Silicon single crystal rod inside diameter slicer for semiconductor

Abstract

The utility model relates to the technical field of semiconductor silicon rod slicing machines, in particular to a silicon single crystal rod inside diameter slicing machine for semiconductors, which comprises a multi-wire cutting machine body, a connecting seat is fixedly connected onto the multi-wire cutting machine body, a rotating block is rotatably connected onto the connecting seat, and a guide rail is slidably connected onto the rotating block. A material plate is connected to the guide rail in a sliding mode, a silicon rod is bonded to the material plate, and a first limiting structure is arranged on the rotating block. And physical power can be saved when the silicon rod is mounted, and the damage of the silicon rod caused by collision due to lack of physical power is avoided, so that the use safety is effectively improved.

Description

Technical Field

[0001] The utility model relates to an inner circle slicing machine for silicon rods, specifically an inner circle slicing machine for single crystal silicon rods used in semiconductors, and belongs to the technical field of semiconductor silicon rod slicing machines. Background Technique

[0002] A semiconductor single silicon crystal rod refers to a high-purity silicon rod used in integrated circuit manufacturing and is one of the basic materials in the semiconductor industry. It is made of high-purity silicon material, has extremely high crystal quality and purity, and is mainly used for manufacturing electronic products such as integrated circuits, solar cells, and display screens. During the semiconductor processing, the single crystal silicon rod is bonded to the material plate through solid glue, then the material plate is installed on the multi-wire cutting machine, and finally the single crystal silicon rod is sliced by the multi-wire cutting machine.

[0003] However, during the installation of the material plate, the staff needs to hold up the material plate to make it snap into the material plate mounting seat of the multi-wire cutting machine. Since the material plate mounting seat is inside the multi-wire cutting machine, every time the material plate is installed, the staff needs to bend and lift the material plate with both hands and then straighten the arms to snap the material plate into the material plate mounting seat to complete the installation of the material plate. Due to the heavy weight of the material plate and the single crystal silicon rod, it is very labor-consuming during the process of straightening the arms. When the physical strength is exhausted, it is very easy to bump, which may easily cause damage to the single crystal rod, resulting in poor safety in use. Content of the Utility Model

[0004] The purpose of the utility model is to provide an inner circle slicing machine for single crystal silicon rods used in semiconductors to solve the above problems, which can save physical strength when installing the silicon rod, avoid damage to the silicon rod caused by bumping due to exhaustion of physical strength, and thus effectively improve the safety in use.

[0005] The utility model realizes the above purpose through the following technical solutions. The inner circle slicing machine for single crystal silicon rods used in semiconductors includes a multi-wire cutting machine body. A connecting seat is fixedly connected to the multi-wire cutting machine body. A rotating block is rotatably connected to the connecting seat. A guide rail is slidably connected to the rotating block. A material plate is slidably connected to the guide rail. A silicon rod is bonded to the material plate. A first limiting structure is provided on the rotating block.

[0006] Preferably, the cross-section of the whole connecting seat is in an L-shaped structure, and the cross-section of the whole rotating block is in an L-shaped structure.

[0007] Preferably, the cross-section of the end of the guide rail is in a "convex" shape structure, and the guide rail is perpendicular to the rotating block.

[0008] Preferably, the first limiting structure includes an insertion block and a connecting ring. The insertion block is slidably connected to the rotating block. Two first slots are provided on the guide rail. One end of the insertion block is engaged with one of the first slots. A second slot is provided on the connecting seat.

[0009] Preferably, a connecting ring is fixedly connected to the insert block, and a spring is sleeved on the outside of the insert block. One end of the spring is fixedly connected to the rotating block, and the other end of the spring is fixedly connected to the connecting ring.

[0010] Preferably, the cross-section of the end of the insert is trapezoidal, and the insert as a whole is cylindrical.

[0011] Preferably, the multi-wire cutting machine body is equipped with a front door, and the multi-wire cutting machine body is provided with a second limiting structure.

[0012] Preferably, the second limiting structure includes a connecting block and a hook block. The connecting block is fixedly connected to the multi-wire cutting machine body, and the hook block is rotatably connected to the connecting block. The hook block abuts against the bottom end of the front door.

[0013] Preferably, the overall cross-section of the hook block is L-shaped, and the cross-section of one end of the hook block is trapezoidal.

[0014] Preferably, a cantilever control box is installed on the multi-wire cutting machine body, and multiple support feet are installed at the bottom of the multi-wire cutting machine body.

[0015] The beneficial effects of this utility model are as follows: When installing silicon rods, the material plate can be lifted by bending both hands, then the material plate can be inserted into the guide rail, and then the material plate can be pushed to slide on the guide rail. Since one end of the guide rail is directly opposite one end of the material plate mounting seat inside the multi-wire cutting machine body, as the material plate is pushed, its end will be inserted into the material plate mounting seat. Then, the material plate is continuously pushed until it is completely inside the material plate mounting seat, at which point the installation of the material plate is completed. Since it is not necessary to stretch out the arms to feed the material plate into the multi-wire cutting machine body during the installation process, it can save physical strength and avoid damage to the crystal rod due to physical exhaustion, thereby effectively improving the safety of use. After the material plate is installed, the guide rail can be pulled out a certain distance from the inside of the multi-wire cutting machine body, and then the rotating block can be rotated. The rotation of the rotating block will drive the guide rail to rotate. When the guide rail rotates 90 degrees, the limiting structure will limit the rotating block, at which point the rotating block cannot rotate. Since the guide rail is attached to one side of the multi-wire cutting machine body at this time, it can reduce the space occupied, thus making it more convenient to use. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 for Figure 1 The enlarged schematic diagram of part A shown below;

[0018] Figure 3This is a schematic diagram of the connection structure between the connector and the rotating block of this utility model;

[0019] Figure 4 for Figure 3 The enlarged schematic diagram of part B is shown.

[0020] In the diagram: 1. Multi-wire cutting machine body; 2. Connecting seat; 3. Rotating block; 4. Guide rail; 5. First limiting structure; 501. Insert block; 502. Connecting ring; 503. Spring; 504. First slot; 505. Second slot; 6. Material plate; 7. Silicon rod; 8. Front door; 9. Second limiting structure; 901. Connecting block; 902. Hook block; 10. Cantilever control box; 11. Support foot. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1 , Figure 2 and Figure 3 As shown, a semiconductor single-crystal silicon rod inner circle slicing machine includes a multi-wire dicing machine body 1, a connecting seat 2 fixedly connected to the multi-wire dicing machine body 1, a rotating block 3 rotatably connected to the connecting seat 2, a guide rail 4 slidably connected to the rotating block 3, a material plate 6 slidably connected to the guide rail 4, a silicon rod 7 bonded to the material plate 6, a first limiting structure 5 provided on the rotating block 3, the overall cross-section of the connecting seat 2 is L-shaped, and the overall cross-section of the rotating block 3 is L-shaped.

[0023] As a technical optimization solution of this utility model, such as Figure 3 As shown, the cross-section of the end of the guide rail 4 is convex. The guide rail 4 is perpendicular to the rotating block 3, so that the convex groove on the material plate 6 can engage with the guide rail 4.

[0024] As a technical optimization solution of this utility model, such as Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the first limiting structure 5 includes an insert block 501 and a connecting ring 502. The insert block 501 is slidably connected to the rotating block 3. The guide rail 4 is provided with two first slots 504. One end of the insert block 501 is engaged with one of the first slots 504. The connecting seat 2 is provided with a second slot 505. The connecting ring 502 is fixedly connected to the insert block 501. A spring 503 is sleeved on the outside of the insert block 501. One end of the spring 503 is fixedly connected to the rotating block 3, and the other end of the spring 503 is fixedly connected to the connecting ring 502. Therefore, it can limit the rotating block 3 when it rotates 90 degrees. At the same time, it can also limit the guide rail 4 after it slides a certain distance on the rotating block 3.

[0025] As a technical optimization solution of this utility model, such as Figure 2 and Figure 4 As shown, the cross-section of the end of the insert 501 is trapezoidal, and the insert 501 as a whole is cylindrical, thus it can play a guiding role when the insert 501 is engaged with the first slot 504.

[0026] As a technical optimization solution of this utility model, such as Figure 1 and Figure 2 As shown, a front door 8 is installed on the multi-wire cutting machine body 1, and a second limiting structure 9 is provided on the multi-wire cutting machine body 1. Therefore, the front end of the multi-wire cutting machine body 1 can be sealed by the front door 8, thereby preventing foreign objects from entering the interior of the multi-wire cutting machine body 1 during the cutting process and causing wire breakage, thus improving the safety of use.

[0027] As a technical optimization solution of this utility model, such as Figure 2 As shown, the second limiting structure 9 includes a connecting block 901 and a hook block 902. The connecting block 901 is fixedly connected to the multi-wire cutting machine body 1, and the hook block 902 is rotatably connected to the connecting block 901. The hook block 902 abuts against the bottom end of the front door 8. The overall cross-section of the hook block 902 is L-shaped, and the cross-section of one end of the hook block 902 is trapezoidal, so it can limit the front door 8 after it is opened.

[0028] As a technical optimization solution of this utility model, such as Figure 1 As shown, a cantilever control box 10 is installed on the multi-wire cutting machine body 1, and multiple support feet 11 are installed at the bottom of the multi-wire cutting machine body 1, so that the multi-wire cutting machine body 1 can be supported by the multiple support feet 11.

[0029] In use, when installing the silicon rod 7, the material plate 6 can be lifted by bending both hands, and then the material plate 6 can be inserted into the guide rail 4. Then, the material plate 6 can be pushed to slide on the guide rail 4. Since one end of the guide rail 4 is directly opposite one end of the material plate mounting seat inside the multi-wire cutting machine body 1, as the material plate 6 is pushed, its end will be inserted into the material plate mounting seat. Then, the material plate 6 is continuously pushed until it is completely inside the material plate mounting seat, at which point the installation of the material plate 6 is completed. Since it is not necessary to stretch out the arms to send the material plate 6 into the multi-wire cutting machine body 1 during the installation process, it can save physical strength and avoid damage to the crystal rod 7 due to physical exhaustion, thus effectively improving the safety of use. After the material plate 6 is installed, the insert block 501 can be pulled, and the spring 503 extends. When one end of the insert block 501 is not close to the first slot 504, When engaged, the guide rail 4 can be pulled out a certain distance from the inside of the multi-wire cutting machine body 1 until the insert block 501 engages with the other first slot 504. Then, the rotating block 3 can be rotated, which will drive the guide rail 4 to rotate. When the guide rail 4 rotates 90 degrees, the other end of the insert block 501 will engage with the second slot 505. At this time, the rotating block 3 cannot rotate. Since the guide rail 4 is attached to one side of the multi-wire cutting machine body 1, it can reduce the space occupied, thus making it easier to use. At the same time, since the guide rail 4 does not block the front door 8, the hook block 902 can be rotated to prevent it from blocking the front door 8. Then the front door 8 can be closed, thereby sealing the front end 1 of the multi-wire cutting machine body. This prevents foreign objects from entering the inside of the multi-wire cutting machine body 1 during the cutting process, which could cause the multi-wire cutting machine body 1 to break, thus effectively improving the safety of use.

[0030] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0031] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A single-crystal silicon rod inner circle slicing machine for semiconductors, comprising a multi-wire slicing machine body (1), characterized in that: A connecting seat (2) is fixedly connected to the body (1) of the multi-wire cutting machine. A rotating block (3) is rotatably connected to the connecting seat (2). A guide rail (4) is slidably connected to the rotating block (3). A material plate (6) is slidably connected to the guide rail (4). A silicon rod (7) is adhered to the material plate (6). A first limiting structure (5) is provided on the rotating block (3).

2. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 1, characterized in that: The connecting seat (2) has an overall L-shaped cross-section, and the rotating block (3) has an overall L-shaped cross-section.

3. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 1, characterized in that: The cross-section of the end of the guide rail (4) is convex, and the guide rail (4) is perpendicular to the rotating block (3).

4. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 1, characterized in that: The first limiting structure (5) includes a plug (501) and a connecting ring (502). The plug (501) is slidably connected on the rotating block (3). The guide rail (4) is provided with two first slots (504). One end of the plug (501) is engaged with one of the first slots (504). The connecting seat (2) is provided with a second slot (505).

5. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 4, characterized in that: A connecting ring (502) is fixedly connected to the insert (501), and a spring (503) is sleeved on the outside of the insert (501). One end of the spring (503) is fixedly connected to the rotating block (3), and the other end of the spring (503) is fixedly connected to the connecting ring (502).

6. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 4, characterized in that: The cross-section of the end of the insert (501) is trapezoidal, and the insert (501) as a whole is cylindrical.

7. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 6, characterized in that: The multi-wire cutting machine body (1) is equipped with a front door (8) and a second limiting structure (9) is provided on the multi-wire cutting machine body (1).

8. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 7, characterized in that: The second limiting structure (9) includes a connecting block (901) and a hook block (902). The connecting block (901) is fixedly connected to the multi-wire cutting machine body (1), and the hook block (902) is rotatably connected to the connecting block (901). The hook block (902) abuts against the bottom end of the front door (8).

9. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 8, characterized in that: The hook block (902) has an L-shaped cross-section, and one end of the hook block (902) has a trapezoidal cross-section.

10. The semiconductor single-crystal silicon rod inner circle slicing machine according to claim 1, characterized in that: The multi-wire cutting machine body (1) is equipped with a cantilever control box (10), and the bottom end of the multi-wire cutting machine body (1) is equipped with multiple support feet (11).

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