Light path blocking device applied to film thickness measuring system of thin film

Abstract

A light path blocking device applied to a film thickness measuring system of a thin film is arranged between a light source emitting device and the thin film to be measured and comprises a base shell and a movable shading device arranged in the base shell. The movable shading device comprises a shading component and an actuating piece capable of actuating the shading component; the shielding component is configured to move to shield a linear light path emitted by the light source emitting device so as to prevent the linear light from generating adverse effects on the to-be-detected film when the to-be-detected film is aligned; according to the utility model, the movable shading device is arranged in the base shell, and the shading component can move back and forth on a planned path, so that accurate shading of a linear light path is realized; through accurate control of the actuating piece, the shielding component can rapidly move to the shielding position when needed, irradiation of a light source to a thin film can be effectively blocked in the non-measurement stage, and therefore photochemical reaction and heat effect possibly caused by the light source are avoided, and the property and deposition quality of a thin film material are protected.

Description

TECHNICAL FIELD

[0001] The utility model relates to LED film thickness measurement technical field especially, relates to a light path blocking device applied to film thickness measurement system of film. BACKGROUND

[0002] As the core process of OLED panel display industry, the evaporation process plays a decisive role in the production yield of the whole panel. The main function of the evaporation machine is to evaporate (or ion bombard) the luminescent material and other functional materials to the specific position of the target substrate in the ultra-high vacuum environment through heating. Due to the special principle of OLED light emission, the thin film deposited on the substrate is particularly thin, with a thickness usually between 0.1 nm and 12 nm. The thickness and deposition position accuracy of such thin film is crucial to the performance of OLED light emitting device; in the production process of OLED, controlling the film thickness accuracy and stability of the thin film is a key factor to ensure the success of the device. The accuracy of the film thickness directly affects the light emitting efficiency and stability of the OLED device, while the stability of the film thickness relates to the consistency and reliability of the device. However, since the thin film material is mostly organic and sensitive to water and oxygen, it is necessary to ensure the high cleanliness and stability of the measurement environment when measuring the thickness of the thin film.

[0003] In order to achieve this goal, the industry usually adopts a system device that can measure the thickness of the thin film online. This system can monitor the thickness of the thin film in real time on the production line, so as to adjust the evaporation parameters in time and ensure the quality of the thin film. However, in actual application, this online measurement system also has some problems. Since the light source needs to have a certain stabilization time when measuring the film thickness, the light source needs to be turned on and debugged in advance and kept in the open state, and the thin film to be measured needs to be positioned before product measurement. Therefore, during the non-measurement process, the irradiation of the light source may cause adverse effects on the product, leading to the decrease of product quality or the increase of defective rate.

[0004] Specifically, the irradiation of the light source may cause photochemical reaction of the thin film material, leading to the change of material properties. In addition, the thermal effect of the light source may also cause the temperature of the thin film surface to rise, thereby affecting the deposition quality and stability of the thin film. Therefore, how to ensure the measurement accuracy while avoiding the adverse effects of the light source on the product has become a problem to be solved. UTILITY MODEL CONTENTS

[0005] The utility model solves the technical problem of the adverse effects of the light source on the product in the system device for measuring the thickness of the thin film online, and provides a light path blocking device applied to the film thickness measurement system of the thin film, which realizes the shielding of the light path through the extension and retraction movement of the movable baffle driven by the electromagnetic coil and the relay under the control of the external signal.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] An optical path blocking device for use in a thin film thickness measurement system, disposed between a light source emitting device and the thin film to be measured, the optical path blocking device comprising:

[0008] Base shell, and

[0009] A movable light-shielding device configured inside the base shell;

[0010] The movable light-shielding device includes a shielding member that moves back and forth along a planned path and an actuator that can actuate the shielding member.

[0011] The blocking member is configured to move to block the linear light path emitted by the light source emitting device, so as to prevent the linear light from having an adverse effect on the film under test during the alignment of the film under test.

[0012] Furthermore, the actuator includes:

[0013] An electromagnetic coil, configured to connect to the blocking member and drive the blocking member to extend or retract, and

[0014] A relay, electrically connected to the electromagnetic coil, is used to control the energization and de-energization of the electromagnetic coil according to a control signal.

[0015] Furthermore, the optical path blocking device also includes a photoelectric gate sensor, which is configured to detect the position state of the blocking member to determine whether the linear optical path is blocked.

[0016] Furthermore, the photoelectric gate sensor is configured on the propagation path of the linear optical path.

[0017] Furthermore, the photoelectric gate sensor includes a transmitter and a receiver;

[0018] When the blocking component is in the blocking position, the light from the transmitter is blocked by the blocking component, and the receiver cannot receive the light, thus emitting a blocking signal; when the blocking component is removed, the light from the transmitter can pass through the measurement area and be received by the receiver, thus emitting a non-blocking signal.

[0019] Furthermore, the optical path blocking device also includes a controller electrically connected to a relay. The controller receives measurement signals and non-measurement signals, and controls the opening and closing of the relay based on these signals, thereby controlling the energization and de-energization of the electromagnetic coil.

[0020] Furthermore, the optical path blocking device also includes an optical collimator, which is disposed between the light source emitting device and the thin film under test to improve the optical coupling efficiency.

[0021] Further, the light collimator collimates the light emitted by the light source into a parallel light beam to improve light coupling efficiency.

[0022] Further, the light source emitting device is configured to be always on.

[0023] Further, the light path blocking device further comprises a support member for supporting the base shell.

[0024] Thanks to the above technical solutions, the present application has the following advantages:

[0025] The present application innovatively configures a movable light shielding device inside the base shell, which is composed of a shielding member and an actuating member. The shielding member can move back and forth on a planned path to accurately shield the linear light path. Through accurate control of the actuating member, the shielding member can quickly move to the shielding position when needed, effectively blocking the irradiation of the light source on the thin film during the non-measurement stage, thereby avoiding the photochemical reaction and thermal effect that may be caused by the light source and protecting the properties and deposition quality of the thin film material.

[0026] The actuating member of the present application adopts an intelligent design combining an electromagnetic coil and a relay. The electromagnetic coil is responsible for driving the shielding member to perform extension and retraction movement, while the relay controls the power-on and power-off of the electromagnetic coil according to the control signal from the controller. This design not only realizes accurate control of the movement of the shielding member, but also improves the response speed and stability of the entire device. The controller can quickly adjust the position of the shielding member according to the measurement requirements, ensuring the accuracy and efficiency of the measurement.

[0027] The light source emitting device of the present application is configured to be always on to ensure that a stable light source can be quickly provided when needed. This design simplifies the operation process and improves the measurement efficiency. In order to enhance the stability and durability of the entire device, the present application further comprises a support member for supporting the base shell. This design helps to ensure that the device does not shake or displace during the measurement process, thereby ensuring the accuracy and consistency of the measurement. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings of the embodiments. Obviously, the drawings described in the following description only relate to some embodiments of the present application, and are not a limitation on the present application.

[0029] Fig. 1 The present application shows the installation position of the light path blocking device in the evaporation chamber.

[0030] Fig. 2 The present application shows the structure of the application scene.

[0031] Fig. 3 The structure schematic diagram of the light path blocking device in the embodiment of the utility model is shown.

[0032] Reference signs:

[0033] In the figure, 100. Light path blocking device;110. Base shell;120. Movable light shielding device;121. Shielding component;122. Actuator;1221. Electromagnetic coil;1222. Relay;130. Photogate sensor;140. Light collimator;150. Support component;

[0034] 200. Light source emitting device;300. Film to be measured. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model more clear, the utility model will be further described in detail below with the help of the attached drawings. The components of the embodiment of the utility model described and shown in the attached drawings can be arranged and designed in various different configurations. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skilled in the art without making creative efforts belong to the scope of protection of the utility model.

[0036] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0037] Unless otherwise defined, the technical terms or scientific terms used in this patent document should be understood as the usual meaning understood by those skilled in the art to which the utility model belongs. The "first", "second" and similar words used in the utility model patent specification and claims do not represent any order, quantity or importance, but are used to distinguish different components. Similarly, "one", "a" or "the" and similar words do not represent a quantity limit, but represent the existence of at least one. "Include" or "contain" and similar words mean that the elements or objects appearing before "include" or "contain" cover the elements or objects listed after "include" or "contain" and their equivalents, and do not exclude other elements or objects. "Center", "up", "down", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are only used to represent the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may also change accordingly, which is only for the convenience of describing the utility model and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, structure and operation, therefore it cannot be understood as a limitation on the utility model.

[0038] In the description of the utility model, need explanation, unless another explicit provision and limitation, term " install " " link " " connection " should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can pass through intermediate medium indirectly connected, can be two element internal communication.For ordinary skilled in the art, can understand the specific meaning of the above terms in the utility model according to specific circumstances.

[0039] Some embodiments of the utility model will be described in detail below with reference to the drawings.In the case of no conflict, the features in the following examples can be combined with each other.

[0040] Please refer to Figs. 1-3 The utility model discloses a kind of light path blocking devices in film thickness measurement system for film, it is configured between light source emitting device 200 and the film to be measured 300.Specifically, the light path blocking device 100 includes base shell 110 and movable light shielding device 120 configured inside base shell.The movable light shielding device 120 includes shielding member 121 moving back and forth on a planned path and actuator 122 that can actuate shielding member 121.Shielding member 121 is configured to move to shield the linear light path emitted by light source emitting device 200, to prevent linear light from producing adverse effects on the film to be measured 300 when the film to be measured 300 is aligned.In the embodiment, the actuator 122 includes electromagnetic coil 1221 and relay 1222.Electromagnetic coil 1221 is configured to be connected with shielding member 121, and drive shielding member 121 to do telescopic motion, and relay 1222 is electrically connected with electromagnetic coil 1221, for controlling the power-on and power-off of electromagnetic coil 1221 according to control signal.Through this way, the movement of shielding member 121 can be controlled as needed, so as to realize the blocking and opening of light path.

[0041] It should be noted that, in view of the characteristics of the linear light source emitted by the light source emitting device 200 and the need for the to-be-measured film 300 to be aligned on the substrate before measurement, the present patent proposes an innovative light path blocking device 100. The device is arranged between the light source emitting device 200 and the to-be-measured film 300, ensuring that during the alignment of the film, the linear light path emitted by the light source will not directly illuminate the to-be-measured film 300, thereby avoiding the adverse effects of light irradiation on the product during non-measurement. The light path blocking device 100 is internally designed with a movable light shielding device 120, which includes a shielding member 121 that moves back and forth on a planned path and an actuator 122 that drives the shielding member 121. The configuration of the shielding member 121 enables it to protect the to-be-measured film 300 without affecting the stability time of the light source. Once the film alignment is complete, the shielding member 121 can be quickly moved away, allowing the linear light source to stably illuminate the to-be-measured film 300 for film thickness measurement. This design ensures the accuracy of the measurement and avoids the impact of light irradiation on the film quality.

[0042] Further, the light path blocking device 100 also includes a photoelectric gate sensor 130, which is configured to detect the position state of the shielding member 121 to determine whether the linear light path is blocked. The photoelectric gate sensor 130 can be arranged on the propagation path of the linear light path to monitor the position of the shielding member 121 in real time. When the shielding member 121 is in the shielding position, the light emitted by the emitter of the photoelectric gate sensor 130 is blocked by the shielding member 121, and the receiver cannot receive the light, thereby sending a shielding signal. When the shielding member 121 is moved away, the light from the emitter can pass through the measurement area and be received by the receiver, thereby sending a non-shielding signal.

[0043] In addition, the light path blocking device 100 also includes a controller. The controller is electrically connected with the relay 1222, used to receive the measurement signal and the non-measurement signal, and control the opening and closing of the relay 1222 according to these signals. By controlling the opening and closing of the relay 1222, the energization and de-energization of the electromagnetic coil 1221 can be further controlled, thereby controlling the movement of the movable shutter. This way realizes the automatic control of the light path blocking device 100, improves the accuracy and efficiency of the measurement.

[0044] In order to improve the light coupling efficiency, the light path blocking device 100 also includes a light collimator 140. The light collimator 140 is arranged between the light source emitting device 200 and the to-be-measured film 300, and collimates the light emitted by the light source into a parallel light beam to improve the light coupling efficiency. This way can ensure that the light can accurately illuminate the to-be-measured film 300, thereby improving the accuracy of the measurement.

[0045] In one preferred embodiment of the present application, the linear light source needs a certain stabilization time when in use, therefore the emitting device is configured as always on. This means that the light source is always kept on and stable during the whole process, and only when it needs to be blocked, the blocking member 121 is moved to block the light. This way simplifies the measurement process and improves the continuity and stability of the measurement.

[0046] In addition, the light path blocking device 100 also includes a support member 150 for supporting the base shell. The support member 150 can ensure the stability and firmness of the base shell, prevent shaking or displacement during the measurement process, and thus affect the accuracy of the measurement.

[0047] The specific use of the present application is as follows:

[0048] Step 1: Chamber without product, waiting for product to be moved in

[0049] In the evaporation chamber of the OLED production line, when there is no product to be measured, the light path blocking device 100 is in an open state (i.e. the blocking member 121 is in the blocking position). At this time, the light emitted by the light source emitting device 200 is blocked by the blocking member 121 and cannot irradiate the area to be measured. In this state, the chamber remains in a dark environment, avoiding the adverse effects of light sources on other sensitive materials or structures that may exist.

[0050] Step 2: Chamber product is moved in

[0051] When the product is moved into the evaporation chamber, the light path blocking device 100 is still in an open state. At this time, the blocking member 121 continues to block the light, ensuring that the product will not be irradiated by the light source during the alignment process. This helps to protect the product from photochemical reactions and thermal effects, ensuring the accuracy of subsequent measurements.

[0052] Step 3: Alignment is completed, measurement signal is received

[0053] When the product alignment is completed, the control system will issue a measurement signal. At this time, the controller of the light path blocking device 100 receives the measurement signal and controls the relay 1222 to close, so that the electromagnetic coil 1221 is energized. The magnetic force generated by the electromagnetic coil 1221 drives the blocking member 121 to move along the planned path to the non-blocking position, thereby canceling the blocking of the light. At this time, the light emitted by the light source emitting device 200 can accurately irradiate the measured film 300, and the film thickness is measured online.

[0054] Step 4: Measurement is completed, close measurement signal is received

[0055] When the measurement is completed, the control system sends a signal to close the measurement. At this time, the controller of the light path blocking device 100 receives the signal to close the measurement, and controls the relay 1222 to be disconnected, so that the electromagnetic coil 1221 is powered off. After the electromagnetic coil 1221 loses the magnetic force, the shielding member 121 returns to the shielding position under the action of gravity or other reset mechanisms, and the light is shielded again. In this way, the dark environment in the chamber is maintained again before the next measurement, avoiding the adverse effects of the light source on the product.

[0056] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A light path blocking device applied to a film thickness measurement system of a thin film, which is arranged between a light source emitting device and a thin film to be measured, characterized in that, The light path blocking device comprises: a base shell, and a movable light shielding device arranged inside the base shell; wherein the movable light shielding device comprises a shielding member moving back and forth on a planned path and an actuator actuating the shielding member; wherein the shielding member is arranged to move to shield the linear light path emitted by the light source emitting device to prevent the linear light from adversely affecting the to-be-measured film when the to-be-measured film is aligned.

2. The optical path disruption device of claim 1, wherein, The actuator comprises: an electromagnetic coil arranged to be connected with the shielding member and drive the shielding member to perform extension and retraction movement, and an electric appliance electrically connected with the electromagnetic coil for controlling the energization and de-energization of the electromagnetic coil according to a control signal.

3. The optical path disruption device of claim 1, wherein, The light path blocking device further comprises a photoelectric gate sensor arranged to detect the position state of the shielding member to determine whether the linear light path is shielded.

4. The optical path disruption device of claim 3, wherein, The photoelectric gate sensor is arranged on the propagation route of the linear light path.

5. The optical path disruption device of claim 3, wherein, The photoelectric gate sensor comprises an emitter and a receiver; wherein when the shielding member is in a shielding position, the light of the emitter is blocked by the shielding member and the receiver cannot receive the light, thereby sending a shielding signal; when the shielding member moves away, the light of the emitter can pass through the measurement area and be received by the receiver, thereby sending a non-shielding signal.

6. The optical path disruption device of claim 5, wherein, The light path blocking device further comprises a controller electrically connected with a relay, the controller being used to receive a measurement signal and a non-measurement signal and control the opening and closing of the relay according to these signals, thereby controlling the energization and de-energization of the electromagnetic coil to control the movement of the movable shielding member.

7. The optical path disruption device of claim 1, wherein, The light path blocking device further comprises a light collimator arranged between the light source emitting device and the to-be-measured film to improve the light coupling efficiency.

8. The optical path disruption device of claim 7, wherein, The light collimator collimates the light emitted by the light source into a parallel light beam to improve the light coupling efficiency.

9. The light path blocking device of claim 1, wherein, The light source emitting device is arranged to be normally open.

10. The light path blocking device of claim 1, wherein, The light path blocking device further comprises a support member for supporting the base shell.

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