Wet process wafer box transfer mechanism for wafer cleaning machine

Abstract

The utility model relates to a wet-process wafer box transfer mechanism for a wafer cleaning machine, and aims to solve the problems that a wafer box is unstable, easy to shake and poor in clamping effect in the transfer process in the prior art. The mechanism comprises a main body structure and a wafer box. The main body structure is composed of a cross arm, a supporting rod, a base, a fixing plate, an electric push rod, a guide column and a clamping mechanism. The clamping mechanism comprises a lifting plate, a servo motor, a double-end lead screw, a clamping lifting frame, a limiting guide rail and a movable transverse rod. The electric push rod drives the lifting plate to move up and down through the guide columns to ensure stable lifting process and avoid waggling of the wafer box. The clamping lifting frame achieves accurate clamping through a double-end lead screw and a limiting guide rail, limiting rods are arranged on the two sides of the wafer box, and the clamping effect is further enhanced. According to the utility model, by optimizing the structural design, the stability and safety of wafer box transfer are improved, and the risk that the wafer box falls off is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer cleaning technical field, concretely is a kind of wet method sheet box transfer mechanism for wafer cleaning machine. BACKGROUND

[0002] Wafer cleaning is an important process step in semiconductor manufacturing process, aims at removing various pollutants on wafer surface, to ensure the quality and precision of subsequent processing.Wafer cleaning refers to the wafer in the process of forming and polishing treatment, due to the contact with various organic matters, particles and metal and produce the pollutants of cleaning process.The core is to effectively remove the particles, organic matter, metal ion or oxide residue on wafer surface by physical, chemical method, to ensure that wafer has clean surface suitable for subsequent processing.

[0003] Wafer needs to be transported after cleaning mechanism to carry the wafer box after cleaning, so that wafer can be processed next.

[0004] The wafer transfer mechanism in the prior art is unstable during the upward lifting process of the wafer box, which can easily cause the wafer box to shake, increase the risk of wafer box falling, and the wafer box can be lifted and carried by lifting the cross bar clamped on both sides of the wafer box, and the clamping effect of the wafer box cannot be guaranteed. UTILITY MODEL CONTENT

[0005] To solve the above technical problems, the utility model provides a wet method sheet box transfer mechanism for wafer cleaning machine, which is provided with a fixed plate, a lifting plate, a guide column and an electric push rod, so that the electric push rod drives the lifting plate to move up and down, the guide column is slidably connected with the fixed plate, the lifting plate is stable during lifting, the wafer box is prevented from shaking, the risk of wafer box falling is reduced, and the problems in the background art can be effectively solved.

[0006] The utility model adopts the technical scheme of a wet method sheet box transfer mechanism for wafer cleaning machine, which comprises a main body structure and a wafer box, characterized in that the main body structure comprises a cross arm, one end of the cross arm is fixedly connected with a base through a support rod, the other end is provided with a fixed plate on the lower surface, a clamping mechanism is arranged below the fixed plate, the telescopic end of an electric push rod arranged above the cross arm penetrates through the cross arm and the fixed plate and is connected with the clamping mechanism, a plurality of guide columns for increasing the stability of the clamping mechanism are arranged on the fixed plate, and the guide columns penetrate through the fixed plate and are connected with the clamping mechanism.

[0007] As a preferred scheme, the clamping mechanism comprises a lifting plate, a servo motor and a double-head screw rod, the upper surface of the lifting plate is connected with the electric push rod, the lower surface is provided with a double-head screw rod, and the outer side of the fixed plate is further provided with a servo motor, and the power output end of the servo motor is connected with the double-head screw rod.

[0008] Further, the clamping mechanism is also provided with a clamping lifting frame, a limiting guide rail and a moving cross bar, the double-end screw rod is also provided with a limiting guide rail on both sides symmetrically, the clamping lifting frame is connected with the limiting guide rail through the moving cross bar, and the moving cross bar is slidably arranged on the limiting guide rail.

[0009] As a preferred scheme, the wafer box symmetric side is also provided with a limiting rod matched with the clamping lifting frame.

[0010] As a preferred scheme, the fixing plate is also provided with a ball bearing for fixing the guide column, one end of the guide column is connected with the lifting plate through a bolt, the other end passes through the ball bearing and is provided with a limiting structure at the tail end for preventing the guide column from falling out.

[0011] As a preferred scheme, the double-end screw rod is fixedly connected with the lower side center of the lifting plate through a bearing seat.

[0012] As a preferred scheme, the end of the cross arm connected with the supporting rod is also provided with an L-shaped supporting arm for improving the fixing stability, and the supporting arm is matched with the outward convex surface of the upper end of the supporting rod.

[0013] The beneficial effects of the utility model are:

[0014] Based on the deficiencies of the prior art, the utility model provides a wet piece box transfer mechanism for a wafer cleaning machine, and has the following technical effects through optimizing the structure design:

[0015] Firstly, the utility model is provided with the fixing plate, the lifting plate, the guide column and the electric push rod, so that when the electric push rod drives the lifting plate to move up and down, the guide column is slidably connected with the fixing plate, the lifting plate is stable during the lifting process, the wafer box is prevented from shaking, and the risk of wafer box falling is reduced.

[0016] Secondly, the utility model is provided with the wafer box, the limiting rod and the clamping lifting frame, so that when the clamping lifting frame clamps the wafer box, the clamping lifting frame is clamped on both sides of the wafer box, the limiting rod can limit the clamping lifting frame, the clamping lifting frame can effectively limit and fix the wafer box, and the clamping effect of the clamping lifting frame on the wafer box is ensured. DRAWINGS

[0017] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to these drawings without the creative labor of the ordinary skilled in the art.

[0018] Figure 1 It is the structural schematic view of the utility model;

[0019] Figure 2 It is the main sectional view structural schematic view of the utility model's lifting plate;

[0020] Figure 3 It is the utility model Figure 1 The side view structural schematic view of the wafer box in the utility model.

[0021] In the drawing: 1, support rod; 2, cross arm; 3, base; 4, electric push rod; 5, guide column; 6, lifting plate; 7, fixed plate; 8, servo motor; 9, clamping lifting frame; 10, wafer box; 11, double-end screw; 12, moving cross bar; 13, limit guide rail; 14, limit rod. DETAILED DESCRIPTION

[0022] Below, the utility model is specifically described by exemplary implementation. However, it should be understood that the elements, structures and features in one implementation can also be beneficially combined into other implementations without further recitations.

[0023] It should be noted that: unless otherwise defined, the technical terms or scientific terms used in this article should be understood as the usual meaning of the person skilled in the art to which the utility model belongs. The "one", "an" or "the" and similar words used in the utility model patent application description and claims do not express quantity limitation, but indicate that there is at least one; "include" or "contain" and similar words indicate that the elements or objects appearing before "include" or "contain" cover the elements or objects listed after "include" or "contain" and their equivalents, but do not exclude other elements or objects with the same function.

[0024] In order to more clearly describe the specific structural composition of the wet wafer box transfer mechanism for wafer cleaning machine, combined with the attached Figure 1 This embodiment is described:

[0025] A wet wafer box transfer mechanism for wafer cleaning machine, including main body structure and wafer box 10. The main body structure in the cross arm 2 one end is fixed with the base 3 through the support rod 1, the other end lower surface is equipped with fixed plate 7, and the fixed plate 7 below is equipped with clamping mechanism. The telescopic end of electric push rod 4 arranged above cross arm 2 passes through cross arm 2 and fixed plate 7 and is connected with the clamping mechanism, to drive the clamping mechanism to move up and down. In order to increase the stability of the clamping mechanism, a plurality of groups of guide columns 5 are arranged on the fixed plate 7, and the guide columns 5 pass through the fixed plate 7 and are connected with the clamping mechanism.

[0026] In the embodiment, the clamping mechanism comprises a lifting plate 6, a clamping lifting frame 9, a limiting guide rail 13, a moving cross bar 12, a servo motor 8 and a double-end screw rod 11. The upper surface of the lifting plate 6 is connected with the electric push rod 4, and the lower surface is provided with the double-end screw rod 11. The servo motor 8 is arranged outside the fixed plate 7, and the power output end thereof is connected with the double-end screw rod 11, so as to control the rotation of the double-end screw rod 11. In addition, the clamping lifting frame 9 is connected with the limiting guide rail 13 through the moving cross bar 12, and the moving cross bar 12 can slide on the limiting guide rail 13. This design can drive the clamping lifting frame 9 to move linearly when the double-end screw rod 11 rotates, so as to effectively clamp or release the wafer box 10.

[0027] In the embodiment, the wafer box 10 is provided with a limiting rod 14 on the symmetrical side, which cooperates with the clamping lifting frame 9. This not only helps the clamping lifting frame 9 to accurately position and clamp the wafer box 10, but also effectively prevents the wafer box 10 from shaking or moving during the conveying process. In order to further enhance the stability and smoothness of the guide column 5, a ball bearing is also installed on the fixed plate 7 to fix the guide column 5. One end of the guide column 5 is connected with the lifting plate 6 through a bolt, and the other end passes through the ball bearing and is provided with a limiting structure to prevent the guide column 5 from falling out.

[0028] In the embodiment, the double-end screw rod 11 is fixedly connected with the lower side center of the lifting plate 6 through a bearing seat, which ensures the stability and accuracy of the double-end screw rod 11 during operation. Considering the stability of the entire device, an L-shaped supporting arm is additionally provided at the end of the cross arm 2 connected with the supporting rod 1. The supporting arm cooperates with the outward convex surface of the upper end of the supporting rod 1, so as to improve the fixing stability of the overall structure.

[0029] In actual work, the supporting rod 1 is connected with the screw rod guide rail structure and the cleaning machine through the base 3, so that the supporting rod 1 can move horizontally. The electric push rod 4 drives the lifting plate 6 to move up and down, so that the clamping lifting frame 9 moves to the height of the upper side of the wafer box 10. Then, the servo motor 8 drives the double-end screw rod 11 to rotate, so that the moving cross bar 12 drives the clamping lifting frame 9 to move towards each other, and then the lower side cross bar of the clamping lifting frame 9 passes through the lower side of the limiting rod 14. Then, the electric push rod 4 drives the lifting plate 6 to move upwards, so that the clamping lifting frame 9 clamps and fixes the wafer box 10, so as to ensure that the wafer box 10 remains stable during the transfer process, and avoid shaking of the wafer box 10 to damage the wafers.

[0030] It should be noted that although the utility model has been described through the above-mentioned embodiments, the utility model can also have other various embodiments. Those skilled in the art can obviously make various corresponding changes and modifications to the utility model without departing from the spirit and scope of the utility model. However, these changes and modifications should all belong to the scope protected by the claims and equivalents of the utility model.

Claims

1. A wet wafer cassette transfer mechanism for a wafer cleaning machine, comprising a main structure and a wafer cassette (10), characterized in that, The main structure includes a cross arm (2), one end of which is fixedly connected to the base (3) via a support rod (1), and the other end of which is provided with a fixing plate (7) on its lower surface. A clamping mechanism is provided below the fixing plate (7). The telescopic end of an electric push rod (4) located above the cross arm (2) passes through the cross arm (2) and the fixing plate (7) and is connected to the clamping mechanism. The fixing plate (7) is also provided with several sets of guide columns (5) for increasing the stability of the clamping mechanism. The guide columns (5) pass through the fixing plate (7) and are connected to the clamping mechanism.

2. The wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 1, characterized in that, The clamping mechanism includes a lifting plate (6), a servo motor (8), and a double-headed lead screw (11). The upper surface of the lifting plate (6) is connected to the electric push rod (4), and the lower surface is provided with a double-headed lead screw (11). The outer side of the fixing plate (7) is also provided with a servo motor (8), and its power output end is connected to the double-headed lead screw (11).

3. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 2, characterized in that, It is also equipped with a clamping lifting frame (9), a limiting guide rail (13) and a moving crossbar (12). The double-headed screw (11) is symmetrically provided with limiting guide rails (13) on both sides. The clamping lifting frame (9) is connected to the limiting guide rail (13) through the moving crossbar (12). The moving crossbar (12) is slidably arranged on the limiting guide rail (13).

4. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 3, characterized in that, The wafer box (10) is also symmetrically provided with limiting rods (14) on both sides, which cooperate with the clamping lifting frame (9).

5. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 2, characterized in that, The fixing plate (7) is also provided with ball bearings for fixing the guide column (5).

6. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 5, characterized in that, One end of the guide post (5) is connected to the lifting plate (6) by bolts, and the other end passes through the ball bearing and is provided with a limiting structure at the end to prevent the guide post (5) from falling out.

7. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 2, characterized in that, The double-headed lead screw (11) is fixedly connected to the center of the lower side of the lifting plate (6) through a bearing seat.

8. A wet wafer cassette transfer mechanism for a wafer cleaning machine according to claim 1, characterized in that, The end of the cross arm (2) connected to the support rod (1) is also provided with an L-shaped support arm, which is in cooperation with the convex surface of the upper end of the support rod (1).

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