rod. When the push block is obstructed in front of the push block, the push rod can overcome the constraint force of the constraint structure and move forward in the guide groove until the micro-control switch moves forward and abuts against the front wall of the guide groove. This achieves precise and rapid control of the movement of the push rod and the push block. Moreover, the structure is compact and saves space. Attached Figure Description
[0010] The present invention will be further described below with reference to the accompanying drawings.
[0011] Figure 1 This is a schematic diagram of the structure of a clamp module according to the present invention;
[0012] Figure 2 yes Figure 1 Sectional view at point AA;
[0013] Figure 3 yes Figure 2 Enlarged view of point B in the middle;
[0014] Figure 4 This is a schematic diagram showing the structure of a prior art chuck module. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0016] Please see Figure 1 and Figure 2 As shown, this utility model is a chuck module, including a cylinder 14, a push rod 11 driven by the cylinder 14, and a push block 10 located in front of the push rod 11. Both the push block 10 and the push rod 11 are rectangular. A guide groove 13 extending axially is provided on the rear end face of the push block 10. The front end of the push rod 11 extends into the guide groove 13, and the push rod 11 can move forward and backward along the guide groove 13. A micro-control switch 15 is mounted on the front end face of the push rod. A gap 16 is formed between the micro-control switch 15 and the front wall of the guide groove 13, creating a movable stroke 16.
[0017] A constraint structure 20 is provided between the push rod 11 and the guide groove 13. When the cylinder 14 is activated, it drives the push rod 11, carrying the microcontroller 15, to move forward towards the wafer. The push block 10 moves synchronously with the push rod via the constraint structure 20. When the push block 10 contacts the wafer and is stopped by it, the push rod 11 overcomes the constraint force of the constraint structure 20 and continues to move forward along the guide groove 13 with the microcontroller 15 until it contacts the front wall of the guide groove 13. Once contact is made, the microcontroller 15 sends a signal, the cylinder 14 stops working, and the push rod stops moving forward, indicating that the push rod 11 and push block 10 have reached their positions. Compared to existing technologies, this design reduces the need for additional baffles and sensors, resulting in a more compact overall structure and effectively saving internal space.
[0018] like Figure 2 and Figure 3As shown, in this embodiment, the constraint structure 20 includes a triangular wedge 21 and a spring 22. A groove 23 is formed on the upper surface of the push rod 11. The front end of the wedge 21 is rotatably mounted in the groove 23 via a pin 27. The top of the guide groove 13 has a latch 24 adapted to the wedge 21. The upper apex 211 of the wedge is inserted into the latch. The bottom surface of the wedge 21 has a downwardly extending upper positioning post 25, and the bottom surface of the groove 23 is provided with a lower positioning post 26 corresponding to the position of the upper positioning post 25. The spring 22 is sleeved on the upper positioning post 25 and the lower positioning post 26. One end of the spring 22 abuts against the bottom surface of the wedge 21, and the other end abuts against the bottom surface of the groove 23. The wedge 21 is pushed by the spring 22, and the upper apex 211 is inserted into the latch 24 to form an interlocking structure, thereby preventing the push block from falling off the push rod. Thus, when push block 10 contacts the wafer and is stopped by it, as push rod 11 continues to move forward along guide groove 13, wedge block 21 experiences resistance from bayonet 24. This resistance causes wedge block 21 to rotate around pin 27. During rotation, the apex 211 of the upper end of wedge block gradually separates from bayonet 24. Simultaneously, the upper positioning post 25 on the bottom surface of wedge block 21 also moves with the rotation of wedge block 21, compressing the spring 22 fitted on the upper positioning post 25, and the spring 22 begins to store energy. As push rod moves forward, microcontroller switch 15 contacts the front wall of guide groove 13. Microcontroller switch sends a signal, controlling cylinder 14 to stop working. When push rod stops moving forward and there is no resistance in front of push block, the compressed spring begins to release energy, pushing wedge block 21 to rotate in the opposite direction around pin, causing the apex of the upper end of wedge block to re-insert into bayonet 24 to form an interlocking structure, and in this process, microcontroller switch returns to its initial position.
[0019] like Figure 3 As shown, in this embodiment, an inspection hole 17 is provided at the top of the guide groove 13 corresponding to the position of the inclined block 21. The inspection hole facilitates disassembly and maintenance. When disassembly or maintenance is required, a tool can be inserted through the inspection hole 17 to press against the inclined block 21, applying downward pressure to force the inclined block 21 to rotate around the pin, causing the apex 211 of the upper end of the inclined block to separate from the bayonet. The push block 10 is then pulled forward to separate the push block 10 from the push rod 11. After separation, damaged parts can be inspected, cleaned, or replaced.
[0020] The above describes a chuck module according to this utility model. During operation, the cylinder 14 is activated, driving the push rod 11 to move the push block 10 towards the wafer. When the push block 10 contacts the wafer and is stopped by the wafer, the push rod 11 continues to move forward along the guide groove 13. During this process, the inclined block 21 is resisted by the bayonet 24, which causes the inclined block 21 to rotate around the pin 27. As the inclined block rotates, the apex 211 of the upper end of the inclined block gradually separates from the bayonet 24. At the same time, the upper positioning post 25 on the bottom surface of the inclined block 21 also moves with the rotation of the inclined block 21, and the spring 22 sleeved on the upper positioning post 25 is compressed, and the spring 22 begins to store energy. As the push rod moves forward, when the micro-control switch 15 contacts the front wall of the guide groove 13, the micro-control switch will send a signal, controlling the cylinder 14 to stop working, and the push rod will also stop moving forward. At this time, it indicates that the push rod and the push block have moved into place and the subsequent production process can proceed. After the subsequent production process is completed, when the push is unresisted, the compressed spring begins to release energy, pushing the inclined block 21 to rotate in the opposite direction around the pin shaft, so that the top corner 211 of the upper end of the inclined block is re-inserted into the bayonet 24 to form an interlocking structure, and in the process, the micro-control switch returns to the initial position, waiting for the next operation.
[0021] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.
Claims
1. A chuck module, comprising a cylinder, a push rod driven by the cylinder, and a push block located in front of the push rod, characterized in that, The push block has an axially extending guide groove on its rear end face. The front end of the push rod extends into the guide groove, and a micro-control switch is installed on the front end face of the push rod. There is a gap between the micro-control switch and the front wall of the guide groove to form a movable stroke. There is a constraint structure between the push rod and the guide groove. When the push block is not obstructed in front, the constraint structure causes the micro-control switch to be in a state away from the front wall of the guide groove, and enables the push rod to drive the push block to move. When the push block is obstructed in front, the push rod can overcome the constraint force of the constraint structure and move forward in the guide groove until the micro-control switch moves forward and abuts against the front wall of the guide groove.
2. The chuck module according to claim 1, characterized in that, The constraint structure includes a triangular wedge and a spring. The push rod has a groove on its side. The front end of the wedge is rotatably mounted in the groove via a pin. The top of the guide groove has a slot that fits the wedge. The bottom surface of the wedge has an upper positioning post extending downward. A lower positioning post is provided on the bottom surface of the groove corresponding to the position of the upper positioning post. The spring is sleeved on the upper and lower positioning posts. One end of the spring abuts against the bottom surface of the wedge, and the other end abuts against the bottom surface of the groove, so that the upper apex of the wedge is inserted into the slot to form an interlocking action.
3. The chuck module according to claim 1, characterized in that, An inspection hole is provided at the top of the guide groove corresponding to the position of the inclined block.