Suction nozzle fixing device of quartz wafer visual inspection machine

Abstract

The utility model relates to a quartz wafer visual inspection machine suction nozzle fixing device which comprises an air pipe connected with a machine table main air source and a fixing support, the fixing support comprises a long cross beam, a short cross beam and a vertical beam, the long cross beam and the short cross beam are arranged in an up-down parallel mode, and the middle of the lower end of the long cross beam is connected with the end of the short cross beam through the vertical beam. A suction nozzle fixing block is vertically inserted into one end of the long cross beam, the suction nozzle fixing block is hollow, an upper port of the suction nozzle fixing block is communicated with the air pipe, a lower port of the suction nozzle fixing block is connected with a needle head, a suction nozzle supporting sleeve is installed at the free end of the short cross beam, and the suction nozzle supporting sleeve is arranged on the outer side of the lower portion of the needle head in a sleeving mode. The needle head is ensured not to fall off through the suction nozzle supporting sleeve, so that the problem that the needle head is loosened due to long-time use is avoided, and the fault phenomenon of the visual inspection machine due to the suction nozzle is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz wafer visual inspection equipment technical field especially relates to a quartz wafer visual inspection machine suction nozzle fixing device. BACKGROUND

[0002] In the production making wafer process, quartz wafer needs to pass through visual inspection machine to confirm the appearance of wafer, guarantees the wafer that the production is all good, has no breakage. When carrying out visual inspection operation, need first inverts wafer at visual inspection machine material tray, and after the positioning camera recognizes wafer, by suction nozzle suction single wafer and places in glass dish, simultaneously glass dish rotates, rotates wafer to the front camera under identification its appearance.

[0003] In wafer visual inspection operation, the traditional suction nozzle fixed mode is: the needle head is directly rotated on the fixed block, but after long time operation, frequent blowing and suction can cause certain influence to the stability of needle head, further leads to the phenomenon that suction nozzle is easy to appear empty suction or suction skew when placing wafer from material tray to glass dish. So need to change the fixed mode of suction nozzle, so as to reduce the failure rate and avoid the occurrence of such phenomenon. SUMMARY

[0004] The utility model provides a quartz wafer visual inspection machine suction nozzle fixing device, through suction nozzle support sleeve ensures that the needle head does not fall, further avoids the problem of needle head loosening caused by long time use, reduces the visual inspection machine failure phenomenon caused by suction nozzle.

[0005] The utility model discloses a quartz wafer visual inspection machine suction nozzle fixing device, including the gas pipe and fixed support of connecting machine total gas source, the fixed support includes long crossbeam, short crossbeam and vertical beam, long crossbeam and short crossbeam are arranged in parallel, and the long crossbeam lower end middle part is connected with the short crossbeam end portion using vertical beam, the long crossbeam one end vertical insertion has suction nozzle fixed block, and the suction nozzle fixed block is hollow in the inside, the suction nozzle fixed block upper end port is connected with the gas pipe, and the suction nozzle fixed block lower end port is connected with needle head, the free end of short crossbeam is installed with suction nozzle support sleeve, and the suction nozzle support sleeve is set up in the outside of needle head lower part, and the outer diameter of needle head upper part is greater than the aperture of suction nozzle support sleeve inner hole.

[0006] As a supplement to the technical scheme of the utility model, one end of the gas pipe is connected with the suction nozzle fixed block through the joint.

[0007] As a supplement to the technical scheme of the utility model, one end of the long crossbeam is vertically provided with a through hole for inserting the suction nozzle fixed block, and a headless screw one is horizontally arranged and screwed on the end face of the long crossbeam, and one end of the headless screw one penetrates through the through hole and abuts against the suction nozzle fixed block.

[0008] As a supplement to the technical scheme of the utility model, the side of the suction nozzle fixing block is provided with a cutting surface, and the one end of the endless screw is fixed on the cutting surface.

[0009] As a supplement to the technical scheme of the utility model, the free end of the short cross beam is provided with a C-shaped notch, the outer side of the free end of the short cross beam is screwed with the horizontally arranged endless screw two, and the one end of the endless screw two penetrates through the C-shaped notch and abuts against the suction nozzle supporting sleeve.

[0010] As a supplement to the technical scheme of the utility model, the edge of the upper end of the suction nozzle supporting sleeve is arranged with an outer edge, and the outer edge is buckled at the upper end opening of the C-shaped notch.

[0011] As a supplement to the technical scheme of the utility model, the lower end of the suction nozzle fixing block is screwed with the needle.

[0012] As a supplement to the technical scheme of the utility model, the side wall of the other end of the long cross beam is provided with a fixing hole.

[0013] Beneficial effects: the utility model relates to a quartz wafer visual inspection machine suction nozzle fixing device, simple structure, when combining and installing, only the needle is installed on the suction nozzle fixing block and penetrates through the suction nozzle supporting sleeve, and the suction nozzle fixing block is locked on the fixed support through the endless screw one, when performing visual inspection operation, the fixed support frame is determined, because the outer diameter of the upper part of the needle is greater than the hole diameter of the inner hole of the suction nozzle supporting sleeve, the outer diameter of the lower part of the needle is smaller than the hole diameter of the inner hole of the suction nozzle supporting sleeve, the needle is prevented from falling through the suction nozzle supporting sleeve, and the problem of needle loosening caused by long-time use is avoided, and the visual inspection machine failure phenomenon caused by the suction nozzle is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the structure schematic view of the utility model;

[0015] Figure 2 It is the sectional view of the utility model;

[0016] Figure 3 It is the structure schematic view of the fixed support of the utility model;

[0017] Figure 4 It is the structure schematic view of the suction nozzle fixing block of the utility model.

[0018] Diagram: 1. Trachea, 2. Connector, 3. Fixing bracket, 4. Nozzle fixing block, 5. Needle, 6. Nozzle support sleeve, 7. Headless screw one, 8. Headless screw two, 9. Fixing hole, 10. Long crossbeam, 11. Short crossbeam, 12. Vertical beam, 13. Through hole, 14. C-shaped notch, 15. Cross-section, 16. Outer edge. Detailed Implementation

[0019] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims.

[0020] The present invention relates to a nozzle fixing device for a quartz wafer visual inspection machine, such as... Figures 1-4 As shown, the device includes an air pipe 1 connecting to the main air source of the machine and a fixed support 3. The fixed support 3 includes a long crossbeam 10, a short crossbeam 11, and a vertical beam 12. The long crossbeam 10 and the short crossbeam 11 are arranged parallel to each other vertically. The middle of the lower end of the long crossbeam 10 is connected to the end of the short crossbeam 11 by the vertical beam 12. A suction nozzle fixing block 4 is vertically inserted into one end of the long crossbeam 10. The suction nozzle fixing block 4 is hollow inside. The upper end of the suction nozzle fixing block 4 is connected to the air pipe 1, and the lower end of the suction nozzle fixing block 4 is connected to a needle 5. A suction nozzle support sleeve 6 is installed on the free end of the short crossbeam 11. The suction nozzle support sleeve 6 is sleeved on the outer side of the lower part of the needle 5. The outer diameter of the upper part of the needle 5 is larger than the diameter of the inner hole of the suction nozzle support sleeve 6.

[0021] One end of the air tube 1 is connected to the mouthpiece fixing block 4 via a connector 2; one end of the connector 2 is connected to the air tube 1, and the other end of the connector 2 is connected to the mouthpiece fixing block 4 via a flathead screw.

[0022] The connector 2, the fixing bracket 3, the nozzle fixing block 4, and the nozzle support sleeve 6 are all made of aluminum.

[0023] The long crossbeam 10 has a vertical through hole 13 at one end for inserting the nozzle fixing block 4. A headless screw 7 is screwed onto the end face of the long crossbeam 10. The nozzle fixing block 4 has a cut surface 15 on one side. One end of the headless screw 7 passes through the through hole 13 and abuts against the cut surface 15 of the nozzle fixing block 4. The cut surface 15 allows the headless screw 7 to abut better and prevents the nozzle fixing block 4 from rotating.

[0024] The free end of the short cross beam 11 is provided with a C-shaped notch 14, and a horizontal headless screw 8 is screwed on the outer side of the free end of the short cross beam 11, one end of the headless screw 8 penetrating the C-shaped notch 14 and abutting against the suction nozzle support sleeve 6.

[0025] The edge of the upper end of the suction nozzle support sleeve 6 is provided with an outer edge 16, and the outer edge 16 is buckled at the upper end opening of the C-shaped notch 14.

[0026] The lower end of the suction nozzle fixing block 4 is screwed with the needle 5, and the needle 5 can be quickly disassembled through screwing.

[0027] The side wall of the other end of the long cross beam 10 is provided with a fixing hole 9, and the fixing support 3 is installed and fixed through the fixing hole 9 and fasteners.

[0028] When the device is assembled, one end of the air pipe 1 is connected with a total gas source of a machine table, and the other end is installed at the top end of the suction nozzle fixing block 4 through the joint 2 and is used for transmitting gas, the suction nozzle support sleeve 6 is buckled into the C-shaped notch 14, the outer edge 16 is buckled at the upper end opening of the C-shaped notch 14, the headless screw 8 is screwed, one end of the headless screw 8 penetrates the C-shaped notch 14 and abuts against the suction nozzle support sleeve 6, then the needle 5 is screwed at the lower end of the suction nozzle fixing block 4, the suction nozzle fixing block 4 and the needle 5 pass through the through hole 13 from top to bottom, the needle 5 is inserted into the suction nozzle support sleeve 6, the thin end of the needle 5 penetrates the inner hole of the suction nozzle support sleeve 6 and performs a wafer suction and release operation of the suction nozzle, when the suction nozzle fixing block 4 and the needle 5 reach the required position, the headless screw 1 is screwed, one end of the headless screw 1 penetrates the through hole 13 and abuts against the tangent plane 15 of the suction nozzle fixing block 4, and the upper part of the suction nozzle fixing block 4 is fixed with the long cross beam 10 through the headless screw 1.

[0029] The utility model is used for quartz crystal visual inspection machine, and the needle 5 sucks the chip on the tray and places the chip on the glass plate for visual inspection through the air suction of the electromagnetic valve.

[0030] The utility model discloses simple structure, when carrying out combination installation, only need to install the needle 5 on the suction nozzle fixing block 4 and pass through the suction nozzle support sleeve 6, and lock the suction nozzle fixing block 4 on the fixing support 3 with the headless screw 1, when carrying out visual inspection operation, the frame of the fixing support 1 is determined, because the outer diameter of the upper part of the needle 5 is greater than the aperture of the inner hole of the suction nozzle support sleeve 6, and the outer diameter of the lower part of the needle 5 is less than the aperture of the inner hole of the suction nozzle support sleeve 6, the needle 5 is ensured not to fall through the suction nozzle support sleeve 6, and then the problem of needle loosening caused by long-time use is avoided, and the failure phenomenon of the visual inspection machine caused by the suction nozzle is reduced.

[0031] In the description of the utility model, it needs to be understood that the directions such as '' front, back, up, down, left, right '' '' horizontal, vertical, perpendicular, horizontal '' and '' top, bottom '' and the like indicated direction or positional relationship is usually based on the direction or positional relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, in the case where no contrary statement is made, these direction words do not indicate and imply that the indicated device or element must have a particular orientation or be constructed and operated in a particular orientation, therefore, it cannot be understood as the limitation of the protection scope of the utility model;Direction words '' inside, outside '' refer to the inside and outside relative to the contour of each component.

[0032] For the convenience of description, spatial relative terms such as '' above'', '' above'', '' upper surface'', '' upper '' and the like can be used here to describe the spatial position relationship of one device or feature with other devices or features as shown in the drawing. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawing. For example, if the device in the drawing is inverted, the device described as '' above '' or '' above '' other devices or structures will be positioned '' below '' or '' below '' other devices or structures. Thus, the exemplary term '' above '' can include both '' above '' and '' below '' orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here are interpreted accordingly.

[0033] In addition, it needs to be explained that the use of '' first'', '' second '' and the like to limit parts is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, therefore, it cannot be understood as the limitation of the protection scope of the utility model.

[0034] The quartz wafer visual inspection machine suction nozzle fixing device provided by the application is described in detail above, the principles and implementation modes of the application are described in this paper, and the above example is only used to help understand the method and core idea of the application;At the same time, for those skilled in the art, according to the idea of the application, the specific implementation mode and application range will be changed, and the above description should not be understood as the limitation of the application.

Claims

1. A quartz wafer inspection machine nozzle fixing device, comprising a gas pipe (1) connected to the total gas source of the machine and a fixing support (3), characterized in that: The fixed support (3) comprises a long crossbeam (10), a short crossbeam (11) and a vertical beam (12), the long crossbeam (10) and the short crossbeam (11) are arranged in parallel, the vertical beam (12) is connected between the middle of the lower end of the long crossbeam (10) and the end of the short crossbeam (11), one end of the long crossbeam (10) is vertically inserted with a suction nozzle fixing block (4), the suction nozzle fixing block (4) is hollow inside, the upper end of the suction nozzle fixing block (4) is communicated with the trachea (1), the lower end of the suction nozzle fixing block (4) is connected with a needle (5), the free end of the short crossbeam (11) is provided with a suction nozzle support sleeve (6), the suction nozzle support sleeve (6) is sleeved outside the lower part of the needle (5), the outer diameter of the upper part of the needle (5) is larger than the hole diameter of the inner hole of the suction nozzle support sleeve (6).

2. The quartz wafer visual inspection machine nozzle fixture of claim 1, wherein: One end of the trachea (1) is connected with the suction nozzle fixing block (4) through the joint (2).

3. The quartz wafer inspection machine nozzle fixing device according to claim 1, wherein: One end of the long crossbeam (10) is vertically provided with a through hole (13) for inserting the suction nozzle fixing block (4), the end surface of the long crossbeam (10) is rotatably connected with a horizontal headless screw (7), one end of the headless screw (7) is inserted into the through hole (13) and abuts against the suction nozzle fixing block (4).

4. The quartz wafer inspection machine nozzle fixing device according to claim 3, characterized in that: One side of the suction nozzle fixing block (4) is provided with a cutting surface (15), one end of the headless screw (7) is arranged on the cutting surface (15).

5. The quartz wafer visual inspection machine nozzle fixture of claim 1 wherein: The free end of the short crossbeam (11) is provided with a C-shaped notch (14), the free end of the short crossbeam (11) is rotatably connected with a horizontal headless screw (8), one end of the headless screw (8) is inserted into the C-shaped notch (14) and abuts against the suction nozzle support sleeve (6).

6. A quartz wafer inspection machine nozzle holding device according to claim 5, wherein: The edge of the upper end of the suction nozzle support sleeve (6) is provided with a ring-shaped outer edge (16), the outer edge (16) is buckled on the upper end opening of the C-shaped notch (14).

7. The quartz wafer inspection machine nozzle fixture of claim 1 wherein: The lower end of the suction nozzle fixing block (4) is threadedly connected with the needle (5).

8. The quartz wafer inspection machine nozzle holding device of claim 1 wherein: The side wall of the other end of the long crossbeam (10) is provided with a fixing hole (9). The side wall of the other end of the long crossbeam (10) is provided with a fixing hole (9).

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