Stop piece boat assembly for oxidation diffusion technology in semiconductor wafer manufacturing process

Abstract

The utility model discloses a baffle plate boat assembly for an oxidation diffusion technology in a semiconductor wafer manufacturing process, relates to the technical field of baffle plate boats, and aims to provide a baffle plate boat assembly with stable installation, which comprises a base and a plurality of baffle plates, the base is provided with a plurality of slots, and the plurality of baffle plates are respectively arranged in the corresponding slots. A connecting assembly is arranged between the blocking piece and the base, the connecting assembly is used for connecting the blocking piece and the base, when the blocking piece is placed in the inserting groove, the blocking piece can be fixed through mutual clamping and matching of the first connecting piece and the second connecting piece at the moment, the blocking piece is prevented from shifting or falling under the action of airflow, and the blocking piece can always shield and protect the wafer.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of baffle boat, more particularly, it relates to the baffle boat assembly for oxidation diffusion process in the semiconductor wafer manufacturing process. BACKGROUND

[0002] In the oxidation diffusion process of semiconductor wafer, quartz boat is usually used to carry wafer. In order to prevent the position deviation of wafer in the process, avoid the abnormal deposition of impurities on the wafer surface and ensure the uniform distribution of process gas around the wafer, baffle structure needs to be arranged on one side of the quartz boat.

[0003] At present, in the traditional baffle boat assembly, the baffle is usually fixed on the quartz boat through simple clamping groove, and under the complex environment of high temperature and process gas impact, the baffle is easy to loosen or displace, which affects the protection of wafer and the stability of process. For example, in the oxidation process, when high-temperature oxidizing gas is introduced, the impact force generated by gas flow may change the position of the baffle, which may further cause the local exposure of wafer in the uneven gas environment, affecting the quality of the oxide layer. Therefore, a stable baffle boat assembly is needed. SUMMARY

[0004] In view of the problems existing in the prior art, the utility model provides a baffle boat assembly for oxidation diffusion process in the semiconductor wafer manufacturing process to solve the technical problems mentioned in the background art.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a baffle boat assembly for oxidation diffusion process in the semiconductor wafer manufacturing process, comprising a base and a plurality of baffles, a plurality of insertion slots are formed on the base, and a plurality of baffles are arranged in the corresponding insertion slots, a connecting assembly is arranged between the baffle and the base, and the connecting assembly is used for connecting the baffle and the base.

[0006] The utility model is further provided as follows: the connecting assembly comprises a first connecting piece and a second connecting piece matched with each other, the first connecting piece is fixed on the base, and the second connecting piece is fixed on the baffle.

[0007] The utility model is further provided as follows: the first connecting piece has a limiting block protruding upward, and the second connecting piece is provided with a limiting slot matched with the limiting block.

[0008] The utility model is further provided as follows: the top end of the limiting block has a fillet section, which facilitates the butt joint of the limiting block and the limiting slot.

[0009] The utility model is further provided as follows: the bottom end of the limiting slot has a chamfer, which facilitates the butt joint of the limiting block and the limiting slot.

[0010] The utility model further sets up, the second connecting piece with baffle between through screw detachably connected.

[0011] The utility model further sets up, the connecting assembly has a plurality of groups, and each baffle is connected with the base through the connecting assembly.

[0012] The utility model further sets up, the baffle with the slot has spacing, to provide the compensation amount of thermal expansion and contraction.

[0013] Compared with the prior art, the utility model provides the baffle boat assembly for oxidation diffusion process in semiconductor wafer manufacturing process, has the following beneficial effects:

[0014] 1, when the baffle is placed in the slot, the baffle can be fixed through the mutual clamping cooperation of the first connecting piece and the second connecting piece at this time, avoids its displacement or drop under the action of airflow, and the baffle can always shield and protect the wafer.

[0015] 2, the connecting assembly structure between the baffle and the base is simple, and the installation and dismounting process are very simple, when replacing the wafer, it is convenient to replace the baffle according to the different sizes of the wafer. DRAWINGS

[0016] Fig. 1 It is the overall structure schematic view of the baffle boat assembly for oxidation diffusion process in semiconductor wafer manufacturing process in the utility model;

[0017] Fig. 2 It is the structure schematic view of the base in the utility model;

[0018] Fig. 3 It is the structure schematic view of the connecting assembly in the utility model;

[0019] Fig. 4 It is the explosion structure schematic view of the utility model Fig. 3 .

[0020] In the drawing: 1, base;101, slot;2, baffle;3, connecting assembly;301, first connecting piece;3011, limiting block;3012, round corner section;302, second connecting piece;3021, limiting groove;3022, chamfer. SPECIFIC EMBODIMENT

[0021] It should be explained that the embodiment in the application and the features in the embodiment can be combined mutually without conflict. The utility model will be described in detail below with reference to the drawings and in combination with the embodiment.

[0022] It should be noted that all technical and scientific terms used in the present application have the same meaning as that generally understood by those skilled in the art to which the present application belongs, unless otherwise specified.

[0023] In the utility model, unless otherwise indicated, the orientation such as "up, down" is generally directed to the direction shown in the drawing, or is directed to the vertical, perpendicular or gravity direction; similarly, for the convenience of understanding and description, "left, right" is generally directed to the left and right shown in the drawing; "inner, outer" refers to the inner and outer relative to the contour of each component itself, but the above orientation words are not used to limit the utility model.

[0024] The baffle boat assembly comprises a base 1 and a plurality of baffles 2, a plurality of insertion slots 101 are formed in the base 1, and the plurality of baffles 2 are respectively arranged in the corresponding insertion slots 101; a connecting assembly 3 is arranged between the baffle 2 and the base 1, the connecting assembly 3 is used for connecting the baffle 2 and the base 1, the connecting assembly 3 has a plurality of groups, and each baffle 2 is connected and matched with the base 1 through the connecting assembly 3.

[0025] In specific application, the base 1 is connected with a quartz boat on which a wafer is mounted, and is arranged in a furnace body to perform oxidation diffusion process treatment; baffles 2 with appropriate sizes are mounted in the insertion slots 101 of the base 1, and the baffles 2 are used for shielding uneven air, so that the wafer is prevented from being directly exposed to the uneven air.

[0026] Please refer to Fig. 3 and 4 In the embodiment of the present application, the connecting assembly 3 comprises a first connecting piece 301 and a second connecting piece 302 which are matched with each other, the first connecting piece 301 is fixed on the base 1, the second connecting piece 302 is fixed on the baffle 2, the first connecting piece 301 has a limiting block 3011 which protrudes upward, the second connecting piece 302 is provided with a limiting slot 3021 which is matched with the limiting block 3011, the top end of the limiting block 3011 has a round corner section 3012, the bottom end of the limiting slot 3021 has a chamfer 3022, and the limiting block 3011 and the limiting slot 3021 are matched and connected.

[0027] Please refer to Figs. 1-4 In specific application, the first connecting piece 301 is mounted on the base 1, the second connecting piece 302 is mounted on the baffle 2, the baffle 2 is inserted into the corresponding insertion slot 101, and the limiting slot 3021 on the second connecting piece 302 is matched and fixed with the limiting block 3011 on the first connecting piece 301, so that the baffle 2 is mounted and fixed.

[0028] In the embodiment of the present application, the second connecting piece 302 is detachably connected with the baffle 2 through a screw; the baffle 2 which is replaced can be detached with the second connecting piece 302 installed thereon, so as to reduce the floor area of the baffle 2 and be easier to store.

[0029] In the embodiment of the present application, the baffle 2 has a spacing with the slot 101, so as to provide a compensation amount of thermal expansion and contraction.

[0030] In all the above-mentioned solutions, the connection between two components can be selected according to actual conditions, such as welding, bolt and nut cooperation connection, bolt or screw connection or other known connection modes, which will not be described one by one here. Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A shadow mask boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes, characterized by, The application relates to a base (1) and a plurality of baffle plates (2), the base (1) is provided with a plurality of insertion grooves (101), the plurality of baffle plates (2) are respectively arranged in the corresponding insertion grooves (101), and a connecting assembly (3) is arranged between the baffle plate (2) and the base (1) and used for connecting the baffle plate (2) and the base (1).

2. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 1, wherein, The connecting assembly (3) comprises a first connecting piece (301) and a second connecting piece (302) which are matched with each other, the first connecting piece (301) is fixed on the base (1), and the second connecting piece (302) is fixed on the baffle plate (2).

3. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 2, wherein, The first connecting piece (301) is provided with an upwardly protruding limiting block (3011), and the second connecting piece (302) is provided with a limiting groove (3021) matched with the limiting block (3011).

4. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 3, wherein, The top end of the limiting block (3011) is provided with a round corner section (3012).

5. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 3, wherein, The bottom end of the limiting groove (3021) is provided with a chamfer (3022).

6. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 2, wherein, The second connecting piece (302) and the baffle plate (2) are detachably connected through a screw.

7. The shadow boat assembly for oxidation diffusion processes in semiconductor wafer manufacturing processes of claim 1, wherein, The connecting assembly (3) has a plurality of groups, and each baffle plate (2) is connected and matched with the base (1) through the connecting assembly (3).

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