Uniform overflow liquid pipe device of multi-wire cutting machine

Abstract

The utility model relates to a uniform overflow liquid pipe device of a multi-wire cutting machine, which comprises a liquid pipe groove body, an inverted T-shaped spray pipe main body is arranged in the liquid pipe groove body, two ends of the spray pipe main body are respectively connected with a straight spray pipe, the free end of each straight spray pipe is sealed by a sealing cover, and a plurality of spray through holes are uniformly formed in the front side of the lower part of each straight spray pipe. A concave water return plate is transversely arranged in the middle of the liquid pipe groove body and located in front of the direct spraying pipe, the two ends of the concave water return plate are fixedly connected with the inner walls of the two sides of the liquid pipe groove body respectively, and a gap exists between the lower end of the concave water return plate and the bottom of the liquid pipe groove body. The spraying pipe is composed of the spraying pipe body and the two direct spraying pipes, the spraying through holes are evenly distributed in the positions, close to the outer sides, of the direct spraying pipes, liquid is sprayed to the concave water return plate from the spraying through holes, and the concave water return plate counteracts fluid pressure generated when the liquid is sprayed into the liquid pipe groove body. And the liquid bypasses the concave water return plate and then overflows and descends along the overflow liquid guide plate, so that the uniformity of the water pressure of the liquid in the liquid pipe groove body can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor silicon wafer manufacturing, particularly to a uniform overflow liquid pipe device of multi-wire cutting machine. BACKGROUND

[0002] The wire cutting machine, especially the multi-wire cutting machine, is used for cutting a specific semiconductor silicon wafer material into a thin sheet. In the existing multi-wire cutting machine, the spray pipe device is a "U" type liquid spray, and the liquid is concentratedly sprayed to the groove bottom at both ends of the liquid pipe. The water pressure is large at both ends of the groove, and the water pressure is small in the middle of the groove, which is not uniformly distributed, resulting in large fluctuation of TTV data after wire cutting. Moreover, the fixed baffle at both ends of the liquid pipe only has one support block, the center of gravity is unstable, the supporting force is insufficient, and the liquid pipe has no function of adjusting the horizontal height of the groove body and the liquid pipe, which has great limitations. SUMMARY

[0003] The utility model provides a uniform overflow liquid pipe device of multi-wire cutting machine, and the "T" type spray pipe is composed of a spray pipe body and two straight spray pipes. The spray holes with a diameter of 8 mm are uniformly distributed at the outer side of the straight spray pipes. The liquid is sprayed from the spray holes to the concave water return plate. The concave water return plate offsets the fluid pressure of the liquid sprayed into the liquid pipe groove. The liquid flows out along the overflow liquid guide plate after bypassing the concave water return plate, so that the uniformity of the liquid water pressure in the liquid pipe groove is achieved, and the thickness and flow rate of the cutting liquid overflowed are consistent.

[0004] The utility model adopts the technical scheme that a uniform overflow liquid pipe device of multi-wire cutting machine is provided, which comprises a liquid pipe groove. An inverted T-shaped spray pipe body is installed inside the liquid pipe groove. Two straight spray pipes are connected to the ends of the spray pipe body. The free ends of the straight spray pipes are sealed by covers. Multiple spray holes are uniformly arranged on the front side of the lower part of each straight spray pipe. A concave water return plate is transversely arranged in front of the straight spray pipes in the middle of the liquid pipe groove. The concave water return plate is fixedly connected to the inner walls of the liquid pipe groove at both ends. There is a gap between the lower end of the concave water return plate and the bottom of the liquid pipe groove.

[0005] As a supplement to the technical scheme of the utility model, two liquid pipe fixing slot blocks are further included. Two support blocks are installed side by side on the sides of the liquid pipe groove. The support blocks are inverted L-shaped. A bayonet hole is formed in the upper end of the liquid pipe fixing slot block for inserting the support block. An adjusting bolt is screwed to the top of the free end of each support block. The adjusting bolt is vertically arranged. The lower end of the adjusting bolt is in contact with the bottom surface of the bayonet hole.

[0006] As a supplement to the technical scheme of the utility model, the front side of the liquid pipe groove is provided with a downwardly inclined overflow liquid guide plate.

[0007] As a supplement to the technical scheme of the utility model, the lower part of each straight pipe is uniformly arranged with nine spray through holes with a diameter of 8mm.

[0008] As a supplement to the technical scheme of the utility model, the rear side of the liquid pipe groove body is mounted with a clamping seat, the front end of the clamping seat is provided with a clamping opening matched with the straight pipe, the clamping opening is in a C shape, and the upper end of the clamping seat is provided with an opening for the upper part of the spray pipe body to pass through.

[0009] As a supplement to the technical scheme of the utility model, the rear end of the clamping seat is mounted with a threaded column at four corners, one end of the threaded column passes through the liquid pipe groove body and is fixed by rotating a nut.

[0010] Beneficial effects: the utility model relates to a uniform overflow liquid pipe device of a multi-wire cutting machine, a new "T" shaped spray pipe is designed, the "T" shaped spray pipe is composed of a spray pipe body and two straight pipes, the straight pipes are uniformly distributed with spray through holes with a diameter of 8mm at the outer side, liquid is sprayed from the spray through holes to the concave water return plate, the concave water return plate offsets the fluid pressure of the liquid sprayed into the liquid pipe groove body, the liquid is overflowed along the overflow liquid guide plate after bypassing the concave water return plate, the uniformity of the liquid water pressure in the liquid pipe groove body is achieved, the thickness and flow rate of the cutting liquid overflowed are kept consistent, support blocks are installed at the two sides of the liquid pipe groove body, M6 screw holes are arranged above the support blocks, adjusting bolts are installed in the screw holes, the overall height of the spray pipe and the liquid pipe groove body can be conveniently adjusted by rotating the adjusting bolts, the new "T" shaped spray pipe is time-saving and labor-saving in dismounting and mounting, and the liquid overflowed by the spray pipe is uniform, and the TTV parameter of the cut product is better. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a structural schematic view of the utility model;

[0012] Figure 2 It is a structural schematic view of the spray pipe body, the cover and the straight pipe;

[0013] Figure 3 It is a structural schematic view of the utility model after removing the liquid pipe fixing clamping groove block;

[0014] Figure 4 It is a structural schematic view of the liquid pipe fixing clamping groove block;

[0015] Figure 5 It is a structural schematic view of the clamping seat.

[0016] Figure: 1, liquid pipe fixed slot block, 2, support block, 3, overflow liquid flow guide plate, 4, spray pipe body, 5, concave backwater plate, 6, liquid pipe groove body, 7, clamping seat, 8, straight spray pipe, 9, cover, 10, spray through hole, 11, bayonet, 12, clamping opening, 13, opening, 14, threaded column. DETAILED DESCRIPTION

[0017] The utility model is further described below in combination with specific embodiments. It should be understood that these embodiments are only used for illustrating the utility model and are not used for limiting the scope of the utility model. In addition, it should be understood that after reading the content taught by the utility model, those skilled in the art can make various changes or modifications to the utility model, and these equivalent forms also fall within the scope defined by the claims attached to the present application.

[0018] The embodiment of the utility model relates to a kind of uniformity overflow liquid pipe device of multiple wire cutting machine, as shown in figure Figures 1-5 The liquid pipe groove body 6 is internally provided with inverted T-shaped spray pipe body 4, the both ends of the spray pipe body 4 are connected with straight spray pipe 8, the free end of the straight spray pipe 8 is sealed by cover 9, the front side of each straight spray pipe 8 lower part is uniformly provided with multiple spray through holes 10, the middle part of the liquid pipe groove body 6 is transversely arranged with concave backwater plate 5 in front of straight spray pipe 8, the both ends of the concave backwater plate 5 are fixedly connected with the inner wall of the both sides of liquid pipe groove body 6, and there is gap between the lower end of the concave backwater plate 5 and the bottom of the liquid pipe groove body 6;The concave backwater plate 5 is fixedly arranged at the outer side of the liquid pipe groove body 6, for blocking the liquid sprayed by straight spray pipe 8, which can effectively reduce the fluid pressure when the liquid is sprayed;The straight spray pipe 8 and cover 9 are threadedly connected, and the straight spray pipe 8 and spray pipe body 4 are threadedly connected.

[0019] It also includes two liquid pipe fixed slot blocks 1, the both sides of the liquid pipe groove body 6 are parallelly provided with two support blocks 2, the support block 2 is inverted L-shaped, the upper end of the liquid pipe fixed slot block 1 is provided with bayonet 11 for inserting support block 2, the free end of each support block 2 is threadedly connected with adjusting bolt, the adjusting bolt is vertically arranged, and the lower end of the adjusting bolt is in contact with the bottom surface of the bayonet 11;The liquid pipe fixed slot block 1 is double "concave" rectangular block, the liquid pipe groove body 6 is installed between the two liquid pipe fixed slot blocks 1, the bayonet 11 of the upper end of the liquid pipe fixed slot block 1 is used for clamping support block 2 of the end surface of the liquid pipe groove body 6;The adjusting bolt is vertically arranged above the support block 2, so as to adjust the horizontal height of the liquid pipe groove body 6 and the spray pipe by screwing the adjusting bolt.

[0020] As the preferred scheme of the liquid pipe tank body 6, the front side of the liquid pipe tank body 6 is provided with a downwardly inclined overflow liquid guide plate 3, the overflow liquid guide plate 3 is provided with an inclined angle of 120°, and the liquid overflowing from the tank body flows along the overflow liquid guide plate 3 to the cutting steel wire.

[0021] As the preferred scheme of the direct injection pipe 8, the lower part of each direct injection pipe 8 is uniformly provided with nine injection through holes 10 with a diameter of 8 mm.

[0022] The rear side of the inside of the liquid pipe tank body 6 is provided with a clamping seat 7, the front end of the clamping seat 7 is provided with a clamping opening 12 matched with the direct injection pipe 8, the clamping opening 12 is in a C shape, the upper end of the clamping seat 7 is provided with an opening 13 for the upper part of the injection pipe body 4 to pass through, the opening 13 clamps the upper part of the injection pipe body 4, the clamping opening 12 clamps the lower part of the injection pipe body 4, and

[0023] As the preferred scheme of the clamping seat 7, the rear end of the clamping seat 7 is provided with a threaded column 14 at each corner, the rear wall of the liquid pipe tank body 6 is provided with a through hole for the threaded column 14 to pass through, and one end of the threaded column 14 is fixed by a threaded nut after passing through the through hole of the rear wall of the liquid pipe tank body 6.

[0024] The utility model discloses a new "T" type injection pipe, the "T" type injection pipe is composed of an injection pipe body 4 and two direct injection pipes 8, the injection through holes 10 with a diameter of 8 mm are uniformly distributed at the outer side of the direct injection pipe 8, the liquid is sprayed from the injection through holes 10 to the concave water return plate 5, the concave water return plate 5 offsets the fluid pressure of the liquid sprayed into the liquid pipe tank body 6, and the liquid overflows after bypassing the concave water return plate 5 and then flows down along the overflow liquid guide plate 3, so that the uniformity of the liquid water pressure in the liquid pipe tank body 6 is achieved, and the thickness and flow rate of the cutting liquid overflowing are kept consistent.

[0025] In the description of the utility model, it is understood that the orientation words such as '' front, back, up, down, left, right '' '' horizontal, vertical, perpendicular, horizontal '' and '' top, bottom '' and the like indicated orientation or positional relationship generally based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, in the absence of the opposite statement, these orientation words do not indicate and imply that the device or element indicated must have a particular orientation or be constructed and operated in a particular orientation, therefore, it cannot be understood as the limitation of the protection scope of the utility model;The orientation words '' inside, outside '' refer to the inside and outside relative to the contour of each component.

[0026] For the convenience of description, spatial relative terms such as '' above'', '' above'', '' upper surface'', '' upper '' and the like can be used here to describe the spatial position relationship of one device or feature with other devices or features as shown in the drawing. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawing. For example, if the device in the drawing is inverted, the device described as '' above '' or '' above '' other devices or structures will be positioned '' below '' or '' below '' other devices or structures. Thus, the example term '' above '' can include both '' above '' and '' below '' orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative description used here is interpreted accordingly.

[0027] In addition, it should be noted that the use of '' first'', '' second '' and the like to limit parts is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, therefore, it cannot be understood as the limitation of the protection scope of the utility model.

[0028] The above provides a kind of evenness overflow liquid pipe device of multi-wire cutting machine provided by the present application, which is described in detail, the principle and implementation mode of the present application are described in this paper, the above example is only used to help understand the method and core idea of the present application;At the same time, for the general technical personnel in the art, according to the idea of the present application, there will be changes in specific implementation mode and application range, and the above description should not be understood as the limitation of the present application.

Claims

1. A uniformity overflow liquid pipe device of a multi-wire saw, comprising a liquid pipe tank body (6), characterized in that: The liquid pipe groove body (6) is internally provided with an inverted T-shaped spray pipe body (4), the two ends of the spray pipe body (4) are connected with a straight spray pipe (8), the free end of the straight spray pipe (8) is sealed by a cover (9), the front side of the lower part of each straight spray pipe (8) is uniformly provided with a plurality of spray through holes (10), the middle part of the liquid pipe groove body (6) is transversely provided with a concave backwater plate (5) in front of the straight spray pipe (8), the two ends of the concave backwater plate (5) are fixedly connected with the inner walls of the two sides of the liquid pipe groove body (6), and a gap exists between the lower end of the concave backwater plate (5) and the bottom of the liquid pipe groove body (6).

2. A uniformity overflow tube apparatus for a multi-wire saw as recited in claim 1, wherein: Two liquid pipe fixing clamping groove blocks (1) are further included, the two sides of the liquid pipe groove body (6) are parallelly provided with two support blocks (2), the support block (2) is in an inverted L shape, the upper end of the liquid pipe fixing clamping groove block (1) is provided with a clamping opening (11) for inserting the support block (2), the free end of each support block (2) is rotatably connected with an adjusting bolt, the adjusting bolt is vertically arranged, and the lower end of the adjusting bolt is in contact with the bottom surface of the clamping opening (11).

3. A uniformity overflow tube apparatus for a multi-wire saw as recited in claim 1, wherein: The front side of the liquid pipe groove body (6) is provided with a downwardly inclined overflow liquid guide plate (3).

4. A uniformity overflow tube apparatus for a multi-wire saw as recited in claim 1, wherein: The lower part of each straight spray pipe (8) is uniformly provided with nine spray through holes (10) with a diameter of 8 mm.

5. A uniformity overflow tube apparatus for a multi-wire saw as recited in claim 1, wherein: The rear side of the liquid pipe groove body (6) is internally provided with a clamping seat (7), the front end of the clamping seat (7) is provided with a clamping opening (12) matched with the straight spray pipe (8), the clamping opening (12) is in a C shape, and the upper end of the clamping seat (7) is provided with an opening (13) for the upper part of the spray pipe body (4) to pass through.

6. A uniformity overflow tube apparatus for a multi-wire saw as recited in claim 5, wherein: The rear end of the clamping seat (7) is provided with a threaded column (14) at each corner, one end of the threaded column (14) penetrates through the liquid pipe groove body (6) and is fixed by being rotatably connected with a nut.

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