Vacuum coating machine with dust collection function

Abstract

The utility model relates to the technical field of vacuum coating machines, and discloses a vacuum coating machine with a dust collection function, which comprises a coating machine body, the inner bottom surface of the coating machine body is fixedly connected with a mounting frame, the inner wall of the mounting frame is slidably connected with a sliding plate, and the sliding plate is fixedly connected with the mounting frame. And a dust collection assembly is arranged on the inner wall of the coating machine body. According to the vacuum coating machine with the dust collection function, a workpiece rotationally moves to the side face of the dust collection opening, floating dust attached to the surface can be more easily sucked away, the dust collection efficiency is improved, the dust collection opening longitudinally reciprocates, all areas of the surface of the workpiece can be effectively subjected to dust collection, local dust residues are avoided, and the vacuum coating machine is suitable for different types of workpieces; and the air outlet pipe blows air from the middle of the workpiece, so that the adsorption force of dust can be destroyed, the dust can be suspended, the dust can be taken away by airflow more easily, and the dust collection effect of the dust collection opening is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine technical field, concretely is a kind of vacuum coating machine with dust collection function. BACKGROUND

[0002] Vacuum coating refers to the method that metal or non-metal material is heated under high vacuum, evaporates and condenses on the surface of the plated part, i.e. metal, semiconductor or insulator, to form a thin film, and the vacuum coating machine refers to the evaporation or sputtering of metal, alloy or compound in vacuum, so that it condenses and deposits on the object to be coated, i.e. substrate, wafer or base.

[0003] According to the vacuum coating machine with dust collection function (publication number: CN219547086U) disclosed in the above-mentioned application, the vacuum coating machine body is internally mounted with a rotating plate, a support column is fixedly installed in the middle of the rotating plate, a bracket is fixedly installed at a position away from the support column in the middle of the rotating plate, a motor is arranged at the bottom end inside the vacuum coating machine body, a hollow box is fixedly installed at the rear end of the vacuum coating machine body, and a storage box is arranged inside the hollow box.

[0004] However, in the actual use process of the above-mentioned device, dust on the workpiece can exist everywhere on the surface of the workpiece and is not limited to a single direction. Dust may not be effectively collected if it is only sucked from one angle, especially in areas far from the dust suction port or where air flow is not easy to reach. In view of this, the present application provides a vacuum coating machine with dust collection function. SUMMARY

[0005] The purpose of the present application is to provide a vacuum coating machine with dust collection function to solve the problems raised in the background art.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical scheme: a vacuum coating machine with dust collection function, comprising a coating machine body, an installation rack is fixedly connected to the inner bottom surface of the coating machine body, a sliding plate is slidingly connected to the inner wall of the installation rack, a dust collection assembly is arranged on the inner wall of the coating machine body, and the dust collection assembly comprises:

[0007] A rotating disc is fixedly connected to the bottom end surface of the rotating disc, a rotating frame is rotatably connected to the top end surface of the rotating disc, a hollow tube is fixedly connected to the top end surface of the rotating disc, a gas outlet hole is formed in the side wall of the hollow tube, a motor is fixedly connected to the inner bottom surface of the coating machine body, a rotating shaft is fixedly connected to the output end of the motor, and a rotating plate is fixedly connected to the top end of the rotating shaft.

[0008] A dust collector is fixedly connected to the side wall of the dust collector, and a gas conveying pipe is fixedly connected to the side wall of the dust collector.

[0009] The vertical frame is fixedly connected with an arc-shaped frame on the side wall, the mounting frame is rotationally connected with a rotating rod, and the top end of the rotating rod is fixedly connected with a half gear.

[0010] Preferably, the number of mounting frames is two groups, one group of the mounting frames is fixedly connected to the inner bottom surface of the coating machine body, and the other group of the mounting frames is fixedly connected to the inner top surface of the coating machine body.

[0011] Preferably, the half gear is engaged with the toothed plate, the outer wall of the dust suction port is movably connected with the inner wall of the arc-shaped frame, the dust suction port is hingedly connected with the inner wall of the coating machine body, and the half gear drives the toothed plate to reciprocate transversely.

[0012] Preferably, the side wall of the rotating rod is fixedly connected with a pulley one, the pulley one is drivingly connected with a belt, the side wall of the rotating shaft is fixedly connected with a pulley two, the pulley two is drivingly connected with the belt, the rotating shaft drives the rotating rod to rotate through the belt, and the half gear is further driven to rotate.

[0013] Preferably, the side wall of the dust collector is fixedly connected with an air outlet pipe, the air outlet pipe is sleeved with the mounting frame, and the air outlet pipe abuts against the top end of the hollow pipe.

[0014] Preferably, the side wall of the rotating frame is fixedly connected with a cross rod, and a plurality of groups of the cross rods are arranged at equal intervals on the side wall of the rotating frame.

[0015] Preferably, the bottom end surface of the mounting frame fixedly connected to the inner top surface of the coating machine body is fixedly connected with a rubber rod, and the side wall of the rubber rod is fixedly connected with a convex ring.

[0016] Compared with the prior art, the vacuum coating machine with the dust collection function has the following beneficial effects:

[0017] 1. The vacuum coating machine with the dust collection function, through the dust collection assembly, the workpiece rotates and moves to the side of the dust suction port, so that the floating dust attached to the surface can be more easily sucked away, the dust collection efficiency is improved, the dust suction port reciprocates longitudinally, the dust suction port reciprocates longitudinally, which means that it can cover a larger range, so that each area of the workpiece surface can be effectively dusted, local dust residue is avoided, different types of workpieces are adapted, all surfaces can be cleaned, the air outlet pipe blows air from the middle of the workpiece, which can destroy the adsorption force of the dust, make it suspended, and make the dust more easily carried away by the airflow, thereby improving the dust collection effect of the dust suction port.

[0018] 2. The vacuum coating machine with dust collection function, through the rubber rod, the rotating frame is driven to rotate, the workpiece changes its orientation in the rotating process, so that each angle of the workpiece can be exposed in front of the dust suction port in turn, avoiding the cleaning dead angle caused by fixed angle dust collection, and the dust particles attached to the surface of the workpiece are more easily stripped by airflow and quickly sucked away. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the main structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the main structure of the utility model Figure 1 It is a schematic diagram of the A area structure in the utility model;

[0021] Figure 3 It is a schematic diagram of the dust collection assembly structure of the utility model;

[0022] Figure 4 It is a schematic diagram of the B area structure in the utility model; Figure 3

[0023] It is an exploded view of the rotating frame of the utility model; Figure 5

[0024] It is a schematic diagram of the arc-shaped frame structure of the utility model. Figure 6 In the figure: 1, coating machine body; 2, mounting frame; 3, sliding plate; 4, dust collection assembly; 401, rotating disc; 402, clamping block; 403, motor; 404, rotating plate; 405, rotating frame; 406, cross bar; 407, hollow pipe; 408, air outlet; 409, dust collector; 410, gas conveying pipe; 411, dust suction port; 412, toothed plate; 413, vertical frame; 414, arc-shaped frame; 415, rotating rod; 416, half gear; 417, air outlet pipe; 5, rubber rod; 6, convex ring; 7, belt.

[0025] DETAILED DESCRIPTION

[0026] As shown in the figure, the utility model provides a technical scheme: a vacuum coating machine with dust collection function, comprising a coating machine body 1, the inside bottom surface of the coating machine body 1 is fixedly connected with a mounting frame 2, the inner wall of the mounting frame 2 is slidably connected with a sliding plate 3, the inner wall of the coating machine body 1 is provided with a dust collection assembly 4, the dust collection assembly 4 comprises a rotating disc 401, a clamping block 402, a motor 403, a rotating plate 404, a rotating frame 405, a cross bar 406, a hollow pipe 407, an air outlet 408, a dust collector 409, a gas conveying pipe 410, a dust suction port 411, a toothed plate 412, a vertical frame 413, an arc-shaped frame 414, a rotating rod 415, a half gear 416 and an air outlet pipe 417. Figures 1-6

[0027] ​​In an embodiment of the utility model, the bottom end surface of rotary disc 401 is fixedly connected with clamping block 402, the top end surface of rotary disc 401 is rotatably connected with rotary frame 405, the side wall of rotary frame 405 is fixedly connected with cross bar 406, the number of cross bar 406 is set to several groups, several groups of cross bar 406 are equidistantly arranged on the side wall of rotary frame 405, the top end surface of rotary disc 401 is fixedly connected with hollow tube 407, the side wall of hollow tube 407 is provided with air outlet 408, the inner bottom surface of coating machine body 1 is fixedly connected with motor 403, the output end of motor 403 is fixedly connected with rotating shaft, the top end of rotating shaft is fixedly connected with rotating plate 404.

[0028] The side wall of dust collector 409 is fixedly connected with air conveying pipe 410, the side wall of air conveying pipe 410 is fixedly connected with dust suction port 411, the number of mounting bracket 2 is two groups, one group of mounting bracket 2 is fixedly connected to the inner bottom surface of coating machine body 1, the other group of mounting bracket 2 is fixedly connected to the inner top surface of coating machine body 1, dust collector 409 is fixedly connected to the inner bottom surface of mounting bracket 2 on the inner top surface of coating machine body 1, the side wall of dust collector 409 is fixedly connected with air outlet pipe 417, air outlet pipe 417 is sleeved with mounting bracket 2, air outlet pipe 417 abuts against the top end of hollow tube 407, air outlet pipe 417 blows air into hollow tube 407, and then the airflow is blown out through air outlet pipe 417.

[0029] The top end surface of toothed plate 412 is fixedly connected with vertical frame 413, the side wall of vertical frame 413 is fixedly connected with arc-shaped frame 414, mounting bracket 2 is rotatably connected with rotating rod 415, the side wall of rotating rod 415 is fixedly connected with pulley one, pulley one is drivingly connected with belt 7, the side wall of rotating shaft is fixedly connected with pulley two, pulley two is drivingly connected with belt 7, through belt 7, rotating shaft drives rotating rod 415 to rotate, and then drives half gear 416 to rotate, the top end of rotating rod 415 is fixedly connected with half gear 416, half gear 416 is engaged with toothed plate 412, the outer wall of dust suction port 411 is movably connected with the inner wall of arc-shaped frame 414, dust suction port 411 is hingedly connected with the inner wall of coating machine body 1, half gear 416 drives toothed plate 412 to reciprocate transversely.

[0030] The motor 403 drives the rotating shaft and the rotating plate 404 to rotate, and further drives the rotating disc 401 and the rotating frame 405 to rotate, so that the workpiece hung on the horizontal rod 406 rotates, and the workpiece rotates to the side of the dust suction port 411, dust attached to the surface can be more easily sucked away, the dust suction efficiency is improved, the rotation of the rotating shaft drives the rotating rod 415 to rotate through the transmission of the belt 7, and further drives the half gear 416 to rotate, the rotation of the half gear 416 drives the toothed plate 412 to reciprocate horizontally, and further drives the arc-shaped frame 414 to reciprocate horizontally, and drives the dust suction port 411 to reciprocate longitudinally, the longitudinal reciprocation of the dust suction port 411 means that the dust suction port 411 can cover a larger range, so that each region of the workpiece surface can be effectively dusted, local dust residue is avoided, different types of workpieces are adapted to, all surfaces can be cleaned, the versatility of the equipment is improved, the air outlet pipe 417 blows air into the hollow pipe 407, and further blows the air flow out through the air outlet pipe 417, and the air flow is blown from the middle of the workpiece, the adsorption force of dust can be destroyed, the dust is suspended, and the dust is more easily taken away by the air flow, so that the dust suction effect of the dust suction port 411 is improved.

[0031] In addition, the bottom end surface of the mounting frame 2 fixedly connected to the inner top surface of the coating machine body 1 is fixedly connected with a rubber rod 5, and the side wall of the rubber rod 5 is fixedly connected with a convex ring 6, when the rotating frame 405 rotates, the rubber rod 5 is in contact with the rotating frame 405, the convex ring 6 improves the friction force with the rotating frame 405, and further drives the rotating frame 405 to rotate, so that the workpiece changes its orientation during rotation, so that each angle of the workpiece can be exposed in front of the dust suction port 411 in turn, the cleaning dead angle caused by fixed-angle dusting is avoided, and dust particles attached to the surface of the workpiece are more easily stripped by the air flow and quickly sucked away, so that the overall dust removal effect is improved.

[0032] In the utility model, when in use, the motor 403 drives the rotating shaft and the rotating plate 404 to rotate, and further drives the rotating disc 401 and the rotating frame 405 to rotate, so that the workpiece hung on the horizontal rod 406 rotates, and the workpiece rotates to the side of the dust suction port 411, dust attached to the surface can be more easily sucked away, the rotation of the rotating shaft drives the rotating rod 415 to rotate through the transmission of the belt 7, and further drives the half gear 416 to rotate, the rotation of the half gear 416 drives the toothed plate 412 to reciprocate horizontally, and further drives the arc-shaped frame 414 to reciprocate horizontally, and drives the dust suction port 411 to reciprocate longitudinally, so that each region of the workpiece surface can be effectively dusted, the air outlet pipe 417 blows air into the hollow pipe 407, and further blows the air flow out through the air outlet pipe 417, and the air flow is blown from the middle of the workpiece, the adsorption force of dust can be destroyed, the dust is suspended, and the dust suction effect of the dust suction port 411 is improved.

[0033] The utility model has made the detailed description to the utility model generally above, but can make some modification or improvement to it on the basis of the utility model, this is obvious to the general skilled person in the technical field. Therefore, the modification or improvement without departing from the utility model thought spirit, all are within the protection scope of the utility model.

Claims

1. A vacuum coating machine with a dust-collecting function, comprising a coating machine body (1), wherein a mounting frame (2) is fixedly connected to the inner bottom surface of the coating machine body (1), and a sliding plate (3) is slidably connected to the inner wall of the mounting frame (2), characterized in that: The inner wall of the coating machine body (1) is provided with a dust suction assembly (4), the dust suction assembly (4) comprises: The bottom end surface of the rotating disc (401) is fixedly connected with a clamping block (402), the top end surface of the rotating disc (401) is rotatably connected with a rotating frame (405), the top end surface of the rotating disc (401) is fixedly connected with a hollow pipe (407), the side wall of the hollow pipe (407) is provided with an air outlet (408), the inner bottom surface of the coating machine body (1) is fixedly connected with a motor (403), the output end of the motor (403) is fixedly connected with a rotating shaft, and the top end of the rotating shaft is fixedly connected with a rotating plate (404); A dust collector (409) is fixedly connected with a gas delivery pipe (410) on the side wall, and the gas delivery pipe (410) is fixedly connected with a dust suction port (411) on the side wall. A toothed plate (412) is fixedly connected with a vertical frame (413) on the top end surface, the vertical frame (413) is fixedly connected with an arc-shaped frame (414) on the side wall, the mounting frame (2) is rotatably connected with a rotating rod (415), and the top end of the rotating rod (415) is fixedly connected with a half gear (416).

2. The vacuum coating machine with dust absorption function according to claim 1, characterized in that: There are two groups of mounting frames (2), one group of mounting frames (2) is fixedly connected to the inner bottom surface of the coating machine body (1), and the other group of mounting frames (2) is fixedly connected to the inner top surface of the coating machine body (1), and the dust collector (409) is fixedly connected to the inner bottom surface of the mounting frame (2) on the inner top surface of the coating machine body (1).

3. The vacuum coating machine with dust absorption function according to claim 1, characterized in that: The half gear (416) is engaged with the toothed plate (412), the outer wall of the dust suction port (411) is movably connected with the inner wall of the arc-shaped frame (414), and the dust suction port (411) is hingedly connected with the inner wall of the coating machine body (1).

4. The vacuum coating machine with dust absorption function according to claim 1, characterized in that: The side wall of the rotating rod (415) is fixedly connected with a pulley one, the pulley one is drivingly connected with a belt (7), and the side wall of the rotating shaft is fixedly connected with a pulley two, the pulley two is drivingly connected with the belt (7).

5. The vacuum coating machine with dust absorption function according to claim 1, characterized in that: The side wall of the dust collector (409) is fixedly connected with an air outlet pipe (417), the air outlet pipe (417) is sleeved with the mounting frame (2), and the air outlet pipe (417) abuts against the top end of the hollow pipe (407).

6. The vacuum coating machine with dust absorption function according to claim 1, characterized in that: The side wall of the rotating frame (405) is fixedly connected with a cross rod (406), and a plurality of groups of cross rods (406) are arranged at equal intervals on the side wall of the rotating frame (405).

7. The vacuum coating machine with dust absorption function according to claim 2, characterized in that: The bottom end surface of the mounting frame (2) fixedly connected to the inner top surface of the coating machine body (1) is fixedly connected with a rubber rod (5), and the side wall of the rubber rod (5) is fixedly connected with a convex ring (6).

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