Multi-bracket detection mechanism of die bonder
By combining lifting, gripping, and sensing devices, and utilizing ultrasonic detection and pressure sensors, the accuracy problem of bracket adhesion detection is solved, thereby improving the reliability and efficiency of the semiconductor chip packaging process.
Patent Information
- Application Number
- CN202423286270.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2034-12-31
AI Technical Summary
Existing technologies are insufficient to effectively detect the adhesion of multiple supports during semiconductor chip packaging, which can lead to damage to the supports during transport. Furthermore, ultrasonic testing is susceptible to misjudgment due to other factors.
The system employs a lifting device, a gripping device, and a sensing device. It utilizes an ultrasonic detector and a pressure sensor to determine whether the support is stuck by detecting changes in the characteristics of the reflected waves during the suction process, thus reducing false judgments.
It enables accurate detection of stent adhesion, reduces stent damage caused by misjudgment, and improves the reliability and efficiency of the production process.
Smart Images
Figure CN223926350U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor chip packaging production especially relates to a multi-support detection mechanism of chip mounter. BACKGROUND
[0002] With the development of technology, the field of semiconductor chip packaging and flip chip production puts forward higher and higher requirements for production. More and more chip packaging adopts suction feeding, because the support is stacked feeding, it is inevitable that multiple supports are sucked at a time. If it cannot be found in time, it is easy to cause damage to the support during the conveying process.
[0003] Now most of the supports are about 0.1mm thick, it is difficult to directly find out whether the support adhesion occurs by the naked eye of the staff, when using an ultrasonic detector to detect the stacked supports, it is easy to be affected by other factors to judge, so a multi-support detection mechanism is needed to provide an effective basis for judging whether the stacked supports are adhesion. UTILITY MODEL CONTENT
[0004] The utility model aims at solving the shortcomings in the prior art and provides a multi-support detection mechanism of chip mounter.
[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a multi-support detection mechanism of chip mounter includes lifting device, grabbing device and inductive device, the lifting device includes drive device, inductive switch and connecting rod, the drive device is the screw rod transmission equipment special for semiconductor chip chip mounter, the drive device is vertically arranged, one end of the connecting rod is fixedly connected with the transmission nut of the drive device, and the other end is fixedly connected with the grabbing device; the grabbing device includes suction nozzle and fixed rod, the suction nozzle is special for semiconductor chip, the inductive switch includes start sensor and close sensor, the start sensor and the close sensor are both pressure sensors, the start sensor is arranged at the lower end of the suction nozzle, the close sensor is arranged at the upper end of the transmission nut, and the inductive switch is connected with the inductive device through wires; the inductive device includes connecting frame, detection equipment and display equipment, the detection equipment is an ultrasonic detector, the detection equipment is arranged at the side of the stacked support, the display equipment is a matched ultrasonic detection display, the switch of the detection equipment is connected with the inductive switch, and the both ends of the connecting frame are fixedly connected with the detection equipment and the grabbing device respectively.
[0006] Preferably, one end of the connecting rod is fixedly connected with the middle part of the fixed rod, a plurality of suction nozzles are arranged, the suction nozzles are fixedly connected at both ends of the middle part of the fixed rod, only one suction nozzle near the lower end of the middle part of the fixed rod is provided with the start sensor, and the side end of the fixed rod is fixedly connected with the connecting frame.
[0007] Preferably, the display device is provided with a dedicated power supply which is not affected by the detection device.
[0008] Preferably, the suction nozzles are of the same model and the lower ends of the suction nozzles are on the same horizontal line.
[0009] Preferably, the connecting rod is L-shaped, and one end after the bend is fixedly connected with the grabbing device, so that collision between the lifting device and the support adsorbed by the suction nozzle is avoided.
[0010] Compared with the prior art, the utility model has the beneficial effects that: the inductive switch works by the transmission of the driving device, the inductive switch controls the switch of the detection device, the detection data of the process of the support stacking and being sucked can be obtained by the inductive device including the ultrasonic detector, when the supports are adhered, the ultrasonic waves emitted by the ultrasonic detector are blocked and absorbed by the adhering objects, and the density caused by the adhering objects is uneven, thereby affecting the moving path and speed of the ultrasonic waves, the amplitude of the reflected waves is reduced by the ultrasonic waves being blocked and absorbed, the time interval of the reflected waves is also irregular by the change of the moving path and speed caused by the uneven density, and whether the same adhering characteristics exist by comparing the detection data when starting and before closing can judge whether the supports are adhered and can reduce the misjudgment caused by other factors. BRIEF DESCRIPTION OF DRAWINGS
[0011] Figure 1 It is a front view of the multi-support detection mechanism of the film loading machine of the utility model;
[0012] Figure 2 It is a left view of the multi-support detection mechanism of the film loading machine of the utility model;
[0013] Figure 3 It is a circuit connection schematic diagram of the multi-support detection mechanism of the film loading machine of the utility model. DETAILED DESCRIPTION
[0014] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application, such as Figure 1 and Figure 2As shown in the figure, a kind of multi-support detection mechanism of chip mounter includes lifting device 1, grabbing device 2 and sensing device 3, the lifting device 1 includes driving device 110, sensing switch 120 and connecting rod 130, the driving device 110 is the screw rod transmission equipment special for semiconductor chip mounter, the driving device 110 is vertically arranged, one end of the connecting rod 130 is fixedly connected with the transmission nut 112 of the driving device 110, and the other end of the connecting rod 130 is fixedly connected with the grabbing device 2;The grabbing device 2 includes suction nozzle 210 and fixed rod 220, the middle part of the fixed rod 220 is fixedly connected with one end of the connecting rod 130, the suction nozzle 210 is special for semiconductor chip and is provided with multiple, the suction nozzle 210 is uniformly fixedly connected at the both ends of the middle part of fixed rod 220, and such design makes more suction points, so that the grabbing of support is more stable.
[0015] The sensing switch 120 includes start sensor 121 and close sensor 122, the start sensor 121 and the close sensor 122 are all pressure sensors, the start sensor 121 is arranged at the lower end of the suction nozzle 210, only the lower end of one suction nozzle 210 close to the middle part of the fixed rod 220 is provided with the start sensor 121 in multiple suction nozzles 210, the close sensor 122 is arranged on the upper end of the transmission nut 112, and the sensing switch 120 is connected with the switch of sensing device 3 through wire. The sensing device 3 includes connecting frame 310, detection equipment 320 and display equipment 330, the detection equipment 320 is ultrasonic detector, the detection equipment 320 is arranged at the side of stacked support, the display equipment 330 is matched ultrasonic detection display, the switch of the detection equipment 320 is connected with the sensing switch 120, and the both ends of the connecting frame 310 are fixedly connected with the detection equipment 320 and the side end of the fixed rod 220 respectively.
[0016] As shown in the figure, Figure 3 The start sensor 121 is connected with the start port of the detection equipment 320 through wire, the close sensor 122 is connected with the close port of the detection equipment 320 through wire, so that the start sensor 121 and the close sensor 122 control ultrasonic detection work and stop of the detection equipment 320 respectively, and the display equipment 330 is connected with the detection equipment 320 through special wire.
[0017] In use, the lifting device 1 starts to control the transmission nut 112 to move downwards, the transmission nut 112 stops moving when the suction nozzle 210 contacts the top end of the support, the suction nozzle 210 starts to suck the uppermost support, which is the prior art, and the utility model is not innovated, so it is not repeated, when the suction nozzle 210 contacts the support, the starting sensor 121 at the lower end of the suction nozzle 210 is pressed, because the starting sensor 121 is a pressure sensor, so the starting sensor 121 converts the pressure into an electrical signal and transmits it to the detection equipment 320, after receiving the signal, the detection equipment 320 starts ultrasonic detection on the stacked support and transmits initial detection data to the display equipment 330, the initial detection data is displayed as a reflected wave image on the display equipment 330, which is the prior art, and the utility model is not innovated, so it is not repeated.
[0018] After the suction nozzle 210 completes the suction, the lifting device 1 starts to control the transmission nut 112 to move upwards again, which is the prior art, and the utility model is innovated, so it is not repeated, during the movement, the detection equipment 320 is always working and transmitting comparative detection data, during this process, the support is sucked by the suction nozzle 210, and the detection object of the detection equipment 320 is always the sucked support, so the comparative detection data transmitted by the detection equipment 320 does not change, and the comparative detection data is displayed as a reflected wave image on the display equipment 330.
[0019] When the transmission nut 112 moves to the uppermost end of the transmission rod 111, the closing sensor 122 is pressed, because the closing sensor 122 is a pressure sensor, so the closing sensor 122 converts the pressure into an electrical signal and transmits it to the closing end of the detection equipment 320, and the detection equipment 320 stops the ultrasonic detection work after receiving the signal.
[0020] When the support is adhered, the ultrasonic waves emitted by the ultrasonic detector are blocked and absorbed by the adhering object, and the density caused by the adhering object is not uniform, thereby affecting the moving path and speed of the ultrasonic waves, the blocked and absorbed ultrasonic waves will cause the amplitude of the reflected wave to decrease, and the change in the moving path and speed caused by the non-uniform density will cause the time interval of the reflected wave to become irregular, and this reflected wave image is the adhesion characteristic, the staff observes whether the same adhesion characteristic exists in the same position of the two reflected wave images through the comparative detection data and the initial detection data, if the same adhesion characteristic appears in the same position, it means that the adhered support moves with the suction nozzle 210, at this time, the staff should immediately stop the mechanical operation, if there is no same adhesion characteristic or no adhesion characteristic, it means that there is no adhesion, so that whether the support is adhered or not can be judged, and the misjudgment caused by other factors can be reduced
[0021] The above descriptions are only the preferred embodiments of the present application, and are not intended to limit the present application. The present application can have various modifications and changes for those skilled in the art. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A multi-support detection mechanism of a film loader comprising a lifting device, a grabbing device and a sensing device, characterized in that: The lifting device comprises a driving device, an inductive switch and a connecting rod, the driving device is a screw rod transmission equipment special for semiconductor chip mounter, the driving device is vertically arranged, one end of the connecting rod is fixedly connected with a transmission nut of the driving device, and the other end is fixedly connected with the grabbing device, the grabbing device comprises a suction nozzle and a fixing rod, the suction nozzle is special for semiconductor chip, the inductive switch comprises a starting sensor and a closing sensor, the starting sensor and the closing sensor are both pressure sensors, the starting sensor is arranged at the lower end of the suction nozzle, the closing sensor is arranged at the upper end of the transmission nut, and the inductive switch is connected with an inductive device through wires; the inductive device comprises a connecting frame, a detection equipment and a display equipment, the detection equipment is an ultrasonic detector, the detection equipment is arranged at the side of the stacking support, the display equipment is a matched ultrasonic detection display, the ultrasonic detection switch of the detection equipment is connected with the inductive switch, and the connecting frame is fixedly connected with the detection equipment and the grabbing device at both ends.
2. The sheet loading machine multi-support detection mechanism according to claim 1, wherein: The middle part of the fixing rod is fixedly connected with one end of the connecting rod, a plurality of suction nozzles are arranged, the suction nozzles are fixedly connected at both ends of the middle part of the fixing rod, only the lower end of one suction nozzle near the middle part of the fixing rod is provided with the starting sensor, and the side end of the fixing rod is fixedly connected with the connecting frame.
3. The sheet loading machine multi-support detection mechanism according to claim 1, wherein: The suction nozzles are all of the same model, and the lowermost ends of the suction nozzles are on the same horizontal line.
4. The sheet loading machine multi-support detection mechanism according to claim 1, wherein: The display equipment is provided with a special power supply and is not affected by the detection equipment.
5. The sheet loading machine multi-support detection mechanism according to claim 1, wherein: The connecting rod is L-shaped, and one end after the bend is fixedly connected with the grabbing device.