High-performance magnetron sputtering coating and glass manufacturing equipment
By introducing a combination structure of fixing blocks and connecting rings into the glass manufacturing equipment, the problem of uneven coating caused by the inability to adjust the number of target materials was solved, and the flexible adjustment of the number of target materials and the uniformity of coating were achieved.
Patent Information
- Application Number
- CN202520232984.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-14
- Publication Date
- 2026-02-13
- Estimated Expiration
- 2035-02-14
AI Technical Summary
Existing glass magnetron sputtering coating equipment cannot adjust the number of targets on the same equipment, resulting in uneven coating.
A high-performance magnetron sputtering coating and glass manufacturing equipment was designed. Through the combination structure of a fixed block, connecting ring, limiting ring, connecting plate, threaded tube, fixing bolt, connecting tube, first concave plate and second concave plate, different numbers of target seats and targets can be adjusted and fixed on the same equipment, so as to achieve precise adjustment of the target position and angle.
It enables flexible adjustment of the number of targets on the same equipment, ensuring the uniformity and precision of the coating and improving the coating effect.
Smart Images
Figure CN223906927U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to glass magnetron sputtering coating related technical field, especially a kind of high-performance magnetron sputtering coating and glass manufacturing equipment. BACKGROUND
[0002] Magnetron sputtering coating technology can form uniform, dense and good adhesion film on the surface of different materials, significantly improve the hardness, wear resistance and corrosion resistance of material, magnetron sputtering coating technology is applied in many fields, among them, glass production process, through coating instrument, glass surface is magnetron sputtered, it is one of important processes of glass production, through magnetron sputtering technology, a layer of uniform, dense and good adhesion film can be formed on the surface of glass, so as to significantly improve the performance of glass, therefore, a kind of high-performance magnetron sputtering coating and glass manufacturing equipment are needed.
[0003] The existing glass magnetron sputtering coating equipment needs to be coated according to different samples, and the effect of different target body quantity is different, multiple target bodies can be coated on the surface of workpiece more uniformly, single target material is prone to uneven coating problem, but most of the target materials of different quantity have corresponding equipment at present, and the quantity of target material cannot be adjusted on the same equipment. SUMMARY
[0004] The utility model discloses a kind of high-performance magnetron sputtering coating and glass manufacturing equipment, to solve the problem that the existing glass magnetron sputtering coating equipment is proposed in above background technology, needs to be coated according to different samples, and the effect of different target body quantity is different, multiple target bodies can be coated on the surface of workpiece more uniformly, single target material is prone to uneven coating problem, but most of the target materials of different quantity have corresponding equipment at present, and the quantity of target material cannot be adjusted on the same equipment.
[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of high-performance magnetron sputtering coating and glass manufacturing equipment, including coating instrument, the upper surface of the coating instrument is fixedly connected with cavity, the surface of one end of the cavity is pasted with sealing strip, the inside one end of the cavity is provided with clamping mechanism, one side of the cavity is hinged with flap, the surface of one end of the flap is equipped with recess, the other side surface of the flap is fixedly installed with connecting seat, the inside ring of one end of the flap is provided with adjusting mechanism;
[0006] The adjusting mechanism comprises a fixed block, a connecting ring, a limiting ring, a connecting plate, a connecting groove, a threaded pipe, a fixed bolt, a connecting pipe, a first concave plate, a second concave plate, a target material seat and a target body, the inner ring surface of the flip cover is fixedly installed with the fixed block, one side of the fixed block is welded with the connecting ring, one side of the connecting ring is welded with the limiting ring, one end of the connecting ring is provided with the connecting plate, the side surface of the connecting plate is provided with the connecting groove, the side surface of the connecting plate is fixedly penetrated with the threaded pipe, one end of the threaded pipe is connected with the fixed bolt, one side of the connecting plate is fixedly penetrated with the connecting pipe, one end of the connecting pipe is fixedly connected with the first concave plate, one end of the first concave plate is connected with the second concave plate.
[0007] Preferably, the clamping mechanism comprises a placement table, a sliding groove, a sliding block, a clamping plate, a fixed table and a screw rod, one end of the inner side of the cavity is provided with the placement table, the side surfaces of the placement table are provided with the sliding grooves, one end of the sliding groove is provided with the sliding block, one side of the sliding block is fixedly connected with the clamping plate, both ends of the placement table are fixedly installed with the fixed table, one end of the fixed table is penetrated with the screw rod.
[0008] Preferably, one end of the screw rod is rotatably connected with the clamping plate, and the screw rod is threadedly connected with the fixed table.
[0009] Preferably, the connecting plate is slidably connected through the connecting groove and the limiting ring, and the fixed bolt is rotatably connected with the connecting ring at one end of the threaded pipe.
[0010] Preferably, the connecting seat is provided with six groups, and the connecting seat is connected with the connecting pipe.
[0011] Preferably, one end of the first concave plate is rotatably connected with the second concave plate, and the other end of the first concave plate is screw-nut tightly connected with the second concave plate.
[0012] Preferably, one end of the second concave plate is fixedly installed with the target material seat, and one end of the target material seat is provided with the target body.
[0013] Compared with the prior art, the high-performance magnetron sputtering coating and glass manufacturing equipment has the beneficial effects that: through the setting of the fixing block, the connecting ring, the limiting ring, the connecting plate, the connecting groove, the threaded pipe, the fixing bolt, the connecting pipe, the first concave plate, the second concave plate, the target material seat and the target body, when in use, the connecting plate is buckled at one end of the connecting ring and the limiting ring, the position of the connecting plate at one end of the connecting ring can be rotated, so that the position of the target body is adjusted, at the same time, at one end of the connecting ring, different numbers of connecting plates are installed, different numbers of target material seats and target bodies can be correspondingly installed, one to six groups of target material seats and target bodies can be rotatably installed, the connecting plate is rotated at one end of the connecting ring, the positions of the connecting pipe and the connecting seat are corresponded, the connecting plate is fixed at one side of the connecting ring through the rotation of the fixing bolt at one end of the threaded pipe, so that the target material seat and the target body are fixed, at the same time, the target material seat can be rotated at an angle at one end of the first concave material through the second concave material, so that accurate adjustment is realized. BRIEF DESCRIPTION OF DRAWINGS
[0014] Figure 1 It is a whole appearance structure schematic view of the utility model;
[0015] Figure 2 It is a clamping mechanism structure schematic view of the utility model;
[0016] Figure 3 It is a cover and connecting seat mutual cooperation structure schematic view of the utility model;
[0017] Figure 4 It is a connecting ring and limiting ring mutual cooperation structure schematic view of the utility model;
[0018] Figure 5 It is an adjusting mechanism structure schematic view of the utility model.
[0019] In the drawing: 1, coating instrument; 2, cavity; 3, sealing strip; 4, clamping mechanism; 401, placing table; 402, sliding groove; 403, sliding block; 404, clamping plate; 405, fixed table; 406, screw rod; 5, cover; 6, groove; 7, connecting seat; 8, adjusting mechanism; 801, fixing block; 802, connecting ring; 803, limiting ring; 804, connecting plate; 805, connecting groove; 806, threaded pipe; 807, fixing bolt; 808, connecting pipe; 809, first concave plate; 810, second concave plate; 811, target material seat; 812, target body. DETAILED DESCRIPTION
[0020] Clearly, the described embodiments are merely a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.
[0021] Please refer to Figures 1-5 The utility model provides a technical scheme: a kind of high-performance magnetron sputtering coating and glass manufacturing equipment, including coating appearance 1, the upper surface of coating appearance 1 is fixedly connected with cavity 2, the surface of one end of cavity 2 is pasted with sealing strip 3, the inside one end of cavity 2 is provided with clamping mechanism 4, the side of cavity 2 is hinged with flap 5, the surface of one end of flap 5 is provided with recess 6, the other side surface of flap 5 is fixedly installed with connecting seat 7, the inner ring of one end of flap 5 is provided with adjusting mechanism 8;
[0022] Adjusting mechanism 8 includes fixed block 801, connecting ring 802, limit ring 803, connecting plate 804, connecting groove 805, threaded tube 806, fixed bolt 807, connecting pipe 808, first concave plate 809, second concave plate 810, target material seat 811 and target body 812, the inner ring surface of flap 5 is fixedly installed with fixed block 801, the side of fixed block 801 is welded with connecting ring 802, the side of connecting ring 802 is welded with limit ring 803, the one end of connecting ring 802 is provided with connecting plate 804, the side surface of connecting plate 804 is provided with connecting groove 805, the side surface of connecting plate 804 is fixedly penetrated with threaded tube 806, the one end of threaded tube 806 is connected with fixed bolt 807, the side of connecting plate 804 is fixedly penetrated with connecting pipe 808, the one end of connecting pipe 808 is fixedly connected with first concave plate 809, the one end of first concave plate 809 is connected with second concave plate 810, through the setting of fixed block 801, connecting ring 802, limit ring 803, connecting plate 804, connecting groove 805, threaded tube 806, fixed bolt 807, connecting pipe 808, first concave plate 809, second concave plate 810, target material seat 811 and target body 812, when using, connecting plate 804 is installed at the one end of connecting ring 802 and limit ring 803, then according to the position of connecting seat 7 is rotated, then through the rotation of fixed bolt 807, connecting plate 804 is fixed, then the angle of second concave plate 810 at the one end of first concave plate 809 can be rotated, then through bolt nut locking, so as to adjust the angle of target material seat 811 and target body 812.
[0023] Further, the clamping mechanism 4 comprises a placement table 401, a sliding groove 402, a sliding block 403, a clamping plate 404, a fixed table 405 and a screw rod 406, the inner side of the cavity 2 is provided with the placement table 401, the both sides of the placement table 401 are provided with the sliding grooves 402, one end of the sliding groove 402 is provided with the sliding block 403, one side of the sliding block 403 is fixedly connected with the clamping plate 404, both ends of the placement table 401 are fixedly installed with the fixed tables 405, one end of the fixed table 405 penetrates through the screw rod 406, through the placement table 401, the sliding groove 402, the sliding block 403, the clamping plate 404, the fixed table 405 and the screw rod 406, when in use, the sample to be plated is placed at one end of the placement table 401, then the screw rod 406 at one end of the fixed table 405 is rotated, the screw rod 406 pushes the clamping plate 404 to slide, the clamping plate 404 slightly protrudes from the surface of the placement table 401, and the sample can be fixed.
[0024] Further, one end of the screw rod 406 is rotatably connected with the clamping plate 404, the screw rod 406 is threadedly connected with the fixed table 405, through the screw rod 406, the screw rod 406 is rotatably connected with the clamping plate 404, so that the screw rod 406 can rotate while the clamping plate 404 does not rotate.
[0025] Further, the connecting plate 804 is slidably connected with the limiting ring 803 through the connecting groove 805, and the fixed bolt 807 is rotatably connected with the connecting ring 802 at one end of the threaded pipe 806; through the limiting ring 803, the connecting plate 804 can be supported and limited in position in cooperation with the connecting groove 805.
[0026] Further, the connecting seat 7 is provided in six groups and is connected with the connecting pipe 808, through the connecting seat 7, the connecting seat 7 can be conveniently connected with the connecting pipe 808, the connecting seat 7 can be provided in a closed structure, the number of target material seats 811 can be set, and then the corresponding connecting seat 7 is opened to be connected.
[0027] Further, one end of the first recessed plate 809 is rotatably connected with the second recessed plate 810, and the other end of the first recessed plate 809 is screw-nut locked with the second recessed plate 810, through the first recessed plate 809 and the second recessed plate 810, the angle of the target body 812 can be conveniently adjusted.
[0028] Further, one end of the second recessed plate 810 is fixedly installed with the target material seat 811, and one end of the target material seat 811 is provided with the target body 812, through the target body 812, the target body 812 is fixed at one end of the target material seat 811 through the external clasp, and the target body 812 can be replaced.
[0029] Working principle: firstly, according to the requirement, the required number of target material seat 811 can be installed, the connecting plate 804 is installed in the connecting groove 805 at one end of the connecting ring 802 and the limiting ring 803, then the connecting pipe 808 can be rotated with the connecting seat 7 corresponding to the position, then the second concave plate 810 is rotated at one end of the first concave plate 809, the angle of the target material seat 811 and the target body 812 is adjusted, then the sample to be plated is placed at one end of the placing table 401, then the screw rod 406 is rotated at one end of the fixing table 405, the screw rod 406 drives the clamping plate 404 to slide, the clamping plate 404 slightly protrudes from the surface of the placing table 401, the sample can be fixed, then the flip cover 5 is closed, the flip cover 5 is sealed and connected with the cavity 2 through the groove 6 and the sealing strip 3, finally the magnetron sputtering plating operation can be carried out.
[0030] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A high-performance magnetron sputtering coating and glass manufacturing device, comprising a coating device (1), characterized in that: The upper surface of the coating machine (1) is fixedly connected with a cavity (2), one end surface of the cavity (2) is pasted with a sealing strip (3), one end of the inner side of the cavity (2) is provided with a clamping mechanism (4), one side of the cavity (2) is hingedly connected with a flip cover (5), one end surface of the flip cover (5) is provided with a groove (6), the other side surface of the flip cover (5) is fixedly installed with a connecting seat (7), and one end of the flip cover (5) is provided with an adjusting mechanism (8). The adjusting mechanism (8) comprises a fixed block (801), a connecting ring (802), a limiting ring (803), a connecting plate (804), a connecting groove (805), a threaded pipe (806), a fixed bolt (807), a connecting pipe (808), a first concave plate (809), a second concave plate (810), a target material seat (811) and a target body (812), the inner surface of the flip cover (5) is fixedly installed with the fixed block (801), one side of the fixed block (801) is welded with the connecting ring (802), one side of the connecting ring (802) is welded with the limiting ring (803), one end of the connecting ring (802) is provided with the connecting plate (804), one side surface of the connecting plate (804) is provided with the connecting groove (805), one side surface of the connecting plate (804) penetrates through and is fixedly connected with the threaded pipe (806), one end of the threaded pipe (806) is connected with the fixed bolt (807), one side of the connecting plate (804) penetrates through and is fixedly connected with the connecting pipe (808), one end of the connecting pipe (808) is fixedly connected with the first concave plate (809), and one end of the first concave plate (809) is connected with the second concave plate (810).
2. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 1, wherein: The clamping mechanism (4) comprises a placing table (401), a sliding groove (402), a sliding block (403), a clamping plate (404), a fixed table (405) and a screw rod (406), one end of the inner side of the cavity (2) is provided with the placing table (401), the both side surfaces of the placing table (401) are provided with the sliding grooves (402), one end of the sliding groove (402) is provided with the sliding block (403), one side of the sliding block (403) is fixedly connected with the clamping plate (404), and the both ends of the placing table (401) are fixedly installed with the fixed tables (405).
3. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 2, wherein: One end of the screw rod (406) is rotatably connected with the clamping plate (404), and the screw rod (406) is threadedly connected with the fixed table (405).
4. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 1, wherein: The connecting plate (804) is slidably connected through the connecting groove (805) and the limiting ring (803), and the fixed bolt (807) is rotatably connected with the connecting ring (802) at one end of the threaded pipe (806).
5. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 1, wherein: The connecting seat (7) is provided with six groups, and the connecting seat (7) is connected with the connecting pipe (808).
6. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 1, wherein: One end of the first concave plate (809) is rotatably connected with the second concave plate (810), and the other end of the first concave plate (809) is screw nut locked with the second concave plate (810).
7. The high performance magnetron sputter coating and glass manufacturing apparatus of claim 1, wherein: One end of the second concave plate (810) is fixedly provided with a target seat (811), and one end of the target seat (811) is provided with a target body (812).