Evaporation device for metallized film processing

Abstract

The utility model discloses an evaporation device for metallized film processing, which relates to the technical field of metal film processing and comprises a mounting bin and a transmission component, the transmission component is arranged in the mounting bin and comprises a mounting plate fixedly connected in the mounting bin, a first connecting rod is rotatably connected onto the mounting plate, and a second connecting rod is rotatably connected onto the first connecting rod. The first connecting rod is rotatably connected with a first rotating shaft, the first rotating shaft is rotatably connected with a sliding block, the sliding block is slidably connected with a transmission frame, the transmission frame is fixedly connected with a connecting plate, the connecting plate is fixedly connected with an electric telescopic rod, the electric telescopic rod is fixedly connected to the mounting plate, and the transmission frame is fixedly connected with a transmission plate. The first sliding shaft slides in the inclined groove, the transmission block is driven by the guiding effect of the inclined groove to conduct inward clamping movement at the opening position of the mounting bin, finally the clamping block is driven to fasten the workpiece to be machined, the tilting and loosening phenomena caused by uneven stress are avoided, the clamping stability is improved, and a thin film is always kept firmly fixed in the evaporation process.

Description

Technical Field

[0001] This utility model relates to the field of metal thin film processing technology, specifically to a vapor deposition apparatus for metallization thin film processing. Background Technology

[0002] In today's era of rapid technological development, vapor deposition equipment for metallized thin film processing has become an indispensable key equipment in many fields, and its development process is closely linked to the progress of various industries.

[0003] Existing technologies employ only simple mechanical clamping, such as single-sided clips or double-sided bolts. This method struggles to apply uniform force to the film from all directions, leading to uneven stress on the film edges, causing them to warp or loosen. For large-area films, the clamping force in the central area is significantly reduced due to its greater distance from the clamping point, resulting in poorer stability and affecting the clamping strength. Consequently, the film fails to be securely fixed to the substrate fixture, leading to economic losses. Utility Model Content

[0004] The purpose of this invention is to provide a vapor deposition apparatus for metallization thin film processing, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vapor deposition apparatus for metallization thin film processing, comprising:

[0006] Installation compartment;

[0007] A transmission assembly is placed inside an installation chamber. The transmission assembly includes an installation plate fixedly connected to the installation chamber, a first connecting rod rotatably connected to the installation plate, a first rotating shaft rotatably connected to the first connecting rod, a sliding block rotatably connected to the first rotating shaft, a transmission frame slidably connected to the sliding block, a connecting plate fixedly connected to the transmission frame, an electric telescopic rod fixedly connected to the connecting plate, the electric telescopic rod fixedly connected to the installation plate, and a transmission plate fixedly connected to the transmission frame.

[0008] A clamping assembly is placed inside an installation chamber. The clamping assembly includes a first sliding shaft fixedly connected to a transmission plate, a transmission block slidably connected to the first sliding shaft, a clamping block fixedly connected to the transmission block, a first fixing frame fixedly connected to the transmission plate, and a second fixing frame fixedly connected to the transmission plate.

[0009] Furthermore, the transmission block has an inclined groove, a second connecting rod is fixedly connected between the transmission frame and the transmission plate, the first sliding shaft is slidably connected in the inclined groove on the transmission block, the mounting chamber has an opening, a sealing gasket is fixed in the opening on the mounting chamber, and a sealing door is rotatably connected to the opening on the mounting chamber via a rotating shaft.

[0010] The above technical solution is adopted: by opening an inclined groove on the transmission block, the transmission block is driven by the sliding of the first sliding shaft on the transmission block during use.

[0011] Furthermore, the transmission plate has an opening, and the transmission block is slidably connected to the opening in the mounting plate.

[0012] The above technical solution is adopted: by opening holes in the transmission plate, the transmission block can slide in them during use.

[0013] Furthermore, the first connecting rod is rotatably connected to the mounting plate via a second rotating shaft.

[0014] The above technical solution is adopted: by setting a second rotating shaft, it is convenient for the first connecting rod to rotate during use.

[0015] Furthermore, an installation groove is provided on the top of the inner wall of the installation chamber, and an installation hole is provided on one side of the installation chamber.

[0016] The above technical solution is adopted: by opening an installation groove on the top of the inner wall of the installation chamber, it is convenient to install the electron beam evaporation source during use, and the installation hole is convenient to install the vacuum pipe.

[0017] Furthermore, a limiting plate is fixedly connected to the sliding block, and the limiting plate on the sliding block is slidably connected to the transmission frame.

[0018] The above technical solution is adopted: by fixing a limit plate on the sliding block, the sliding block is prevented from falling off the transmission frame during use.

[0019] Furthermore, a rubber rod is fixedly connected to the first rotating shaft, a limiting groove is formed at the bottom of the inner wall of the installation chamber, and a second sliding shaft is slidably connected in the limiting groove inside the installation chamber. The second sliding shaft is fixedly connected to the bottom of the transmission block.

[0020] The above technical solution is adopted: by fixing a rubber rod to the first rotating shaft, it is easy to slide the rubber rod onto the first fixed frame during use.

[0021] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0022] 1. In this utility model, when the electric telescopic rod is activated, the electric telescopic rod acts as a power source, rigidly connected to the transmission frame via a connecting plate, driving the transmission frame to rise. The transmission frame has a specific frame structure, with an internal track for sliding blocks to slide on. As the transmission frame rises, the sliding blocks slide within the track. Since the sliding blocks are rotatably connected to the first connecting rod via a rotating shaft, the movement of the sliding blocks causes the first connecting rod to gradually become perpendicular to the mounting plate with the second rotating shaft connected to the mounting plate as its axis. During this process, based on the linkage characteristics of the mechanical structure, the sliding blocks on both sides slide inward synchronously, thereby driving the first rotating shaft and its rubber rod to press the metal target material.

[0023] 2. In this utility model, the transmission frame drives the transmission plate to rise via the second connecting rod. The first sliding shaft on the transmission plate is embedded in the inclined groove of the transmission block. When the transmission plate is raised, the first sliding shaft slides in the inclined groove. Utilizing the guiding effect of the inclined groove, the transmission block is driven to move inward at the opening of the mounting chamber, ultimately causing the clamping block to secure the workpiece to be processed. This omnidirectional, multi-angle coordinated force application method ensures that the workpiece to be processed, whether it is a large-area film or a substrate of other shapes, is evenly stressed from the edge to the center, avoiding uneven stress that could lead to warping or loosening. This improves the stability of the clamping and ensures that the film remains firmly fixed during the vapor deposition process. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of a vapor deposition apparatus for metallization thin film processing.

[0025] Figure 2 This is a schematic diagram showing the position of the transmission components of a vapor deposition apparatus for metallization thin film processing.

[0026] Figure 3 This is a schematic diagram of the clamping component position in a vapor deposition apparatus for metallization thin film processing.

[0027] Figure 4 This is a schematic diagram of the position of the first sliding shaft in a vapor deposition apparatus for metallization thin film processing.

[0028] Numbering on the map:

[0029] 1. Installation compartment;

[0030] 2. Transmission assembly; 21. Mounting plate; 22. Electric telescopic rod; 23. Transmission frame; 24. Connecting plate; 25. Sliding block; 26. First rotating shaft; 27. Second rotating shaft; 28. First connecting rod; 29. ​​Second connecting rod; 210. Transmission plate;

[0031] 3. Clamping assembly; 31. First sliding shaft; 32. Second sliding shaft; 33. Clamping block; 34. First fixing frame; 35. Transmission block; 36. Second fixing frame. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0033] like Figures 1-4 As shown, this utility model provides a technical solution: a vapor deposition apparatus for metallization thin film processing, comprising:

[0034] Installation compartment 1;

[0035] Transmission assembly 2 is placed inside the installation chamber 1. Transmission assembly 2 includes an installation plate 21 fixedly connected inside the installation chamber 1, a first connecting rod 28 rotatably connected to the installation plate 21, a first rotating shaft 26 rotatably connected to the first connecting rod 28, a sliding block 25 rotatably connected to the first rotating shaft 26, a transmission frame 23 slidably connected to the sliding block 25, a connecting plate 24 fixedly connected to the transmission frame 23, an electric telescopic rod 22 fixedly connected to the connecting plate 24, the electric telescopic rod 22 fixedly connected to the installation plate 21, and a transmission plate 210 fixedly connected to the transmission frame 23.

[0036] The clamping assembly 3 is placed inside the installation chamber 1. The clamping assembly 3 includes a first sliding shaft 31 fixedly connected to the transmission plate 210, a transmission block 35 slidably connected to the first sliding shaft 31, a clamping block 33 fixedly connected to the transmission block 35, a first fixing frame 34 fixedly connected to the transmission plate 210, and a second first fixing frame 34 fixedly connected to the transmission plate 210.

[0037] When the electric telescopic rod 22 is activated, it acts as a power source, rigidly connected to the transmission frame 23 via the connecting plate 24, causing the transmission frame 23 to rise. The transmission frame 23 has a specific frame structure with an internal track for the sliding block 25 to slide. As the transmission frame 23 rises, the sliding block 25 slides within the track. Since the sliding block 25 is rotatably connected to the first connecting rod 28 via a rotating shaft, the movement of the sliding block 25 causes the first connecting rod 28 to gradually become perpendicular to the mounting plate 21 with the second rotating shaft 27 connected to the mounting plate 21 as its axis. During this process, based on the linkage characteristics of the mechanical structure, the sliding blocks 25 on both sides slide inward synchronously, thereby causing the first rotating shaft 26 and its rubber rod to press against the metal target. The transmission frame 23, through the second connecting rod 29, drives the transmission plate 210 to rise, thus... The first sliding shaft 31 on the moving plate 210 is embedded in the inclined groove of the transmission block 35. When the transmission plate 210 is lifted, the first sliding shaft 31 slides in the inclined groove. Using the guiding effect of the inclined groove, the transmission block 35 is driven to move inward at the opening of the mounting chamber 1, and finally the clamping block 33 is driven to fasten the workpiece to be processed. This all-round, multi-angle coordinated force application method ensures that the workpiece to be processed, whether it is a large-area film or a substrate of other shapes, can be evenly stressed from the edge to the center, avoiding the warping and loosening caused by uneven stress, improving the stability of clamping, and keeping the film firmly fixed during the vapor deposition process.

[0038] Furthermore, such as Figure 1 Place Figure 4 As shown, a sloping groove is provided on the transmission block 35, and a second connecting rod 29 is fixedly connected between the transmission frame 23 and the transmission plate 210. The first sliding shaft 31 is slidably connected in the sloping groove on the transmission block 35. An opening is provided on the installation chamber 1, and a sealing gasket is fixed on the opening on the installation chamber 1. A sealing door is rotatably connected to the opening on the installation chamber 1 through a rotating shaft. By providing a sloping groove on the transmission block 35, the transmission block 35 is driven by the sliding of the first sliding shaft 31 on the transmission block 35 during use.

[0039] The transmission plate 210 has an opening, and the transmission block 35 is slidably connected in the opening on the mounting plate 21. The opening on the transmission plate 210 facilitates the sliding of the transmission block 35 during use.

[0040] The first connecting rod 28 is rotatably connected to the mounting plate 21 via the second rotating shaft 27. The second rotating shaft 27 facilitates the rotation of the first connecting rod 28 during use.

[0041] The top of the inner wall of the installation chamber 1 is provided with an installation groove, and the side of the installation chamber 1 is provided with an installation hole. The installation groove on the top of the inner wall of the installation chamber 1 facilitates the installation of the electron beam evaporation source during use, and the installation hole facilitates the installation of vacuum pipes.

[0042] A limiting plate is fixedly connected to the sliding block 25. The limiting plate on the sliding block 25 is slidably connected to the transmission frame 23. By fixing the limiting plate on the sliding block 25, the sliding block 25 is prevented from falling off the transmission frame 23 during use.

[0043] The above solution also has the problem that the length of the first rotating shaft 26 is too short, such as... Figures 2 to 4 As shown, a rubber rod is fixedly connected to the first rotating shaft 26. A limiting groove is opened at the bottom of the inner wall of the installation chamber 1. A second sliding shaft 32 is slidably connected in the limiting groove in the installation chamber 1. The second sliding shaft 32 is fixedly connected to the bottom of the transmission block 35. By fixing the rubber rod to the first rotating shaft 26, it is convenient to slide the rubber rod onto the first fixed frame 34 during use.

[0044] Working principle: such as Figures 1-4 As shown, during use, first install the electron beam evaporation source (GSL-ZDDZS-500 electron beam evaporation source) on the top of the inner wall of the installation chamber 1, install the vacuum tube and vacuum pump (HiPace350 molecular pump) in the mounting hole on the installation chamber 1, open the sealing door on the installation chamber 1, place the metal target on the second fixed frame 36, place the workpiece to be processed on the first fixed frame 34, and close the sealing door (rotary sealing door with fluororubber sealing gasket) to seal it.

[0045] When in use, first start the electric telescopic rod 22, so that the electric telescopic rod 22 drives the transmission frame 23 to rise through the connecting plate 24, so that the sliding block 25 slides in the transmission frame 23, and the first connecting rod 28 gradually becomes perpendicular to the mounting plate 21.

[0046] During this process, the sliding blocks 25 on both sides will be driven to slide inward, causing the first rotating shaft 26 to slide inward, causing the rubber rod on the first rotating shaft 26 to press against the metal target on the second fixed frame 36. During this process, the transmission frame 23 will drive the transmission plate 210 to rise in the installation chamber 1 through the second connecting rod 29, causing the first sliding shaft 31 on the transmission plate 210 to drive the transmission block 35 to move inward through the opening on the installation chamber 1, and driving the clamping block 33 to clamp and fasten the workpiece to be processed.

[0047] Then, a vacuum environment is created in the installation chamber 1 using a vacuum pump, and the electron beam evaporation source is started. By emitting a high-energy electron beam, the metal target is bombarded, causing the target to melt and evaporate instantly at high temperature, thus starting the coating process.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. The implementation schemes in the above embodiments can also be further combined or replaced. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A vapor deposition apparatus for processing a metallized film, characterized by comprising: Include: The installation warehouse (1); Transmission assembly (2), the transmission assembly (2) is placed in the installation warehouse (1), the transmission assembly (2) includes the mounting plate (21) fixedly connected in the installation warehouse (1), the first connecting rod (28) is rotatably connected on the mounting plate (21), the first rotating shaft (26) is rotatably connected on the first connecting rod (28), the sliding block (25) is rotatably connected on the first rotating shaft (26), the transmission frame (23) is slidably connected on the sliding block (25), the connecting plate (24) is fixedly connected on the transmission frame (23), the electric telescopic rod (22) is fixedly connected on the connecting plate (24), the electric telescopic rod (22) is fixedly connected on the mounting plate (21), the transmission plate (210) is fixedly connected on the transmission frame (23); Clamping assembly (3), the clamping assembly (3) is placed in the installation warehouse (1), the clamping assembly (3) includes the first sliding shaft (31) fixedly connected on the transmission plate (210), the transmission block (35) is slidably connected on the first sliding shaft (31), the clamping block (33) is fixedly connected on the transmission block (35), the first fixed frame (34) is fixedly connected on the transmission plate (210), the second fixed frame (36) is fixedly connected on the transmission plate (210).

2. The evaporation device for processing of metallized film according to claim 1, characterized in that: The transmission block (35) is provided with an inclined slot, the second connecting rod (29) is fixedly connected between the transmission frame (23) and the transmission plate (210), the first sliding shaft (31) is slidably connected in the inclined slot on the transmission block (35), the opening is formed on the installation warehouse (1), the sealing gasket is fixed on the opening of the installation warehouse (1), the sealing door is rotatably connected on the opening of the installation warehouse (1) through the rotating shaft.

3. The evaporation device for processing of metallized film according to claim 2, characterized in that: The transmission plate (210) is provided with an opening, and the transmission block (35) is slidably connected in the opening on the mounting plate (21).

4. The evaporation device for processing of a metallized film according to claim 1, characterized in that: The first connecting rod (28) is rotatably connected on the mounting plate (21) through the second rotating shaft (27).

5. The evaporation device for processing of metallized film according to claim 1, characterized in that: The inner wall top of the installation warehouse (1) is provided with a mounting groove, and one side of the installation warehouse (1) is provided with a mounting hole.

6. The evaporation device for processing of a metallized film according to claim 1, characterized in that: The limiting plate is fixedly connected on the sliding block (25), and the limiting plate on the sliding block (25) is slidably connected with the transmission frame (23).

7. The evaporation device for processing of a metallized film according to claim 1, characterized in that: The first rotating shaft (26) is fixedly connected with a rubber rod, the inner wall bottom of the installation warehouse (1) is provided with a limiting groove, the second sliding shaft (32) is slidably connected in the limiting groove in the installation warehouse (1), and the second sliding shaft (32) is fixedly connected at the bottom of the transmission block (35).

Images