Efficient dust removal device for semiconductor clean workshop construction

Abstract

When the efficient dust removal device for semiconductor clean workshop construction is used, dust-containing air is pumped into the dust removal box through the dust removal pump via the air inlet, airflow flows from bottom to top and is filtered and dedusted through the filter screen plate, and finally clean air is discharged through the air outlet. Air sucked in through an air inlet can apply force to a rotating plate, so that a rotating shaft horizontally rotates anticlockwise, a half gear is driven to horizontally rotate anticlockwise, a rack is made to move backwards, a pushing piece is driven to move backwards, a stress plate is pushed to rotate backwards and downwards, an elastic piece is compressed, and a knocking plate is driven to rotate forwards and downwards; and the stress plate rotates forwards and upwards under the elastic action of the elastic piece, pushes the pushing piece and the rack to move forwards and drives the knocking plate to rotate backwards and upwards to knock the bottom of the filter screen of the lowermost filter screen plate. The dust removal device can efficiently remove dust in the semiconductor clean workshop, is good in dust removal performance, and achieves the effect of guaranteeing the dust removal performance.

Description

Technical Field

[0001] This utility model relates to the field of building construction technology, and particularly to the field of semiconductor cleanroom construction technology, specifically referring to a high-efficiency dust removal device for semiconductor cleanroom construction. Background Technology

[0002] Building construction refers to the production activities during the implementation phase of an engineering project. It is the process of building various types of structures, or the process of turning the lines on design drawings into a physical object at a designated location. It includes foundation construction, main structure construction, roofing construction, and decoration construction.

[0003] During the construction of semiconductor cleanrooms, a large amount of dust is generated, which needs to be suppressed and removed using atomizing vehicles. Otherwise, dust pollution will occur, affecting the health of workers. After construction is completed, dust collection devices are needed to remove dust from the ground and residual dust in the air.

[0004] Chinese utility model patent (authorization announcement number CN214638976U) discloses a high-efficiency dust removal device for semiconductor cleanroom construction, including a box body. A controller is installed on the left side of the box body. A dust removal chamber and a water storage chamber are opened sequentially from top to bottom inside the box body. A first dust suction plate is hinged to the top and front and rear sides of the box body. A second dust suction plate is installed on the right side of the box body. A third dust suction plate is installed at the bottom of the box body.

[0005] However, when the aforementioned high-efficiency dust removal device for semiconductor cleanroom construction is in use, the water spraying can easily cause dust to clump together and adhere to the filter screen, making it difficult to clean and causing the filter screen to become clogged, thus affecting the dust removal performance.

[0006] Therefore, it is desirable to provide a high-efficiency dust removal device for the construction of semiconductor cleanrooms, which can perform efficient dust removal in semiconductor cleanrooms, with good dust removal performance, and achieve the effect of ensuring dust removal performance. Utility Model Content

[0007] In order to overcome the shortcomings of the prior art, one objective of this utility model is to provide a high-efficiency dust removal device for the construction of semiconductor cleanrooms, which can perform efficient dust removal in semiconductor cleanrooms, has good dust removal performance, achieves the effect of ensuring dust removal performance, and is suitable for large-scale promotion and application.

[0008] Another objective of this invention is to provide a high-efficiency dust removal device for the construction of semiconductor cleanrooms. It is ingeniously designed, has a simple structure, is easy to manufacture, has low manufacturing costs, and is suitable for large-scale promotion and application.

[0009] To achieve the above objectives, this utility model provides a high-efficiency dust removal device for semiconductor cleanroom construction, including a dust collection box, which is vertically arranged and positioned along the left-right direction. The device further includes a filter screen, a mounting shaft, a striking plate, a force-bearing plate, an elastic element, a rotating shaft, a half-gear, a rotating plate, a rack, a pushing element, a dust pump, and a dust collection drawer.

[0010] The filter plate includes a fixed frame and a filter screen. Both the fixed frame and the filter screen are horizontally arranged along the left-right direction. The filter screen is disposed within the fixed frame, and the fixed frame is disposed within the dust collection box. There are multiple filter plates, which are vertically spaced apart from each other. The mounting shaft is horizontally arranged along the left-right direction. The mounting shaft is located below the rear frame plate of the fixed frame of the lowest filter plate and is rotatably connected to the rear frame plate around the left-right direction. The striking plate is arranged along the left-right direction and inclined downwards and backwards from front to back. The force-bearing plate is arranged along the left-right direction and inclined upward and backward in the front-to-back direction. The striking plate and the force-bearing plate are arranged at intervals above and below each other. The rear end of the striking plate and the rear end of the force-bearing plate are both connected to the mounting shaft. The front end of the striking plate is located below the filter screen of the lowest filter screen plate and abuts against the filter screen of the lowest filter screen plate. The elastic element is inclined downward and backward in the front-to-back direction. The front end of the elastic element is located below the force-bearing plate and connected to the force-bearing plate. The rear end of the elastic element is located in front of the rear side wall of the dust collector and connected to the rear side wall.

[0011] The rotating shaft is vertically arranged, with its upper end located below the filter screen of the lowest filter plate and horizontally rotatably connected to the filter screen of the lowest filter plate. The half gear is horizontally arranged and sleeved on the middle of the rotating shaft. The rotating plate is vertically arranged and radially arranged along the rotating shaft. The rotating plate is located outside the lower end of the rotating shaft and connected to the lower end of the rotating shaft. There are multiple rotating plates, which are horizontally arranged around the lower end of the rotating shaft at intervals. The rack is horizontally arranged and arranged in the front-back direction and located in front of the force plate. The rack is located below the filter screen of the lowest filter plate and is movably connected to the filter screen of the lowest filter plate. The rack is located to the right of the half gear and meshes with the half gear. The pushing member is located between the rack and the upper inclined surface of the force plate, connected to the rack, and abuts against the upper inclined surface of the force plate.

[0012] An air inlet is provided on the left side wall of the dust collection box. The air inlet is located to the left of the rotating plate and to the left of the lower end of the rotating shaft. The dust pump is located on the left side of the left side wall of the dust collection box and is installed on the left side wall of the dust collection box. The exhaust end of the dust pump is connected to the air inlet. An air outlet is provided on the top wall of the dust collection box. The dust collection drawer is horizontally arranged along the left and right direction and is movable back and forth. It is inserted into the bottom of the dust collection box and located below the rotating shaft.

[0013] Preferably, the mesh size of the filter screens in the plurality of filter screens decreases sequentially from bottom to top.

[0014] Preferably, the number of filter screens is three.

[0015] Preferably, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a left fixed rod and a right fixed rod. The left fixed rod and the right fixed rod are both vertically arranged and spaced apart from each other. The left fixed rod and the right fixed rod are both located under the rear frame plate and are both connected to the rear frame plate. The mounting shaft is located between the left fixed rod and the right fixed rod. The left end and the right end of the mounting shaft are rotatably connected to the left fixed rod and the right fixed rod respectively around the left and right directions. The rear end of the striking plate and the rear end of the force-bearing plate are both connected to the middle of the mounting shaft.

[0016] Preferably, the number of rotating plates is three.

[0017] Preferably, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a fixed block and a slider. The fixed block is located below and connected to the filter screen of the lowest filter screen plate. The rack is located below the fixed block. The bottom of the fixed block is provided with a groove along the front-back direction. The slider is movable in the groove and is mounted on the rack.

[0018] More preferably, the groove is a T-shaped groove, and the slider is a T-shaped slider.

[0019] Preferably, the pushing member is an arc-shaped rod, which is horizontally arranged along the left-right direction. The left and right ends of the arc-shaped rod are both located after the rack and are connected to the rack. The middle part of the arc-shaped rod protrudes backward in an arc shape and is located in front of the upper inclined surface of the force plate and abuts against the upper inclined surface of the force plate.

[0020] Preferably, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a dust removal hood, which is arranged along the left-right direction, with the left end of the dust removal hood being wider than the right end, and the right end of the dust removal hood being connected to the dust extraction end of the dust removal pump.

[0021] More preferably, the dust cover is truncated cone-shaped.

[0022] The main beneficial effects of this utility model are as follows:

[0023] 1. When using the high-efficiency dust removal device for semiconductor cleanroom construction, the dust-containing air is drawn into the dust collection box through the air inlet by a dust pump. The airflow flows from bottom to top and passes through the filter screen to remove dust. Finally, the clean air is discharged through the air outlet. During this process, the air drawn in through the air inlet can exert force on the rotating plate, causing the rotating shaft to rotate horizontally counterclockwise (viewed from top to bottom). This drives the half gear to rotate horizontally counterclockwise (viewed from top to bottom), thereby causing the rack to move backward, driving the pushing component to move backward, thus pushing the force plate to rotate backward and downward, compressing the elastic component and driving the striking plate to rotate forward and downward. When the half gear disengages from the rack, the force plate rotates forward and upward under the elastic force of the elastic component, pushing the pushing component and rack forward and driving the striking plate to rotate backward and upward, striking the bottom of the filter screen of the lowest filter screen. Therefore, it can perform high-efficiency dust removal in semiconductor cleanrooms, with good dust removal performance, achieving the effect of ensuring dust removal performance, and is suitable for large-scale promotion and application.

[0024] 2. When using the high-efficiency dust removal device for semiconductor cleanroom construction of this utility model, the dust-containing air is drawn into the dust removal box through the air inlet by the dust removal pump. The airflow flows from bottom to top and passes through the filter screen to remove dust. Finally, the clean air is discharged through the air outlet. During this process, the air drawn in through the air inlet can exert force on the rotating plate, causing the rotating shaft to rotate horizontally counterclockwise (viewed from top to bottom). This drives the half gear to rotate horizontally counterclockwise (viewed from top to bottom), thereby causing the rack to move backward, driving the pushing component to move backward, thus pushing the force plate to rotate backward and downward, compressing the elastic component and driving the striking plate to rotate forward and downward. When the half gear disengages from the rack, the force plate rotates forward and upward under the elastic force of the elastic component, pushing the pushing component and rack forward and driving the striking plate to rotate backward and upward, striking the bottom of the filter screen of the lowest filter screen. Therefore, its design is ingenious, its structure is simple, its manufacturing is convenient, and its manufacturing cost is low, making it suitable for large-scale promotion and application.

[0025] These and other objects, features and advantages of this utility model will be fully apparent from the following detailed description and drawings, and can be achieved by the means, devices and combinations thereof specifically pointed out in the description of the utility model. Attached Figure Description

[0026] Figure 1 This is a three-dimensional schematic diagram of a specific embodiment of the high-efficiency dust removal device for semiconductor cleanroom construction according to this utility model.

[0027] Figure 2 yes Figure 1The diagram shows a three-dimensional sectional view of a specific embodiment.

[0028] Figure 3 yes Figure 2 Enlarged schematic diagram of region A in the middle.

[0029] Figure 4 yes Figure 1 The diagram shows a perspective view of the structure beneath the bottommost filter screen in the specific embodiment shown.

[0030] (Symbol Explanation)

[0031] 1. Dust collection box; 2. Filter screen; 3. Mounting shaft; 4. Striking plate; 5. Force plate; 6. Elastic element; 7. Rotating shaft; 8. Half gear; 9. Rotating plate; 10. Rack; 11. Dust pump; 12. Dust collection drawer; 13. Fixing frame; 14. Filter screen; 15. Air inlet; 16. Air outlet; 17. Left fixing rod; 18. Right fixing rod; 19. Fixing block; 20. Sliding block; 21. Slide groove; 22. Dust collection cover. Detailed Implementation

[0032] In order to better understand the technical content of this utility model, the following embodiments are provided for detailed description.

[0033] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] Please see Figures 1-4 As shown in a specific embodiment of this utility model, the high-efficiency dust removal device for semiconductor cleanroom construction includes a dust collection box 1, a filter screen 2, a mounting shaft 3, a striking plate 4, a force-bearing plate 5, an elastic element 6, a rotating shaft 7, a half gear 8, a rotating plate 9, a rack 10, a pushing element (not shown in the figure), a dust pump 11, and a dust collection drawer 12, wherein:

[0035] The dust collection box 1 is vertically arranged and extends along the left-right direction. The filter screen 2 includes a fixing frame 13 and a filter screen 14. Both the fixing frame 13 and the filter screen 14 are horizontally arranged and extend along the left-right direction. The filter screen 14 is disposed within the fixing frame 13, which is disposed within the dust collection box 1. There are multiple filter screens 2, which are vertically spaced apart. The mounting shaft 3 is horizontally arranged and extends along the left-right direction. The mounting shaft 3 is located below the rear frame of the fixing frame 13 of the lowest filter screen 2 and is rotatably connected to the rear frame around the left-right direction. The striking plate 4 is arranged along the left-right direction and extends from the front... The force-bearing plate 5 is inclined downwards and backwards in the rearward direction. The force-bearing plate 5 is inclined upwards and backwards in the front-to-back direction. The striking plate 4 and the force-bearing plate 5 are arranged vertically and horizontally at intervals. The rear ends of the striking plate 4 and the force-bearing plate 5 are both connected to the mounting shaft 3. The front end of the striking plate 4 is located below the filter screen 14 of the lowest filter screen plate 2 and abuts against the filter screen 14 of the lowest filter screen plate 2. The elastic member 6 is inclined downwards and backwards in the front-to-back direction. The front end of the elastic member 6 is located below the force-bearing plate 5 and connected to the force-bearing plate 5. The rear end of the elastic member 6 is located in front of the rear side wall of the dust collector 1 and connected to the rear side wall.

[0036] The rotating shaft 7 is vertically arranged, with its upper end located below the filter screen 14 of the lowest filter screen plate 2 and horizontally rotatably connected to it. The half gear 8 is horizontally arranged and sleeved on the middle of the rotating shaft 7. The rotating plate 9 is vertically arranged and radially arranged along the rotating shaft 7, located outside the lower end of the rotating shaft 7 and connected to its lower end. Multiple rotating plates 9 are present, horizontally surrounding the filter screen 2. The lower ends of the rotating shafts 7 are spaced apart from each other. The rack 10 is horizontally arranged and arranged in the front-back direction and is located in front of the force plate 5. The rack 10 is located below the filter screen 14 of the lowest filter screen plate 2 and is movably connected to the filter screen 14 of the lowest filter screen plate 2. The rack 10 is located to the right of the half gear 8 and meshes with the half gear 8. The pusher is located between the rack 10 and the upper inclined surface of the force plate 5 and is connected to the rack 10 and abuts against the upper inclined surface of the force plate 5.

[0037] An air inlet 15 is provided on the left side wall of the dust collection box 1. The air inlet 15 is located to the left of the rotating plate 9 and to the left of the lower end of the rotating shaft 7. The dust pump 11 is located on the left side of the left side wall of the dust collection box 1 and is installed on the left side wall of the dust collection box 1. The exhaust end of the dust pump 11 is connected to the air inlet 15. An air outlet 16 is provided on the top wall of the dust collection box 1. The dust collection drawer 12 is horizontally arranged along the left and right direction and is movable back and forth. It is inserted into the bottom of the dust collection box 1 and is located below the rotating shaft 7.

[0038] The mesh apertures of the multiple filter screens 2 and the filter screens 14 can be determined as needed. They can be the same or decrease sequentially from bottom to top. In a specific embodiment of this utility model, the mesh apertures of the multiple filter screens 2 and the filter screens 14 decrease sequentially from bottom to top.

[0039] The number of filter screens 2 can be determined as needed. "Multiple screens" refers to two or more screens. Please refer to [link / reference]. Figure 2 As shown, in a specific embodiment of this utility model, the number of filter screens 2 is 3.

[0040] The mounting shaft 3 is located below the rear frame plate of the fixing frame 13 of the lowest filter screen plate 2 and is rotatably connected to the rear frame plate in the left-right direction. Any suitable structure can be adopted; please refer to [link / reference]. Figure 4 As shown in a specific embodiment of this utility model, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a left fixed rod 17 and a right fixed rod 18. The left fixed rod 17 and the right fixed rod 18 are both vertically arranged and spaced apart from each other. The left fixed rod 17 and the right fixed rod 18 are both located under the rear frame plate and are both connected to the rear frame plate. The mounting shaft 3 is located between the left fixed rod 17 and the right fixed rod 18. The left end and the right end of the mounting shaft 3 are rotatably connected to the left fixed rod 17 and the right fixed rod 18 around the left and right directions, respectively. The rear end of the striking plate 4 and the rear end of the force plate 5 are both connected to the middle of the mounting shaft 3.

[0041] The elastic element 6 can be any suitable elastic element. In one specific embodiment of this utility model, the elastic element 6 is a spring.

[0042] The number of rotating plates 9 can be determined as needed; please refer to [link / reference]. Figure 4 As shown, in a specific embodiment of this utility model, the number of rotating plates 9 is 3.

[0043] The rack 10 is located below the filter screen 14 of the lowest filter screen plate 2 and is movably connected to the filter screen 14 of the lowest filter screen plate 2. It can adopt any suitable structure; please refer to [link / reference]. Figure 3 As shown, in a specific embodiment of this utility model, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a fixed block 19 and a slider 20. The fixed block 19 is located below and connected to the filter screen 14 of the lowest filter screen plate 2. The rack 10 is located below the fixed block 19. The bottom of the fixed block 19 is provided with a groove 21 along the front-back direction. The slider 20 is movably disposed in the groove 21 and disposed on the rack 10.

[0044] The groove 21 and the slider 20 can have any suitable shape; please refer to [link / reference]. Figure 3 As shown, in a specific embodiment of this utility model, the slide groove 21 is a T-shaped slide groove, and the slider 20 is a T-shaped slider.

[0045] The pushing member can be any suitable pushing member. In a specific embodiment of this utility model, the pushing member is an arc-shaped rod. The arc-shaped rod is horizontally arranged and arranged along the left and right directions. The left and right ends of the arc-shaped rod are both located after the rack 10 and are both connected to the rack 10. The middle part of the arc-shaped rod protrudes backward in an arc shape and is located in front of the upper inclined surface of the force plate 5 and abuts against the upper inclined surface of the force plate 5.

[0046] The high-efficiency dust removal device for semiconductor cleanroom construction may also include any other suitable components; please refer to [link / reference]. Figures 1-2 As shown in a specific embodiment of this utility model, the high-efficiency dust removal device for semiconductor cleanroom construction further includes a dust removal hood 22. The dust removal hood 22 is arranged along the left-right direction, with a wider left end and a narrower right end. The right end of the dust removal hood 22 is connected to the dust extraction end of the dust pump 11. With this arrangement, the dust removal hood 22 increases the contact area with dust, allowing more dust to be drawn into the dust collection box 1, thus increasing dust removal efficiency.

[0047] The dust cover 22 can have any suitable shape, please refer to Figures 1-2 As shown, in a specific embodiment of this utility model, the dust cover 22 is a frustum conical shape.

[0048] In use, the dust pump 11 is started, and the dust-laden air is drawn into the dust collection box 1 through the air inlet 15. The airflow flows from bottom to top and passes through the filter screen 2 to remove dust. Finally, the clean air is discharged through the air outlet 16. During this process, the air drawn in through the air inlet 15 can exert force on the rotating plate 9, causing the rotating shaft 7 to rotate horizontally counterclockwise (viewed from top to bottom). This drives the half gear 8 to rotate horizontally counterclockwise (viewed from top to bottom), thereby causing the rack 10 to move backward, driving the pushing component to move backward, thus pushing the force plate 5 to rotate backward and downward, compressing the elastic component 6 and driving the striking plate 4 to rotate forward and downward. When the half gear After disengagement from the rack 10, the force plate 5 rotates forward and upward under the elastic force of the elastic element 6, pushing the pusher and rack 10 forward and driving the striking plate 4 to rotate backward and upward, striking the bottom of the filter screen 14 of the bottommost filter screen plate 2. The above process is repeated as the half gear 8 rotates horizontally counterclockwise (viewed from above), performing a high-frequency striking operation on the bottom of the filter screen 14 of the bottommost filter screen plate 2, which can cause the dust on the filter screen 14 of the bottommost filter screen plate 2 to fall into the dust collection drawer 12, thus preventing the dust from clumping at the bottom of the filter screen 14 of the bottommost filter screen plate 2.

[0049] Therefore, the present invention has the following advantages:

[0050] 1. This utility model, through the arrangement of a rotating plate, rotating shaft, half gear, rack, pushing component, force-bearing plate, elastic component, mounting shaft, and striking plate, allows air drawn in through the air inlet to exert force on the rotating plate, causing the rotating shaft to rotate horizontally counterclockwise (viewed from above). This, in turn, drives the half gear to rotate horizontally counterclockwise (viewed from above), causing the rack to move backward, which in turn drives the pushing component to move backward. This, in turn, pushes the force-bearing plate to rotate backward and downward, compressing the elastic component and causing the striking plate to rotate forward and downward. When the half gear disengages from the rack, the force-bearing plate, under the elastic force of the elastic component... Rotating forward and upward pushes the pusher and rack forward, and drives the striking plate to rotate backward and upward, striking the bottom of the bottom filter screen. This process is repeated continuously as the half gear rotates horizontally counterclockwise (viewed from above), performing a high-frequency striking operation on the bottom of the bottom filter screen. This causes the dust on the bottom filter screen to fall into the dust collection drawer, preventing dust from clumping at the bottom of the bottom filter screen. Therefore, it can effectively remove dust and ensure dust removal performance.

[0051] 2. By setting up a dust removal hood, this utility model can increase the contact area between the dust and the dust, allowing more dust to be drawn into the dust removal box and increasing the dust removal efficiency.

[0052] In summary, the high-efficiency dust removal device for semiconductor cleanroom construction of this utility model can effectively remove dust from semiconductor cleanrooms, with excellent dust removal performance, ensuring dust removal performance. It has an ingenious design, simple structure, easy manufacturing, and low manufacturing cost, making it suitable for large-scale promotion and application.

[0053] Therefore, it is evident that the objective of this utility model has been fully and effectively achieved. The function and structural principles of this utility model have been demonstrated and explained in the embodiments. Without departing from the stated principles, any modifications can be made to the implementation methods. Therefore, this utility model includes all modified embodiments based on the spirit and scope of the claims.

Claims

1. A high-efficiency dust removal device for semiconductor cleanroom construction, comprising a dust collection box, wherein the dust collection box is vertically arranged and positioned along the left-right direction, characterized in that, The high-efficiency dust removal device for semiconductor cleanroom construction also includes a filter screen, mounting shaft, striking plate, force plate, elastic element, rotating shaft, half gear, rotating plate, rack, pushing element, dust pump, and dust collection drawer, wherein: The filter plate includes a fixed frame and a filter screen. Both the fixed frame and the filter screen are horizontally arranged along the left-right direction. The filter screen is disposed within the fixed frame, and the fixed frame is disposed within the dust collection box. There are multiple filter plates, which are vertically spaced apart from each other. The mounting shaft is horizontally arranged along the left-right direction. The mounting shaft is located below the rear frame plate of the fixed frame of the lowest filter plate and is rotatably connected to the rear frame plate around the left-right direction. The striking plate is arranged along the left-right direction and inclined downwards and backwards from front to back. The force-bearing plate is arranged along the left-right direction and inclined upward and backward in the front-to-back direction. The striking plate and the force-bearing plate are arranged at intervals above and below each other. The rear end of the striking plate and the rear end of the force-bearing plate are both connected to the mounting shaft. The front end of the striking plate is located below the filter screen of the lowest filter screen plate and abuts against the filter screen of the lowest filter screen plate. The elastic element is inclined downward and backward in the front-to-back direction. The front end of the elastic element is located below the force-bearing plate and connected to the force-bearing plate. The rear end of the elastic element is located in front of the rear side wall of the dust collector and connected to the rear side wall. The rotating shaft is vertically arranged, with its upper end located below the filter screen of the lowest filter plate and horizontally rotatably connected to the filter screen of the lowest filter plate. The half gear is horizontally arranged and sleeved on the middle of the rotating shaft. The rotating plate is vertically arranged and radially arranged along the rotating shaft. The rotating plate is located outside the lower end of the rotating shaft and connected to the lower end of the rotating shaft. There are multiple rotating plates, which are horizontally arranged around the lower end of the rotating shaft at intervals. The rack is horizontally arranged and arranged in the front-back direction and located in front of the force plate. The rack is located below the filter screen of the lowest filter plate and is movably connected to the filter screen of the lowest filter plate. The rack is located to the right of the half gear and meshes with the half gear. The pushing member is located between the rack and the upper inclined surface of the force plate, connected to the rack, and abuts against the upper inclined surface of the force plate. An air inlet is provided on the left side wall of the dust collection box. The air inlet is located to the left of the rotating plate and to the left of the lower end of the rotating shaft. The dust pump is located on the left side of the left side wall of the dust collection box and is installed on the left side wall of the dust collection box. The exhaust end of the dust pump is connected to the air inlet. An air outlet is provided on the top wall of the dust collection box. The dust collection drawer is horizontally arranged along the left and right direction and is movable back and forth. It is inserted into the bottom of the dust collection box and located below the rotating shaft.

2. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The mesh size of the filter screens in the plurality of filter screens decreases sequentially from bottom to top.

3. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The number of filter screens is 3.

4. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The high-efficiency dust removal device for semiconductor cleanroom construction also includes a left fixed rod and a right fixed rod. The left fixed rod and the right fixed rod are both vertically arranged and spaced apart from each other. The left fixed rod and the right fixed rod are both located under the rear frame plate and are both connected to the rear frame plate. The mounting shaft is located between the left fixed rod and the right fixed rod. The left end and the right end of the mounting shaft are rotatably connected to the left fixed rod and the right fixed rod respectively around the left and right directions. The rear end of the striking plate and the rear end of the force plate are both connected to the middle of the mounting shaft.

5. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The number of rotating plates is 3.

6. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The high-efficiency dust removal device for semiconductor cleanroom construction also includes a fixed block and a slider. The fixed block is located below the filter screen of the lowest filter screen plate and connected to the filter screen of the lowest filter screen plate. The rack is located below the fixed block. The bottom of the fixed block is provided with a sliding groove along the front-back direction. The slider is movable back-and-forth in the sliding groove and is provided on the rack.

7. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 6, characterized in that, The slide is a T-shaped slide, and the slider is a T-shaped slider.

8. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The pushing member is an arc-shaped rod, which is horizontally arranged along the left and right direction. The left and right ends of the arc-shaped rod are both located after the rack and are connected to the rack. The middle part of the arc-shaped rod protrudes backward in an arc shape and is located in front of the upper inclined surface of the force plate and abuts against the upper inclined surface of the force plate.

9. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 1, characterized in that, The high-efficiency dust removal device for semiconductor cleanroom construction also includes a dust removal hood, which is arranged along the left-right direction, with the left end of the dust removal hood being wider than the right end, and the right end of the dust removal hood being connected to the dust extraction end of the dust removal pump.

10. The high-efficiency dust removal device for semiconductor cleanroom construction as described in claim 9, characterized in that, The dust collector hood is truncated cone-shaped.

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