Vacuum adsorption platform for ceramic substrate

Abstract

The utility model discloses a vacuum adsorption platform for a ceramic substrate, which comprises a waste collecting tank (1), an aluminum alloy platform (19) is arranged on the upper plane of the waste collecting tank (1), a Bernoulli suction cup is assembled on the aluminum alloy platform (19), the Bernoulli suction cup is communicated with a gas shunting block, and clamping blocks are arranged on the periphery of the aluminum alloy platform (19). Limiting rubber rollers are arranged between every two adjacent clamping blocks, the limiting rubber rollers comprise a first limiting rubber roller (3), a second limiting rubber roller (5), a third limiting rubber roller (7), a fourth limiting rubber roller (9) and a fifth limiting rubber roller (12), the fourth limiting rubber roller (9) is installed on a first air cylinder (10), and the fifth limiting rubber roller (12) is installed on a second air cylinder (13). And the requirement for the quality of the sheet is lowered, the adaptation degree is improved, and the sheet can be pushed to the accurate position to be machined.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the position adjustment technical field of ceramic substrate relates to a vacuum adsorption platform for ceramic substrate. BACKGROUND

[0002] The ceramic substrate refers to the special process board that copper foil is directly bonded to the surface of alumina or aluminum nitride ceramic substrate at high temperature. The ultra-thin composite substrate has excellent electrical insulation performance, high thermal conductivity, excellent solderability and high adhesion strength, and can etch various patterns like PCB, and has great current carrying capacity. Therefore, the ceramic substrate has become the basic material of high-power power electronic circuit structure technology and interconnection technology.

[0003] A large amount of dust is attached to the surface of the ceramic substrate, if the suction mode is used, the filter element will be frequently blocked, and the suction force will be reduced, so that the product cannot be effectively adsorbed; the ceramic substrate itself is not flat enough, resulting in a large amount of invalid adsorption during the adsorption process of the platform, and the processing process cannot be smoothly carried out; the deviation of the mechanical hand feeding position is large, so that the processing position of the ceramic substrate is not accurate enough. UTILITY MODEL CONTENT

[0004] In view of the above problems existing in the prior art, the application provides a vacuum adsorption platform for ceramic substrate.

[0005] The technical scheme of the utility model is as follows:

[0006] A vacuum adsorption platform for ceramic substrate, comprising a waste collecting groove, an aluminum alloy platform is arranged on the upper plane of the waste collecting groove, the aluminum alloy platform is assembled with a Bernoulli chuck, the Bernoulli chuck is communicated with a gas shunt block, a clamping block is installed around the aluminum alloy platform, a limiting rubber roller is arranged between adjacent clamping blocks, the limiting rubber roller comprises a limiting rubber roller one, a limiting rubber roller two, a limiting rubber roller three, a limiting rubber roller four and a limiting rubber roller five, the limiting rubber roller four is installed on a cylinder one, and the limiting rubber roller five is installed on a cylinder two.

[0007] As a preferred embodiment of the utility model: the clamping block comprises a clamping block one, a clamping block two, a clamping block three, a clamping block four and a clamping block five, and the Bernoulli chuck comprises a Bernoulli chuck one, a Bernoulli chuck two, a Bernoulli chuck three, a Bernoulli chuck four and a Bernoulli chuck five.

[0008] As a preferred embodiment of the utility model: the Bernoulli chuck four is arranged at the center position of the aluminum alloy platform, the diameters of the Bernoulli chuck one, the Bernoulli chuck two, the Bernoulli chuck three and the Bernoulli chuck five are equal, and the diameter of the Bernoulli chuck four is smaller than that of the Bernoulli chuck one.

[0009] As a preferred embodiment of the utility model: limit rubber roller one is set between clamping block one and clamping block two, limit rubber roller two is set between clamping block two and clamping block three, limit rubber roller three is set between clamping block three and clamping block four, limit rubber roller four is set between clamping block four and clamping block five, and limit rubber roller five is set between clamping block five and clamping block one.

[0010] As a preferred embodiment of the utility model: the gas shunt block includes gas shunt block one and gas shunt block two, the gas shunt block one is communicated with the input main pipe, branch pipe one, branch pipe two, branch pipe three, the gas shunt block two is communicated with branch pipe three, branch pipe four, branch pipe five and branch pipe six.

[0011] As a preferred embodiment of the utility model: branch pipe six is communicated with Bernoulli chuck two, branch pipe five is communicated with Bernoulli chuck four, branch pipe four is communicated with Bernoulli chuck three, branch pipe three is communicated with gas shunt block one and gas shunt block two, branch pipe two is communicated with Bernoulli chuck five, and branch pipe one is communicated with Bernoulli chuck one.

[0012] The utility model has the advantages of:

[0013] The filter core of the vacuum generator is avoided from being frequently replaced, the equipment consumable cost is reduced, the aluminum alloy platform can fix the Bernoulli chuck, the Bernoulli chuck can adsorb the ceramic substrate by blowing, can adsorb irregular sheet material, greatly reduces the quality requirement of sheet material, greatly improves the adaptation degree, can place multiple models of Bernoulli chuck at the set position according to the size of ceramic sheet material, ensures that the sheet material is evenly stressed and can be adsorbed on the aluminum alloy platform, the position of sheet material on the aluminum alloy platform can be adjusted by adjusting the distance of the cylinder push, the sheet material is pushed to the accurate position for processing, the limit rubber roller is arranged between the adjacent clamping blocks, can avoid the damage caused by the direct collision of sheet material and clamping block, and is convenient and reliable. ACCURACY

[0014] Fig. 1 It is a top view of the utility model ceramic substrate vacuum adsorption platform;

[0015] Fig. 2 It is the front view of the utility model;

[0016] Fig. 3 It is the perspective view of the utility model.

[0017] In the figure: 1-waste collection tank; 2-clamping block one; 3-limiting rubber roller one; 4-clamping block two; 5-limiting rubber roller two; 6-clamping block three; 7-limiting rubber roller three; 8-clamping block four; 9-limiting rubber roller four; 10-cylinder one; 11-clamping block five; 12-limiting rubber roller five; 13-cylinder two; 14-Bernoulli chuck one; 15-Bernoulli chuck two; 16-Bernoulli chuck three; 17-Bernoulli chuck four; 18-Bernoulli chuck five; 19-aluminum alloy platform; 20-input main pipe; 21-branch pipe one; 22-gas distribution block one; 23-branch pipe two; 24-branch pipe three; 25-branch pipe four; 26-branch pipe five; 27-branch pipe six; 28-gas distribution block two. DETAILED DESCRIPTION

[0018] The utility model will be described in detail below in combination with the drawings and examples. Obviously, the described examples are only a part of the examples of the utility model, rather than all the examples. Based on the examples in the utility model, all other examples obtained by the ordinary skilled in the art without creative labor belong to the scope of protection of the utility model.

[0019] As Figs. 1-3 shown, a kind of vacuum adsorption platform for ceramic substrate, including waste collection tank 1, the upper plane of waste collection tank 1 is provided with aluminum alloy platform 19, aluminum alloy platform 19 is equipped with Bernoulli chuck, Bernoulli chuck is connected with gas distribution block, aluminum alloy platform 19 is installed with clamping block around, limiting rubber roller is set between adjacent clamping block, it can avoid breakage caused by sheet material and clamping block direct collision, limiting rubber roller includes limiting rubber roller one 3, limiting rubber roller two 5, limiting rubber roller three 7, limiting rubber roller four 9, limiting rubber roller five 12, limiting rubber roller four 9 is installed in cylinder one 10, limiting rubber roller five 12 is installed in cylinder two 13.

[0020] Clamping block includes clamping block one 2, clamping block two 4, clamping block three 6, clamping block four 8, clamping block five 11, Bernoulli chuck includes Bernoulli chuck one 14, Bernoulli chuck two 15, Bernoulli chuck three 16, Bernoulli chuck four 17, Bernoulli chuck five 18;Bernoulli chuck four 17 is set at the center position of aluminum alloy platform 19, the diameter of Bernoulli chuck one 14, Bernoulli chuck two 15, Bernoulli chuck three 16, Bernoulli chuck five 18 is equal, and the diameter of Bernoulli chuck four 17 is less than the diameter of Bernoulli chuck one 14.

[0021] The limiting rubber roller one 3 is arranged between the clamping block one 2 and the clamping block two 4, the limiting rubber roller two 5 is arranged between the clamping block two 4 and the clamping block three 6, the limiting rubber roller three 7 is arranged between the clamping block three 6 and the clamping block four 8, the limiting rubber roller four 9 is arranged between the clamping block four 8 and the clamping block five 11, and the limiting rubber roller five 12 is arranged between the clamping block five 11 and the clamping block one 2.

[0022] The gas distribution block comprises a gas distribution block one 22 and a gas distribution block two 28, the gas distribution block one 22 is communicated with the input header pipe 20, the branch pipe one 21, the branch pipe two 23 and the branch pipe three 24, the gas distribution block two 28 is communicated with the branch pipe three 24, the branch pipe four 25, the branch pipe five 26 and the branch pipe six 27; the branch pipe six 27 is communicated with the Bernoulli chuck two 15, the branch pipe five 26 is communicated with the Bernoulli chuck four 17, the branch pipe four 25 is communicated with the Bernoulli chuck three 16, the branch pipe three 24 is communicated with the gas distribution block one 22 and the gas distribution block two 28, the branch pipe two 23 is communicated with the Bernoulli chuck five 18, and the branch pipe one 21 is communicated with the Bernoulli chuck one 14.

[0023] In conclusion, the vacuum adsorption platform for ceramic substrates can avoid frequent replacement of filter elements of vacuum generators, and reduce the cost of equipment consumables; the aluminum alloy platform can fix the Bernoulli chuck, the Bernoulli chuck can adsorb the ceramic substrate through the blowing mode, can provide an adsorption force of up to 1200g, the sheet material will not be thrown in the processing process, can adsorb irregular sheet materials, greatly reduces the quality requirements of the sheet material, greatly improves the adaptation degree; can place Bernoulli chucks of various models at the set positions according to the size of the ceramic sheet material, ensures that the sheet material is evenly stressed and can be adsorbed flat on the aluminum alloy platform, and no abnormal interruption phenomenon occurs in the processing process; the position of the sheet material on the aluminum alloy platform can be adjusted by adjusting the distance pushed by the air cylinder, the sheet material is pushed to the accurate position for processing, the position deviation between different sheet materials is ≤2mm, and the use requirements are met.

[0024] Although the embodiments of the utility model have been disclosed as above, it is not limited to the application listed in the specification and the embodiments, it can be fully applied to various fields suitable for the utility model, for those skilled in the art, for ordinary skilled in the art, can make various changes, modifications, replacements and modifications to these embodiments without departing from the principles and spirits of the utility model, therefore, the utility model is not limited to specific details under the general concept defined by the claims and equivalent range.

Claims

1. A vacuum suction platform for ceramic substrates, characterized by: Including waste collection tank (1), the upper plane of waste collection tank (1) is provided with aluminum alloy platform (19), the aluminum alloy platform (19) is equipped with Bernoulli chuck, the Bernoulli chuck is communicated with gas shunt block, the periphery of aluminum alloy platform (19) is installed with clamping block, the adjacent clamping block is provided with limiting rubber roller, limiting rubber roller one (3), limiting rubber roller two (5), limiting rubber roller three (7), limiting rubber roller four (9), limiting rubber roller five (12) are arranged, limiting rubber roller four (9) is installed in cylinder one (10), limiting rubber roller five (12) is installed in cylinder two (13).

2. The vacuum chuck table for ceramic substrates according to claim 1, wherein: The clamping block includes clamping block one (2), clamping block two (4), clamping block three (6), clamping block four (8), clamping block five (11), and the Bernoulli chuck includes Bernoulli chuck one (14), Bernoulli chuck two (15), Bernoulli chuck three (16), Bernoulli chuck four (17) and Bernoulli chuck five (18).

3. The vacuum chuck table for ceramic substrates according to claim 2, wherein: The Bernoulli chuck four (17) is arranged at the center position of the aluminum alloy platform (19), the diameters of the Bernoulli chuck one (14), the Bernoulli chuck two (15), the Bernoulli chuck three (16) and the Bernoulli chuck five (18) are equal, and the diameter of the Bernoulli chuck four (17) is less than that of the Bernoulli chuck one (14).

4. The vacuum chuck platform for ceramic substrates according to claim 2, wherein: The limiting rubber roller one (3) is arranged between the clamping block one (2) and the clamping block two (4), the limiting rubber roller two (5) is arranged between the clamping block two (4) and the clamping block three (6), the limiting rubber roller three (7) is arranged between the clamping block three (6) and the clamping block four (8), the limiting rubber roller four (9) is arranged between the clamping block four (8) and the clamping block five (11), and the limiting rubber roller five (12) is arranged between the clamping block five (11) and the clamping block one (2).

5. The vacuum chuck platform for ceramic substrates according to claim 2, wherein: The gas shunt block includes gas shunt block one (22) and gas shunt block two (28), the gas shunt block one (22) is communicated with input manifold (20), branch pipe one (21), branch pipe two (23), branch pipe three (24), the gas shunt block two (28) is communicated with branch pipe three (24), branch pipe four (25), branch pipe five (26) and branch pipe six (27).

6. The vacuum chuck platform for ceramic substrates according to claim 5, characterized in that: The branch pipe six (27) is communicated with the Bernoulli chuck two (15), the branch pipe five (26) is communicated with the Bernoulli chuck four (17), the branch pipe four (25) is communicated with the Bernoulli chuck three (16), the branch pipe three (24) is communicated with the gas shunt block one (22) and the gas shunt block two (28), the branch pipe two (23) is communicated with the Bernoulli chuck five (18), and the branch pipe one (21) is communicated with the Bernoulli chuck one (14).

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