Novel coating boat and photovoltaic coating equipment

Abstract

The utility model relates to the technical field of photovoltaic manufacturing, and discloses a novel coating boat and photovoltaic coating equipment. The novel coating boat comprises a plurality of boat pieces which are sequentially stacked at intervals from front to back, wherein each boat piece comprises a boat piece main body, an upper boat lug and a lower boat lug; the boat piece main body is provided with a plurality of cavities which are sequentially arranged left and right and are used for placing coating substrates; the lower boat lugs are connected with the bottom of the left side and / or the bottom of the right side of the boat piece main body and extend towards the outer side along the bottom of the side edge of the boat piece main body, so that a lower coating conductive block is mounted between every two front and back adjacent lower boat lugs; the upper boat lugs are located above the left side and / or the right side of the boat piece main body, the upper boat lugs firstly extend upwards from the top surface of the side edge of the boat piece main body and then extend outwards, so that an upper coating conductive block is mounted between two adjacent upper boat lugs in the front-back direction, and a distance is formed between the bottom surface of each upper coating conductive block and the top surface of the boat piece main body. The novel film coating boat can effectively eliminate the blocking of the boat lugs and the film coating conductive blocks to airflow, optimize the airflow direction and greatly improve the uniformity of film coating.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic manufacturing technical field, concretely relates to a novel coating boat and photovoltaic coating equipment. BACKGROUND

[0002] In the field of photovoltaic manufacturing, plasma enhanced chemical vapor deposition (PECVD) technology is widely used in depositing high-quality nanometer films. With the increasing size of silicon wafers and the continuous reduction of process time, coating uniformity has become one of the key difficulties in the production of photovoltaic cells.

[0003] The existing graphite boat, as shown in Figure 1-2 , comprises a plurality of graphite sheets 1 stacked in order from front to back, and a plurality of cavities 17 for placing silicon wafers arranged in order from left to right on the graphite sheets 1. The left and right sides of the graphite sheets 1 are connected to outwardly protruding boat ears (divided into upper boat ears 15 and lower boat ears 16, with the upper boat ears 15 located above the lower boat ears 16), so that there is a gap between the boat ears of adjacent two graphite sheets 1 that can place a coating conductive block (such as a graphite block). Typically, an upper coating conductive block is placed between adjacent two upper boat ears 15, and a lower coating conductive block is also placed between adjacent two lower boat ears 16. As shown in Figure 1-2 , the upper boat ears 15 and the upper coating conductive block of the existing graphite boat are both located at the middle position of the side edge of the graphite sheet 1. When the coating reaction gas is introduced from one side (such as the left side) of the graphite sheet 1, part of the introduced reaction gas will be blocked by the upper boat ear 15, the upper coating conductive block and the lower coating conductive block due to the volume of the coating conductive block (as shown in Figure 2 , the arrow direction is the direction of the introduction of the reaction gas), affecting the reaction of the reaction gas and the coating deposition of the silicon wafers inside the graphite boat, resulting in uneven coating thickness on the surface of the silicon wafers, causing performance differences in the production of photovoltaic cells in the subsequent process, and affecting the quality of the photovoltaic cells.

[0004] To improve the coating uniformity, a graphite boat with publication number CN211350599U is disclosed, which sets the upper boat foot (i.e. the upper boat ear) at the upper part of the side edge of the graphite sheet, and opens a hole on the boat foot coating conductive block to reduce the blocking effect on the flowing special gas (i.e. the coating reaction gas) to improve the coating uniformity on the surface of the silicon wafers. However, as shown in CN211350599U, the upper boat ear and the boat foot coating conductive block of this graphite boat still block the coating reaction gas, so the improvement effect on the coating uniformity is very limited, and it is difficult to eliminate the adverse effects on the coating gas flow and the coating uniformity. SUMMARY

[0005] The utility model aims at overcoming the defects of the prior art, and provides a novel coating boat and photovoltaic coating equipment.

[0006] Based on this, the utility model discloses a novel coating boat, including the interval of front and back is arranged in proper order a plurality of pieces of boat, the piece of boat includes the piece of boat main part, upper boat ear and lower boat ear, the piece of boat main part is opened with the cavity that a plurality of coating base material is placed and arranges in proper order from left to right, lower boat ear is connected in the left side bottom and / or right side bottom of piece of boat main part, and lower boat ear extends to the outside along the side edge bottom of piece of boat main part, makes the lower coating conductive block of installation between the two lower boat ears of front and back adjacent.

[0007] The upper boat ear is located at the left side top and / or right side top of the piece of boat main part, and the upper boat ear extends upward first and then outward from the side edge top surface of the piece of boat main part, so that the upper coating conductive block is installed between the two upper boat ears of front and back adjacent, and the upper coating conductive block has a spacing between the bottom surface and the top surface of the piece of boat main part.

[0008] Preferably, the upper boat ear includes a connecting ear and an extension ear, the lower end and the upper end of the connecting ear are connected to the side edge top surface of the piece of boat main part and the extension ear respectively, and the extension ear extends outward from the upper end of the connecting ear; the upper coating conductive block is installed between the two extension ears of front and back adjacent.

[0009] Further preferably, the plurality of pieces of boat are divided into three different types of pieces of boat, which are the first type of piece of boat, the second type of piece of boat, and the third type of piece of boat; the first type of piece of boat is stacked at the front and rear of the novel coating boat, while the second type of piece of boat and the third type of piece of boat are alternately stacked at the middle position of the novel coating boat.

[0010] The width of the extension ear of the first type of piece of boat is smaller than the width of the extension ear of the second type of piece of boat and the third type of piece of boat, so that the spacing L1 between the bottom surface of the extension ear of the first type of piece of boat and the top surface of the piece of boat main part is greater than the spacing L2 between the bottom surface of the extension ear of the second type of piece of boat and the top surface of the piece of boat main part, and the spacing L1 is greater than the spacing L3 between the bottom surface of the extension ear of the third type of piece of boat and the top surface of the piece of boat main part.

[0011] More preferably, the upper boat ear of the first type of piece of boat is located at the left side top of the piece of boat main part; the width D1 of the extension ear of the first type of piece of boat is 20-30 mm, and the spacing L1 is 15-25 mm.

[0012] The lower boat ear of the first type of piece of boat is connected to the right side bottom of the piece of boat main part.

[0013] More preferably, the upper boat ear of the second type of piece of boat is located at the left side top of the piece of boat main part; the width D2 of the extension ear of the second type of piece of boat is 35-45 mm; and the spacing L2 is 3-8 mm.

[0014] The lower boat ear of the second type of piece of boat is connected to the right side bottom of the piece of boat main part.

[0015] More preferably, the upper boat ear of the third type of boat piece is located on the upper right side of its boat piece body; the width D3 of the outer ear of the third type of boat piece is 35-45mm; the interval L3 is 3-8mm;

[0016] The lower lug of the third type of boat piece is connected to the bottom left side of its main body.

[0017] Preferably, the width D4 of the lower boat ear is 35-45mm; the width D of the boat body is 200-230mm.

[0018] Preferably, a novel coating boat further includes a first connecting rod for the main body of a plurality of boat pieces stacked in series, a second connecting rod for the upper boat lugs and upper coating conductive blocks of the plurality of boat pieces stacked in series, and a third connecting rod for the lower boat lugs and lower coating conductive blocks of the plurality of boat pieces stacked in series.

[0019] Preferably, the length L of the boat body is 1800-2200mm; the number of cavities on a single boat body is 9.

[0020] This utility model also discloses a photovoltaic coating equipment, which includes the novel coating boat described above, wherein the novel coating boat is a graphite boat.

[0021] Compared with the prior art, the present invention has at least the following beneficial effects:

[0022] This invention improves the structure of the novel coating boat by optimizing the design of the lower boat lug, and especially further optimizing the structure of the upper boat lug and its connection with the main body of the boat. This creates a gap between the bottom surface of the upper coating conductive block and the top surface of the main body of the boat, effectively preventing the lower boat lug, especially the upper boat lug and the large upper coating conductive block from blocking the flow of reactive gas introduced from the left or right side of the boat. It optimizes the direction of reactive gas flow into the novel coating boat, eliminating the obstruction of the reactive gas flow direction by the boat lug and the large graphite block of existing graphite boats. It effectively solves the problem of uneven airflow of reactive gas inside existing graphite boats during the coating process. Compared with existing graphite boats, this novel coating boat greatly reduces the defect of uneven coating thickness on the surface of photovoltaic cells (or silicon wafers) caused by uneven airflow of reactive gas, and greatly improves the uniformity of coating thickness of photovoltaic cells. Attached Figure Description

[0023] Figure 1 This is the front view of an existing graphite boat.

[0024] Figure 2 for Figure 1 A partial structural diagram of an existing graphite boat with reactant gas introduced into its left side.

[0025] Figure 3 This is a three-dimensional structural diagram of a novel coating boat according to this embodiment.

[0026] Figure 4 for Figure 3 A partial structural diagram of the left side of the novel coating boat.

[0027] Figure 5 for Figure 3 A partial structural diagram of the right side of the novel coating boat.

[0028] Figure 6 This is a front view of a novel coated boat according to this embodiment.

[0029] Figure 7 for Figure 6 A partial structural diagram of the novel coating boat with reactive gas introduced into its left side.

[0030] Figure 8 This is a side view of a novel coating boat according to this embodiment.

[0031] Figure 9 This is a top view of a novel coating boat according to this embodiment.

[0032] Figure 10 This is a front view of a first type of boat sheet of a novel coated boat according to this embodiment.

[0033] Figure 11 This is a front view of a second type of boat sheet of a novel coated boat according to this embodiment.

[0034] Figure 12 This is a front view of a third type of boat sheet of a novel coated boat according to this embodiment.

[0035] Explanation of reference numerals: Boat piece 1; Type I boat piece 11; Type II boat piece 12; Type III boat piece 13; Boat piece body 14; Upper boat ear 15; Connecting ear 151; Extended ear 152; Lower boat ear 16; Cavity 17; Upper coated conductive block 2; Lower coated conductive block 3; Spacing 4; First connecting rod 5; Second connecting rod 6; Third connecting rod 7. Detailed Implementation

[0036] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Example

[0038] This embodiment describes a novel coating boat, see [link / reference]. Figures 3-6It includes several boat pieces 1 stacked sequentially from front to back. Each boat piece 1 includes a boat body 14, a lower boat lug 16, and an upper boat lug 15. The boat body 14 has several cavities 17 arranged sequentially from left to right, and each cavity 17 can accommodate a coating substrate (such as a silicon wafer).

[0039] Specifically, the length L of the wafer body 14 is 1800-2200mm (preferably 2000mm). The length of the wafer body 14 can be increased based on this to increase the number of cavities 17 on a single wafer body 14, thereby improving the silicon wafer deposition efficiency and increasing production capacity. (e.g.) Figure 10 (As shown). Preferably, there are 9 cavities 17 on a single wafer body 14; in this way, 9 silicon wafers can be placed on a single wafer body 14 at one time, which can improve the coating efficiency of the silicon wafers.

[0040] In practice, the novel coating boat is preferably a graphite boat. The novel coating boat also includes a first connecting rod 5 (such as...). Figures 4-5 As shown), so that the main body 14 of the stacked boat pieces 1 are connected in series through the first connecting rod 5.

[0041] The lower boat lug 16 is connected to the bottom left side and / or bottom right side of the boat body 14, and extends outward along the bottom side of the boat body 14, forming a straight line. Thus, after several boat pieces 1 are stacked at intervals, a lower coated conductive block 3 (such as...) can be installed between two adjacent lower boat lugs 16. Figures 4-5 (as shown in Figure 8).

[0042] In practice, this novel coating boat also includes a third connecting rod 7, which connects the lower lugs 16 of the stacked boat pieces 1 and the lower coating conductive block 3 in series, facilitating the connection of the novel coating boat to electrodes in the furnace and thus achieving coating. The lower coating conductive block 3 is preferably a graphite block.

[0043] The upper boat ear 15 is located on the upper left and / or upper right side of the boat body 14. The upper boat ear 15 is connected to the top side surface of the boat body 14, and extends upwards and then outwards from the top side surface of the boat body 14, creating a gap 4 between the bottom surface of the upper coated conductive block 2 and the top surface of the boat body 14. Thus, after several boat pieces 1 are stacked sequentially at intervals, an upper coated conductive block 2 (such as...) can be installed between two adjacent upper boat ears 15. Figures 4-5 (as shown in Figure 8).

[0044] Therefore, the novel coating boat of this embodiment, based on the above-mentioned lower boat ear 16 structural design and in conjunction with the above-mentioned optimized design of the upper boat ear 15 structure and its connection relationship, can make the bottom surface of the upper coating conductive block 2 and the top surface of the boat body 14 have a gap 4. Thus, it can effectively prevent the lower boat ear 16, especially the upper boat ear 15 and the large-volume upper coating conductive block 2 from blocking the flow of reaction gas introduced from the left or right side of the boat 1, thereby greatly improving the uniformity of the coating thickness on the silicon wafer surface.

[0045] In practice, this novel coating boat also includes a second connecting rod 6, so that the upper lugs 15 and the upper coating conductive blocks 2 of the stacked boat pieces 1 can be connected in series through the second connecting rod 6, which facilitates the connection of the novel coating boat to electrodes in the furnace, thereby achieving coating. The upper coating conductive blocks 2 are preferably graphite blocks.

[0046] Specifically, see Figures 6-7 15 pieces of the upper boat ear The shape or the reverse The upper boat lug 15 includes a connecting lug 151 and an extension lug 152. The lower end of the connecting lug 151 is connected to the top side surface of the boat body 14, while the upper end of the connecting lug 151 is connected to one side of the extension lug 152. The other side of the extension lug 152 extends outward from the upper end of the connecting lug 151. The upper coated conductive block 2 is installed between two adjacent extension lugs 152. The upper boat lug 15 is shaped like a character. The shape or the reverse The shape of the letter not only facilitates manual movement of the new coating boat, but also makes it easier for robotic arms to handle.

[0047] In summary, this embodiment improves the structure of the novel coating boat, optimizes the design of the lower boat lug 16, and especially further optimizes the structure of the upper boat lug 15 and its connection with the boat body 14, so that there is a gap 4 between the bottom surface of the upper coating conductive block 2 and the top surface of the boat body 14. This effectively prevents the lower boat lug 16, especially the upper boat lug 15 and the large-volume upper coating conductive block 2 from blocking the flow of reaction gas introduced from the left or right side of the boat 1 (such as...). Figure 7 As shown in the diagram, the arrow indicates the direction of the incoming and flowing of the reactive gas. This design optimizes the direction of the reactive gas flowing into the interior of the new coating boat, eliminating the obstruction of the reactive gas flow direction by the lugs and large graphite blocks of existing graphite boats. It effectively solves the problem of uneven airflow of reactive gas inside the graphite boat during the coating process. Compared with existing graphite boats, this new coating boat greatly reduces the defect of uneven coating thickness on the surface of photovoltaic cells (or silicon wafers) caused by uneven airflow of reactive gas, and greatly improves the uniformity of coating thickness of photovoltaic cells.

[0048] Among them, see Figure 3 and Figures 8-12Several boat pieces 1 are divided into three different types of boat pieces 1, namely the first type of boat piece 11 (such as... Figure 10 As shown), the second type of boat piece 12 (as shown) Figure 11 (as shown) and the third type of boat piece 13 (as shown) Figure 12 As shown). The first type of boat sheet 11 is stacked at the front and rear of the new coating boat, while the second type of boat sheet 12 and the third type of boat sheet 13 are alternately stacked in the middle of the new coating boat (as shown). Figures 8-9 (As shown). Preferably, the novel coating boat has a total of 27 boat pieces 1; wherein, the two boat pieces 1 at the front of the novel coating boat are preferably first-type boat pieces 11, and the two boat pieces 1 at the rear of the novel coating boat are also preferably first-type boat pieces 11; while the boat pieces 12 in the middle of the novel coating boat are second-type boat pieces 12 and third-type boat pieces 13, which are alternately stacked.

[0049] Further, see Figures 10-12 The width D1 of the extension ear 152 of the first type of boat piece 11 is smaller than the width D2 of the extension ear 152 of the second type of boat piece 12, so that the distance L1 between the bottom surface of the extension ear 152 of the first type of boat piece 11 and the top surface of the boat piece body 14 is greater than the distance L2 between the bottom surface of the extension ear 152 of the second type of boat piece 12 and the top surface of the boat piece body 14; moreover, the width D1 of the extension ear 152 of the first type of boat piece 11 is also smaller than the width D3 of the extension ear 152 of the third type of boat piece 13, so that the distance L1 is also greater than the distance L3 between the bottom surface of the extension ear 152 of the third type of boat piece 13 and the top surface of the boat piece body 14.

[0050] Thus, by stacking the first type of boat sheet 11 on the front and rear of the new coating boat, and making the width of the extension ear 152 of the first type of boat sheet 11 narrower, the distance L1 between the bottom surface of the extension ear 152 of the first type of boat sheet 11 and the top surface of its body 14 is larger. This provides the new coating boat with handling space, and thus makes it easier to handle and move the new coating boat.

[0051] Specifically, see Figure 10 The upper boat ear 15 of the first type of boat piece 11 is located on the upper left side of its boat piece body 14; the width D1 of the outer extension ear 152 of the first type of boat piece 11 is 20-30mm (preferably 25mm), and the interval L1 is 15-25mm (preferably 20mm). The lower boat ear 16 of the first type of boat piece 11 is connected to the bottom right side of its boat piece body 14.

[0052] Specifically, see Figure 11The upper lug 15 of the second type of boat piece 12 is located on the upper left side of its boat piece body 14; the width D2 of the outer lug 152 of the second type of boat piece 12 is 35-45mm (preferably 40mm); the spacing L2 is 3-8mm (preferably 5mm). The lower lug 16 of the second type of boat piece 12 is connected to the bottom right side of its boat piece body 14.

[0053] Specifically, see Figure 12 The upper lug 15 of the third type of boat piece 13 is located on the upper right side of its boat piece body 14; the width D3 of the outer lug 152 of the third type of boat piece 13 is 35-45mm (preferably 40mm); the interval L3 is 3-8mm (preferably 5mm). The lower lug 16 of the third type of boat piece 13 is connected to the bottom left side of its boat piece body 14.

[0054] Specifically, the width D4 of the lower boat ear 16 is 35-45mm (preferably 40mm); the width D of the boat body 14 is 200-230mm (preferably 215mm).

[0055] This embodiment optimizes the structure and connection relationship of the upper boat lug 15 and the lower boat lug 16, and optimizes the design of the three different types of boat pieces 1. This not only effectively avoids the obstruction of airflow caused by the shape and volume of the boat lugs and the coated conductive block, but also greatly improves the problem of uneven coating thickness on the surface of photovoltaic cells or silicon wafers caused by the uneven airflow inside the existing graphite boat, thus greatly improving the uniformity of the coating thickness of photovoltaic cells; it also provides a transport space for the new coating boat, making it more convenient to transport and move.

[0056] This embodiment of a photovoltaic coating equipment includes a novel coating boat as described above, wherein the novel coating boat is a graphite boat.

[0057] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0058] The technical solution provided by this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A novel coating boat, characterized in that, The device includes several boat pieces stacked sequentially at intervals. Each boat piece includes a boat piece body, an upper boat ear, and a lower boat ear. The boat piece body has several cavities arranged from left to right for placing the coating substrate. The lower boat ear is connected to the bottom left side and / or bottom right side of the boat piece body, and extends outward along the bottom side of the boat piece body, so that a lower coating conductive block is installed between two adjacent lower boat ears. The upper boat ear is located on the upper left and / or upper right of the boat body, and the upper boat ear extends upward from the top side surface of the boat body and then outward, so that an upper coated conductive block is installed between two adjacent upper boat ears, and there is a gap between the bottom surface of the upper coated conductive block and the top surface of the boat body.

2. The novel coating boat according to claim 1, characterized in that, The upper boat lug includes a connecting lug and an extension lug. The lower end and the upper end of the connecting lug are respectively connected to the side top surface of the boat body and the extension lug. The extension lug extends outward from the upper end of the connecting lug. The upper coated conductive block is installed between two adjacent extension lugs.

3. The novel coating boat according to claim 2, characterized in that, The boat pieces are divided into three different types of boat pieces, namely, the first type of boat piece, the second type of boat piece and the third type of boat piece; the first type of boat piece is stacked at the front and rear of the new coating boat, while the second type of boat piece and the third type of boat piece are stacked alternately at the middle position of the new coating boat. The width of the extension ear of the first type of boat piece is smaller than the width of the extension ear of the second type of boat piece and the third type of boat piece, so that the distance L1 between the bottom surface of the extension ear of the first type of boat piece and the top surface of the boat piece body is greater than the distance L2 between the bottom surface of the extension ear of the second type of boat piece and the top surface of the boat piece body, and the distance L1 is greater than the distance L3 between the bottom surface of the extension ear of the third type of boat piece and the top surface of the boat piece body.

4. The novel coating boat according to claim 3, characterized in that, The upper lug of the first type of boat piece is located on the upper left side of its boat piece body; the width D1 of the outer lug of the first type of boat piece is 20-30mm, and the interval L1 is 15-25mm; The lower lug of the first type of boat piece is connected to the bottom right side of its boat piece body.

5. A novel coating boat according to claim 3, characterized in that, The upper lug of the second type of boat piece is located on the upper left side of its main body; the width D2 of the outer lug of the second type of boat piece is 35-45mm; the interval L2 is 3-8mm; The lower lug of the second type of boat piece is connected to the bottom right side of its main body.

6. A novel coating boat according to claim 3, characterized in that, The upper lug of the third type of boat piece is located on the upper right side of its main body; the width D3 of the outer lug of the third type of boat piece is 35-45mm; the interval L3 is 3-8mm; The lower lug of the third type of boat piece is connected to the bottom left side of its main body.

7. The novel coating boat according to claim 1, characterized in that, The width D4 of the lower boat lug is 35-45mm; the width D of the boat body is 200-230mm.

8. The novel coating boat according to claim 1, characterized in that, It also includes a first connecting rod for the main body of a plurality of boat pieces stacked in series, a second connecting rod for the upper boat lug and upper coated conductive block of a plurality of boat pieces stacked in series, and a third connecting rod for the lower boat lug and lower coated conductive block of a plurality of boat pieces stacked in series.

9. A novel coating boat according to claim 1, characterized in that, The length L of the main body of the boat piece is 1800-2200mm; the number of cavities on a single main body of the boat piece is 9.

10. A photovoltaic coating equipment, characterized in that, It includes a novel coating boat as described in any one of claims 1-9, wherein the novel coating boat is a graphite boat.

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