Sapphire crystal growth furnace with waste gas multi-stage treatment function

Abstract

The utility model discloses a sapphire crystal growth furnace with a waste gas multi-stage treatment function, relates to the technical field of waste gas treatment of crystal growth furnaces, and aims to solve the problems that an existing crystal growth furnace is lack of a waste gas multi-stage treatment structure, the purification degree of waste gas is not high, and the overall environmental protection coefficient needs to be improved. The waste gas outlet end of the crystal growth furnace main body is fixedly connected with a gas inlet pipe, the gas outlet end of the gas inlet pipe is fixedly provided with a filtering tank, the gas outlet end of the filtering tank is fixedly connected with a first gas guide pipe, the gas outlet end of the first gas guide pipe is fixedly provided with a heat exchanger, and the gas outlet end of the heat exchanger is fixedly provided with a second gas guide pipe; a washing box is fixedly installed at the air outlet end of the second air guide pipe, and an inner filtering tank is fixedly connected to the bottom end face of the interior of the filtering tank. And the effects that the waste gas can be subjected to multi-stage treatment operation, the purification degree of the waste gas is high, and the overall environmental protection coefficient is high are achieved.

Description

Technical Field

[0001] This utility model relates to the field of waste gas treatment technology for crystal growth furnaces, and in particular to a sapphire crystal growth furnace with multi-stage waste gas treatment. Background Technology

[0002] Crystal growth furnaces, as the core equipment for crystal growth, play a vital role in modern industrial production and scientific research. Their working principle is based on specific physicochemical processes. By precisely controlling conditions such as temperature and pressure, atoms or molecules are induced to arrange themselves in an orderly manner under specific conditions, thereby growing high-quality crystals. During operation, crystal growth furnaces generate waste gas, which must be treated before being discharged into the external environment.

[0003] Existing crystal growth furnaces lack a multi-stage waste gas treatment structure, resulting in low purification levels and an overall environmental protection coefficient that needs improvement. Utility Model Content

[0004] The purpose of this invention is to provide a sapphire crystal growth furnace with multi-stage waste gas treatment, which can perform multi-stage treatment of waste gas, resulting in a high degree of waste gas purification and a high overall environmental protection coefficient.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A sapphire crystal growth furnace with multi-stage exhaust gas treatment includes a crystal growth furnace body. An air inlet pipe is fixedly connected to the exhaust gas outlet of the crystal growth furnace body. A filter canister is fixedly installed at the outlet of the air inlet pipe. A first air guide pipe is fixedly connected to the outlet of the filter canister. A heat exchanger is fixedly installed at the outlet of the first air guide pipe. A second air guide pipe is fixedly installed at the outlet of the heat exchanger. A washing tank is fixedly installed at the outlet of the second air guide pipe.

[0007] By adopting the above technical solutions, the waste gas can be treated in multiple stages, thereby improving the environmental protection coefficient of the sapphire crystal growth furnace.

[0008] Furthermore, an inner filter canister is fixedly connected to the bottom surface of the filter canister, the outlet end of the air inlet pipe is connected to the inside of the inner filter canister, a filter element is installed inside the inner filter canister, and the inlet end of the first air guide pipe is connected to the inside of the filter canister.

[0009] By adopting the above technical solution, the filter element can be used to filter dust from exhaust gas.

[0010] Furthermore, a control valve is fixedly installed in both the air inlet pipe and the first air guide pipe. A mounting groove is provided at the middle position of the upper end face of the filter tank, and an ultrasonic vibrator is fixedly installed inside the mounting groove. A discharge port is provided at the middle position of the lower end face of the filter tank. An ultrasonic generator is fixedly installed on the side surface of the filter tank, and the ultrasonic generator is electrically connected to the ultrasonic vibrator.

[0011] By adopting the above technical solution, ultrasonic cleaning operations can be performed by using the cooperation of an ultrasonic generator and an ultrasonic vibrator.

[0012] Furthermore, the washing tank has a connecting cavity at its upper end, and multiple washing pipes are fixedly connected to the lower end face of the connecting cavity. The air outlet of the second air guide pipe is connected to the inside of the connecting cavity. The washing tank contains washing liquid, and the air outlet of the washing pipe is placed in the washing liquid.

[0013] By adopting the above technical solution, the waste gas can be introduced into the washing liquid through the washing pipe, and the waste gas can be washed using the washing liquid.

[0014] Furthermore, an air extraction pipe is fixedly connected to the upper surface of the washing tank, and an air extraction pump is fixedly installed in the pipe.

[0015] By adopting the above technical solution, the interior of the washing tank can be evacuated.

[0016] Furthermore, a drain pipe is fixedly connected to the lower end face of the washing tank, and a valve is installed in the drain pipe.

[0017] By adopting the above technical solution, it is easy to replace the washing liquid.

[0018] In summary, the beneficial technical effects of this utility model are as follows:

[0019] 1. This utility model connects a filter tank, a heat exchanger, and a washing box sequentially at the exhaust gas outlet of the crystal growth furnace, which can sequentially filter, recover heat energy, and wash the discharged exhaust gas, effectively performing multi-stage treatment of exhaust gas with high exhaust gas treatment efficiency and high environmental protection coefficient.

[0020] 2. After working for a period of time, this utility model can close two control valves to make the inside of the filter canister a sealed space. Then, the ultrasonic generator and ultrasonic vibrator are started. The ultrasonic vibrator is used to generate ultrasonic vibration inside the filter canister, which can effectively perform ultrasonic vibration cleaning of the filter element. The generated dust is discharged from the discharge port of the filter canister. The entire cleaning operation is convenient and quick, and can ensure that the filter canister maintains a high-efficiency filtration state for a long time. It is highly practical. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 2 This is a diagram of the internal structure of this utility model.

[0023] In the diagram: 1. Crystal growth furnace body; 2. Filter tank; 3. Inlet pipe; 4. Ultrasonic vibrator; 5. Ultrasonic generator; 6. First gas guide pipe; 7. Control valve; 8. Heat exchanger; 9. Second gas guide pipe; 10. Washing tank; 11. Extraction pipe; 12. Extraction pump; 13. Inner filter tank; 14. Filter element; 15. Connecting cavity; 16. Washing pipe. Detailed Implementation

[0024] The method of this utility model will be further described in detail below with reference to the accompanying drawings.

[0025] Reference Figure 1 A sapphire crystal growth furnace with multi-stage waste gas treatment includes a crystal growth furnace body 1. An inlet pipe 3 is fixedly connected to the waste gas outlet of the crystal growth furnace body 1. A filter tank 2 is fixedly installed at the outlet of the inlet pipe 3. A first guide pipe 6 is fixedly connected to the outlet of the filter tank 2. A heat exchanger 8 is fixedly installed at the outlet of the first guide pipe 6. A second guide pipe 9 is fixedly installed at the outlet of the heat exchanger 8. A scrubbing tank 10 is fixedly installed at the outlet of the second guide pipe 9. By sequentially connecting the filter tank 2, the heat exchanger 8, and the scrubbing tank 10 at the waste gas outlet of the crystal growth furnace, the discharged waste gas can be filtered, heat recovered, and scrubbed in sequence, effectively performing multi-stage treatment of the waste gas with high treatment efficiency and high environmental protection coefficient.

[0026] Reference Figure 1 , Figure 2An inner filter tank 13 is fixedly connected to the bottom surface of the filter tank 2. The outlet end of the air inlet pipe 3 communicates with the interior of the inner filter tank 13. A filter element 14 is installed inside the inner filter tank 13. The inlet end of the first air guide pipe 6 communicates with the interior of the filter tank 2. A control valve 7 is fixedly installed in both the air inlet pipe 3 and the first air guide pipe 6. A mounting groove is provided at the middle position of the upper end face of the filter tank 2, and an ultrasonic vibrator 4 is fixedly installed inside the mounting groove. A discharge port is provided at the middle position of the lower end face of the filter tank 2. An ultrasonic generator 5 is fixedly installed on the side surface of the filter tank 2. The ultrasonic generator 5 is electrically connected to the ultrasonic vibrator 4. During filtration, the waste can be discharged through the air inlet pipe 3. The exhaust gas is delivered to the interior of the inner filter tank 13, where the filter element 14 filters it. The filtered exhaust gas then enters the interior of the filter tank 2 and is discharged through the first air guide pipe 6. This process removes dust from the exhaust gas. After a period of filtration, the two control valves 7 are closed, creating a sealed space inside the filter tank 2. The ultrasonic generator 5 and ultrasonic vibrator 4 are then activated. The ultrasonic vibrator 4 generates ultrasonic vibrations inside the filter tank 2, effectively cleaning the filter element 14 with ultrasonic vibration. The generated dust is discharged from the discharge port of the filter tank 2. The entire cleaning process is convenient and quick, ensuring that the filter tank 2 maintains a high-efficiency filtration state for a long time.

[0027] Reference Figure 1 , Figure 2 The washing tank 10 has a connecting cavity 15 at its upper end. Multiple washing pipes 16 are fixedly connected to the lower end of the connecting cavity 15. The outlet of the second air guide pipe 9 is connected to the inside of the connecting cavity 15. The washing tank 10 contains washing liquid, and the outlet of the washing pipes 16 is placed in the washing liquid. An exhaust pipe 11 is fixedly connected to the upper end of the washing tank 10. An exhaust pump 12 is fixedly installed in the exhaust pipe 11. A drain pipe is fixedly connected to the lower end of the washing tank 10, and a valve is installed in the drain pipe. The exhaust pump 12 can be activated to allow the exhaust gas after heat exchange to be introduced into the connecting cavity 15 through the second air guide pipe 9, and then transported to the inside of the washing tank 10 through the multiple washing pipes 16, so that the exhaust gas can fully contact the washing liquid. At this time, the washing liquid can be used to wash the exhaust gas. The washed exhaust gas is discharged from the exhaust pipe 11. After a period of washing, the washing solution can be replaced using the drain pipe at the bottom, which is convenient and quick.

[0028] Working Principle: In operation, the sapphire crystal growth furnace is first installed in the designated location. Then, the furnace body 1 is used for processing. Next, the exhaust pump 12 is started, enabling the entire waste gas treatment structure to effectively extract waste gas. The waste gas is then transported to the inner filter tank 13 via the inlet pipe 3. The filter element 14 then filters the waste gas. The filtered waste gas enters the filter tank 2 and is discharged through the first air guide pipe 6. This process filters dust from the waste gas. After a period of filtration, the two control valves 7 are closed, creating a sealed space inside the filter tank 2. Then, the ultrasonic generator 5 and ultrasonic vibrator 4 are activated. The ultrasonic vibrator 4 generates ultrasonic vibrations inside the filter tank 2, thereby achieving... The filter element 14 is effectively cleaned by ultrasonic vibration. The generated dust is discharged from the discharge port of the filter tank 2. The entire cleaning operation is convenient and quick, ensuring that the filter tank 2 maintains a high-efficiency filtration state for a long time. The filtered exhaust gas enters the heat exchanger 8 through the first air guide pipe 6. At this time, the heat exchanger 8 is used to recover the heat energy in the exhaust gas. The exhaust gas after heat recovery is introduced into the connecting cavity 15 through the second air guide pipe 9, and then transported to the washing tank 10 through multiple washing pipes 16, so that the exhaust gas and washing liquid can be fully contacted. At this time, the washing liquid can be used to wash the exhaust gas. The washed exhaust gas is discharged from the exhaust pipe 11. After a period of washing, the washing solution can be replaced through the drain pipe at the bottom, which is convenient and quick.

[0029] The specific real-time examples described herein are preferred real-time examples of this utility model and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape, and principle of this utility model should be included within the scope of protection of this utility model.

Claims

1. A sapphire crystal growth furnace with multi-stage waste gas treatment, comprising a crystal growth furnace body (1), characterized in that: The exhaust gas outlet of the crystal growth furnace body (1) is fixedly connected to an air inlet pipe (3), the exhaust gas outlet of the air inlet pipe (3) is fixedly installed with a filter tank (2), the exhaust gas outlet of the filter tank (2) is fixedly connected to a first air guide pipe (6), the exhaust gas outlet of the first air guide pipe (6) is fixedly installed with a heat exchanger (8), the exhaust gas outlet of the heat exchanger (8) is fixedly installed with a second air guide pipe (9), and the exhaust gas outlet of the second air guide pipe (9) is fixedly installed with a washing tank (10).

2. The sapphire crystal growth furnace with multi-stage waste gas treatment according to claim 1, characterized in that: An inner filter tank (13) is fixedly connected to the bottom surface of the filter tank (2). The outlet end of the air inlet pipe (3) is connected to the inside of the inner filter tank (13). A filter element (14) is installed inside the inner filter tank (13). The inlet end of the first air guide pipe (6) is connected to the inside of the filter tank (2).

3. A sapphire crystal growth furnace with multi-stage waste gas treatment according to claim 2, characterized in that: A control valve (7) is fixedly installed in both the air inlet pipe (3) and the first air guide pipe (6). An installation groove is provided at the middle position of the upper end face of the filter tank (2), and an ultrasonic vibrator (4) is fixedly installed inside the installation groove. A discharge port is provided at the middle position of the lower end face of the filter tank (2). An ultrasonic generator (5) is fixedly installed on the side surface of the filter tank (2), and the ultrasonic generator (5) is electrically connected to the ultrasonic vibrator (4).

4. A sapphire crystal growth furnace with multi-stage waste gas treatment according to claim 1, characterized in that: The washing tank (10) has a connecting cavity (15) at its upper interior. Multiple washing pipes (16) are fixedly connected to the lower end of the connecting cavity (15). The air outlet of the second air guide pipe (9) is connected to the interior of the connecting cavity (15). The washing tank (10) is filled with washing liquid. The air outlet of the washing pipe (16) is placed in the washing liquid.

5. A sapphire crystal growth furnace with multi-stage waste gas treatment according to claim 4, characterized in that: An air extraction pipe (11) is fixedly connected to the upper surface of the washing tank (10), and an air extraction pump (12) is fixedly installed in the pipe of the air extraction pipe (11).

6. A sapphire crystal growth furnace with multi-stage waste gas treatment according to claim 4, characterized in that: A drain pipe is fixedly connected to the lower end face of the washing tank (10), and a valve is installed in the drain pipe.

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