Temperature control system

Abstract

The utility model relates to the technical field of test equipment, and particularly discloses a temperature control system which is characterized in that a cavity is formed in a rack; an inlet of the liquid inlet pipe is connected with temperature control fluid supply equipment, and an outlet of the liquid inlet pipe is communicated with the cavity; the control valve is arranged on the liquid inlet pipe, and the opening degree is controlled according to the upstream pressure of the control valve, so that the flow of the temperature control fluid entering the cavity is constant, and the air temperature in the cavity is reduced; the gas-liquid separator is connected to the liquid inlet pipe in series, and the gas-liquid separator is located on the downstream of the control valve in the flowing direction of the temperature control fluid; the heating assembly comprises a heater, a temperature detection piece and a controller, the heater is used for generating heat to increase the air temperature in the cavity, the temperature detection piece is used for detecting the air temperature in the cavity and sending out a temperature signal, and the controller is used for receiving the temperature signal and controlling the heat generation amount of the heater. According to the arrangement, the service life of the control valve is prolonged, the working efficiency is guaranteed, and the stability of a temperature control system is improved.

Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, and in particular to a temperature control system. Background Technology

[0002] Test and sorting equipment can improve the testing efficiency of semiconductors. The temperature control system of the test and sorting equipment controls the temperature of the gas in the preheating chamber, testing chamber, and reheating chamber through liquid nitrogen and heater control. The test and sorting equipment on the market currently uses dual-channel temperature control, that is, the temperature controller controls the heater to heat while simultaneously controlling the solenoid valve on the liquid nitrogen path to control cooling.

[0003] The existing solution has three main problems: First, because the cooling capacity is controlled by the frequency of solenoid valve operation, the solenoid valves operate at high frequencies, requiring frequent replacement and increasing costs. Second, when liquid nitrogen enters multiple branch pipelines from the main pipeline, insulation errors in the pipelines result in a gas-liquid mixture, and the amount of this mixture fluctuates. This leads to significant differences in the cooling capacity of the branch pipelines, causing the solenoid valves in branches with lower cooling capacity to operate at higher frequencies, while those in branches with higher cooling capacity operate at lower frequencies. This results in significant differences in the lifespan of different solenoid valves within the same unit, requiring frequent replacement of some valves and impacting equipment efficiency. Third, the temperature controller output includes both heating and cooling variables, increasing the complexity of the temperature control system and reducing its stability.

[0004] Therefore, it is urgent to study a temperature control system to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a temperature control system to solve the problems of high cost and reduced work efficiency caused by replacing solenoid valves in the prior art, and low system stability caused by complex control.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Temperature control system, including:

[0008] The frame has internal cavities;

[0009] The inlet pipe is connected to a temperature-controlled fluid supply device, and the outlet pipe is connected to the cavity.

[0010] A control valve is provided on the inlet pipe, and the opening degree is controlled according to the pressure upstream of the control valve so as to keep the flow rate of the temperature-controlled fluid entering the cavity constant.

[0011] A gas-liquid separator is connected in series with the inlet pipe and is located downstream of the control valve along the flow direction of the temperature-controlled fluid. After passing through the gas-liquid separator, the gaseous temperature-controlled fluid enters the cavity.

[0012] A heating assembly includes a heater, a temperature sensor, and a controller. The heater generates heat to raise the air temperature inside the cavity. The temperature sensor detects the air temperature inside the cavity and sends a temperature signal. The controller receives the temperature signal and controls the heat generation of the heater.

[0013] As an optional technical solution for a temperature control system, the control valve is a proportional valve, which can control its opening degree according to the upstream pressure to keep the flow rate of the temperature control fluid entering the cavity constant.

[0014] As an optional technical solution for the temperature control system, the temperature control system also includes a pressure gauge, which is installed on the inlet pipe along the flow direction of the temperature-controlled fluid. The pressure gauge is located upstream of the proportional valve and is communicatively connected to the proportional valve.

[0015] As an optional technical solution for a temperature control system, the temperature control system includes several chambers; the liquid inlet pipe includes a main pipeline and several branch pipelines, the main pipeline is connected to the inlet of the gas-liquid separator, the several branch pipelines are connected one-to-one with several outlets of the gas-liquid separator, and are connected one-to-one with several chambers.

[0016] As an optional technical solution for a temperature control system, the temperature control system comprises several cavities: an upper preheating cavity, a lower preheating cavity, an upper test cavity, a lower test cavity, an upper reheating cavity, and a lower reheating cavity. The upper preheating cavity is located above the lower preheating cavity, and the two are connected. The upper test cavity is located above the lower test cavity, and the two are connected. The upper reheating cavity is located above the lower reheating cavity, and the two are connected.

[0017] As an optional technical solution for a temperature control system, the upper part of the preheating chamber, the upper part of the test chamber, and the upper part of the return chamber are located at the same height and are connected in sequence, and the lower part of the preheating chamber, the lower part of the test chamber, and the lower part of the return chamber are located at the same height and are connected in sequence.

[0018] As an optional technical solution for a temperature control system, the temperature control system is provided with a number of heating components, with each cavity corresponding to one heating component; each heating component is located at the top or bottom of each cavity.

[0019] As an optional technical solution for the temperature control system, the heating component also includes a fan, which is located at the top or bottom of each cavity.

[0020] As an optional technical solution for temperature control systems, each cavity is equipped with two fans arranged opposite to each other.

[0021] As an optional technical solution for the temperature control system, the temperature control system also includes an insulation sleeve, which is fitted around the outer periphery of the liquid inlet pipe.

[0022] This utility model has at least the following beneficial effects:

[0023] This invention provides a temperature control system, which includes a frame, an inlet pipe, a control valve, a heating assembly, and a gas-liquid separator. The frame has an internal cavity; the inlet of the inlet pipe is connected to a temperature-controlled fluid supply device, and the outlet of the inlet pipe is connected to the cavity; the control valve is located on the inlet pipe, and its opening is controlled according to the pressure upstream of the control valve to maintain a constant flow rate of the temperature-controlled fluid entering the cavity and reduce the air temperature inside the cavity; the gas-liquid separator is connected in series with the inlet pipe, located downstream of the control valve along the flow direction of the temperature-controlled fluid; after passing through the gas-liquid separator, the gaseous temperature-controlled fluid enters the cavity; the heating assembly includes a heater, a temperature sensor, and a controller. The heater generates heat to raise the air temperature inside the cavity, the temperature sensor detects the air temperature inside the cavity and sends a temperature signal, and the controller receives the temperature signal and controls the heat generation of the heater. Because the flow rate of the temperature-controlled fluid flowing into the cavity is constant and the liquid distribution is uniform, the control valve does not need to be opened and closed frequently, thereby improving the service life of the control valve, reducing the replacement frequency, reducing costs, and ensuring working efficiency. In addition, since the controller only needs to control the heater and does not need to control the flow rate of the temperature-controlled fluid, the dual-channel control is adjusted to a single-channel control, which simplifies the temperature control system and improves the stability of use. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the temperature control system in an embodiment of the present invention;

[0026] Figure 2 This is a partial structural diagram of the temperature control system at the heating component in an embodiment of the present invention.

[0027] In the picture:

[0028] 100. Frame; 110. Upper part of preheating chamber; 120. Lower part of preheating chamber; 121. Mounting hole; 130. Upper part of test chamber; 140. Lower part of test chamber; 150. Upper part of reheating chamber; 160. Lower part of reheating chamber;

[0029] 200. Inlet pipe; 210. Main pipe; 220. Branch pipe; 230. Insulation jacket;

[0030] 300. Control valve; 310. Pressure gauge;

[0031] 400. Heating component; 410. Heater; 420. Fan; 421. Drive component; 430. Temperature detection component;

[0032] 500. Gas-liquid separator. Detailed Implementation

[0033] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0034] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0035] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0036] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0037] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​not using relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0038] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0039] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0040] like Figure 1 and Figure 2As shown, this embodiment provides a temperature control system, which includes a frame 100, a liquid inlet pipe 200, a control valve 300, a heating component 400, and a gas-liquid separator 500. The frame 100 contains a test chamber. The inlet of the liquid inlet pipe 200 is connected to a temperature-controlled fluid supply device, and the outlet of the liquid inlet pipe 200 is connected to the test chamber. A control valve 300 is located on the liquid inlet pipe 200, and its opening is controlled according to the pressure upstream of the control valve 300 to keep the flow rate of the temperature-controlled fluid entering the test chamber constant. A gas-liquid separator 500 is connected in series with the liquid inlet pipe 200 and is located downstream of the control valve 300 along the flow direction of the temperature-controlled fluid. After passing through the gas-liquid separator 500, the gaseous temperature-controlled fluid enters the chamber. The heating assembly 400 includes a heater 410, a temperature sensor 430, and a controller. The heater 410 generates heat to raise the air temperature inside the test chamber. The temperature sensor 430 detects the air temperature inside the chamber and sends a temperature signal. The controller receives the temperature signal and controls the heat generation of the heater 410. Specifically, when the temperature is high, the controller controls the heater 410 to reduce the heat generation, and when the temperature is low, the controller controls the heater 410 to increase the heat generation. In some embodiments, both the heater 410 and the temperature sensing element 430 are disposed inside the cavity. It should be noted that the heater 410 and the controller are communicatively connected.

[0041] With the help of the above mechanism, since the flow rate of the temperature-controlled fluid flowing into the cavity is constant and the liquid is evenly distributed, the control valve 300 does not need to be opened and closed frequently, thereby improving the service life of the control valve 300, reducing the replacement frequency, reducing costs, and ensuring working efficiency. In addition, since the controller only needs to control the heater 410 and does not need to control the flow rate of the temperature-controlled fluid, the dual-channel control is adjusted to a single-channel control, which simplifies the temperature control system and improves the stability of use.

[0042] In some embodiments, the control valve 300 is a proportional valve, which controls its opening degree according to the upstream pressure to maintain a constant flow rate of the temperature-controlled fluid entering the chamber. Preferably, this embodiment uses a cryogenic proportional valve, which can reduce the air temperature inside the test chamber. Proportional valves are low-cost and highly reliable. In other embodiments, the control valve 300 can be a servo valve, a variable frequency pump, or a regulating valve, etc.

[0043] To ensure the control accuracy of the proportional valve, in some embodiments, the temperature control system further includes a pressure gauge 310. The pressure gauge 310 is located on the inlet pipe 200, upstream of the proportional valve along the flow direction of the temperature-controlled fluid, and is communicatively connected to the proportional valve. The proportional valve can adjust its opening in real time according to the reading of the pressure gauge 310 to ensure that the flow rate of the temperature-controlled fluid passing through the proportional valve remains constant. For example, when the reading of the pressure gauge 310 is high, the opening of the proportional valve decreases; when the reading of the pressure gauge 310 is low, the opening of the proportional valve increases.

[0044] In some embodiments, the temperature control system includes several chambers; the inlet pipe 200 includes a main pipe 210 and several branch pipes 220. The main pipe 210 is connected to the inlet of the gas-liquid separator 500, and the several branch pipes 220 are connected one-to-one with several outlets of the gas-liquid separator 500 and communicate one-to-one with several chambers. This arrangement ensures that the temperature control fluid entering the several branch pipes 220 is in a gaseous state, thereby simultaneously cooling the several chambers. In some embodiments, the temperature control fluid can be liquid nitrogen, which partially vaporizes after flowing through the main pipe 210 to form a gas-liquid mixture, and then flows into the branch pipes 220 in gaseous form after passing through the gas-liquid separator 500. The gas-liquid separator 500 can be a Dewar flask.

[0045] Furthermore, the temperature control system also includes an insulation sleeve 230, which is fitted around the outer periphery of the liquid inlet pipe 200. The branch pipes 220 and the main pipe 210 are both fitted with insulation sleeves 230. The insulation sleeve 230 is made of one of the following materials: foam plastic, rubber-plastic sponge, rock wool, or polyurethane foam.

[0046] Specifically, the temperature control system comprises several chambers: an upper preheating chamber 110, a lower preheating chamber 120, an upper testing chamber 130, a lower testing chamber 140, an upper reheating chamber 150, and a lower reheating chamber 160. The upper preheating chamber 110 is located above the lower preheating chamber 120 and the two are connected. The upper testing chamber 130 is located above the lower testing chamber 140 and the two are connected. The upper reheating chamber 150 is located above the lower reheating chamber 160 and the two are connected. The lower preheating chamber 120 is provided with a mounting hole 121, through which a branch pipe 220 passes and enters the lower preheating chamber 120.

[0047] To improve testing efficiency, the upper part 110 of the preheating chamber, the upper part 130 of the testing chamber, and the upper part 150 of the reheating chamber are located at the same height and connected sequentially. Similarly, the lower part 120 of the preheating chamber, the lower part 140 of the testing chamber, and the lower part 160 of the reheating chamber are located at the same height and connected sequentially. With this structure, the test piece can first enter the upper part 110 and / or the lower part 120 of the preheating chamber for preheating, then enter the upper part 130 and / or the lower part 140 of the testing chamber for testing, and finally enter the upper part 150 and / or the lower part 160 of the reheating chamber for reheating. A door structure is provided between the upper part 130 and / or the lower part 140 of the testing chamber and the upper part 150 and / or the lower part 160 of the reheating chamber to prevent the temperature of the upper part 150 and / or the lower part 160 of the reheating chamber from interfering with the upper part 130 and / or the lower part 140 of the testing chamber, thereby affecting the testing results. To ensure precise temperature control of each chamber, in some embodiments, the temperature control system includes several heating components 400, with one heating component 400 corresponding to each chamber; each heating component 400 is located at the top or bottom of each chamber. Specifically, the heater 410 in the heating component 400 corresponding to the upper part 110 of the preheating chamber is located at the top of the upper part 110, and the heater 410 in the heating component 400 corresponding to the lower part 120 of the preheating chamber is located at the bottom of the lower part 120. With several heating components 400 arranged vertically at intervals, during the temperature control process, the temperature uniformity inside the entire interconnected upper part 110 and lower part 120 of the preheating chamber is better, and the gaseous temperature control fluid forms a circulation between the upper part 110 and lower part 120 of the preheating chamber, resulting in higher temperature control efficiency. In other embodiments, similarly, the heater 410 in the heating assembly 400 corresponding to the upper part 130 of the test chamber is located at the top of the upper part 130 of the test chamber, and the heater 410 in the heating assembly 400 corresponding to the lower part 140 of the test chamber is located at the bottom of the lower part 140 of the test chamber. The heater 410 in the heating assembly 400 corresponding to the upper part 150 of the reheating chamber is located at the top of the upper part 150 of the reheating chamber, and the heater 410 in the heating assembly 400 corresponding to the lower part 160 of the reheating chamber is located at the bottom of the lower part 160 of the reheating chamber.

[0048] Furthermore, the heating assembly 400 also includes a fan 420. The fan 420 in the heating assembly 400 corresponding to the upper part 110 of the preheating chamber is located at the top of the upper part 110 of the preheating chamber and blows air towards the lower part 120 of the preheating chamber; the fan 420 in the heating assembly 400 corresponding to the lower part 120 of the preheating chamber is located at the bottom of the lower part 120 of the preheating chamber and blows air towards the upper part 110 of the preheating chamber. The arrangement of the fan 420 enables rapid airflow circulation, further improving temperature control efficiency and the uniformity of temperature inside the chamber. At least one fan 420 is provided in each of the upper part 130 of the test chamber, the lower part 140 of the test chamber, the upper part 150 of the reheating chamber, and the lower part 160 of the reheating chamber. The blowing direction of each fan 420 is set with reference to the fan 420 in the upper part 110 of the preheating chamber or the fan 420 in the lower part 120 of the preheating chamber. For example, two fans 420 are provided in each of the upper part 130 of the test chamber, the lower part 140 of the test chamber, the upper part 150 of the reheat chamber, and the lower part 160 of the reheat chamber to increase the flow of the temperature control fluid and form convection, thereby improving the uniformity of temperature control of the temperature control fluid inside the chamber.

[0049] Specifically, the fan 420 includes a drive component 421 and an impeller. The drive component 421 is fixed outside the cavity, and the impeller is connected to the output end of the drive component 421 and located inside the cavity. This arrangement constrains the airflow direction, improves the gas flow path, and increases the heat exchange efficiency between chambers at different temperatures, thereby further improving temperature control efficiency. Specifically, the drive component 421 corresponding to the upper part 110 of the preheating chamber is located outside the upper part 110 of the preheating chamber; the drive component 421 corresponding to the lower part 120 of the preheating chamber is located outside the lower part 120 of the preheating chamber. This arrangement helps to reduce the occupancy of the internal volume of each chamber, ensuring testing efficiency; at the same time, the drive component 421 is in a low-temperature environment, which helps to extend its service life.

[0050] In some embodiments, the air inlet of the fan 420 faces the heater 410. This inlet orientation allows for the rapid transfer of high-temperature gas, preventing it from accumulating near the heater 410 and causing excessively high local temperatures.

[0051] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. Temperature control system, characterized in that The application relates to a temperature control system, comprising: a rack (100) internally provided with a cavity; a liquid inlet pipe (200), an inlet of the liquid inlet pipe (200) being connected with a temperature control fluid supply device, and an outlet of the liquid inlet pipe (200) being communicated with the cavity; a control valve (300) arranged on the liquid inlet pipe (200) and capable of controlling the opening degree according to the pressure upstream of the control valve (300) so as to keep the temperature control fluid flow into the cavity constant; a gas-liquid separator (500) connected in series with the liquid inlet pipe (200) along the flow direction of the temperature control fluid, the gas-liquid separator (500) being located downstream of the control valve (300), and gaseous temperature control fluid entering the cavity after passing through the gas-liquid separator (500); a temperature rising assembly (400) comprising a heater (410) for generating heat to raise the air temperature in the cavity, a temperature detecting member (430) for detecting the air temperature of the cavity and sending a temperature signal, and a controller for receiving the temperature signal and controlling the heat generation of the heater (410).

2. The temperature control system of claim 1, wherein, The control valve (300) is a proportional valve capable of controlling the opening degree according to the pressure upstream so as to keep the temperature control fluid flow into the cavity constant.

3. The temperature control system of claim 2, wherein, The temperature control system further comprises a pressure gauge (310) arranged on the liquid inlet pipe (200) along the flow direction of the temperature control fluid, the pressure gauge (310) being located upstream of the proportional valve and being in communication connection with the proportional valve.

4. The temperature control system of claim 1, wherein, The temperature control system comprises a plurality of cavities; the liquid inlet pipe (200) comprises a main pipe (210) and a plurality of branch pipes (220), the main pipe (210) being connected with the inlet of the gas-liquid separator (500), and the plurality of branch pipes (220) being connected with a plurality of outlets of the gas-liquid separator (500) one by one and communicated with a plurality of cavities one by one.

5. The temperature control system of claim 4, wherein, The plurality of cavities of the temperature control system are a pre-warming cavity upper portion (110), a pre-warming cavity lower portion (120), a test cavity upper portion (130), a test cavity lower portion (140), a post-warming cavity upper portion (150) and a post-warming cavity lower portion (160), the pre-warming cavity upper portion (110) being located on the upper side of the pre-warming cavity lower portion (120) and being communicated with the pre-warming cavity lower portion (120); the test cavity upper portion (130) being located on the upper side of the test cavity lower portion (140) and being communicated with the test cavity lower portion (140); and the post-warming cavity upper portion (150) being located on the upper side of the post-warming cavity lower portion (160) and being communicated with the post-warming cavity lower portion (160).

6. The temperature control system of claim 5, wherein, The pre-warming cavity upper portion (110), the test cavity upper portion (130) and the post-warming cavity upper portion (150) are located at the same height and are connected in sequence, and the pre-warming cavity lower portion (120), the test cavity lower portion (140) and the post-warming cavity lower portion (160) are located at the same height and are connected in sequence.

7. The temperature control system of claim 4, wherein, The temperature control system is provided with a plurality of temperature raising assemblies (400), and each cavity is provided with a temperature raising assembly (400); each temperature raising assembly (400) is arranged at the top or bottom of each cavity.

8. The temperature control system of claim 7, wherein, The temperature raising assembly (400) further comprises a fan (420), and the fan (420) is arranged at the top or bottom of each cavity.

9. The temperature control system of claim 8, wherein, Two fans (420) are arranged in each cavity in a manner of being opposite to each other.

10. The temperature control system of any of claims 1-9, wherein, The temperature control system further comprises a heat preservation sleeve (230), and the heat preservation sleeve (230) is sleeved on the outer periphery of the liquid inlet pipe (200).

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