Preparation device of functional diamond single crystal
By designing a limiting mechanism and a rotating mechanism, the problem of instability of the tray on the deposition stage was solved, enabling stable preparation and efficient deposition of functional diamond single crystals.
Patent Information
- Application Number
- CN202520399842.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-10
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-03-10
AI Technical Summary
In existing technologies, the tray is not stable enough on the deposition stage and is prone to moving or falling, which affects the stability and safety of functional diamond single crystal preparation.
A limiting mechanism was designed, including positive and negative screws, threaded rods and limiting blocks. The stable limiting of the tray is achieved by motor drive, and the deposition stage and tray are rotated by a rotating mechanism to uniformly distribute gas, thereby improving the stability and efficiency of the preparation.
This achieves stable positioning of the tray, preventing it from falling and ensuring the stable preparation and safety of diamond single crystals, while also improving the uniformity of gas distribution and deposition rate.
Smart Images
Figure CN223921629U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of diamond single crystal preparation technology, specifically to a device for preparing functional diamond single crystals. Background Technology
[0002] Functional diamond refers to synthetic diamond with excellent acoustic, optical, electrical, magnetic, and thermal properties. These properties include, but are not limited to, high optical transmittance, high carrier mobility, excellent insulation, and high thermal conductivity. Functional diamond single crystals refer to diamond materials composed of a single crystal structure, possessing a highly ordered atomic arrangement and fewer grain boundary defects. Such materials typically exhibit superior physical and chemical properties, such as higher hardness, better thermal conductivity, and lower internal stress. To produce functional diamond single crystals, fabrication equipment is usually used. Through fabrication, diamond single crystals with a complete crystal structure can be obtained, thereby improving their mechanical, electrical, and optical properties. High-quality functional diamond single crystals can be applied in a wider range of high-tech fields.
[0003] In the prior art, when preparing functional diamond single crystals, it is usually necessary to place the functional diamond single crystal substrate material in a tray and place the tray on the deposition stage. Due to the inability to effectively limit the position of the tray, the tray is not stable enough when placed on the deposition stage, and the tray is prone to moving or falling off the deposition stage, which can easily affect the stability and safety of functional diamond single crystal preparation. Therefore, in order to solve the above problems, a preparation device for functional diamond single crystals is proposed. Utility Model Content
[0004] The purpose of this invention is to provide a device for preparing functional diamond single crystals, in order to solve the problem mentioned in the background art that the inability to properly limit the position of the tray makes the tray unstable when placed on the deposition stage, and thus the tray is prone to moving or falling off the deposition stage, which easily affects the stability and safety of the preparation of functional diamond single crystals.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a device for preparing functional diamond single crystals, comprising a housing, the housing including a reaction chamber, an opening on the inner side of the reaction chamber, a door on the surface of the reaction chamber, a microwave generator fixedly installed at the top of the reaction chamber, an air inlet pipe fixedly connected to the surface of the reaction chamber, an exhaust pipe fixedly connected to the bottom of the reaction chamber, a deposition stage on the inner side of the reaction chamber, and a tray on the surface of the deposition stage;
[0006] The surface of the deposition stage is provided with a limiting mechanism, which includes a connecting column fixedly connected to the bottom end of the deposition stage. A fixing block is fixedly connected to the lower surface of the deposition stage. A positive and negative screw is movably connected to the inner side of the fixing block. A first conical tooth is fixedly connected to the surface of the positive and negative screw. A first motor is fixedly installed on the surface of the fixing block. A threaded rod is movably connected to the inner side of the fixing block. A second conical tooth is fixedly connected to the surface of the threaded rod. A moving block is threadedly connected to the surfaces of the positive and negative screw and the threaded rod. A limiting block is fixedly connected to the surface of the moving block.
[0007] Preferably, the limiting mechanism further includes movable slots, which are arranged in four groups on the inner side of the deposition stage, and the moving block and the movable slots are movably connected.
[0008] Preferably, the positive and negative screws are fixedly connected to the output end of the first motor, and the positive and negative screws, the first conical tooth, the threaded rod, and the second conical tooth are all movable inside the connecting column. The limiting blocks are arranged in four groups and correspondingly connected to the moving blocks.
[0009] Preferably, a rotating mechanism is provided inside the reaction chamber. The rotating mechanism includes a connecting plate, which is fixedly connected to the bottom of the reaction chamber. A first rotating rod is movably connected to the inside of the connecting plate. A first gear is fixedly connected to the surface of the first rotating rod. A second motor is fixedly installed at the bottom of the connecting plate. A second rotating rod is movably connected to the inside of the reaction chamber. A second gear is fixedly connected to the bottom of the second rotating rod. A support rod is fixedly connected to the lower surface of the deposition stage. A rotating groove is provided inside the reaction chamber.
[0010] Preferably, one end of the first rotating rod is movably connected to the reaction chamber, the other end of the first rotating rod is fixedly connected to the output end of the second motor, and the end of the second rotating rod away from the second gear is fixedly connected to the connecting column.
[0011] Preferably, the support rods are arranged in four groups and fixedly connected to the deposition stage, with one end of the support rod away from the deposition stage movable inside the rotating groove.
[0012] Compared with the prior art, the beneficial effects of this utility model are:
[0013] 1. The operation of the first motor drives the forward and reverse screws to rotate, which in turn drives the second conical tooth to rotate, and the threaded rod to rotate. In turn, the moving block can drive the limiting block to move under the action of the forward and reverse screws and the threaded rod. The limiting block can limit the tray, which can stabilize the tray on the deposition stage and prevent the tray from moving or falling off. This ensures the stability and safety of the functional diamond single crystal and facilitates more stable preparation.
[0014] 2. The second motor drives the first rotating rod to rotate, which in turn rotates the first gear and drives the second gear. This, in turn, causes the second rotating rod to rotate the deposition stage, which in turn rotates the substrate material in the tray. This allows the gas to be distributed more evenly on the surface of the substrate material, which helps to ensure the uniformity of diamond single crystal growth. At the same time, the rotation increases the contact between the substrate material and the reactive gas, thereby improving the diamond deposition rate and efficiency. Attached Figure Description
[0015] Figure 1 This is a front view schematic diagram of the structure of this utility model;
[0016] Figure 2 This is a front sectional view of the reaction chamber and opening of this utility model;
[0017] Figure 3 This is an exploded cross-sectional view of the deposition stage and the second rotating rod of this utility model.
[0018] Figure 4 This is an exploded side view sectional view of the structure of the positive and negative screws and the limiting block of this utility model.
[0019] In the diagram: 1. Reaction chamber; 11. Opening; 12. Chamber door; 13. Microwave generator; 14. Inlet pipe; 15. Exhaust pipe; 16. Deposition stage; 17. Tray; 2. Connecting column; 21. Fixing block; 22. Positive and negative screws; 23. First conical tooth; 24. First motor; 25. Threaded rod; 26. Second conical tooth; 27. Moving block; 28. Limiting block; 29. Movable groove; 3. Connecting plate; 31. First rotating rod; 32. First gear; 33. Second motor; 34. Second rotating rod; 35. Second gear; 36. Support rod; 37. Rotating groove. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] Please see Figure 1-4 One embodiment provided by this utility model:
[0022] The microwave generator 13, the first motor 24, and the second motor 33 used in this application are products that can be purchased directly from the market. Their principles and connection methods are existing technologies well known to those skilled in the art, so they will not be described in detail here.
[0023] A device for preparing functional diamond single crystals includes a housing, which includes a reaction chamber 1. The reaction chamber 1 has an opening 11 on its inner side and a door 12 on its surface. A microwave generator 13 is fixedly installed at the top of the reaction chamber 1. An air inlet pipe 14 is fixedly connected to the surface of the reaction chamber 1, and an exhaust pipe 15 is fixedly connected to the bottom of the reaction chamber 1. A deposition stage 16 is provided inside the reaction chamber 1, and a tray 17 is provided on the surface of the deposition stage 16. The deposition stage 16 can support and place the tray 17, and the tray 17 can be used to place the functional diamond single crystal substrate material. The air inlet pipe 14 can introduce gases such as methane and hydrogen. The microwave generator 13 can heat the inside of the reaction chamber 1, which can cause methane to decompose into carbon atoms and deposit on the substrate to form diamond.
[0024] A limiting mechanism is provided on the surface of the deposition stage 16. The limiting mechanism includes a connecting column 2, which is fixedly connected to the bottom end of the deposition stage 16. A fixing block 21 is fixedly connected to the lower surface of the deposition stage 16. A positive and negative screw 22 is movably connected to the inner side of the fixing block 21. A first conical tooth 23 is fixedly connected to the surface of the positive and negative screw 22. A first motor 24 is fixedly installed on the surface of the fixing block 21. A threaded rod 25 is movably connected to the inner side of the fixing block 21. A second conical tooth 26 is fixedly connected to the surface of the threaded rod 25. A moving block 27 is threadedly connected to the surfaces of the positive and negative screw 22 and the threaded rod 25. A limiting block 28 is fixedly connected to the surface of the moving block 27. By setting the limiting block 28, the limiting block 28 can limit the tray 17 placed on the deposition stage 16, which can ensure the stability of the tray 17 and prevent the tray 17 from moving or falling. This ensures the stability of the reaction with the substrate material and the safety of the preparation of functional diamond single crystals.
[0025] Furthermore, the limiting mechanism also includes movable grooves 29. The movable grooves 29 are arranged in four groups on the inner side of the deposition stage 16. The movable block 27 is movably connected to the movable grooves 29. By opening the movable grooves 29, the movable block 27 can be limited, which can prevent the movable block 27 from shifting under the action of the positive and negative screws 22 and the threaded rod 25, and facilitate the movable block 27 to drive the limiting block 28 to move stably.
[0026] Furthermore, the output ends of the positive and negative screws 22 and the first motor 24 are fixedly connected. The positive and negative screws 22, the first conical tooth 23, the threaded rod 25 and the second conical tooth 26 are all movable inside the connecting post 2. The limiting blocks 28 are arranged in four groups and correspondingly connected to the moving block 27. Through the setting of the first conical tooth 23 and the second conical tooth 26, when the first conical tooth 23 rotates under the action of the positive and negative screws 22, it can realize the transmission of the second conical tooth 26, thereby enabling the two sets of threaded rods 25 and the positive and negative screws 22 to rotate simultaneously, which facilitates the moving block 27 to drive the limiting block 28 to move.
[0027] Furthermore, a rotating mechanism is provided inside the reaction chamber 1. The rotating mechanism includes a connecting plate 3, which is fixedly connected to the bottom of the reaction chamber 1. A first rotating rod 31 is movably connected to the inside of the connecting plate 3. A first gear 32 is fixedly connected to the surface of the first rotating rod 31. A second motor 33 is fixedly installed at the bottom of the connecting plate 3. A second rotating rod 34 is movably connected to the inside of the reaction chamber 1. A second gear 35 is fixedly connected to the bottom of the second rotating rod 34. A support rod 36 is fixedly connected to the lower surface of the deposition stage 16. A rotating groove 37 is provided inside the reaction chamber 1. With the second rotating rod 34, when the second rotating rod 34 rotates, the deposition stage 16 can drive the tray 17 to rotate accordingly, which facilitates the rotation of the substrate material. This enables the gas to be evenly distributed on the surface of the substrate material, ensuring contact between the substrate material and the reactive gas, and improving the deposition quality and effect of diamond.
[0028] Furthermore, one end of the first rotating rod 31 is movably connected to the reaction chamber 1, and the other end of the first rotating rod 31 is fixedly connected to the output end of the second motor 33. The end of the second rotating rod 34 away from the second gear 35 is fixedly connected to the connecting column 2. Through the arrangement of the first gear 32 and the second gear 35, the rotation of the first gear 32 under the action of the first rotating rod 31 can realize the transmission of the second gear 35, thereby facilitating the rotation of the second rotating rod 34 under the action of the second gear 35 and driving the deposition stage 16 and the tray 17 to rotate, which can realize the rotation of the functional diamond single crystal substrate material.
[0029] Furthermore, the support rods 36 are fixedly connected to the deposition stage 16 in four groups. The end of the support rod 36 away from the deposition stage 16 moves inside the rotating groove 37. The support rods 36 can support the deposition stage 16. The cooperation between the support rods 36 and the rotating groove 37 makes the deposition stage 16 more stable when rotating.
[0030] Working principle: In use, the first motor 24 is electrically connected to an external power source. The operator starts the first motor 24 by pressing the switch. The first motor 24 drives the positive and negative screws 22 to rotate. The first conical tooth 23 will rotate under the action of the positive and negative screws 22, thereby enabling the first conical tooth 23 to transmit power to the second conical tooth 26, so that the threaded rod 25 can rotate under the action of the second conical tooth 26. The moving block 27 is limited by the movable groove 29 and will move under the action of the positive and negative screws 22 and the threaded rod 25. In turn, the limiting block 28 moves accordingly, which can limit the tray 17.
[0031] The second motor 33 is electrically connected to an external power source. The operator starts the second motor 33 by pressing a switch. The operation of the second motor 33 drives the first rotating rod 31 to rotate. The first gear 32 will rotate under the action of the first rotating rod 31 and can transmit power to the second gear 35. This allows the second rotating rod 34 to rotate under the action of the second gear 35. In turn, the connecting column 2 drives the deposition stage 16 and the tray 17 to rotate under the action of the second rotating rod 34. At the same time, the support rod 36 moves in the rotating groove 37, which can realize the rotation of the functional diamond single crystal substrate material.
[0032] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the description above. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.
Claims
1. A functional diamond single crystal preparation device, comprising a box, the box comprises a reaction box (1), the inside of the reaction box (1) is provided with an opening (11), the surface of the reaction box (1) is provided with a box door (12), the top end of the reaction box (1) is fixedly installed with a microwave generator (13), the surface of the reaction box (1) is fixedly connected with an air inlet pipe (14), the bottom end of the reaction box (1) is fixedly connected with an exhaust pipe (15), the inside of the reaction box (1) is provided with a deposition table (16), the surface of the deposition table (16) is provided with a tray (17); characterized in that The surface of the deposition table (16) is provided with a limiting mechanism, the limiting mechanism comprises a connecting column (2), the connecting column (2) is fixedly connected at the bottom end of the deposition table (16), the lower surface of the deposition table (16) is fixedly connected with a fixed block (21), the inside of the fixed block (21) is movably connected with a forward and reverse screw rod (22), the surface of the forward and reverse screw rod (22) is fixedly connected with a first tapered tooth (23), the surface of the fixed block (21) is fixedly installed with a first motor (24), the inside of the fixed block (21) is movably connected with a threaded rod (25), the surface of the threaded rod (25) is fixedly connected with a second tapered tooth (26), the surface of the forward and reverse screw rod (22) and the threaded rod (25) is screwedly connected with a moving block (27), the surface of the moving block (27) is fixedly connected with a limiting block (28).
2. The apparatus for producing a functional diamond single crystal according to claim 1, wherein: The limiting mechanism further comprises a movable groove (29), the movable groove (29) is movably connected with the moving block (27) and the movable groove (29) is movably connected with the movable groove (29).
3. The apparatus of claim 1, wherein: The output end of the forward and reverse screw rod (22) and the first motor (24) is fixedly connected, the forward and reverse screw rod (22), the first tapered tooth (23), the threaded rod (25) and the second tapered tooth (26) are movably arranged in the inside of the connecting column (2), the limiting block (28) is movably connected with the moving block (27) in four groups.
4. The apparatus of claim 1, wherein: The inside of the reaction box (1) is provided with a rotating mechanism, the rotating mechanism comprises a connecting plate (3), the connecting plate (3) is fixedly connected at the bottom end of the reaction box (1), the inside of the connecting plate (3) is movably connected with a first rotating rod (31), the surface of the first rotating rod (31) is fixedly connected with a first gear (32), the bottom end of the connecting plate (3) is fixedly installed with a second motor (33), the inside of the reaction box (1) is movably connected with a second rotating rod (34), the bottom end of the second rotating rod (34) is fixedly connected with a second gear (35), the lower surface of the deposition table (16) is fixedly connected with a supporting rod (36), the inside of the reaction box (1) is provided with a rotating groove (37).
5. The apparatus of claim 4, wherein: One end of the first rotating rod (31) is movably connected with the reaction box (1), the other end of the first rotating rod (31) is fixedly connected with the output end of the second motor (33), the end of the second rotating rod (34) away from the second gear (35) is fixedly connected with the connecting column (2).
6. The apparatus of claim 4, wherein: The support rod (36) is fixedly connected with the deposition table (16) in four groups, and the end of the support rod (36) away from the deposition table (16) is movably arranged in the inner side of the rotating groove (37).